Bonding device and bonding machine

Abstract

The utility model provides a bonding device and a bonding machine. The bonding device comprises a mounting bracket, a bonding execution mechanism and a positioning mechanism, the bonding execution mechanism comprises a driving part and a bonding head, the driving part is arranged on the mounting bracket, the bonding head is connected to the driving end of the driving part, and the driving part is used for driving the bonding head to press down the workpiece so as to enable the bonding head to carry out bonding on the workpiece. The positioning mechanism comprises an objective lens, a reflection mechanism and a positioning camera from bottom to top. The objective lens is arranged close to the bonding head, and an optical channel located in the installation support is formed between the objective lens and the reflection mechanism. Light reflected from a target bonding position enters the objective lens and then is gathered upwards by the objective lens to the reflection mechanism, the reflection mechanism reflects the light to the positioning camera, and the positioning camera performs photographing positioning on the bonding position. According to the bonding device, after the positioning camera completes positioning of the target bonding position, the bonding head can be adjusted to the position above the target bonding position by moving the bonding head by a small distance, and the bonding efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor packaging, and in particular to a bonding device and a bonding machine. Background Art

[0002] In the semiconductor wire bonding process, in order to ensure bonding accuracy, it is necessary to locate the target bonding position through a positioning mechanism, and then control the bonding head to move above the target bonding position according to the position information of the target bonding position to implement bonding.

[0003] The positioning mechanism includes an objective lens and a positioning camera, wherein the objective lens is used to receive the light reflected from the target bonding position and implement the convergence of the light. After the converged light is received by the positioning camera, the positioning camera can implement the positioning of the target bonding position. In the existing bonding device, the objective lens and the camera are generally installed coaxially, and the light converged by the objective lens is directly transmitted upward to the positioning camera. In order to prevent the light from being blocked by the mounting bracket, the objective lens needs to be installed on the outer wall of the mounting bracket, so the distance between the objective lens and the bonding head is far. The problem caused by this is: after completing the positioning of the target bonding position, the bonding head needs to be controlled to move a large distance in order to adjust the bonding head to the top of the target bonding position, thereby affecting the bonding efficiency. In addition, the large movement of the bonding head is likely to cause machine resonance, thereby affecting the bonding accuracy. Utility Model Content

[0004] In order to solve the above technical problems existing in the existing bonding device, the present application provides a bonding device, which adopts the following technical solution:

[0005] A bonding device comprises a mounting bracket, a bonding actuator and a positioning mechanism, wherein:

[0006] The bonding actuator includes a driving part and a bonding head, wherein the driving part is arranged on the mounting bracket, the bonding head is connected to the driving end of the driving part, and the driving part is used to drive the bonding head to press down on the workpiece so that the bonding head implements bonding on the workpiece;

[0007] The positioning mechanism includes an objective lens, a reflection mechanism and a positioning camera which are arranged on the mounting bracket from bottom to top, wherein the objective lens is located at the bottom of the mounting bracket and is arranged close to the bonding head, and an optical channel located in the mounting bracket is formed between the objective lens and the reflection mechanism;

[0008] After the light reflected from the target bonding position of the workpiece enters the objective lens, it is converged upward by the objective lens through the optical channel to the reflection mechanism, which is configured to reflect the light upward into the positioning camera, and the positioning camera is configured to take pictures and locate the bonding position.

[0009] Because a reflection mechanism is provided between the objective lens and the positioning camera, and an optical channel located in the mounting bracket is formed between the objective lens and the reflection mechanism. After the light reflected from the target bonding position of the self-workpiece enters the objective lens, it converges upward to the reflection mechanism through the optical channel in the mounting bracket, and is reflected by the reflection mechanism into the positioning camera. Therefore, in the bonding device in the embodiment of the present application, the objective lens and the positioning camera do not need to be coaxially arranged, and they can be arranged close to the bonding head. In this way, after the positioning camera completes the positioning of the target bonding position, it only needs to control the bonding head to move a small distance to adjust the bonding head to the top of the target bonding position, thereby improving the bonding efficiency, reducing the vibration of the machine, and improving the bonding accuracy.

[0010] In some embodiments, the reflection mechanism includes a first reflection part and a second reflection part, wherein the first reflection part is configured to receive the light converged by the objective lens and reflect the light upward into the second reflection part, and the second reflection part is configured to reflect the light upward into the positioning camera.

