Door blocking device for diffusion furnace

Abstract

The utility model belongs to the technical field, and particularly relates to a door blocking device for a diffusion furnace. The device comprises two baffle plates, silicon paddle holes and temperature measuring holes are formed in the baffle plates, the two baffle plates are respectively a first baffle plate which blocks a diffusion furnace mouth and a second baffle plate which is arranged at an interval with the first baffle plate and is positioned in the diffusion furnace; a ram is arranged on the first baffle in a penetrating manner, and the interior of the ram is hollow; a connecting nail penetrates through the ram in a matched mode, and the first end of the connecting nail is connected with the second baffle. The output end of the driving device is connected with the ram and the second end, away from the second baffle, of the connecting nail, and the driving device is used for driving the two baffles to reciprocate in the axial direction of the connecting nail. The furnace door structure is used for solving the problem of complex installation of the furnace door structure in the diffusion furnace.

Description

Technical Field

[0001] The utility model belongs to the technical field, and in particular relates to a door blocking device for a diffusion furnace. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.

[0003] At present, a furnace mouth flange is usually provided at the cavity mouth of a diffusion furnace. After the silicon wafer and the silicon boat are sent into the cavity, the furnace door is connected to the furnace mouth flange to close the main furnace mouth. Generally, the furnace door is covered at the furnace mouth position by rotation, and then the furnace door is fixed to the furnace mouth flange by fasteners such as screws. However, this connection method of the furnace door is not only complicated, but also the furnace door will be affected by source diffusion during long-term use of the diffusion furnace. Some by-products will be attached to the furnace door, which will affect the subsequent use of the diffusion furnace and further affect the product quality. Long-term use will also cause corrosion of the furnace door, etc. Therefore, how to improve the quality of products in the diffusion furnace has become a problem that needs to be solved urgently. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a door blocking device for a diffusion furnace, which is used to solve the problem of complex installation of the furnace door structure in the diffusion furnace.

[0005] The utility model solves the above technical problems with the following technical solutions: a door blocking device for a diffusion furnace, comprising:

[0006] Two baffles, each of which is provided with a silicon paddle hole and a temperature measuring hole, and each of the two baffles is respectively a first baffle that blocks the diffusion furnace port, and a second baffle that is spaced apart from the first baffle and is located in the diffusion furnace;

[0007] At least one lifting rod is provided through the first baffle plate, and the interior of the lifting rod is hollow;

[0008] At least one connecting nail, matched and passed through the lifting rod, and a first end of the connecting nail is connected to the second baffle;

[0009] A driving device, wherein the output end of the driving device is connected to the second end of the lifting rod and the connecting nail away from the second baffle, and the driving device is used to drive the two baffles to reciprocate along the axial direction of the connecting nail.

[0010] Compared with the prior art, the above technical solution has the following beneficial effects:

[0011] By setting two spaced baffles, the first baffle is closed at the furnace mouth of the diffusion furnace, and the second baffle extends into the diffusion furnace, thereby strengthening the sealing effect, and the two baffles are slidably connected by a series-coordinated pick rod and connecting nails, and the second baffle is separated from the first baffle, which is more convenient to clean. In the process of using the driving device to drive the two baffles to move back and forth, the first baffle covers the furnace mouth, or leaves the furnace mouth, and the second baffle extends into the furnace, or is pulled out of the furnace. This sealing method is achieved by the driving device, and the moving direction is from the axial direction to the furnace mouth. Under the drive of the driving device, the baffle can be tightly pressed against the furnace mouth to keep it closed. When opening, it only needs to be driven by the driving device, which is more convenient and quicker than before.

[0012] Furthermore, a reset ring is arranged on the second end of the lifting rod, and a reset spring sleeved on the lifting rod is arranged between the reset ring and the first baffle.

[0013] Furthermore, it also includes a clamping mechanism, which is fixed on the output end of the driving device, and the second end of the connecting pin is connected to the clamping mechanism. The clamping mechanism includes an upper clamping plate and a lower clamping plate that match each other, and a clamping hole corresponding to the silicon paddle hole is formed between the upper clamping plate and the lower clamping plate.

