Multidirectional grinding device for quartz boat

Abstract

The utility model discloses a quartz boat multidirectional polishing device which comprises a base and a polishing unit, the top of the base is fixedly provided with a rack, the polishing unit is arranged on the rack, the polishing unit comprises two groups of polishing assemblies, the two groups of polishing assemblies are symmetrically arranged on the rack, and each group of polishing assemblies comprises an X-axis driving assembly. According to the quartz boat polishing machine tool, welding spots on the two sides of the same quartz plate on a quartz boat can be polished at the same time, and compared with a traditional single-shaft polishing machine tool, the quartz boat polishing machine tool improves polishing efficiency and is convenient to use.

Description

Technical Field

[0001] The utility model belongs to the technical field of quartz boat grinding, and in particular relates to a quartz boat multi-directional grinding device. Background Art

[0002] Quartz is the preferred material for making silicon wafer carriers because of its high purity, high temperature resistance, acid resistance and alkali resistance. The silicon wafer carrier made of quartz material is called a quartz boat.

[0003] During the production process of the quartz boat, after the quartz plate and the quartz column are welded, protruding welding points will be formed on the surface of the quartz plate. In order to ensure the quality of the quartz boat, the welding points need to be polished again.

[0004] Currently, most of the machine tools on the market use single-spindle heads for grinding operations. During the grinding process, since there are multiple solder joints on the same side of the quartz boat, the solder joints need to be polished one by one, and the grinding efficiency is low. Utility Model Content

[0005] In order to solve the above technical problems, the purpose of the utility model is to provide a quartz boat multi-directional grinding device to solve the defects of the prior art.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A quartz boat multi-directional polishing device, comprising:

[0008] A base, a frame is fixedly mounted on the top of the base;

[0009] A grinding unit for simultaneously grinding the welding points on both sides of the same quartz plate on a quartz boat, the grinding unit is arranged on the frame, the grinding unit includes two groups of grinding components, the two groups of grinding components are symmetrically arranged on the frame, the two groups of grinding components each include an X-axis driving component, the X-axis driving component is provided with a Y-axis driving component, the Y-axis driving component is provided with a grinding motor, and a grinding head is fixedly installed at the lower end of the rotating shaft of the grinding motor.

[0010] As a further solution of the utility model, the frame includes two support frames, the two support frames are arranged on the top of the base, the outer upper ends of the two support frames are provided with mounting seats, a C-shaped mounting plate is installed between the two mounting seats, and both ends of the C-shaped mounting plate are provided with second mounting waist holes for connecting the grinding unit.

[0011] As a further solution of the present utility model, the X-axis drive assembly includes a second mounting plate, which is fixedly mounted on the upper end of the support frame, and second vertical plates are fixedly mounted on both ends of the second mounting plate, wherein a second motor is fixedly mounted on the outer second vertical plate, a second lead screw is rotatably connected between the two second vertical plates, a second nut is threadedly rotatably connected on the second lead screw, a third mounting plate is fixedly connected to the second nut, second slide rails are fixedly mounted on the upper and lower ends of the second mounting plate, second slide rails are slidably provided with second sliders, and the second sliders are connected to the third mounting plate.

[0012] As a further scheme of the present utility model, the Y-axis driving assembly includes a third vertical plate fixed on the upper and lower ends of the third mounting plate, a third screw is rotatably connected between the two third vertical plates, and a third nut is threadedly rotatably connected to the third screw, wherein a third motor is fixedly installed on the top of the upper third vertical plate, the rotating shaft of the third motor is fixedly connected to the upper end of the third screw, a moving seat is fixedly connected to the third nut, a grinding motor is fixedly installed on the moving seat, a grinding head is fixedly connected to the rotating shaft of the grinding motor, a third slide rail is fixedly installed on the front end of the third mounting plate, a third slider is slidably provided on the third slide rail, and the third slider is connected to the moving seat through a second connecting rod.

