Porous water-cooled jacket for crystal cooling and crystal preparation equipment

Abstract

The utility model discloses a porous water cooling jacket for crystal cooling and crystal preparation equipment, comprising at least two groups of water cooling disc assemblies, the two groups of water cooling disc assemblies are connected and respectively comprise a water cooling disc and a water inlet and return device, the water inlet and return device comprises a water inlet structure and a water return structure, and the water inlet structure and the water return structure are connected with the water cooling disc. The cooling jacket is of a split structure formed by the two water cooling disc assemblies, assembling is easy, the water cooling disc assemblies are of an integrated structure, the water inlet pipe and the water return pipe are welded to the water cooling disc, the risk that a pipeline connector loses efficacy in the vacuum high-temperature environment is effectively avoided, and the reliability of the cooling jacket is guaranteed; the water-cooling discs of the two water-cooling disc assemblies are provided with independent water inlet and return structures, cooling paths are reduced, and the cooling effect is effectively improved.

Description

Technical Field

[0001] The utility model belongs to the field of silicon core preparation and relates to a porous water cooling jacket for crystal cooling and crystal preparation equipment. Background Art

[0002] In order to achieve the simultaneous pulling of multiple crystals, the existing patents 2022111827741 and 2022206161651 both disclose a crystal cooling device that can achieve the simultaneous pulling and cooling of multiple silicon rods. The crystal cooling device adopts an integral design and a flexible joint assembly seal. This structure has a great impact on the life of the sealing ring under long-term vacuum and high temperature conditions. There is a risk of water leakage at the sealing joints, and there are great safety hazards. In addition, there is a lack of effective and reasonable water channel layout, and the thermal radiation generated during crystal pulling is difficult to effectively exchange heat, which affects the life of the silicon rod fixing plate. Summary of the invention

[0003] In order to overcome at least one deficiency of the prior art, the utility model provides a porous water cooling jacket for crystal cooling and a crystal preparation device.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a porous water cooling jacket for crystal cooling, comprising at least two groups of water cooling plate assemblies, the two groups of water cooling plate assemblies are connected and both include water cooling plates and water inlet and return devices, the water inlet and return devices include a water inlet structure and a water return structure, and the water inlet structure and the water return structure are connected to the water cooling plate.

[0005] Furthermore, the water cooling plate assembly is an integrated structure, and the water cooling plates of two groups of the water cooling plate assemblies are connected.

[0006] Furthermore, the water cooling disk is provided with a water flow channel, the water inlet structure and the water return structure are respectively connected to the water flow channel, and the water inlet structure, the water flow channel and the water return structure constitute the water inlet and return channel.

[0007] Furthermore, the water inlet structure includes an inlet pipe joint and an inlet pipe, one end of the inlet pipe is connected to the inlet pipe joint, and the other end is connected to the water inlet of the water flow channel. The return water structure includes a return water pipe joint and a return water pipe, one end of the return water pipe is connected to the return water pipe joint.

[0008] Furthermore, the water cooling plate comprises a water cooling jacket upper plate, a water cooling jacket connecting pipe and a water cooling jacket lower plate, and the water cooling jacket upper plate and the water cooling jacket lower plate are connected via the water cooling jacket connecting pipe.

[0009] Furthermore, the upper plate of the water cooling jacket is provided with an upper water inlet chamber and an upper water return chamber of the water cooling jacket, the water inlet is arranged in the upper water inlet chamber of the water cooling jacket, the lower plate of the water cooling jacket is provided with a lower water inlet chamber and a lower water return chamber of the water cooling jacket, the outlet is arranged in the lower water return chamber of the water cooling jacket, the upper water inlet chamber of the water cooling jacket and the lower water inlet chamber of the water cooling jacket, the lower water inlet chamber of the water cooling jacket and the lower water return chamber of the water cooling jacket, and the upper water return chamber of the water cooling jacket and the lower water return chamber of the water cooling jacket are connected respectively through a water cooling jacket connecting pipe.

[0010] Furthermore, the water-cooling jacket connecting pipes are respectively a first connecting pipe, a second connecting pipe, a third connecting pipe and a fourth connecting pipe, a circulation chamber is provided between the upper water inlet chamber of the water-cooling jacket and the upper water return chamber of the water-cooling jacket, the first connecting pipe connects the upper water inlet chamber of the water-cooling jacket and the lower water inlet chamber of the water-cooling jacket, the second connecting pipe connects the circulation chamber and the lower water inlet chamber of the water-cooling jacket, the third connecting pipe connects the circulation chamber and the lower water return chamber of the water-cooling jacket, and the fourth connecting pipe connects the upper water return chamber of the water-cooling jacket and the lower water return chamber of the water-cooling jacket.