[0014] Furthermore, a connecting hole is provided on the second baffle plate, the first end of the connecting nail is detachably connected to the connecting hole, and the second end of the connecting nail is located on a side of the first baffle plate away from the second baffle plate and is detachably connected to a limiting ring.

[0015] Furthermore, it also includes a connecting seat fixed on the clamping mechanism, the second end of the lifting rod is fixedly connected to the connecting seat, the connecting nail passes through the second end of the connecting seat and is detachably connected to the limiting ring, at least one limiting nail is connected to the outer periphery of the limiting ring, and the limiting nail passes through the limiting ring and abuts against the outer peripheral surface of the connecting nail.

[0016] Furthermore, a sealing cover is provided on a side of the second baffle away from the first baffle, and the sealing cover covers the connecting hole.

[0017] Furthermore, the connecting hole comprises a through hole 1 which is interconnected and a through hole 2 which has a larger contour than the through hole 1, the through hole 1 matches the outer diameter of the connecting nail, and a clamping ring matching the through hole 2 is provided at the end of the connecting nail.

[0018] Furthermore, a slot is provided on the periphery of the temperature measuring hole of the baffle, and a baffle covering the temperature measuring hole is inserted into the slot.

[0019] Further, the outer contour of the first baffle is larger than the outer contour of the second baffle, and the outer contour of the second baffle matches the inner diameter of the diffusion furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0022] Figure 2 for Figure 1 Schematic diagram of the overall structure from another perspective.

[0023] Figure 3 for Figure 1 Schematic diagram of the exploded structure without the drive device.

[0024] Reference numerals:

[0025] 1. First baffle; 2. Second baffle;

[0026] 3. Silicon paddle hole; 4. Temperature measurement hole;

[0027] 5. Lifting rod; 6. Connecting nails;

[0028] 7. Driving device; 701. Guide rod; 702. Sliding block;

[0029] 8. Reset ring; 9. Reset spring;

[0030] 10. Clamping mechanism; 1001. Upper clamping plate; 1002. Lower clamping plate; 1003. Clamping hole;

[0031] 11, connecting hole; 1101, through hole one; 1102, through hole two;

[0032] 12. Limiting ring; 13. Limiting pin; 14. Sealing cover;

[0033] 15. Snap ring;

[0034] 16. slot; 17. baffle;

[0035] 18. Connecting socket. DETAILED DESCRIPTION

[0036] The following embodiments of the technical solution of the utility model are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the utility model, and are therefore only used as examples, and cannot be used to limit the protection scope of the utility model.

[0037] It should be noted that, unless otherwise specified, the technical terms or scientific terms used in this application should have the common meanings understood by technicians in the field to which the utility model belongs.

[0038] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0039] In addition, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present utility model, the meaning of "plurality" is more than two, unless otherwise clearly and specifically limited.

[0040] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0041] Example

[0042] like Figure 1-3 As shown, the utility model provides a door-blocking device for a diffusion furnace, which comprises: two baffles, a lifting rod, a connecting nail and a driving device, wherein the two baffles are respectively a first baffle and a second baffle;

[0043] Among them, the first baffle is a metal baffle. In this embodiment, a stainless steel baffle can be used. The second baffle is a quartz baffle. The second baffle extending into the diffusion furnace uses a quartz baffle to prevent impurities in the baffle from escaping. The first baffle uses a metal baffle, which can withstand better pressure and achieve better sealing effect.

[0044] The two baffles are provided with silicon paddle holes and temperature measuring holes. The two baffles are sleeved on the silicon paddle extending into the diffusion furnace through the silicon paddle holes. The two baffles are respectively a first baffle blocking the diffusion furnace port, and a second baffle spaced apart from the first baffle and located in the diffusion furnace. The second baffle is used to block the front end of the furnace tube.

[0045] At least one lifting rod is arranged through the first baffle plate. In the present embodiment, two lifting rods are arranged. The interior of the lifting rods is hollow. Correspondingly, two connecting nails are matched and pass through the lifting rods to be connected with the second baffle plate. The first baffle plate and the second baffle plate are connected by the cooperation of the lifting rods and the connecting nails. Combined with the fixation of the silicon paddle holes, the two baffle plates can be better fixed on the diffusion furnace.

