Quick release structure of atomic layer deposition heating plate and atomic layer deposition equipment

Abstract

The utility model provides a quick release structure of an atomic layer deposition heating plate and atomic layer deposition equipment, and the quick release structure of the atomic layer deposition heating plate comprises a rear furnace door which comprises an inner side surface and an outer side surface, and further comprises an opening penetrating through the inner side surface and the outer side surface; the baffle plate is detachably fixed on the outer side surface and blocks the opening; the heating plate is located on one side of the inner side face, one end of the heating plate is connected with the baffle, and the heating plate can penetrate through the opening in the through direction of the opening. According to the quick dismounting structure of the atomic layer deposition heating plate, the heating plate can be conveniently dismounted, and the maintenance efficiency is greatly improved.

Description

Technical Field

[0001] The present application belongs to the technical field of atomic layer deposition, and more specifically, relates to a quick-disassembly structure of an atomic layer deposition heating plate and an atomic layer deposition device. Background Art

[0002] In photovoltaic production equipment, the heating method of the atomic layer deposition heating chamber is mostly to use a heating plate to heat the outer wall of the reaction cavity, and then use thermal radiation and thermal convection to heat the silicon wafer.

[0003] The heating plate is mainly fixed between the inner cavity and the outer cavity of the cavity. The traditional installation method is to directly fix the heating plate on the outer wall of the reaction cavity or the inner wall of the reaction cavity, which is relatively complicated to install. This means that when the heating plate fails, there are generally two ways to disassemble it. One way is to remove the heating plate after disassembling the rear furnace door. Before disassembling the rear furnace door, the four fixed flange bottom plates of the heating plate need to be removed. At the same time, because the furnace door is too heavy, it requires lifting equipment to remove it. Another way is to take out the entire reaction cavity and then remove the heating plate. Disassembling the reaction cavity is too complicated, and the entire cavity needs to be fixed loosely, and lifting equipment is required to operate.

[0004] Therefore, a new technology is needed to solve the problem in the prior art that the heating plate disassembly and maintenance operations are complicated, which greatly affects the maintenance efficiency. Utility Model Content

[0005] The embodiment of the present application provides a quick-disassembly structure of an atomic layer deposition heating plate, which can facilitate the disassembly of the heating plate and greatly improve the maintenance efficiency.

[0006] The technical solution adopted in the embodiment of the present application is: to provide a quick-disassembly structure of an atomic layer deposition heating plate, comprising:

[0007] A rear furnace door, comprising an inner side surface and an outer side surface, and also comprising an opening penetrating the inner side surface and the outer side surface;

[0008] a baffle, detachably fixed to the outer side surface and blocking the opening;

[0009] A heating plate is located on one side of the inner side surface, one end of the heating plate is connected to the baffle plate, and the heating plate can pass through the opening along the through direction of the opening.

[0010] Furthermore, a positioning groove matching the shape of the baffle is provided on the outer side.

[0011] Furthermore, a sealing member is included, and an embedding groove arranged around the opening is provided on the inner wall of the positioning groove, and the sealing member is installed in the embedding groove.

[0012] Furthermore, one side of the heating plate can be in contact with the outer wall of the inner cavity.

[0013] Furthermore, it also includes a guide groove plate, which is fixed on the outer wall of the inner cavity, and a guide groove is formed between the guide groove plate and the outer wall of the inner cavity for inserting an end of the heating plate away from the baffle.

[0014] Furthermore, the guide groove plate comprises:

[0015] A fixing portion, which can be fixedly fitted with the outer wall of the inner cavity;

[0016] A first bending portion is vertically connected to the fixing portion, and the first bending portion is extended and the extending direction is parallel to the through direction of the opening;

[0017] The second bending portion is vertically connected to the first bending portion. The second bending portion is extended and the extending direction is parallel to the through direction of the opening. The guide groove is formed between the second bending portion and the first bending portion.

[0018] Furthermore, the guide groove plates are provided on both sides of the heating plate, one side of the heating plate is inserted into the guide groove of one guide groove plate, and the other side of the heating plate is inserted into the guide groove of another guide groove plate.

[0019] Furthermore, the heating plate comprises:

[0020] A heating bottom plate, one end of which is connected to the baffle, wherein a receiving groove is provided on the heating bottom plate, and an opening of the receiving groove faces the outer wall of the inner cavity;

[0021] An electric heating tube is arranged in the containing tank;

[0022] A heating pipe joint is arranged on the baffle, and one end of the heating pipe joint is electrically connected to the electric heating pipe.