[0011] Since the objective lens is arranged close to the bonding head, the distance of deviation between the positioning camera and the objective lens in the horizontal direction is relatively large. By arranging the reflection mechanism to include a first reflection part and a second reflection part, it is ensured that the light is fully corrected in the horizontal direction during the upward reflection process, thereby ultimately ensuring that the light converged upward by the objective lens can be reflected into the positioning camera.

[0012] In some embodiments, the first reflecting part includes a first reflector and a second reflector, and the second reflecting part includes a third reflector and a fourth reflector, wherein: the first reflector and the second reflector are both set at a 45° angle and arranged in parallel, the reflecting surface of the first reflector is opposite to the reflecting surface of the second reflector, and the first reflector is located directly above the objective lens; the third reflector and the fourth reflector are both set at a 45° angle and arranged in parallel, the reflecting surface of the third reflector is opposite to the reflecting surface of the fourth reflector, the third reflector is located directly above the second reflector, and the fourth reflector is located directly below the positioning camera; the first reflector receives the light converged by the objective lens and reflects the light along a first horizontal direction to the second reflector, the second reflector reflects the light upward along a vertical direction to the third reflector, the third reflector reflects the light along a second horizontal direction to the fourth reflector, and the fourth reflector reflects the light upward along a vertical direction to the positioning camera.

[0013] Through the cooperation of the first reflector and the second reflector, the first reflector corrects the light that is converged upward by the objective lens along the first horizontal direction toward the positioning camera. Through the cooperation of the third reflector and the fourth reflector, the second reflector further corrects the light along the second horizontal direction toward the positioning camera, and finally allows the light to enter the positioning camera. Depending on the specific position of the positioning camera relative to the objective lens, the second horizontal direction may be parallel to the first horizontal direction, or may not be parallel to the first horizontal direction.

[0014] In some embodiments, the first reflecting portion also includes a first shell, the first reflector and the second reflector are relatively arranged in the first shell, the bottom of the first shell is provided with a first incident hole located directly above the objective lens, and the top of the first shell is provided with a first exit hole located directly below the third reflector; the light converged by the objective lens is converged to the first reflector through the first incident hole, and the second reflector reflects the light upward in a vertical direction to the third reflector through the first exit hole.

[0015] Encapsulating the first reflector and the second reflector in the first housing can reduce light loss and facilitate overall adjustment of the installation position and angle of the first reflective portion.

[0016] In some embodiments, the second reflecting portion also includes a second shell, the third reflector and the fourth reflector are relatively arranged in the second shell, the bottom of the second shell is provided with a second incident hole located directly above the second reflector, and the top of the second shell is provided with a second exit hole located directly below the positioning camera; the light reflected by the second reflector is projected onto the third reflector through the second incident hole, and the fourth reflector reflects the light upward in a vertical direction to the positioning camera through the second exit hole.

[0017] Encapsulating the third reflector and the fourth reflector in the second housing can reduce light loss and facilitate overall adjustment of the installation position and angle of the second reflective portion.

[0018] In some embodiments, an elastic buffer is further provided between the bonding head and the driving end of the driving unit. When the driving unit drives the bonding head down to the workpiece, the elastic buffer is deformed by pressure, so that the bonding head is elastically pressed against the workpiece.

[0019] By arranging an elastic buffer between the bonding head and the driving end of the driving part, the bonding head is elastically pressed against the workpiece, thereby preventing the bonding head from damaging the workpiece.

[0020] In some embodiments, the elastic buffer comprises a spring sheet, and a light through hole is provided on the spring sheet for light to pass through.

[0021] The light-through hole is arranged on the spring sheet to prevent the spring sheet from blocking the light.

[0022] In some embodiments, the fixed end of the bonding head is fixedly connected to the outer side of the spring sheet, and the movable end of the bonding head is fixedly connected to the inner side of the spring sheet. After the driving unit drives the bonding head down to the workpiece, the spring sheet is deformed under pressure and provides downward pressure to the workpiece through the movable end of the bonding head.

[0023] Such an arrangement can ensure the connection strength between the bond head and the spring sheet, and ensure that when the driving unit drives the bond head down to the workpiece, the elastic sheet is deformed under pressure and vertically presses the bond head down, ultimately making the bond head elastically pressed against the workpiece.

[0024] In some embodiments, the bonding device also includes a clamping mechanism and a cutting mechanism arranged on the mounting bracket, wherein: the clamping mechanism is used to clamp the consumable; when the driving unit drives the bonding head downward, the bonding head presses the consumable clamped by the clamping mechanism and bonds it to the workpiece; the cutting mechanism is used to cut off the consumable after bonding is completed.

