Heating furnace body device of rapid annealing furnace

Abstract

The utility model relates to the technical field of annealing furnaces, and discloses a heating furnace body device of a rapid annealing furnace, which comprises a rapid annealing furnace body, a quartz cavity is arranged in the middle of the interior of the rapid annealing furnace body, and a row of infrared lamp tubes for heating metal are respectively arranged at the upper end and the lower end of the interior of the rapid annealing furnace body. Through the design of the temperature measuring thermocouple, the high temperature in the furnace body of the rapid annealing furnace can be accurately measured, and the temperature change in the hearth can be monitored in real time, so that the operation of heating equipment is favorably controlled, the stability of the temperature in the hearth and the safety of the heating process are ensured, the product quality is favorably controlled, the energy consumption is accurately controlled, and the production efficiency is improved. The energy waste is reduced; through the design that the locking mechanism is rotationally arranged on the furnace door, and the locking mechanism is rotated to enable the clamping block to be clamped in the clamping groove, locking of the furnace door can be achieved, operation is convenient and rapid, then taking and placing of metal are facilitated, and the heat treatment efficiency of the metal is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnaces, in particular to a rapid annealing furnace heating furnace body device. Background Art

[0002] Annealing furnace is a kind of heat treatment equipment commonly used in industrial production, mainly used to adjust the crystal structure and properties of metal materials. The working principle of annealing furnace mainly includes three steps: heating, insulation and cooling. The temperature in the furnace is raised to the required annealing temperature through internal electric heaters or gas stoves and other heating equipment; when the temperature in the furnace reaches the required annealing temperature, the metal material will be kept at this temperature for a period of time, and this process is called insulation; after the insulation is completed, the annealing furnace will gradually reduce the temperature in the furnace by controlling the gas supply or turning off the heating equipment.

[0003] After searching, the patent with application number 202111595920.9 discloses an infrared rapid annealing furnace, including a furnace body, which is provided with upper and lower rows of infrared lamps, and infrared heat insulation baffles are provided between adjacent infrared lamps to block the transmission of infrared light. This invention separates adjacent infrared lamps by using infrared heat insulation baffles. The infrared heat insulation baffles are resistant to high temperatures and are not conducive to the transmission of infrared light, thereby weakening the heat radiated from the edge lamps to the center position, isolating a single infrared lamp as a separate radiation heat source, greatly reducing the transmission of infrared waves, and can effectively alleviate the edge field effect during the heating process of the silicon wafer, and maintain the silicon wafer with good temperature uniformity.

[0004] The temperature measurement inside the furnace body of the current rapid annealing furnace for metal heat treatment is not accurate enough. Too high or too low temperature is not conducive to the quality control of product heat treatment, and high temperature easily causes energy waste. In addition, the current rapid annealing furnace is more troublesome to open and close the furnace door during metal heat treatment, which is inconvenient for metal loading and unloading, thereby reducing the metal heat treatment efficiency. Therefore, we need to propose a rapid annealing furnace heating furnace body device. Utility Model Content

[0005] The utility model aims to provide a rapid annealing furnace heating device. Through the design of temperature measuring thermocouples, the high temperature in the rapid annealing furnace body can be accurately measured, and the temperature change in the furnace can be monitored in real time, which is helpful to control the operation of the heating equipment, thereby ensuring the stability of the temperature in the furnace and the safety of the heating process, which is beneficial to control the quality of the product, and accurately control the energy consumption to reduce energy waste; by arranging a locking mechanism when the furnace door is rotated, and by rotating the locking mechanism, the card block is stuck in the inside of the card slot, the furnace door can be locked, the operation is convenient and quick, and the metal is convenient to take and put, and the metal heat treatment efficiency is improved, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a rapid annealing furnace heating furnace body device, comprising a rapid annealing furnace body, a quartz cavity is arranged in the middle position inside the rapid annealing furnace body, a row of infrared lamp tubes for heating metal are installed at the upper end and the lower end of the internal part of the rapid annealing furnace body, a lamp tube heat dissipation hole plate for rapid cooling of the infrared lamp tubes is installed on the top of the rapid annealing furnace body, a fixed plate is installed on one side of the rapid annealing furnace body, a temperature measuring thermocouple is installed on the fixed plate, a furnace door is rotatably installed on one side edge of the fixed plate, and a locking mechanism for quickly opening and closing the furnace door is rotatably installed on the furnace door.

[0007] Preferably, connecting rods are connected to both ends of the furnace door, and the locking mechanism includes two positioning rods rotatably installed at both ends of the furnace door, a door handle is rotatably connected between the two positioning rods, the positioning rods are configured as Z-shaped positioning rods, and the ends of the connecting rods are rotatably installed on the positioning rods.

