Multifunctional detection equipment for tellurium-zinc-cadmium crystal defects

Abstract

The utility model belongs to the technical field of tellurium-zinc-cadmium crystal detection, and particularly relates to a multifunctional detection device for tellurium-zinc-cadmium crystal defects, in particular to a multifunctional detection device for tellurium-zinc-cadmium crystal defects. Comprising a base, a light source fixing device arranged on the base and an infrared transmission light source arranged on the light source fixing device, and a movable objective table is arranged on the infrared transmission light source and used for placing tellurium-zinc-cadmium crystals; the infrared transmission light source is located below the movable objective table so as to emit light upwards to the movable objective table. The multifunctional detection equipment for the tellurium-zinc-cadmium crystal defects has four detection modes of infrared transmission jigsaw puzzle, infrared spectrum, infrared heat absorption imaging jigsaw puzzle and surface appearance jigsaw puzzle, after the crystal is fixed on the objective table, four types of detection can be carried out at a time, the sizes of shot detection images are consistent, data comparison is facilitated, and the detection efficiency is improved. And the probability that the crystal is scratched and broken in the process due to multiple times of detection is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of cadmium zinc telluride crystal detection, and specifically relates to a multifunctional detection device for cadmium zinc telluride crystal defects. Background Art

[0002] Cadmium zinc telluride crystal is an important compound semiconductor material with a zinc blende structure, which is widely used in space exploration, medical imaging, environmental monitoring, nuclear safety protection and basic scientific research. However, there are many defects in the cadmium zinc telluride single crystals prepared by the vertical Bridgman method, such as inclusions, twins, small-angle grain boundaries, polycrystalline defects, etc. These defects have a great impact on the performance of the detectors prepared by them.

[0003] At present, the methods for characterizing CdZnTe defects include X-ray morphology, infrared transmission microscopy, and infrared spectrometer. These methods can effectively detect CdZnTe crystal defects, but each method corresponds to a different detection instrument. Every time the detection instrument is changed to detect crystal defects, the CdZnTe sample needs to be placed, which wastes time and may cause secondary pollution on the way. In addition, since CdZnTe is soft and brittle, friction may occur between the crystal surface and the stage, causing scratches on the crystal surface, affecting the detection results; it may even increase the probability of fragmentation due to improper operation, thus affecting the final yield. Moreover, the imaging size of each detection instrument is not uniform, which is not convenient for comparing multiple defect morphology images at a certain local position of the crystal. Utility Model Content

[0004] The utility model aims to provide a multifunctional detection device for cadmium zinc telluride crystal defects to solve the technical problem that existing equipment detects defects in cadmium zinc telluride crystals. The device has four detection modes, namely, infrared transmission puzzle, infrared spectrum, infrared thermal absorption imaging puzzle and surface morphology puzzle. After the crystal is fixed on the stage, the four detections can be performed at one time. The sizes of the captured detection images are consistent, which can facilitate data comparison, save detection time and reduce the probability of scratches and breakages of the crystal during multiple detections.

[0005] In order to solve the above technical problems, the utility model provides a multifunctional detection device for cadmium zinc telluride crystal defects, comprising:

[0006] A base, a light source holder disposed on the base, and an infrared transmission light source disposed on the light source holder, wherein a movable stage is disposed on the infrared transmission light source to place a cadmium zinc telluride crystal;

[0007] The infrared transmission light source is located below the movable stage to irradiate upwards to the movable stage;

[0008] A U-shaped bracket is provided on the base. A spectrometer, a laser source, and a microscopic imaging module are provided on the U-shaped bracket. The spectrometer is connected to a laser microscopic spectroscopy module. A camera is provided on the laser microscopic spectroscopy module. The laser source is aligned with the movable stage.

[0009] The microscopic imaging module includes a camera, a laser microscopic spectroscopy module, a bright and dark field regulator, and a magnifying objective lens from top to bottom.

[0010] Further, the movable stage includes an X-axis moving member, a Y-axis moving member, and a Z-axis moving member to move the cadmium telluride crystal.

[0011] Further, the magnifying objective lens includes several lens bodies with different magnifications.

[0012] Further, the magnifications of several of the lens bodies are 10 - 100 times.

[0013] Further, rollers are provided below the base to move the base.

[0014] The beneficial effects of the present utility model are as follows:

[0015] 1. This device can take infrared transmission mosaics of cadmium telluride crystals and calculate the inclusion density in the crystals. This device can perform infrared spectroscopy tests on cadmium telluride crystals. According to the spectral data, the transmittance of the crystals and the surface composition distribution of the Zn component can be calculated. This device can take defect diffraction infrared thermal absorption imaging diagrams of the infrared transmission area of cadmium telluride irradiated by a laser, which helps the operator understand the three-dimensional structure information of the defects. This device can take the surface morphology of cadmium telluride crystals, facilitating the operator to evaluate the surface quality of the crystals.

[0016] 2. This device can perform four types of detections on the sample at one time, namely infrared transmission mosaic, infrared spectroscopy, infrared thermal absorption imaging mosaic, and surface morphology mosaic, thus saving and reducing the overall crystal defect detection time and improving the detection efficiency.

[0017] 3. Since this device can perform four types of detections on the sample at one time, the probability of scratches and fractures occurring to the crystal during multiple detections is reduced.

[0018] 4. The detection image sizes of the four detection methods provided by this device are consistent, facilitating data comparison and helping to study the formation mechanism of cadmium telluride crystal defects.

[0019] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following specifically enumerates preferred embodiments and, in conjunction with the accompanying drawings, makes a detailed description as follows. Description of the Drawings

[0020] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0021] Figure 1 It is a schematic structural diagram of a multi-functional defect detection device for cadmium telluride zinc crystals of the present utility model.