[0046] The output end of the driving device is connected to the second end of the lifting rod and the connecting pin away from the second baffle. The driving device can be implemented by a linear track and a guide rod. The driving device is used to drive the two baffles to reciprocate along the axial direction of the connecting pin. The linear track is used to drive the connecting pin and the lifting rod to reciprocate, and the axial direction of the guide rod is consistent with the axial direction of the diffusion furnace.

[0047] By setting two spaced baffles, the first baffle is closed at the furnace mouth of the diffusion furnace, and the second baffle extends into the diffusion furnace, thereby strengthening the sealing effect, and the two baffles are slidably connected by a series-coordinated pick rod and connecting nails, and the second baffle is separated from the first baffle, which is more convenient to clean. In the process of using the driving device to drive the two baffles to move back and forth, the first baffle covers the furnace mouth, or leaves the furnace mouth, and the second baffle extends into the furnace, or is pulled out of the furnace. This sealing method is achieved by the driving device, and the moving direction is from the axial direction to the furnace mouth. Under the drive of the driving device, the baffle can be tightly pressed against the furnace mouth to keep it closed. When opening, it only needs to be driven by the driving device, which is more convenient and quicker than before.

[0048] A reset ring is arranged on the second end of the lifting rod, and a reset spring which is sleeved on the lifting rod is arranged between the reset ring and the first baffle. The elastic force of the reset spring can apply pressure to the first baffle when the first baffle covers the furnace opening, so that the first baffle is pressed on the furnace opening with a certain pressure, thereby achieving a better sealing effect.

[0049] It also includes a clamping mechanism, which is fixed on the output end of the driving device, the clamping mechanism is fixed on the slider of the linear track in the driving device, the second end of the connecting nail is connected to the clamping mechanism, the clamping mechanism includes an upper clamping plate and a lower clamping plate that match each other, and a clamping hole corresponding to the silicon paddle hole is formed between the upper clamping plate and the lower clamping plate. The outer end of the silicon paddle passes through the silicon paddle holes on the second baffle and the first baffle in turn, and is clamped and fixed in the clamping hole.

[0050] A connecting hole is provided on the second baffle plate, a first end of the connecting nail is detachably connected to the connecting hole, and a second end of the connecting nail is located on a side of the first baffle plate away from the second baffle plate and is detachably connected to a limiting ring.

[0051] The connecting nail is detachably connected to the second baffle through the connecting hole, so that the second baffle can be removed separately for cleaning and replacement. A limiting ring is provided on the second end of the connecting nail on the outer side of the first baffle, which can play a limiting role and prevent the first baffle and the second baffle from slipping when the first baffle is closed on the furnace mouth.

[0052] In this embodiment, it also includes a connecting seat fixed on the clamping mechanism, the second end of the lifting rod is fixedly connected to the connecting seat, the connecting nail passes through the second end of the connecting seat and is detachably connected to the limiting ring, at least one limiting nail is connected to the outer periphery of the limiting ring, and the limiting nail passes through the limiting ring and abuts against the outer peripheral surface of the connecting nail.

[0053] Specifically, the first end of the connecting nail is detachably connected to the second baffle plate, and the middle part passes through the lifting rod on the first baffle plate. The second end of the connecting nail passes through the connecting seat and is connected to the limiting ring. The limiting ring is fastened by multiple limiting nails. After the limiting ring on the second end of the connecting nail is removed, it is convenient to insert. The limiting nail passes through the limiting ring and abuts against the outer peripheral surface of the connecting nail. The limiting ring is fixed on the connecting nail by tightening the limiting nail.

[0054] In this embodiment, the connecting hole includes a through hole 1 that is interconnected and a through hole 2 whose contour is larger than the through hole 1. The through hole 1 matches the outer diameter of the connecting nail. The end of the first end of the connecting nail is provided with a clamping ring that matches the through hole 2. When connection and fixation are required, the clamping ring at the end of the connecting nail is inserted through the through hole 2, and then moved until the connecting nail is clamped into the through hole 1. Since the aperture of the through hole 2 is larger than that of the through hole 1, the clamping ring can avoid falling out of the through hole, thereby playing a limiting role.

