Airflow circulation type annealing furnace

Abstract

The utility model provides an airflow circulation type annealing furnace, which relates to the technical field of annealing furnaces and comprises a furnace body, an end cover is arranged on the upper surface of the furnace body, a fan is arranged on the lower surface of the end cover, a hopper is arranged at the bottom in the furnace body, a temperature measuring galvanic couple is arranged between the end cover and the hopper, and air holes are formed in the surface of the top in the end cover in a penetrating manner. A worker places a workpiece in the hopper inside the furnace body, tightly covers the upper end of the furnace body with the end cover, turns on the fan for annealing and monitors the temperature of the workpiece in real time through the temperature measuring galvanic couple, airflow can fully enter the hopper under the flow guide action of the flow guide cover, and therefore the workpiece can be fully heated and heated. And part of air flow is prevented from rising or transversely flowing along the furnace wall or other structures instead of directly entering the hopper, so that the annealing effect is enhanced.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnaces, in particular to an airflow circulation type annealing furnace. Background Art

[0002] Annealing furnace is a process used in semiconductor device manufacturing, which involves heating multiple semiconductor wafers to affect their electrical properties1. Annealing furnaces can be integrated into other furnace processing steps or processed separately. Annealing furnaces are completed by equipment designed specifically for heating semiconductor wafers. They are energy-saving cycle-type operation furnaces with ultra-energy-saving structures and fiber structures. When the fan inside the existing annealing furnace is started and blows air, the wind flow generated by the fan may be dispersed in all directions, and part of the wind flow may rise or flow laterally along the furnace wall or other structures instead of directly entering the hopper, resulting in a significant reduction in the annealing effect. Utility Model Content

[0003] The main purpose of the utility model is to provide an air circulation annealing furnace, which can effectively solve the problem that when the internal fan of the annealing furnace in the background technology is started and blows air, the wind flow generated by the fan may be dispersed in all directions, and part of the wind flow may rise or flow laterally along the furnace wall or other structures instead of directly entering the hopper, resulting in a significant reduction in the annealing effect.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0005] An air circulation annealing furnace comprises a furnace body, an end cover is arranged on the upper surface of the furnace body, a fan is arranged on the lower surface of the end cover, a hopper is arranged at the bottom of the furnace body, a temperature measuring couple is arranged between the end cover and the hopper, and an air hole is opened through the top surface of the end cover;

[0006] A flow guide cover is arranged on the lower surface of the end cover.

[0007] Preferably, two connecting plates are movably mounted on the lower surface of the end cover, and first arc-shaped plates are fixedly mounted on the lower surfaces of the two connecting plates, and arc-shaped grooves are penetrated through one side surface of the two first arc-shaped plates;

[0008] Two support blocks are fixedly mounted on the outer wall of the air deflector, and a second arc-shaped plate is fixedly mounted on one side of the two support blocks. The two second arc-shaped plates are respectively inserted and matched with the corresponding arc-shaped grooves.

[0009] Preferably, a slide groove is provided on one side surface of the two second arc-shaped plates, two sliders are slidably arranged in the two slide grooves, and a triangular block is fixedly installed on one side surface of each slider.

[0010] Preferably, a slide bar is fixedly installed between the two sides of the inner walls of the two slide grooves, and two adjacent sliding blocks are slidably arranged on both sides of the corresponding slide bar body, and a spring is sleeved in the middle of the two slide bar bodies.

[0011] Preferably, one side of the upper surface of the two connecting plates passes through the end cover and a movable plate is fixedly installed together, a screw is rotatably installed in the middle of the upper surface of the end cover, a rotating wheel is fixedly installed on the upper end of the screw, and the movable plate thread is arranged on one side of the screw rod body.

