Heating device and heating equipment

Abstract

The utility model relates to the technical field of heating equipment, in particular to a heating device and heating equipment.The heating device comprises at least two heating assemblies, each heating assembly comprises a shell and an electric heating tube at least partially located in the shell, and each electric heating tube is provided with a first end and a second end; the at least two heating assemblies are communicated in series and / or in parallel through a communicating piece, each shell is provided with a first butt joint part and a second butt joint part, and the first butt joint part of one shell is in butt joint with the second butt joint part of the other shell. According to the device, the multiple heating assemblies are communicated in series and / or in parallel through the communicating pieces, the heating efficiency of the whole heating device is improved, and the first butt joint part of one shell can be in butt joint with the second butt joint part of another shell, so that the multiple heating assemblies can be better assembled together.

Description

Technical Field

[0001] The utility model relates to the technical field of heating equipment, in particular to a heating device and heating equipment. Background Art

[0002] Fluid heating equipment can be used in the semiconductor, photovoltaic solar energy, display panels, testing equipment, micro-chemical and other industries, such as wet cleaning equipment in semiconductor processes. Fluid heating equipment can be applied to multiple links, such as etching and degumming, ultrapure water cleaning, etc. These all require heating of acid and alkali liquids, chemical liquids, pure water or ultrapure water. By increasing the temperature of the cleaning liquid, the cleaning effect is improved and the cleaning speed is accelerated.

[0003] In semiconductor cleaning equipment, the required heated fluid flow rate is relatively large, and the heating power of traditional heating equipment is relatively small, which makes it difficult to meet the usage requirements. Utility Model Content

[0004] The utility model aims to provide a heating device to solve the problem that in pan-semiconductor cleaning equipment, the flow rate of the fluid required for heating is relatively large, and the heating power of the traditional heating equipment is relatively small and it is difficult to meet the use requirements.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A heating device comprises at least two heating components, wherein the heating components comprise an outer shell and an electric heating tube at least partially located in the outer shell, wherein the electric heating tube has a first end and a second end, and at least two of the heating components are connected in series and / or in parallel via a connecting piece, and the outer shell has a first docking portion and a second docking portion, and the first docking portion of one of the outer shells is docked with the second docking portion of another of the outer shells.

[0007] The shell includes a side panel, the first docking portion includes a plurality of spaced-apart protrusions, the protrusions are fixedly connected or integrally formed at one end of the side panel, the second docking portion includes a plurality of spaced-apart concave portions, the concave portions are fixedly connected or integrally formed at one end of the side panel away from the protrusions, and the wall portions of the protrusions abut against the wall portions of the concave portions.

[0008] The convex portion is provided with a first hole, the side plate is provided with a rear wall portion located on one side of the concave portion, the rear wall portion is provided with a second hole, the outer peripheral wall of the convex portion abuts against the inner peripheral wall of the concave portion, the side wall of the convex portion abuts against the rear wall portion, and the first hole and the second hole are connected by a connecting piece.

[0009] The outer peripheral wall includes a convex top wall, a first convex inclined wall at one end of the convex top wall, and a second convex inclined wall at the other end of the convex top wall; the inner peripheral wall includes a concave top wall, a first concave inclined wall at one end of the concave top wall, and a second concave inclined wall at the other end of the concave top wall; the convex top wall abuts against the concave top wall, the first convex inclined wall abuts against the first concave inclined wall, and the second convex inclined wall abuts against the second concave inclined wall.

[0010] The first end and the second end are located on the same side of the shell; or the first end extends out of the shell and the outer circumference of the first end has a groove structure; or the second end extends out of the shell and the outer circumference of the second end has a groove structure; or two adjacent heating components are connected in series and / or in parallel through a connecting piece.

[0011] The electric heating tube includes a first heating tube and a second heating tube, and the heating assembly includes a fixed block, which is fixedly assembled with the shell, one end of the first heating tube is sealed with the fixed block, one end of the second heating tube is sealed with the fixed block, and the fixed block has a channel connecting the first heating tube and the second heating tube.