[0011] Furthermore, the upper water inlet chamber of the water cooling jacket, the upper water return chamber of the water cooling jacket, the lower water inlet chamber of the water cooling jacket and the lower water return chamber of the water cooling jacket are all provided with water baffles.

[0012] Furthermore, a heat insulating layer is provided on the end surface of the lower plate of the water cooling jacket opposite to the crucible.

[0013] A crystal preparation device comprises the porous water cooling jacket.

[0014] In summary, the utility model is beneficial in that:

[0015] The cooling jacket of the utility model is a split structure composed of two groups of water-cooling plate assemblies, which is simple to assemble. The water-cooling plate assembly is an integrated structure, and the water inlet pipe and the water return pipe are welded to the water-cooling plate, which effectively avoids the risk of failure of the pipe joints in a vacuum high-temperature environment and ensures the reliability of the cooling jacket; the water-cooling plates of the two groups of water-cooling plate assemblies have separate water inlet and return structures, which reduces the cooling path and effectively improves the cooling effect; the water inlet and return devices are provided with a temperature measuring flow meter and an over-temperature switch, and the function of real-time monitoring of water temperature and flow during crystal pulling is realized through the temperature measuring flow meter and the over-temperature switch. When the water temperature detected by the temperature measuring flow meter exceeds the set value, the over-temperature switch threshold alarm is triggered, and the water flow is adjusted through manual or automatic intervention. The over-temperature pre-tightening function is effectively realized through the over-temperature switch, and the cooling effect is further improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of a porous water cooling jacket of the utility model.

[0017] Figure 2 It is a top view of the porous water cooling jacket of the utility model.

[0018] Figure 3 It is the front view of the porous water cooling jacket of the utility model.

[0019] Figure 4 For the utility model Figure 2 Sectional view of AA.

[0020] Figure 5 For the utility model Figure 3 Cross-sectional view of BB.

[0021] Figure 6 For the utility model Figure 3 Cross-sectional view of CC.

[0022] Markings in the figure: water cooling plate assembly 1, water cooling plate 2, water inlet and return device 3, cooling hole 20, water cooling jacket upper plate 21, water cooling jacket connecting pipe 22, water cooling jacket lower plate 23, temperature measuring flow meter 30, water inlet pipe joint 31, water inlet pipe 32, return water pipe joint 33, return water pipe 34, over-temperature switch 35, water inlet chamber 211 on water cooling jacket, water return chamber 212 on water cooling jacket, circulation chamber 213, first connecting pipe 221, second connecting pipe 222, third connecting pipe 223, fourth connecting pipe 224, water inlet chamber 231 below water cooling jacket, water return chamber 232 below water cooling jacket, screw hole 233. DETAILED DESCRIPTION

[0023] The following describes the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0024] It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention, and thus the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.

[0025] All directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, horizontal, vertical...) are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0026] Due to installation errors and other reasons, the parallel relationship referred to in the embodiments of the present invention may actually be an approximately parallel relationship, and the vertical relationship may actually be an approximately vertical relationship.

[0027] Embodiment 1:

[0028] like Figure 1-Figure 6 As shown, a porous water cooling jacket for crystal cooling includes at least two groups of water cooling plate assemblies 1. The water cooling plate assembly 1 includes a water cooling plate 2 and a water inlet and return device 3 connected to the water cooling plate. The water cooling plate 2 is provided with a water flow channel connected to the water inlet and return device 3. The water cooling plates 2 of the two groups of water cooling plate assemblies 1 are connected.

[0029] The water cooling plate assembly 1 is an integrated structure. Two groups of water cooling plate assemblies 1 are connected to form a porous water cooling jacket. Compared with the existing integral water cooling jacket, the porous water cooling jacket in this embodiment is configured as a split structure composed of two groups of water cooling plate assemblies 1. The split porous water cooling jacket is simple to assemble and can be placed in the equipment as a whole, avoiding the risk of failure of the pipe joint in a vacuum and high temperature environment.

[0030] like Figure 1 As shown, two groups of water cooling plate assemblies 1 are distributed on the left and right, but the number and distribution of the water cooling plate assemblies 1 in the present application are not limited thereto.

[0031] In this embodiment, the two groups of water cooling plate assemblies 1 have the same structure, and one group of water cooling plate assemblies 1 is taken as an example for structural description.