[0012] Preferably, a sealing ring is fixedly mounted on the upper end of the air guide cover.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] (1) The staff places the workpiece in the hopper inside the furnace body, and then closes the end cover on the upper end of the furnace body, turns on the fan, and performs annealing. The temperature of the workpiece is monitored in real time by the thermocouple. The airflow can fully enter the hopper under the guidance of the guide cover, avoiding that part of the airflow may rise or flow laterally along the furnace wall or other structures instead of directly entering the hopper, thereby enhancing the annealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the overall structure of an airflow circulation annealing furnace of the utility model;

[0016] Figure 2 This is a front view structural schematic diagram of an airflow circulation annealing furnace of the utility model;

[0017] Figure 3 The utility model is an air circulation annealing furnace Figure 2 Schematic diagram of the cross-section structure at AA in the middle;

[0018] Figure 4 The utility model is an air circulation annealing furnace Figure 2 Schematic diagram of the cross-section structure at BB in the middle;

[0019] Figure 5 The utility model is an air circulation annealing furnace Figure 3 Enlarged structural diagram at A in the middle.

[0020] In the figure: 1. furnace body; 2. end cover; 3. fan; 4. hopper; 5. temperature measuring couple; 6. air hole; 7. air guide cover; 8. connecting plate; 9. first arc plate; 10. arc groove; 11. support block; 12. second arc plate; 13. slide groove; 14. slider; 15. triangular block; 16. slide rod; 17. spring; 18. moving plate; 19. screw rod; 20. rotating wheel; 21. sealing ring. DETAILED DESCRIPTION

[0021] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] like Figure 1-Figure 5 As shown, the embodiment of the utility model proposes an air circulation annealing furnace, comprising a furnace body 1, an end cover 2 is arranged on the upper surface of the furnace body 1, a fan 3 is arranged on the lower surface of the end cover 2, a hopper 4 is arranged at the bottom of the furnace body 1, a temperature measuring couple 5 is arranged between the end cover 2 and the hopper 4, and an air hole 6 is opened through the top surface of the end cover 2, and the air pressure balance in the furnace body 1 is ensured by setting the air hole 6;

[0023] A flow guide cover 7 is provided on the lower surface of the end cover 2 .

[0024] The staff places the workpiece in the hopper 4 inside the furnace body 1, and then closes the end cover 2 on the upper end of the furnace body 1, and then turns on the fan 3 to carry out annealing, and monitors the temperature of the workpiece in real time through the temperature measuring thermocouple 5. Under the guidance of the guide cover 7, the airflow can fully enter the hopper 4, avoiding that part of the airflow may rise or flow laterally along the furnace wall or other structures instead of directly entering the hopper 4, thereby enhancing the annealing effect.

[0025] In another embodiment of the utility model, two connecting plates 8 are movably mounted on the lower surface of the end cover 2, and first arc-shaped plates 9 are fixedly mounted on the lower surfaces of the two connecting plates 8, and arc-shaped grooves 10 are formed through the surfaces of one side of the two first arc-shaped plates 9;

[0026] Two support blocks 11 are fixedly mounted on the outer wall of the air deflector 7 , and a second arc-shaped plate 12 is fixedly mounted on one side of the two support blocks 11 . The two second arc-shaped plates 12 are respectively inserted and matched with the corresponding arc-shaped grooves 10 .

[0027] A slide groove 13 is formed on one side surface of the two second arc-shaped plates 12 . Two sliders 14 are slidably arranged in the two slide grooves 13 . A triangular block 15 is fixedly mounted on one side surface of each slider 14 .

[0028] A slide bar 16 is fixedly installed between the inner walls of the two slide grooves 13 , and two adjacent sliders 14 are slidably arranged on both sides of the corresponding slide bar 16 , and a spring 17 is sleeved in the middle of the two slide bars 16 .

[0029] The staff moves the triangular block 15 to move it along the direction of the slide groove 13, and then the staff rotates the air deflector 7 to make the second arc plate 12 move along the arc groove 10, so that the second arc plate 12 is disengaged from the arc groove 10, thereby facilitating the staff to quickly replace the damaged air deflector 7 to avoid the situation where the air diversion efficiency is affected.