[0012] The fixing block comprises a main body;

[0013] A first tube is provided at one side of the main body, a first sealing ring is embedded in the inner wall of the first tube, one end of the first heating tube is inserted into the first tube, and the outer peripheral wall of the first heating tube abuts against the first sealing ring;

[0014] And / or a second tube is provided at the other side of the main body, a second sealing ring is embedded in the inner wall of the second tube, one end of the second heating tube is inserted in the second tube, and the outer peripheral wall of the second heating tube abuts against the second sealing ring;

[0015] And / or the channel wall portion of the fixing block located in the main body has a limiting protrusion extending inwardly, one end of the first heating tube abuts against one side of the limiting protrusion, and one end of the second heating tube abuts against the other side of the limiting protrusion.

[0016] The heating assembly includes a plurality of threaded rods, each of which is threadedly connected with at least two nuts, the threaded rod is fixedly assembled with the shell, the fixing block has a through hole, the threaded rod passes through the through hole, and the fixing block is clamped between the two nuts of each threaded rod.

[0017] The shell includes a cylinder and end covers located at both ends of the cylinder. The heating part of the electric heating tube is located in the space formed by the cylinder and the end covers. The cylinder is a cylinder, a quadrangular prism, a pentagonal prism or a hexagonal prism. The cylinder is an integrated structure or a structure of multiple plates spliced ​​together.

[0018] A heating device, used for pan-semiconductor cleaning equipment, comprises the above-mentioned heating device, wherein the electric heating tube comprises an integrally formed tube substrate and an electric heating film attached to the surface of the tube substrate, and the tube substrate has a fluid channel.

[0019] The utility model proposes a heating device with the beneficial effects that one end of the electric heating tube of the device is a fluid inlet end and the other end is a fluid output end, and a plurality of heating components are connected in series and / or in parallel through a connecting piece, thereby improving the heating efficiency of the entire heating device, and the outer shell of the heating component of the device has a first docking portion and a second docking portion, and the first docking portion of one outer shell can be docked with the second docking portion of another outer shell, so that the plurality of heating components can be better assembled together.

[0020] The heating equipment using the heating device has a higher heating efficiency and generates a greater total heating power. In addition, since the heating component structures can be assembled in coordination with each other, the entire equipment occupies a smaller space. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the three-dimensional structure of the heating component of the first embodiment of the utility model;

[0022] Figure 2 This is a schematic diagram of the internal structure of the heating component of the first embodiment of the utility model;

[0023] Figure 3 This is a schematic diagram of the local structure of the side plate of the heating component of the first embodiment of the utility model Figure 1 ;

[0024] Figure 4 This is a schematic diagram of the local structure of the side plate of the heating component of the first embodiment of the utility model Figure 2 ;

[0025] Figure 5 This is a schematic diagram of the assembled three-dimensional structure of the first embodiment of the utility model;

[0026] Figure 6 This is a schematic diagram of the main structure of the first embodiment of the utility model;

[0027] Figure 7 This is a schematic diagram of the heating assembly structure of the second embodiment of the utility model;

[0028] Figure 8 The third embodiment of the present invention is a schematic diagram of the local structure of the heating component Figure 1 ;

[0029] Fig. 9 The third embodiment of the present invention is a schematic diagram of the local structure of the heating component Figure 2 ;

[0030] Fig.10 This is a schematic diagram of the assembly structure of the third embodiment of the utility model;

[0031] Fig.11 This is a schematic diagram of the structure of a heating component according to a fourth embodiment of the present utility model.

[0032] In the figure: heating component 1, shell 2, first end 3, second end 4, first docking part 5, second docking part 6, electric heating tube 7, convex part 8, first hole 9, side plate 10, recessed part 11, second hole 12, rear wall part 13, connecting piece 14, fixing block 15, first heating tube 16, second heating tube 17, threaded rod 18, main body 19, first tube 20, second tube 21, first sealing ring 22, limiting protrusion 23, second sealing ring 24, convex top wall 81, first convex inclined wall 82, second convex inclined wall 83, concave top wall 111, first concave inclined wall 112, second concave inclined wall 113. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0034] Reference Figure 1-Figure 11 A heating device includes at least two heating components 1, the heating component 1 includes a shell 2 and an electric heating tube 7 at least partially located in the shell 2, the electric heating tube 7 has a first end 3 and a second end 4, at least two heating components 1 are connected in series and / or in parallel through a connecting piece 14, the shell 2 has a first docking portion 5 and a second docking portion 6, and the first docking portion 5 of one shell 2 is docked with the second docking portion 6 of another shell 2.