[0023] Furthermore, the opening, the heating plate and the baffle are each provided in plurality and correspond to each other one by one, and each heating plate is arranged around the inner cavity.

[0024] An embodiment of the present application also provides an atomic layer deposition device, comprising the quick-release structure of the atomic layer deposition heating plate as described above.

[0025] The beneficial effect of the quick-release structure of the atomic layer deposition heating plate provided in the embodiment of the present application is that: the quick-release structure of the atomic layer deposition heating plate in the embodiment of the present application is provided with an opening on the rear furnace door, the heating plate is inserted into the opening and one end is connected to a baffle, the baffle can detachably seal the opening to ensure that there is no leakage from the opening during the reaction process. When the heating plate fails, the baffle can be directly removed, and since the heating plate can pass through the opening along the through direction of the opening, the heating plate can be directly pulled out of the opening, thereby completing the removal of the heating plate, without removing the entire rear furnace door or pulling out the inner cavity, this disassembly method is very simple and convenient, and greatly improves the maintenance efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0027] Figure 1 A schematic diagram of a three-dimensional structure of a quick-release structure of an atomic layer deposition heating plate provided in an embodiment of the present application installed on an atomic layer deposition device;

[0028] Figure 2 A schematic diagram of the three-dimensional structure of the quick-release structure of the atomic layer deposition heating plate provided in an embodiment of the present application when it is installed on the inner cavity;

[0029] Figure 3 for Figure 2 Magnified view at A in the middle;

[0030] Figure 4 A schematic diagram of a heating plate provided in an embodiment of the present application being fixed to an inner cavity through a guide groove of a guide groove plate;

[0031] Figure 5 A schematic diagram of the structure of the heating plate provided in an embodiment of the present application.

[0032] Among them, the reference numerals in the figure are:

[0033] 10. rear furnace door; 11. inner side; 12. outer side; 121. positioning groove; 122. embedding groove; 13. opening; 14. sealing member;

[0034] 20. Baffle;

[0035] 30, heating plate; 31, heating bottom plate; 311, receiving groove; 32, electric heating pipe; 33, heating pipe joint; X, through direction;

[0036] 40. guide groove plate; 41. fixing portion; 42. first bending portion; 43. second bending portion; 44. guide groove;

[0037] 50. Inner cavity;

[0038] 60. External cavity. DETAILED DESCRIPTION

[0039] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0040] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0041] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0042] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0043] See also Figure 1 The quick-detachable structure of the atomic layer deposition heating plate provided in the embodiment of the present application is now described. The quick-detachable structure of the atomic layer deposition heating plate provided in the embodiment of the present application comprises a rear furnace door 10 , a baffle 20 and a heating plate 30 .

[0044] Reference Figure 1 and Figure 2, the rear furnace door 10 includes an inner side surface 11 and an outer side surface 12, and also includes an opening 13 that passes through the inner side surface 11 and the outer side surface 12. The rear furnace door 10 is a door plate of the rear door of the outer cavity 60 of the atomic layer deposition equipment. The rear furnace door 10 is provided with a through hole for the exhaust gas exhaust pipe of the inner cavity 50 to pass through. In the atomic layer deposition equipment, the interior of the inner cavity 50 can be called a reaction cavity, and the space between the outer cavity 60 and the inner cavity 50 can be called a heating outer cavity. In the embodiment of the present application, the inner side surface 11 of the rear furnace door 10 is located in the heating outer cavity, and the outer side surface 12 is located outside the heating outer cavity and is in direct contact with the outside atmosphere. The through opening 13 opened on the rear furnace door 10 can connect the heating outer cavity with the outside world. Therefore, the heating plate 30 can be inserted into the heating outer cavity from the opening 13, or the heating plate 30 in the heating outer cavity can be pulled out from the opening 13.