[0032] The water inlet and return device 3 includes a water inlet structure and a water return structure, and the water inlet structure and the water return structure are respectively connected to the water flow channel of the water cooling plate 2. The water inlet structure, the water flow channel and the water return structure constitute an inlet and return water channel. Water flows along the inlet and return water channel to realize the separate inlet and return water cooling of a single water cooling plate assembly 1. Compared with the existing integral water cooling jacket, which has the disadvantage of long water channel distribution and low cooling effect, the present application is assembled through a split water cooling plate assembly 1, and an independent inlet and return water device 3 is set in any water cooling plate assembly 1, so as to reduce the cooling path and effectively improve the cooling effect.

[0033] like Figure 3 As shown, the water inlet structure includes an inlet pipe joint 31 and an inlet pipe 32, one end of the inlet pipe 32 is connected to the inlet pipe joint 31, and the other end is connected to the water inlet of the water flow channel, and water flows into the water flow channel through the inlet pipe joint 31, the inlet pipe 32 and the water inlet; the return water structure includes a return water pipe joint 33 and a return water pipe 34, one end of the return water pipe 34 is connected to the return water pipe joint 33, and the other end is connected to the water outlet of the water flow channel, and water flows out through the water outlet, the return water pipe 34 and the return water pipe joint 33.

[0034] like Figure 3 As shown, the water inlet pipe 32 and the water return pipe 34 are coaxially arranged, and the water return pipe 34 is sleeved on the outside of the water inlet pipe 32. The ends of the water inlet pipe 32 and the water return pipe 34 are respectively connected to the water inlet and the water outlet. The water inlet pipe 32 and the water return pipe 34 are both made of insulation material to prevent the return water temperature from affecting the inlet water temperature.

[0035] The return water device 3 also includes a regulating device, which includes a temperature measuring flowmeter 30 and an over-temperature switch 35. The temperature measuring flowmeter 30 and the over-temperature switch 35 are arranged on the return water structure. The over-temperature switch 35 is connected to the temperature measuring flowmeter 30. The real-time water flow rate and temperature of the return water are detected by the temperature measuring flowmeter 30, so as to realize the function of real-time monitoring of water temperature and flow rate during crystal pulling. When the water temperature detected by the temperature measuring flowmeter 30 exceeds the set value, the over-temperature switch 35 threshold alarm is triggered, and the water flow rate is adjusted through manual or automatic intervention. The over-temperature pre-tightening function is effectively realized through the over-temperature switch 35, so as to further improve the cooling effect.

[0036] In this embodiment, the water inlet pipe 32 and the water return pipe 34 are welded to the water cooling plate 2. Compared with the existing solution of assembling and sealing by flexible joints, in which the service life of the sealing ring is affected by high temperature and fails to leak, the present application eliminates the flexible joint assembly seal and the sealing ring, and directly welds the water inlet pipe 32 and the water return pipe 34 to the water cooling plate 2, which can effectively avoid the risk of failure of the pipe joints in a vacuum high temperature environment.

[0037] The water cooling plate 2 includes a water cooling jacket upper plate 21, a water cooling jacket connecting pipe 22 and a water cooling jacket lower plate 23. The water cooling jacket upper plate 21 and the water cooling jacket lower plate 23 are connected by the water cooling jacket connecting pipe 22, and water flows between the water cooling jacket upper plate 21 and the water cooling jacket lower plate 23 through the connecting pipe 22.

[0038] The upper plate 21 and the lower plate 23 of the water cooling jacket are respectively provided with penetrating cooling holes 20. During crystal pulling, the silicon seed crystal is lifted upward by the lifting device in the crystal preparation equipment, and the silicon seed crystal passes through the cooling hole 20. When its diameter gradually increases to form a silicon core, water flows in the water cooling plate 2 to cool the silicon seed crystal.

[0039] In this embodiment, the cooling holes 20 on the upper plate 21 of the water cooling jacket correspond one to one with the cooling holes 20 on the lower plate 23 of the water cooling jacket. A plurality of cooling holes 20 are provided, and the number can be set according to needs. The cooling holes 20 are arranged in an inner and outer double circle.