[0013] Compared with the prior art, the utility model provides a quartz boat multi-directional grinding device with the following beneficial effects: the grinding unit can simultaneously grind the welding points on both sides of the same quartz plate on the quartz boat, thereby improving the grinding efficiency compared with the traditional single-axis grinding machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the drawings required for use in the embodiment will be briefly introduced below. Obviously, the drawings described below are only examples of the embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 This is a schematic diagram of the structure of the protective cover of the embodiment of the utility model;

[0016] Figure 2 The structure of the embodiment of the utility model is schematically shown Figure 1 ;

[0017] Figure 3 The structure of the embodiment of the utility model is schematically shown Figure 2 ;

[0018] Figure 4 A schematic diagram of the structure of the frame in the embodiment of the utility model

[0019] Figure 5 This is a schematic diagram of the structure of the grinding unit in the embodiment of the utility model;

[0020] Figure 6 The local structure of the grinding unit in the embodiment of the utility model is shown in FIG. Figure 1 ;

[0021] Figure 7 The local structure of the grinding unit in the embodiment of the utility model is shown in FIG. Figure 2 .

[0022] Reference numerals:

[0023] 1. Base; 2. Protective cover; 3. Frame; 301. Support frame; 3011. First mounting waist hole; 302. Mounting seat;

[0024] 4. Door panel; 5. Dust suction port;

[0025] 6. Grinding unit; 601. Second mounting plate; 602. Second vertical plate; 603. Second motor; 604. Second lead screw; 6041. Second nut; 6011. Second slide rail; 6012. Second slider; 605. Third mounting plate; 606. Third vertical plate; 6061. Third lead screw; 6062. Third nut; 607. Third slide rail; 608. Third motor; 609. Second connecting rod; 610. Moving seat; 611. Third slider; 612. Grinding motor; 613. Grinding head. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiment of the utility model more clear, the embodiment of the utility model is further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0027] In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limitations on the embodiments of the present invention.

[0028] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, an integral connection, or a detachable connection; it can be the internal connection of two components; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0029] See attached Figure 1-3 As shown, a quartz boat multi-directional polishing device according to an embodiment of the utility model comprises a base 1 , and a frame 3 is fixedly mounted on the top of the base 1 .

[0030] See also Figure 5-7 As shown, a grinding unit 6 for simultaneously grinding the welding points on both sides of the same quartz plate on the quartz boat is arranged on the frame 3, and the grinding unit 6 includes two groups of grinding components, and the two groups of grinding components are symmetrically arranged on the frame 3. The two groups of grinding components both include an X-axis driving component, and the X-axis driving component is provided with a Y-axis driving component, and the Y-axis driving component is provided with a grinding motor 612, and a grinding head 613 is fixedly installed at the lower end of the rotating shaft of the grinding motor 612.

[0031] See also Figure 2-4 As shown, in the embodiment of the utility model, the frame 3 includes two support frames 301, and the two support frames 301 are arranged on the top of the base 1. Both sides of the top of the support frames 301 are provided with first mounting waist holes 3011 for assembly and fixing with the base 1. A mounting seat 302 is fixedly installed on one side of the two support frames 301, and a C-shaped mounting plate 306 is installed between the two mounting seats 302. Both ends of the C-shaped mounting plate 306 are provided with second mounting waist holes for connecting the grinding unit 6.

[0032] In this embodiment of the utility model, the X-axis drive assembly includes a second mounting plate 601, which is fixedly mounted on the upper end of the support frame 301, and second vertical plates 602 are fixedly mounted on both ends of the second mounting plate 601, wherein a second motor 603 is fixedly mounted on the outer second vertical plate 602, a second lead screw 604 is rotatably connected between the two second vertical plates 602, a second nut 6041 is threadedly rotatably connected on the second lead screw 604, a third mounting plate 605 is fixedly connected to the second nut 6041, second slide rails 6011 are fixedly mounted on the upper and lower ends of the second mounting plate 601, a second slider 6012 is slidably arranged on the second slide rail 6011, and the second slider 6012 is connected to the third mounting plate 605.

[0033] The Y-axis driving assembly includes a third vertical plate 606 fixed on the upper and lower ends of the third mounting plate 605, a third lead screw 6061 is rotatably connected between the two third vertical plates 606, and a third nut 6062 is threadedly rotatably connected on the third lead screw 6061, wherein a third motor 608 is fixedly installed on the top of the upper third vertical plate 606, the rotating shaft of the third motor 608 is fixedly connected to the upper end of the third lead screw 6061, a moving seat 610 is fixedly connected to the third nut 6062, a grinding motor 612 is fixedly installed on the moving seat 610, a grinding head 613 is fixedly connected to the rotating shaft of the grinding motor 612, a third slide rail 607 is fixedly installed on the third mounting plate 605, a third slider 611 is slidably arranged on the third slide rail 607, and the third slider 611 is connected to the moving seat 610 through a second connecting rod 609.