[0008] Preferably, a clamping block is connected to the fixing plate, the axis of the clamping block is at the same height as the axis of the connecting rod, a clamping slot is provided at one end of the positioning rod, and the clamping block is clamped inside the clamping slot.

[0009] Preferably, a support plate is installed on the side of the rapid annealing furnace body, and a mounting groove is opened on the support plate, and the ends of the infrared lamp tubes are all engaged in the mounting groove.

[0010] Preferably, four legs are connected to the four corners of the bottom of the rapid annealing furnace body, and a fixing seat is also installed at the bottom of the rapid annealing furnace body, and a guide shaft is installed on the fixing seat.

[0011] Preferably, a support seat is connected to the top of the fixing plate, and a vacuum extraction interface connected to the quartz cavity is installed on the other side of the rapid annealing furnace body.

[0012] Preferably, a bracket is installed at the bottom of the rapid annealing furnace body, and a pyrometer is installed on the bracket.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The utility model can accurately measure the high temperature in the rapid annealing furnace body through the design of the temperature measuring thermocouple, and monitor the temperature change in the furnace in real time, which is helpful to control the operation of the heating equipment, thereby ensuring the stability of the temperature in the furnace and the safety of the heating process, which is beneficial to control the quality of the product, and accurately control the energy consumption and reduce energy waste;

[0015] 2. The utility model is designed to set a locking mechanism when the furnace door is rotated, and by rotating the locking mechanism, the card block is stuck in the inside of the card slot, so that the furnace door can be locked. The operation is convenient and quick, which makes it easy to take out and put out metal materials and improves the efficiency of metal heat treatment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional diagram of the utility model;

[0017] Figure 2 It is the front view of the utility model;

[0018] Figure 3 For this utility model Figure 1 Enlarged view of part A in the middle.

[0019] In the figure: 1. rapid annealing furnace body; 2. support legs; 3. lamp tube heat dissipation hole plate; 4. support plate; 5. infrared lamp tube; 6. guide shaft; 7. support seat; 8. furnace door; 81. connecting rod; 9. positioning rod; 91. slot; 10. door handle; 11. fixing plate; 111. clamping block; 12. quartz cavity; 13. vacuum interface; 14. bracket; 15. pyrometer; 16. fixing seat; 17. temperature measuring thermocouple. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-3 The utility model provides a technical solution: a rapid annealing furnace heating furnace body device, including a rapid annealing furnace body 1, a quartz cavity 12 is arranged in the middle position inside the rapid annealing furnace body 1, quartz has good thermal conductivity and thermal stability, and can make the metal heated evenly and high in temperature during the metal heat treatment process, a row of infrared lamp tubes 5 for heating the metal are installed at the upper end and the lower end of the internal part of the rapid annealing furnace body 1, and each row of infrared lamp tubes 5 are arranged with multiple infrared lamp tubes 5 at equal intervals, a lamp tube heat dissipation hole plate 3 for rapid cooling of the infrared lamp tubes 5 is installed on the top of the rapid annealing furnace body 1, and a plurality of heat dissipation holes are opened on the lamp tube heat dissipation hole plate 3, a fixed plate 11 is installed on one side of the rapid annealing furnace body 1, a temperature measuring thermocouple 17 is installed on the fixed plate 11, a furnace door 8 is rotatably installed on one side edge of the fixed plate 11, and a locking mechanism for quickly opening and closing the furnace door 8 is rotatably installed on the furnace door 8.

[0022] As a temperature measuring element, the temperature measuring thermocouple 17 can generate an electromotive force by using the temperature difference at the contact point of two different metal conductors, and then accurately measure the high temperature in the furnace. By monitoring the temperature changes in the furnace in real time, the temperature measuring thermocouple provides a feedback signal to the furnace temperature control system. This helps to control the operation of the heating equipment, thereby ensuring the stability of the temperature in the furnace and the safety of the heating process.

[0023] It helps to achieve the best annealing effect and can also help the factory optimize energy consumption. By accurately controlling the heating process, energy waste can be avoided, energy utilization efficiency can be improved, and production costs can be reduced. The real-time monitoring function of the temperature measuring thermocouple 17 also helps to promptly detect abnormal conditions inside the rapid annealing furnace body 1, such as local overheating. This helps to prevent potential failures and safety accidents and ensure the long-term stable operation of the rapid annealing furnace.

[0024] Both ends of the furnace door 8 are connected to connecting rods 81, and the locking mechanism includes two positioning rods 9 rotatably installed at both ends of the furnace door 8, and a door opening handle 10 is rotatably connected between the two positioning rods 9. The positioning rods 9 are set as Z-shaped positioning rods, and the ends of the connecting rods 81 are rotatably installed on the positioning rods 9.

[0025] A clamping block 111 is connected to the fixing plate 11 . The axis of the clamping block 111 is at the same height as the axis of the connecting rod 81 . A clamping groove 91 is formed at one end of the positioning rod 9 . The clamping block 111 is clamped in the inside of the clamping groove 91 .