[0035] One end of the electric heating tube 7 of the device is the fluid inlet end, and the other end is the fluid output end. A plurality of heating components 1 are connected in series and / or in parallel through a connecting piece 14, thereby improving the heating efficiency of the entire heating device. The shell 2 of the heating component 1 of the device has a first docking portion 5 and a second docking portion 6, and the first docking portion 5 of one shell 2 can be docked with the second docking portion 6 of another shell 2, so that the plurality of heating components 1 can be better assembled together.

[0036] The device adopts a modular structure. Each heating component can be used as a heating unit. The power of each heating unit is 3KW-30KW. The heating power of the assembled heating device can be as high as 180KW or more, which can meet the use of industrial equipment.

[0037] The heating components 1 of the device are connected in series and / or in parallel via a connecting piece 14 , including two adjacent heating components 1 being connected via a connecting piece 14 , or two heating components 1 spaced apart being connected via a connecting piece 14 .

[0038] refer to Figure 3 , Figure 4 , Figure 5 , Figure 6 The shell 2 includes a side plate 10, the first docking portion 5 includes a plurality of spaced convex portions 8, the convex portion 8 is fixedly connected or integrally formed at one end of the side plate 10, the second docking portion 6 includes a plurality of spaced concave portions 11, the concave portion is fixedly connected or integrally formed at one end of the side plate 10 away from the convex portion 8, the wall of the convex portion 8 abuts against the wall of the concave portion 11, and the convex portions 8 and the concave portions 11 at the upper and lower ends of the shell 2 are matched together so that multiple heating components can be stacked.

[0039] As an embodiment, the convex portion 8 is provided with a first hole 9, the side plate 10 is located on one side of the recess 11 and is provided with a rear wall portion 13, the rear wall portion 13 is provided with a second hole 12, the outer peripheral wall of the convex portion 8 abuts against the inner peripheral wall of the recess 11, the side wall of the convex portion 8 abuts against the rear wall portion 13, the first hole 9 and the second hole 12 are connected by a connecting member, for example, the connecting member can be a screw, the outer peripheral wall of the convex portion 8 of the device abuts against the inner peripheral wall of the recess 11 to achieve positioning, so that the side of the convex portion 8 is close to the rear wall portion 13, and finally the upper and lower shells are locked by screws to achieve assembly between the upper and lower adjacent heating components.

[0040] For further reference, Figure 3 , Figure 4 The outer peripheral wall includes a convex top wall 81, a first convex inclined wall 82 at one end of the convex top wall 81, and a second convex inclined wall 83 at the other end of the convex top wall 81; the inner peripheral wall includes a concave top wall 111, a first concave inclined wall 112 at one end of the concave top wall 111, and a second concave inclined wall 113 at the other end of the concave top wall 111; the convex top wall 81 abuts against the concave top wall 111, the first convex inclined wall 82 abuts against the first concave inclined wall 112, and the second convex inclined wall 83 abuts against the second concave inclined wall 113. The device is provided with an inclined first convex inclined wall 82 and a second convex inclined wall 83 on the convex part 8, and an inclined first concave inclined wall 112 and a second concave inclined wall 113 on the concave part 11. The inclined setting method can make it more convenient and accurate for the convex part 8 and the concave part 11 to abut against each other when they are connected.

[0041] refer to Figure 5, the first end 3 and the second end 4 are located on the same side of the housing 2, and this arrangement is convenient for assembly work and later maintenance and use; or the first end 3 extends out of the housing 2 and the outer circumference of the first end 3 has a groove structure; or the second end 4 extends out of the housing 2 and the outer circumference of the second end 4 has a groove structure; or two adjacent heating components 1 are connected in series and / or in parallel through a connecting piece 14. The inlet and outlet pipes of each standard heating component are connected using a 3 / 4 or 1-inch PILLAR adapter through the groove structure.

[0042] refer to Figure 8-Figure 10 The electric heating tube 7 includes a first heating tube 16 and a second heating tube 17. The heating assembly 1 includes a fixed block 15. The fixed block 15 is fixedly assembled with the housing 2. One end of the first heating tube 16 is sealed with the fixed block 15. One end of the second heating tube 17 is sealed with the fixed block 15. The fixed block 15 has a channel connecting the first heating tube 16 and the second heating tube 17. The electric heating tube 7 in the device is assembled in the form of multiple heating tubes, which reduces the manufacturing difficulty of a single electric heating tube 7.