[0055] In this embodiment, a sealing cover is provided on a side of the second baffle away from the first baffle, and the sealing cover covers the connecting hole. The connecting hole on the second baffle is covered by the sealing cover to avoid the connecting hole affecting the sealing effect of the second baffle, thereby improving the sealing effect of the second baffle.

[0056] Specifically, a cavity for accommodating a clamping ring is formed inside the sealing cover, which can accommodate the clamping ring and play a certain limiting role to prevent the axial movement of the connecting nail.

[0057] The temperature measuring hole generally needs to be closed, but needs to be opened when measuring temperature. Therefore, a slot is provided on the outer periphery of the temperature measuring hole of the baffle, and a blocking piece covering the temperature measuring hole is inserted into the slot. When temperature measurement is required, the blocking piece is pulled out and the thermocouple is inserted. After the temperature measurement is completed, the blocking piece is inserted into the slot to close the temperature measuring hole.

[0058] Since the second baffle needs to extend into the diffusion furnace to cover the pipe opening, and the first baffle needs to cover the furnace opening, the outer contour of the first baffle is larger than that of the second baffle, and the outer contour of the second baffle matches the inner diameter of the diffusion furnace.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A door stop device for a diffusion furnace, characterized in that: include: Two baffles, each of which is provided with a silicon paddle hole and a temperature measuring hole, and each of the two baffles is respectively a first baffle that blocks the diffusion furnace port, and a second baffle that is spaced apart from the first baffle and is located in the diffusion furnace; At least one lifting rod is provided through the first baffle plate, and the interior of the lifting rod is hollow; At least one connecting nail, matched and passed through the lifting rod, and a first end of the connecting nail is connected to the second baffle; A driving device, wherein the output end of the driving device is connected to the second end of the lifting rod and the connecting nail away from the second baffle, and the driving device is used to drive the two baffles to reciprocate along the axial direction of the connecting nail.

2. The door blocking device according to claim 1, characterized in that: A reset ring is arranged on the second end of the lifting rod, and a reset spring sleeved on the lifting rod is arranged between the reset ring and the first baffle.

3. The door blocking device according to claim 2, characterized in that: It also includes a clamping mechanism fixed on the output end of the driving device, the second end of the connecting pin is connected to the clamping mechanism, the clamping mechanism includes an upper clamping plate and a lower clamping plate that match each other, and a clamping hole corresponding to the silicon paddle hole is formed between the upper clamping plate and the lower clamping plate.

4. The door blocking device according to claim 3, characterized in that: A connecting hole is provided on the second baffle plate, a first end of the connecting nail is detachably connected to the connecting hole, and a second end of the connecting nail is located on a side of the first baffle plate away from the second baffle plate and is detachably connected to a limiting ring.

5. The door blocking device according to claim 4, characterized in that: It also includes a connecting seat fixed on the clamping mechanism, the second end of the lifting rod is fixedly connected to the connecting seat, the connecting nail passes through the second end of the connecting seat and is detachably connected to the limiting ring, at least one limiting nail is connected to the outer periphery of the limiting ring, and the limiting nail passes through the limiting ring and abuts against the outer peripheral surface of the connecting nail.

6. The door blocking device according to claim 4, characterized in that: A sealing cover is disposed on a side of the second baffle away from the first baffle, and the sealing cover covers the connecting hole.

7. The door blocking device according to claim 4, characterized in that: The connecting hole comprises a through hole 1 which is connected to each other and a through hole 2 which has a larger contour than the through hole 1. The through hole 1 matches the outer diameter of the connecting nail, and a clamping ring matching the through hole 2 is provided at the end of the connecting nail.

8. The door blocking device according to claim 1, characterized in that: A slot is arranged at the periphery of the temperature measuring hole of the baffle plate, and a baffle covering the temperature measuring hole is inserted into the slot.

9. The door blocking device according to claim 1, characterized in that: The outer contour of the first baffle is larger than the outer contour of the second baffle, and the outer contour of the second baffle matches the inner diameter of the diffusion furnace.

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