[0025] The clamping mechanism clamps the consumables to prevent them from shrinking, ensuring that the bonding head presses the consumables and bonds them to the workpiece. The cutting mechanism cuts off the consumables after welding is completed, so that the consumables bonded to the workpiece are disconnected from the subsequent consumables.

[0026] The present application also provides a bonding machine, which includes a workpiece loading device, a workpiece conveying device, a consumable feeding device, a unloading device and the bonding device described in any one of the above, wherein: the workpiece loading device is located at the first end of the workpiece conveying device, and is used to convey the workpiece to be bonded to the workpiece conveying device; the workpiece conveying device is used to convey the workpiece from the workpiece loading device to the unloading device; the consumable feeding device is located above the workpiece conveying device, and is used to provide the bonding device with consumables required for bonding; the bonding device is used to press and bond the consumables to the workpiece to be bonded conveyed by the workpiece conveying device; the unloading device is located at the second end of the workpiece conveying device, and is used to receive the workpiece that has completed bonding.

[0027] Through the cooperation of the workpiece loading device, the workpiece conveying device, the consumable feeding device, the unloading device and the bonding device, the bonding machine realizes automatic bonding of the workpiece and automatic loading and unloading of the workpiece, and the bonding efficiency is greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic structural diagram of a bonding device according to an embodiment of the present application at a first viewing angle;

[0029] Figure 2 It is a schematic structural diagram of the bonding device of an embodiment of the present application at a second viewing angle;

[0030] Figure 3 is a schematic structural diagram of the bonding device of an embodiment of the present application at a third viewing angle;

[0031] Figure 4 This is a schematic diagram of the structure of the bonding device after the bonding head and part of the bracket are omitted in the embodiment of the present application;

[0032] Figure 5 A reflection light path diagram of the light that is converged upward by the objective lens by the reflection mechanism in the embodiment of the present application at a viewing angle;

[0033] Figure 6 A reflection light path diagram of the light that is converged upward by the objective lens by the reflection mechanism in the embodiment of the present application at another viewing angle;

[0034] Figure 7 Schematic diagram of the structure of the spring sheet in the embodiment of the present application.

[0035] Figures 1 to 7 Included:

[0036] Mounting bracket 1;

[0037] Bonding head 2;

[0038] Objective lens 3;

[0039] Reflection mechanism 4:

[0040] A first reflecting portion 41, a first reflecting mirror 411, a second reflecting mirror 412, a first housing 413, and a first emission hole 414;

[0041] A second reflecting portion 42, a third reflecting mirror 421, a fourth reflecting mirror 422, a second housing 423, and a second emission hole 424;

[0042] Positioning camera 5;

[0043] Spring piece 6: light passage hole 61. DETAILED DESCRIPTION

[0044] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0045] like Figures 1 to 3 As shown, the bonding head device in the embodiment of the present application includes a mounting bracket 1, a bonding actuator and a positioning mechanism, wherein:

[0046] The bonding actuator includes a driving part (not shown in the figure) and a bonding head 2, wherein the driving part is arranged on the mounting bracket 1, and the bonding head 2 is connected to the driving end of the driving part. The driving part is used to drive the bonding head 2 down to the workpiece so that the bonding head 2 implements bonding to the workpiece.

[0047] The positioning mechanism includes an objective lens 3, a reflection mechanism 4 and a positioning camera 5 which are arranged on the mounting bracket from bottom to top, wherein the objective lens 3 is located at the bottom of the mounting bracket 1 and is arranged close to the bonding head 2, and an optical channel located in the mounting bracket 1 is formed between the objective lens 3 and the reflection mechanism 4. In other words, an unobstructed space for light to pass through is formed between the objective lens 3 and the reflection mechanism 4 in the mounting bracket 1.

[0048] After the light reflected from the target bonding position of the workpiece enters the objective lens 3, it is converged upward to the reflection mechanism 4 through the optical channel by the objective lens 3. The reflection mechanism 4 is configured to reflect the light upward to the positioning camera 5. The positioning camera 5 is configured to take pictures and locate the bonding position.