[0030] In another embodiment of the utility model, one side of the upper surface of the two connecting plates 8 passes through the end cover 2 and is fixedly installed with a movable plate 18. A screw rod 19 is rotatably installed in the middle of the upper surface of the end cover 2. A rotating wheel 20 is fixedly installed on the upper end of the screw rod 19. The movable plate 18 is threadedly arranged on one side of the rod body of the screw rod 19.

[0031] The staff rotates the screw 19 to drive the movable plate 18 and the air guide cover 7 to rise by screwing it in, so that the upper end of the air guide cover 7 fits tightly with the lower surface of the end cover 2 to prevent airflow from leaking from the gap between the air guide cover 7 and the end cover 2.

[0032] In another embodiment of the present invention, a sealing ring 21 is fixedly mounted on the upper end of the air deflector 7 .

[0033] By providing the sealing ring 21, the sealing performance between the upper end of the air guide cover 7 and the lower surface of the end cover 2 is further improved, and the possibility of airflow leakage is further reduced.

[0034] The working principle of this air circulation annealing furnace:

[0035] When in use, the staff places the workpiece in the hopper 4 inside the furnace body 1, and then closes the end cover 2 on the upper end of the furnace body 1, and then turns on the fan 3 to carry out annealing, and monitors the temperature of the workpiece in real time through the temperature measuring thermocouple 5. Under the guidance of the guide cover 7, the airflow can fully enter the hopper 4, avoiding that part of the airflow may rise or flow laterally along the furnace wall or other structures instead of directly entering the hopper 4, thereby enhancing the annealing effect.

[0036] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the implementation methods of the present invention. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made on the basis of the above description. It is impossible to list all the implementation methods here. All obvious changes or modifications derived from the technical solution of the present invention are still within the protection scope of the present invention.

Claims

1. An air circulation annealing furnace, comprising a furnace body (1), characterized in that: The upper surface of the furnace body (1) is provided with an end cover (2), the lower surface of the end cover (2) is provided with a fan (3), the bottom of the furnace body (1) is provided with a hopper (4), a temperature measuring couple (5) is provided between the end cover (2) and the hopper (4), and an air hole (6) is provided through the top surface of the end cover (2); The lower surface of the end cover (2) is provided with a flow guide cover (7); Two connecting plates (8) are movably mounted on the lower surface of the end cover (2); first arc-shaped plates (9) are fixedly mounted on the lower surfaces of the two connecting plates (8); and arc-shaped grooves (10) are penetrated through one side surface of the two first arc-shaped plates (9); Two support blocks (11) are fixedly mounted on the outer wall of the air deflector (7), and a second arc-shaped plate (12) is fixedly mounted on one side of the two support blocks (11), and the two second arc-shaped plates (12) are respectively inserted and matched with the corresponding arc-shaped grooves (10); A sliding groove (13) is provided on one side surface of the two second arc-shaped plates (12), two sliding blocks (14) are slidably arranged in the two sliding grooves (13), and a triangular block (15) is fixedly installed on one side surface of each sliding block (14); A slide bar (16) is fixedly installed between the inner walls of the two slide grooves (13), and two adjacent sliders (14) are slidably arranged on both sides of the corresponding slide bar (16) shafts, and a spring (17) is sleeved in the middle of the two slide bar (16) shafts.

2. The airflow circulation annealing furnace according to claim 1, characterized in that: One side of the upper surface of the two connecting plates (8) passes through the end cover (2) and is fixedly mounted with a movable plate (18) on both sides; a screw rod (19) is rotatably mounted in the middle of the upper surface of the end cover (2); a rotating wheel (20) is fixedly mounted on the upper end of the screw rod (19); and the movable plate (18) is threadedly arranged on one side of the rod body of the screw rod (19).

3. The airflow circulation annealing furnace according to claim 2, characterized in that: A sealing ring (21) is fixedly mounted on the upper end of the air guide cover (7).

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