[0045] Reference Figure 1 and Figure 2 , the baffle 20 is detachably fixed to the outer side surface 12 and blocks the opening 13. In actual use, the heating outer cavity needs to be isolated from the outside atmosphere to prevent the outside atmosphere from entering the heating outer cavity. Therefore, the opening 13 needs to be blocked with the baffle 20 to isolate it from the outside atmosphere. When the heating plate 30 needs to be disassembled and repaired, the baffle 20 needs to be removed and then the heating plate 30 is taken out. Therefore, the baffle 20 is configured to be detachably fixed to the outer side surface 12 of the rear furnace door 10. Specifically, the baffle 20 and the outer side surface 12 of the rear furnace door 10 can be detachably fixed with screws.

[0046] Reference Figure 1 and Figure 2 , the heating plate 30 is located on one side of the inner side 11, one end of the heating plate 30 is connected to the baffle 20, and the heating plate 30 can pass through the opening 13 along the through direction X of the opening 13. That is, during installation, one end of the heating plate 30 is connected to the baffle 20, and the other end can be inserted into the heating outer cavity from the opening 13 on one side of the outer side 12, so that the heating plate 30 is located on one side of the inner side 11. When disassembly is required, the heating plate 30 located in the heating outer cavity can be pulled out from the opening 13. It can be understood that the heating plate 30 can pass through the opening 13 along the through direction X of the opening 13, that is, the projection of the heating plate 30 on the plane perpendicular to the through direction X is completely accommodated in the opening 13, so that the heating plate 30 can pass through the opening 13.

[0047] Reference Figure 3The outer side surface 12 is provided with a positioning groove 121 matching the shape of the baffle 20, so as to facilitate the positioning of the baffle 20 on the outer side surface 12 and facilitate the fixing of the baffle 20 to the outer side surface 12. Specifically, the shape of the baffle 20 can be triangular, rectangular, or trapezoidal, preferably trapezoidal, so that the upper and lower end surfaces of the heating plate 30 can be easily distinguished, which has a foolproof effect and prevents the upper and lower end surfaces of the heating plate 30 from being installed upside down during installation.

[0048] Reference Figure 3 The quick-release structure of the atomic layer deposition heating plate of the embodiment of the present application further includes a sealing member 14. The inner wall of the positioning groove 121 is provided with an embedding groove 122 arranged around the opening 13, and the sealing member 14 is installed in the embedding groove 122. The sealing member 14 is installed in the embedding groove 122. When the baffle 20 is installed in the positioning groove 121, the sealing member 14 seals the baffle 20 and the inner wall of the positioning groove 121 to prevent the outside atmosphere from entering the heating outer cavity.

[0049] Reference Figure 2 and Figure 4 , one side of the heating plate 30 can fit the outer wall of the inner cavity 50. That is, after the heating plate 30 is inserted into the heating outer cavity, the heating plate 30 fits the outer wall of the inner cavity 50 to better heat the inner cavity 50, which is conducive to improving the heating efficiency.

[0050] Reference Figure 2 and Figure 4 , the quick-release structure of the atomic layer deposition heating plate of the embodiment of the present application also includes a guide groove plate 40, the guide groove plate 40 is fixed on the outer wall of the inner cavity 50, and a guide groove 44 is formed between the guide groove plate 40 and the outer wall of the inner cavity 50 for inserting the end of the heating plate 30 away from the baffle 20. The guide groove 44 is formed outside the inner cavity 50 by the guide groove plate 40, so that the inserted end of the heating plate 30 can be guided so that it can be inserted along the through direction of the opening 13 during the insertion process, avoiding deflection during the insertion process. It can be understood that the end of the guide groove 44 facing the opening 13 also has a notch, so that the heating plate 30 can be inserted into the notch when it is inserted along the through direction X of the opening 13. That is to say, the notch of the guide groove 44 is opposite to the opening 13, and the shape of the notch matches the cross-sectional shape of the heating plate 30. After the heating plate 30 is inserted into the opening 13 and inserted to the bottom along the guide groove 44, the heating plate 30 can be connected and fixed to the outer cavity 60 through the outer cavity 60. Specifically, the heating plate 30 and the outer cavity 60 can be connected by screws. Due to the guiding effect of the guide groove 44, the position of the heating plate 30 is not deflected, and the screws can be aligned with the screw holes on the heating plate 30 to achieve installation.

[0051] Reference Figure 4 The guide groove plate 40 includes a fixing portion 41, a first bending portion and a second bending portion.

[0052] Reference Figure 4 The fixing portion 41 can be fixedly attached to the outer wall of the inner cavity 50. The fixing portion 41 can be in sheet form and can be fixed to the outer wall of the inner cavity 50. The fixing portion 41 can be fixed by screws or other plates to clamp the fixing portion 41 to the outer wall of the inner cavity 50.