[0022] In the figure:

[0023] 1. Base; 101. Roller;

[0024] 2. Light source holder;

[0025] 3. Infrared transmission light source;

[0026] 4. Movable stage; 41. X-axis moving member; 42. Y-axis moving member; 43. Z-axis moving member;

[0027] 5. C-shaped bracket;

[0028] 6. Bright and dark field adjuster;

[0029] 7. Laser microscopic spectroscopy module;

[0030] 8. Camera;

[0031] 9. Spectrometer;

[0032] 10. Laser source;

[0033] 11. Magnifying objective lens;

[0034] 12. Microscopic shooting module. Specific embodiments

[0035] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions of the present utility model in conjunction with the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.

[0036] Embodiment:

[0037] As Figure 1As shown in the figure, a multi-functional detection device for cadmium zinc telluride crystal defects includes: a base 1, a light source holder 2 provided on the base 1, and an infrared transmission light source 3 provided on the light source holder 2. A movable stage 4 is arranged on the infrared transmission light source 3 to place the cadmium zinc telluride crystal.

[0038] Among them, the movable stage 4 includes an X-axis moving member 41, a Y-axis moving member 42, and a Z-axis moving member 43 to move the cadmium zinc telluride crystal. In this embodiment, the moving member can be, but is not limited to, a slide rail.

[0039] A U-shaped bracket 5 is arranged on the base 1. A spectrometer 9, a laser source 10, and a microscopic photographing module 12 are arranged on the U-shaped bracket 5. The microscopic photographing module 12 is aligned with the movable stage 4. Among them, the microscopic photographing module 12 includes a camera 8, a laser microscopic spectroscope module 7, a bright and dark field regulator 6, and a magnifying objective lens 11 from top to bottom. The laser microscopic spectroscope module 7 can split the light passing through the magnifying objective lens 11 into two beams, and one of the beams is collected by the camera 8 for imaging.

[0040] When it is determined that the brightness regulator 6 is working properly, by adjusting the bright and dark fields and moving the position of the cadmium zinc telluride crystal through the X-axis moving member 41, Y-axis moving member 42, and Z-axis moving member 43, the microscopic spectroscope module 12 can be used to photograph the surface topography of the cadmium zinc telluride crystal under bright and dark fields.

[0041] The infrared transmission light source 3 is located below the movable stage 4 to irradiate upward on the movable stage 4.

[0042] When it is determined that the spectrometer 9 and the infrared transmission light source 3 are working properly, the position of the cadmium zinc telluride crystal is moved through the X-axis moving member 41, Y-axis moving member 42, and Z-axis moving member 43, and then the infrared transmission light is emitted through the infrared transmission light source 3. The light passes through the spectral data collection module 13 for spectral data analysis, and the transmittance surface distribution and Zn component surface distribution of the cadmium zinc telluride crystal can be measured. The light passes through the microscopic photographing module 12 and can be used for infrared imaging to detect the inclusion defects inside the cadmium zinc telluride crystal.

[0043] When it is determined that the infrared transmission light source 3 and the laser source 10 are working properly, the incident angle of the laser irradiated by the laser source 10 is aligned with the surface of the cadmium zinc telluride crystal on the movable stage 4. The laser light, the transmitted light, and the photographing angle intersect at a point, and this point is located on the crystal surface. The laser of the laser source 10 irradiates the infrared transmission area of the crystal, uses the focused high-energy density light spot for thermal excitation, uses the laser to detect the deformation generated by the sample due to thermal excitation, and is photographed through the microscopic photographing module 12 to obtain the photothermal characteristics of the sample, thereby reflecting the absorption non-uniformity of the sample and indirectly obtaining the non-uniformity of the material.

[0044] When the above four detection methods are used to detect the same piece of CdZnTe crystal, there is no need to manually move the crystal a second time, thereby reducing the chance of scratches and breakage of the crystal during multiple detections. In addition, the size of the captured detection images is consistent, which is convenient for data comparison.

[0045] In this embodiment, a roller 101 is disposed below the base 1 to move the base 1 .

[0046] The various devices selected in this application are all universal standard parts or parts known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods.

[0047] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0049] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A multifunctional detection device for cadmium zinc telluride crystal defects, characterized in that: Comprising: A base (1), a light source holder (2) provided on the base (1), and an infrared transmissive light source (3) provided on the light source holder (2). A movable stage (4) is provided on the infrared transmissive light source (3) for placing a cadmium telluride crystal. The infrared transmissive light source (3) is located below the movable stage (4) to irradiate upwardly on the movable stage (4). A U-shaped bracket (5) is provided on the base (1). A spectrometer (9), a laser source (10), and a microscopic imaging module (12) are provided on the U-shaped bracket (5). The microscopic imaging module (12) is aligned with the movable stage (4), and the laser source (10) is provided above the movable stage (4). The microscopic imaging module (12) includes a camera (8), a laser microscopic spectroscopy module (7), a bright and dark field regulator (6), and a magnifying objective lens (11) from top to bottom.

2. A multifunctional detection device for cadmium telluride crystal defects according to claim 1, wherein The movable stage (4) includes an X-axis moving member (41), a Y-axis moving member (42), and a Z-axis moving member (43) for moving the cadmium telluride crystal.

3. A multifunctional detection device for cadmium telluride crystal defects according to claim 2, wherein Rollers (101) are provided below the base (1) for moving the base (1).

4. A multifunctional detection device for cadmium telluride crystal defects according to claim 3, wherein The magnifying objective lens (11) includes a plurality of lens bodies with different magnifications.

5. A multifunctional detection device for cadmium telluride crystal defects according to claim 4, wherein The magnifications of the plurality of magnifying objective lenses (11) are 10 - 100 times.

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