[0040] The upper plate 21 of the water cooling jacket is provided with an upper water inlet chamber 211 of the water cooling jacket and an upper water return chamber 212 of the water cooling jacket. The upper water inlet chamber 211 of the water cooling jacket and the upper water return chamber 212 of the water cooling jacket are separated by a partition so that the two form an independent chamber. The water inlet is arranged on the upper water inlet chamber 211 of the water cooling jacket. The lower plate 23 of the water cooling jacket is provided with a lower water inlet chamber 231 of the water cooling jacket and a lower water return chamber 232 of the water cooling jacket. The lower water inlet chamber 231 of the water cooling jacket and the lower water return chamber 232 of the water cooling jacket are separated by a partition so that the two form an independent chamber. The outlet is arranged in the lower water return chamber 232 of the water cooling jacket, the upper water inlet chamber 211 of the water cooling jacket and the lower water inlet chamber 231 of the water cooling jacket, the lower water inlet chamber 231 of the water cooling jacket and the lower water return chamber 232 of the water cooling jacket, and the upper water return chamber 212 of the water cooling jacket and the lower water return chamber 232 of the water cooling jacket are respectively connected through the water cooling jacket connecting pipe 22, and the upper water inlet chamber 211 of the water cooling jacket, the lower water inlet chamber 231 of the water cooling jacket, the lower water return chamber 232 of the water cooling jacket and the upper water return chamber 212 of the water cooling jacket constitute a water flow channel, and water flows along the water flow channel.

[0041] The water-cooling jacket connecting pipe 22 is a hollow structure, and water flows along the hollow position. The connection between the water-cooling jacket connecting pipe 22 and the water-cooling jacket upper plate 21 and the water-cooling jacket lower plate 23 is specifically as follows:

[0042] The upper end of the water-cooling jacket connecting pipe 22 is connected to the lower end surface of the water-cooling jacket connecting pipe 22, and the lower end is connected to the upper end surface of the water-cooling jacket lower plate 23. The water-cooling jacket connecting pipe 22 is provided with multiple groups. In this embodiment, there are 4 groups, which are the first connecting pipe 221, the second connecting pipe 222, the third connecting pipe 223 and the fourth connecting pipe 224. A flow chamber 213 is provided between the water inlet chamber 211 on the water-cooling jacket and the water return chamber 212 on the water-cooling jacket. The flow chamber 213 passes through The partition is isolated from the upper water inlet chamber 211 and the upper water return chamber 212 of the water cooling jacket, the first connecting pipe 221 connects the upper water inlet chamber 211 and the lower water inlet chamber 231 of the water cooling jacket, the second connecting pipe 222 connects the circulation chamber 213 and the lower water inlet chamber 231 of the water cooling jacket, the third connecting pipe 223 connects the circulation chamber 213 and the lower water return chamber 232 of the water cooling jacket, and the fourth connecting pipe 224 connects the upper water return chamber 212 and the lower water return chamber 232 of the water cooling jacket.

[0043] The flow path of water in the water flow channel is: water enters the upper water inlet chamber 211 of the water cooling jacket along the water inlet, the water in the upper water inlet chamber 211 of the water cooling jacket enters the lower water inlet chamber 231 of the water cooling jacket through the first connecting pipe 221, the water in the lower water inlet chamber 231 of the water cooling jacket enters the circulation chamber 213 along the second connecting pipe 222, the water in the circulation chamber 213 enters the lower return water chamber 232 of the water cooling jacket along the third connecting pipe 223, the water in the lower return water chamber 232 of the water cooling jacket enters the upper return water chamber 21 of the water cooling jacket along the fourth connecting pipe 224, and then enters the return water structure through the water outlet.

[0044] The cooling holes 20 of the present application are arranged in an inner and outer double circle, and the water inlet and outlet and the inlet and outlet of the water cooling jacket connecting pipe 22 are respectively located on both sides of the cooling hole 20. When water flows in the water flow channel, any cooling hole 20 can be cooled to ensure uniform circulation and uniform cooling of the water flow between the upper plate 21 of the water cooling jacket and the lower plate 23 of the water cooling jacket.

[0045] The water inlet chamber 211 on the water cooling jacket, the water return chamber 212 on the water cooling jacket, the water inlet chamber 231 on the water cooling jacket and the water return chamber 232 on the water cooling jacket are all provided with water baffles 200. The water baffles 200 are used to regulate the direction of the water flow to prevent dead water, thereby improving the flow effect of the water flow in the water cooling plate 2.

[0046] The lower surface of the water-cooling jacket lower plate 23, i.e., the end surface opposite to the crucible, is provided with a screw hole 233, and the screw hole 233 is connected to a heat insulation layer (not shown). The heat insulation layer, on the one hand, provides heat insulation protection for the lower surface of the cooling jacket lower plate 23 to prevent direct corrosion of the weak points of the cooling jacket lower plate 23 by heat radiation, and on the other hand, prevents the water-cooling jacket from being immersed in the crucible by mistake and exploding directly.