[0053] Reference Figure 4 The first bending portion 42 is vertically connected to the fixing portion 41, and the first bending portion 42 is extended and the extension direction is parallel to the through direction X of the opening 13. The first bending portion extends and has a certain length, so that the inserted part of the heating plate 30 can be guided as a whole, and can play a guiding role within the length range of the entire guide groove 44. The first bending portion and the fixing portion 41 can be welded, screwed, or integrally connected.

[0054] Reference Figure 4 , the second bending portion 43 is vertically connected to the first bending portion 42, the second bending portion 43 is extended and the extension direction is parallel to the through direction X of the opening 13, and the guide groove 44 is formed between the second bending portion 43 and the first bending portion 42. The first bending portion is vertically connected to the fixing portion 41, and the second bending portion is also vertically connected to the first bending portion, so the second bending portion and the fixing portion 41 are parallel to each other. The fixing portion 41 is in contact with the outer wall of the inner cavity 50, and the fixing portion 41 is parallel to the outer wall of the inner cavity 50, that is, the second bending portion is parallel to the outer wall of the inner cavity 50, and a space for inserting the heating plate 30 is formed between the two, that is, the guide groove 44. It can be understood that the height of the guide groove 44 is the height of the first bending portion. The first bending portion and the second bending portion can be fixed by welding, screwing or integrally connected.

[0055] Preferably, refer to Figure 4 The fixing portion 41, the first bending portion and the second bending portion are integrally connected, so that the guide groove plate 40 is Z-shaped. In some embodiments, the heating plate 30 is provided with multiple guide groove plates 40, which are respectively attached to different surfaces of the inner cavity 50, such as the upper end surface, the lower end surface, the left end surface and the right end surface, and the guide groove plates 40 on two adjacent end surfaces are also connected to each other.

[0056] Reference Figure 4 The guide groove plates 40 are provided on both sides of the heating plate 30, one side of the heating plate 30 is inserted into the guide groove 44 of one guide groove plate 40, and the other side of the heating plate 30 is inserted into the guide groove 44 of the other guide groove plate 40. That is, by installing the guide groove plates 40 on both sides of the heating plate 30 and guiding both sides of the heating plate 30 with the guide grooves 44, it is ensured that the heating plate 30 can be accurately inserted into the outer cavity 60 without deflection.

[0057] Reference Figure 5 The heating plate 30 includes a heating base plate 31 , an electric heating tube 32 and a heating tube joint 33 .

[0058] Reference Figure 5 , one end of the heating base plate 31 is connected to the baffle 20, and a receiving groove 311 is provided on the heating base plate 31, and the opening 13 of the receiving groove 311 faces the outer wall of the inner cavity 50. The heating base plate 31 is a structure for installing and supporting the electric heating tube 32, because the electric heating tube 32 mainly plays the role of heating and providing heat. However, the strength of the electric heating tube 32 itself is difficult to maintain flatness without deformation when only one end of it is fixed. Therefore, it is necessary to set a heating base plate 31, fix the electric heating tube 32 on the heating base plate 31, and then connect and fix one end of the heating base plate 31 to the baffle 20 and insert it into the heating outer cavity. The receiving groove 311 is the structure for receiving and fixing the electric heating tube 32.

[0059] Reference Figure 5 , the electric heating tube 32 is arranged in the receiving groove 311. That is, the electric heating tube 32 is fixed in the receiving groove 311, and specifically, it can be fixed in the receiving groove 311 by a tube clamp or a pin. A positioning sheet metal can be arranged in the receiving groove 311, and a plurality of grooves are arranged at intervals on the positioning sheet metal, and the tube body of the electric heating tube 32 can be just embedded in each groove in sequence after being bent and coiled.

[0060] Reference Figure 5 The heating pipe joint 33 is arranged on the baffle 20. One end of the heating pipe joint 33 is electrically connected to the electric heating pipe 32, and the other end can be connected to a cable to provide power to the electric heating pipe. The heating pipe joint 33 is located on the baffle 20 and on the outside. It can be connected to the internal electric heating pipe 32 to transmit external power to the electric heating pipe 32. When the electric heating pipe is powered on, it generates heat to heat the inner cavity. A temperature sensor is correspondingly arranged in the inner cavity to control the working state of the electric heating pipe 32 according to the temperature conditions.