[0034] By adopting the above technical solution, when grinding the solder joints on the quartz boat, after fixing the quartz boat, start the grinding motor 612 to cooperate with the X-axis drive assembly and the Y-axis drive assembly, so that the solder joints on both sides of the same quartz plate on the quartz boat can be ground simultaneously.

[0035] Specifically, a protective cover 2 is fixedly installed on the top of the base 1, and door panels 4 are hinged on the four sides of the protective cover 2. The protective cover 2 can protect the frame 3 and the grinding mechanism 6 on the top of the base 1 and prevent the dust generated during grinding from scattering.

[0036] A dust suction port 5 is provided on the top of the protective cover 2. Through the dust suction port 5, when in use, the dust suction port 5 can be connected to a waste vacuum cleaner to suck the dust floating in the protective cover 2.

[0037] The above shows and describes the basic principle of the invention of the utility model. The above is only a preferred embodiment of the invention of the utility model and is not intended to limit the invention of the utility model. The above embodiments and descriptions in the specification are only to illustrate the principle of the invention of the utility model. Without departing from the scope of the invention of the utility model, any modifications, equivalent substitutions and improvements made within the spirit and scope of the invention of the utility model should be included in the protection scope of the invention of the utility model.

Claims

1. A quartz boat multi-directional polishing device, characterized in that include: A base (1), wherein a frame (3) is fixedly mounted on the top of the base (1); A grinding unit (6) for simultaneously grinding welding points on both sides of the same quartz plate on the quartz boat; The grinding unit (6) is arranged on the frame (3), and the grinding unit (6) comprises two groups of grinding components, the two groups of grinding components are symmetrically arranged on the frame (3), and the two groups of grinding components each comprise an X-axis drive component, the X-axis drive component is provided with a Y-axis drive component, the Y-axis drive component is provided with a grinding motor (612), and a grinding head (613) is provided at the lower end of the rotating shaft of the grinding motor (612).

2. The multi-directional polishing device for a quartz boat according to claim 1, characterized in that: The frame (3) comprises two support frames (301), the two support frames (301) being arranged on the top of the base (1), a mounting seat (302) being fixedly mounted on the upper ends of the same side of the two support frames (301), a C-shaped mounting plate (306) being mounted between the two mounting seats (302), and second mounting waist holes for connecting the grinding unit (6) being provided at both ends of the C-shaped mounting plate (306).

3. The multi-directional polishing device for a quartz boat according to claim 2, characterized in that: The X-axis drive assembly comprises a second mounting plate (601), wherein the second mounting plate (601) is fixedly mounted on the upper end of the support frame (301), and second vertical plates (602) are fixedly mounted on both ends of the second mounting plate (601), wherein a second motor (603) is fixedly mounted on the outer second vertical plate (602), a second lead screw (604) is rotatably connected between the two second vertical plates (602), a second nut (6041) is threadedly rotatably connected on the second lead screw (604), and a third mounting plate (605) is fixedly connected to the second nut (6041), and second slide rails (6011) are fixedly mounted on the upper and lower ends of the second mounting plate (601), and second slide blocks (6012) are slidably arranged on the second slide rails, and the second slide blocks (6012) are connected to the third mounting plate (605).

4. The multi-directional polishing device for a quartz boat according to claim 3, characterized in that: The Y-axis driving assembly comprises a third vertical plate (606) fixed to the upper and lower ends of the third mounting plate (605), a third lead screw (6061) being rotatably connected between the two third vertical plates (606), a third nut (6062) being threadedly rotatably connected on the third lead screw (6061), a third motor (608) being fixedly mounted on the top of the upper third vertical plate (606), a rotating shaft of the third motor (608) being fixedly connected to the upper end of the third lead screw (6061), and the third lead screw (6061) being rotatably connected to the third nut (6062). A movable seat (610) is fixedly connected to the three nuts (6062), a grinding motor (612) is fixedly mounted on the movable seat (610), a grinding head (613) is fixedly connected to the rotating shaft of the grinding motor (612), a third slide rail (607) is fixedly mounted on the front end of the third mounting plate (605), a third slider (611) is slidably mounted on the third slide rail (607), and the third slider (611) is fixedly connected to the movable seat (610) via a second connecting rod (609).

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