[0043] As a way to install, refer to Fig. 9 The fixed block 15 includes a main body 19; a first tube 20 is provided on one side of the main body 19, a first sealing ring 22 is embedded in the inner wall of the first tube 20, one end of the first heating tube 16 is inserted in the first tube 20, and the outer peripheral wall of the first heating tube 16 abuts against the first sealing ring 22; and / or a second tube 21 is provided on the other side of the main body 19, a second sealing ring 24 is embedded in the inner wall of the second tube 21, one end of the second heating tube 17 is inserted in the second tube 21, and the outer peripheral wall of the second heating tube 17 abuts against the second sealing ring 24; and / or the channel wall of the fixed block 15 located in the main body 19 has an inwardly extending limiting protrusion 23, one end of the first heating tube 16 abuts against one side of the limiting protrusion 23, and one end of the second heating tube 17 abuts against the other side of the limiting protrusion 23. The first heating tube 16 is sealed by the first tube 20 and the first sealing ring 22 on one side of the main body 19, and the second heating tube 17 is sealed by the second tube 21 and the second sealing ring 24 on the other side of the main body 19. This structure can make the first heating tube 16 and the second heating tube 17 connected to each other, and the limiting protrusion can limit the depth of the first heating tube 16 and the second heating tube 17 penetrating into the fixed block 15.

[0044] As an assembly method of the fixing block 15 and the shell, the heating component 1 includes a plurality of threaded rods 18, each of which is threadedly connected with at least two nuts, the threaded rods are fixedly assembled with the shell, the fixing block 15 has a through hole, the threaded rod 18 passes through the through hole, and the fixing block 15 is clamped between the two nuts of each threaded rod 18.

[0045] As an implementation mode, the first heating tube 16 and the second heating tube 17 are coaxially arranged, the threaded rod 18 is arranged along the axial direction, and both ends of the threaded rod 18 are locked with the end cover of the shell by nuts.

[0046] The outer shell 2 includes a cylinder and end covers at both ends of the cylinder. The heating part of the electric heating tube 7 is located in the space formed by the cylinder and the end covers. The cylinder is a cylinder or a quadrangular prism cylinder or a pentagonal prism cylinder or a hexagonal prism cylinder. The cylinder is an integrated structure or a spliced ​​structure of multiple plates.

[0047] As an implementation method, refer to Figure 1 The outer shell 2 uses four plates to form a cylinder, and the two end plates serve as end covers of the cylinder, and the multiple plates are fixed together by screws.

[0048] As an implementation method, refer to Figure 7 The cylinder of the outer shell 2 adopts a cylindrical structure, and two circular plates are used as end covers. The end covers are fixed to the cylinder by screws, and multiple heating components can be stacked up and down along the axial direction.

[0049] As an implementation method, refer to Fig.10 , multiple heating components are stacked up and down in a horizontal axis arrangement.

[0050] As an implementation method, refer to Fig.11 The cylinder adopts a hexagonal structure, and multiple heating components are stacked up and down along the axis.

[0051] A heating device for pan-semiconductor cleaning equipment includes a heating device, an electric heating tube 7 includes an integrally formed tube substrate, an electric heating film attached to the surface of the tube substrate, and the tube substrate has a fluid channel. The device is used in the pan-semiconductor field, such as integrated circuits, flat panel displays, LEDs, solar cells, discrete devices, and semiconductor equipment material industries, and has the advantages of high heating efficiency, high power, simple structure, and small equipment space occupation.

[0052] The above is only a preferred specific implementation method of the utility model, but the protection scope of the utility model is not limited thereto. Any technical solution, concept, and design obtained by equivalent replacement or change based on the technical solution and utility model concept of the utility model by any technician familiar with the technical field within the technical scope disclosed by the utility model should be included in the protection scope of the utility model.

Claims

1. A heating device, characterized in that: The invention comprises at least two heating components (1), wherein the heating components (1) comprise an outer shell (2) and an electric heating pipe (7) at least partially located in the outer shell (2), wherein the electric heating pipe (7) has a first end (3) and a second end (4), and at least two of the heating components (1) are connected in series and / or in parallel via a connecting piece (14); the outer shell (2) comprises a first docking portion (5) and a second docking portion (6), and the first docking portion (5) of one outer shell (2) is docked with the second docking portion (6) of another outer shell (2).