[0061] Reference Figure 1 and Figure 2 , the opening 13, the heating plate 30 and the baffle 20 are all provided in multiple and correspond to each other one by one, and each heating plate 30 is arranged around the inner cavity 50. That is, multiple groups of heating plates 30 can be provided, and each group of heating plates 30 is installed on the rear furnace door 10 by plugging from the opening 13, which is convenient for disassembly and maintenance. In the embodiment of the present application, there are four heating plates 30, four openings 13 are provided on the rear furnace door 10, and four baffles 20 are provided correspondingly. The inner cavity 50 is generally in the shape of a rectangular parallelepiped. After the four heating plates 30 are respectively inserted into the four openings 13, the four heating plates 30 are respectively attached to the upper end surface, the lower end surface, the left end surface and the right end surface of the inner cavity 50.

[0062] An embodiment of the present application also provides an atomic layer deposition device, including the quick-release structure of the atomic layer deposition heating plate in any of the above embodiments.

[0063] The atomic layer deposition device of the embodiment of the present application includes the quick-detachable structure of the atomic layer deposition heating plate in any of the above embodiments, and therefore has the beneficial effects brought about by the quick-detachable structure of the atomic layer deposition heating plate in any of the above embodiments, which will not be elaborated here.

[0064] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A quick-release structure for an atomic layer deposition heating plate, characterized in that: include: A rear furnace door, comprising an inner side surface and an outer side surface, and also comprising an opening penetrating the inner side surface and the outer side surface; a baffle, detachably fixed to the outer side surface and blocking the opening; A heating plate is located on one side of the inner side surface, one end of the heating plate is connected to the baffle plate, and the heating plate can pass through the opening along the through direction of the opening.

2. The quick-release structure of the atomic layer deposition heating plate according to claim 1, characterized in that: The outer side surface is provided with a positioning groove matching the shape of the baffle.

3. The quick-release structure of the atomic layer deposition heating plate according to claim 2, characterized in that: It also includes a sealing member. The inner wall of the positioning groove is provided with an embedding groove arranged around the opening, and the sealing member is installed in the embedding groove.

4. The quick-release structure of the atomic layer deposition heating plate according to claim 1, characterized in that: One side of the heating plate can be in contact with the outer wall of the inner cavity.

5. The quick-release structure of the atomic layer deposition heating plate according to claim 4, characterized in that: It also includes a guide groove plate, which is fixed on the outer wall of the inner cavity. A guide groove is formed between the guide groove plate and the outer wall of the inner cavity for inserting an end of the heating plate away from the baffle.

6. The quick-release structure of the atomic layer deposition heating plate according to claim 5, characterized in that: The guide groove plate comprises: A fixing portion, which can be fixedly fitted with the outer wall of the inner cavity; A first bending portion is vertically connected to the fixing portion, and the first bending portion is extended and the extending direction is parallel to the through direction of the opening; The second bending portion is vertically connected to the first bending portion. The second bending portion is extended and the extending direction is parallel to the through direction of the opening. The guide groove is formed between the second bending portion and the first bending portion.

7. The quick-release structure of the atomic layer deposition heating plate according to claim 6, characterized in that: The guide groove plates are arranged on both sides of the heating plate, one side of the heating plate is inserted into the guide groove of one guide groove plate, and the other side of the heating plate is inserted into the guide groove of the other guide groove plate.

8. The quick-release structure of the atomic layer deposition heating plate according to claim 7, characterized in that: The heating plate comprises: A heating bottom plate, one end of which is connected to the baffle, wherein a receiving groove is provided on the heating bottom plate, and an opening of the receiving groove faces the outer wall of the inner cavity; An electric heating tube is arranged in the containing tank; A heating pipe joint is arranged on the baffle, and one end of the heating pipe joint is electrically connected to the electric heating pipe.

9. The quick-release structure of the atomic layer deposition heating plate according to claim 4, characterized in that: The opening, the heating plate and the baffle are each provided in plurality and correspond to each other one by one, and each heating plate is arranged around the inner cavity.

10. An atomic layer deposition device, characterized in that: A quick-detachable structure comprising an atomic layer deposition heating plate as claimed in any one of claims 1 to 9.

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