[0047] The crucible in this embodiment is a conventional structure of a crystal preparation device. This application does not improve the structure and arrangement of the crucible. The position of the lower plate 23 of the water-cooling jacket is only defined based on the crucible, so the crucible is not described in detail.

[0048] In other embodiments, the structures of the two groups of water cooling disk assemblies 1 with the same structure may not be completely the same or may be completely different.

[0049] In other embodiments, the water inlet pipe 32 and the water outlet pipe 34 may be provided independently.

[0050] A crystal preparation device comprises the above-mentioned porous water cooling jacket.

[0051] Obviously, the described embodiments are only some embodiments of the utility model, not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

Claims

1. A porous water cooling jacket for crystal cooling, characterized in that: It comprises at least two groups of water cooling plate assemblies, which are connected and both comprise water cooling plates and water inlet and return devices, wherein the water inlet and return devices comprise a water inlet structure and a water return structure, and the water inlet structure and the water return structure are connected to the water cooling plates.

2. A porous water cooling jacket for crystal cooling according to claim 1, characterized in that: The water cooling plate assembly is an integrated structure, and the water cooling plates of two groups of the water cooling plate assemblies are connected.

3. The porous water cooling jacket for crystal cooling according to claim 2, characterized in that: The water cooling plate is provided with a water flow channel, and the water inlet structure and the water return structure are respectively connected to the water flow channel, and the water inlet structure, the water flow channel and the water return structure constitute the water inlet and return channel.

4. The porous water cooling jacket for crystal cooling according to claim 1, characterized in that: The water inlet structure includes a water inlet pipe joint and a water inlet pipe, one end of the water inlet pipe is connected to the water inlet pipe joint, and the other end is connected to the water inlet of the water flow channel. The return water structure includes a return water pipe joint and a return water pipe, one end of the return water pipe is connected to the return water pipe joint.

5. The porous water cooling jacket for crystal cooling according to claim 1, characterized in that: The water cooling plate comprises a water cooling jacket upper plate, a water cooling jacket connecting pipe and a water cooling jacket lower plate, and the water cooling jacket upper plate and the water cooling jacket lower plate are connected by the water cooling jacket connecting pipe.

6. The porous water cooling jacket for crystal cooling according to claim 5, characterized in that: The upper plate of the water cooling jacket is provided with an upper water inlet chamber and an upper water return chamber of the water cooling jacket, the water inlet is arranged in the upper water inlet chamber of the water cooling jacket, the lower plate of the water cooling jacket is provided with a lower water inlet chamber and a lower water return chamber of the water cooling jacket, the outlet is arranged in the lower water return chamber of the water cooling jacket, the upper water inlet chamber of the water cooling jacket and the lower water inlet chamber of the water cooling jacket, the lower water inlet chamber of the water cooling jacket and the lower water return chamber of the water cooling jacket, and the upper water return chamber of the water cooling jacket and the lower water return chamber of the water cooling jacket are respectively connected through the water cooling jacket connecting pipe.

7. The porous water cooling jacket for crystal cooling according to claim 6, characterized in that: The water-cooling jacket connecting pipes are respectively the first connecting pipe, the second connecting pipe, the third connecting pipe and the fourth connecting pipe. A circulation chamber is provided between the upper water inlet chamber of the water-cooling jacket and the upper water return chamber of the water-cooling jacket. The first connecting pipe connects the upper water inlet chamber of the water-cooling jacket and the lower water inlet chamber of the water-cooling jacket, the second connecting pipe connects the circulation chamber and the lower water inlet chamber of the water-cooling jacket, the third connecting pipe connects the circulation chamber and the lower water return chamber of the water-cooling jacket, and the fourth connecting pipe connects the upper water return chamber of the water-cooling jacket and the lower water return chamber of the water-cooling jacket.

8. The porous water cooling jacket for crystal cooling according to claim 6, characterized in that: The upper water inlet cavity of the water cooling jacket, the upper water return cavity of the water cooling jacket, the lower water inlet cavity of the water cooling jacket and the lower water return cavity of the water cooling jacket are all provided with water baffles.

9. The porous water cooling jacket for crystal cooling according to claim 5, characterized in that: The end surface of the lower plate of the water cooling jacket opposite to the crucible is provided with a heat insulation layer.

10. A crystal preparation device, characterized in that: It comprises the porous water cooling jacket as described in any one of claims 1 to 9.

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