2. A heating device according to claim 1, characterized in that: The housing (2) comprises a side plate (10), the first docking portion (5) comprises a plurality of convex portions (8) arranged at intervals, the convex portions (8) being fixedly connected or integrally formed on one end of the side plate (10), the second docking portion (6) comprises a plurality of concave portions (11) arranged at intervals, the concave portions (11) being fixedly connected or integrally formed on one end of the side plate (10) away from the convex portions (8), the wall portion of the convex portion (8) being in abutment with the wall portion of the concave portion (11).

3. A heating device according to claim 2, characterized in that: The convex portion (8) is provided with a first hole (9), the side plate (10) is provided with a rear wall portion (13) located on one side of the concave portion (11), the rear wall portion (13) is provided with a second hole (12), the outer peripheral wall of the convex portion (8) abuts against the inner peripheral wall of the concave portion (11), the side wall of the convex portion (8) abuts against the rear wall portion (13), and the first hole (9) and the second hole (12) are connected by a connecting piece.

4. A heating device according to claim 3, characterized in that: The outer peripheral wall comprises a convex top wall (81), a first convex inclined wall (82) located at one end of the convex top wall (81), and a second convex inclined wall (83) located at the other end of the convex top wall (81); the inner peripheral wall comprises a concave top wall (111), a first concave inclined wall (112) located at one end of the concave top wall (111), and a second concave inclined wall (113) located at the other end of the concave top wall (111); the convex top wall (81) abuts against the concave top wall (111), the first convex inclined wall (82) abuts against the first concave inclined wall (112), and the second convex inclined wall (83) abuts against the second concave inclined wall (113).

5. A heating device according to any one of claims 1 to 4, characterized in that: The first end (3) and the second end (4) are located on the same side of the outer shell (2); or the first end (3) extends out of the outer shell (2), and the outer circumference of the first end (3) has a groove structure; or the second end (4) extends out of the outer shell (2), and the outer circumference of the second end (4) has a groove structure; or two adjacent heating components (1) are connected in series and / or in parallel via a connecting piece (14).

6. A heating device according to any one of claims 1 to 4, characterized in that: The electric heating tube (7) comprises a first heating tube (16) and a second heating tube (17); the heating assembly (1) comprises a fixing block (15); the fixing block (15) is fixedly assembled with the housing (2); one end of the first heating tube (16) is sealed with the fixing block (15); one end of the second heating tube (17) is sealed with the fixing block (15); and the fixing block (15) has a channel connecting the first heating tube (16) and the second heating tube (17).

7. A heating device according to claim 6, characterized in that: The fixing block (15) comprises a main body (19); A first tube (20) is provided on one side of the main body (19), a first sealing ring (22) is embedded in the inner wall of the first tube (20), one end of the first heating tube (16) is inserted into the first tube (20), and the outer peripheral wall of the first heating tube (16) abuts against the first sealing ring (22); and / or a second tube (21) is provided on the other side of the main body (19), a second sealing ring (24) is embedded in the inner wall of the second tube (21), one end of the second heating tube (17) is inserted into the second tube (21), and the outer peripheral wall of the second heating tube (17) abuts against the second sealing ring (24); And / or the channel wall of the fixing block (15) located in the main body (19) has a limiting protrusion (23) extending inwardly, one end of the first heating tube (16) abuts against one side of the limiting protrusion (23), and one end of the second heating tube (17) abuts against the other side of the limiting protrusion (23).

8. A heating device according to claim 6, characterized in that: The heating assembly (1) comprises a plurality of threaded rods (18), each of the threaded rods (18) being threadedly connected to at least two nuts, the threaded rods being fixedly assembled with the housing, the fixing block (15) having a through hole, the threaded rods (18) passing through the through hole, and the fixing block (15) being clamped between the two nuts of each threaded rod (18).

9. A heating device according to claim 1 or 2 or 3 or 4 or 7 or 8, characterized in that: The outer shell (2) comprises a cylinder and end covers located at both ends of the cylinder, the heating part of the electric heating tube (7) is located in the space formed by the cylinder and the end covers, the cylinder is a cylinder or a quadrangular prism cylinder or a pentagonal prism cylinder or a hexagonal prism cylinder, and the cylinder is an integrated structure or a structure of multiple plate bodies spliced ​​together.

10. A heating device for pan-semiconductor cleaning equipment, characterized in that: It comprises the heating device as described in any one of claims 1 to 9, wherein the electric heating tube (7) comprises an integrally formed tube substrate and an electric heating film attached to the surface of the tube substrate, and the tube substrate has a fluid channel.

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