[0026] Lift the door handle 10 upwards, and the positioning rod 9 rotates, so that the block 111 is disengaged from the slot 91, and the lock on the furnace door 8 is canceled;

[0027] Similarly, the furnace door 8 is closed and the door handle 10 is pressed down so that the clamping block 111 is clamped in the clamping groove 91 , thereby locking the furnace door 8 .

[0028] A support plate 4 is installed on the side of the rapid annealing furnace body 1. The support plate 4 is provided with a mounting groove. The ends of the infrared lamp tube 5 are all engaged in the mounting groove, so as to limit the position of the infrared lamp tube 5.

[0029] Four legs 2 are connected to the four corners of the bottom of the rapid annealing furnace body 1 . A fixing seat 16 is also installed at the bottom of the rapid annealing furnace body 1 , and a guide shaft 6 is installed on the fixing seat 16 .

[0030] The top of the fixing plate 11 is connected to a support seat 7 , and a vacuum interface 13 connected to the quartz cavity 12 is installed on the other side of the rapid annealing furnace body 1 , so as to facilitate vacuuming the quartz cavity 12 .

[0031] A bracket 14 is installed at the bottom of the rapid annealing furnace body 1 , and a pyrometer 15 is installed on the bracket 14 .

[0032] When in use, lift the door handle 10 upwards, the positioning rod 9 rotates, so that the block 111 disengages from the slot 91, and the lock on the furnace door 8 is released. Then, pull the door handle 10 horizontally to open the furnace door 8, and put the metal to be heated into the quartz cavity 12, and close the furnace door 8. Press the door handle 10 downward so that the block 111 is stuck in the slot 91, so that the furnace door 8 can be locked, and the quartz cavity 12 is evacuated through the vacuum interface 13. Then the infrared lamp tube 5 starts to work and start heat treatment of the metal. After being heated to a certain temperature (generally the heat treatment temperature is above 800°C), it is kept for a period of time for insulation treatment. After the insulation is completed, the infrared lamp tube 5 is turned off, cooling begins, and the residual heat of the infrared lamp tube 5 is discharged through the lamp tube heat dissipation hole plate 3.

[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A rapid annealing furnace heating device, characterized in that: The invention comprises a rapid annealing furnace body (1), wherein a quartz cavity (12) is arranged in the middle position inside the rapid annealing furnace body (1), a row of infrared lamp tubes (5) for heating metal are installed at the upper end and the lower end inside the rapid annealing furnace body (1), a lamp tube heat dissipation hole plate (3) for quickly cooling the infrared lamp tubes (5) is installed on the top of the rapid annealing furnace body (1), a fixing plate (11) is installed on one side of the rapid annealing furnace body (1), a temperature measuring thermocouple (17) is installed on the fixing plate (11), a furnace door (8) is rotatably installed on one side edge of the fixing plate (11), and a locking mechanism for quickly opening and closing the furnace door (8) is rotatably installed on the furnace door (8).

2. A rapid annealing furnace heating device according to claim 1, characterized in that: Both ends of the furnace door (8) are connected to connecting rods (81), and the locking mechanism comprises two positioning rods (9) rotatably mounted on the two ends of the furnace door (8), a door opening handle (10) is rotatably connected between the two positioning rods (9), the positioning rods (9) are configured as Z-shaped positioning rods, and the ends of the connecting rods (81) are rotatably mounted on the positioning rods (9).

3. A rapid annealing furnace heating device according to claim 2, characterized in that: The fixing plate (11) is connected to a clamping block (111), the axis of the clamping block (111) is at the same height as the axis of the connecting rod (81), one end of the positioning rod (9) is provided with a clamping groove (91), and the clamping block (111) is clamped inside the clamping groove (91).

4. A rapid annealing furnace heating device according to claim 1, characterized in that: A support plate (4) is installed on the side of the rapid annealing furnace body (1), and a mounting groove is provided on the support plate (4), and the ends of the infrared lamp tubes (5) are both engaged in the interior of the mounting groove.

5. The rapid annealing furnace heating device according to claim 1, characterized in that: Four legs (2) are connected to the four corners of the bottom of the rapid annealing furnace body (1), and a fixing seat (16) is also installed at the bottom of the rapid annealing furnace body (1), and a guide shaft (6) is installed on the fixing seat (16).

6. The rapid annealing furnace heating device according to claim 1, characterized in that: The top of the fixing plate (11) is connected to a support seat (7), and the other side of the rapid annealing furnace body (1) is provided with a vacuum extraction interface (13) connected to the quartz cavity (12).

7. The rapid annealing furnace heating device according to claim 1, characterized in that: A bracket (14) is installed at the bottom of the rapid annealing furnace body (1), and a pyrometer (15) is installed on the bracket (14).

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