[0049] Since a reflection mechanism 4 is provided between the objective lens 3 and the positioning camera 5, and an optical channel located in the mounting bracket 1 is formed between the objective lens 3 and the reflection mechanism 4. After the light reflected from the target bonding position of the workpiece enters the objective lens 3, it converges upward to the reflection mechanism 4 through the optical channel in the mounting bracket 1, and is reflected by the reflection mechanism 4 into the positioning camera 5. Therefore, in the bonding device in the embodiment of the present application, the objective lens 3 and the positioning camera 5 do not need to be coaxially arranged, and they can be arranged close to the bonding head 2. In this way, after the positioning camera 5 completes the positioning of the target bonding position, it only needs to control the bonding head 2 to move a small distance to adjust the bonding head 2 to the top of the target bonding position, thereby improving the bonding efficiency, reducing the vibration of the machine, and improving the bonding accuracy.

[0050] Optionally, the reflection mechanism 4 includes a first reflection part 41 and a second reflection part 42, wherein the first reflection part 41 is configured to receive the light converged by the objective lens 3 and reflect the light upward into the second reflection part 42, and the second reflection part 42 is configured to reflect the light upward into the positioning camera 5.

[0051] Since the objective lens 3 is disposed close to the bonding head 2, the distance of deviation between the positioning camera 5 and the objective lens 3 in the horizontal direction is relatively large. By configuring the reflection mechanism 4 to include the first reflection portion 41 and the second reflection portion 42, it is ensured that the reflection optical path in the horizontal direction is sufficiently large during the upward reflection of the light, thereby ultimately ensuring that the light converged upward by the objective lens 3 can be reflected into the positioning camera 5.

[0052] like Figures 4 to 6 As shown, optionally, the first reflecting part 41 includes a first reflecting mirror 411 and a second reflecting mirror 412, and the second reflecting part 42 includes a third reflecting mirror 421 and a fourth reflecting mirror 422, wherein: the first reflecting mirror 411 and the second reflecting mirror are both set at an angle of 45° and arranged in parallel, the reflecting surface of the first reflecting mirror 411 is opposite to the reflecting surface of the second reflecting mirror 412, and the first reflecting mirror 411 is located directly above the objective lens 3. The third reflecting mirror 421 and the fourth reflecting mirror 422 are both set at an angle of 45° and arranged in parallel, the reflecting surface of the third reflecting mirror 421 is opposite to the reflecting surface of the fourth reflecting mirror 422, the third reflecting mirror 421 is located directly above the second reflecting mirror 412, and the fourth reflecting mirror 422 is located directly below the positioning camera 5.

[0053] like Figure 5 and Figure 6 As shown by the dotted arrow in the figure, the first reflector 411 receives the light converged upward by the objective lens 3, and reflects the light along the first horizontal direction to the second reflector 412, the second reflector 412 reflects the light upward along the vertical direction to the third reflector 421, the third reflector 421 reflects the light along the second horizontal direction to the fourth reflector 422, and the fourth reflector 422 finally reflects the light upward along the vertical direction into the positioning camera 5.

[0054] It can be seen that, through the cooperation of the first reflector 411 and the second reflector 412, the first reflector 41 corrects the light converged upward by the objective lens 3 along the first horizontal direction toward the positioning camera 5. Through the cooperation of the third reflector 421 and the fourth reflector 422, the second reflector 42 corrects the light along the second horizontal direction toward the positioning camera 5, and finally transmits the light vertically upward into the positioning camera 5.

[0055] According to the specific orientation of the positioning camera 5 relative to the objective lens 3 , the second horizontal direction may be parallel to the first horizontal direction or may not be parallel to the first horizontal direction.

[0056] Optionally, the first reflecting portion 41 further includes a first housing 413, a first reflector 411 and a second reflector 412 are relatively arranged in the first housing 413, a first incident hole located directly above the objective lens 3 is arranged at the bottom of the first housing 413, and a first exit hole 414 located directly below the third reflector 421 is arranged at the top of the first housing 413. The light converged by the objective lens 3 converges to the first reflector 411 through the first incident hole, and the second reflector 412 reflects the light upward in the vertical direction to the third reflector 421 through the first exit hole.

[0057] Encapsulating the first reflector 411 and the second reflector 412 in the first housing 413 can reduce light loss and facilitate overall adjustment of the installation position and angle of the first reflective portion 41 .

[0058] Optionally, the second reflecting portion 42 further includes a second shell 423, the third reflector 421 and the fourth reflector 422 are relatively arranged in the second shell 423, the bottom of the second shell 423 is provided with a second incident hole located directly above the second reflector 412, and the top of the second shell 423 is provided with a second exit hole 424 located directly below the positioning camera 5. The light reflected by the second reflector 412 is projected to the third reflector 421 through the second incident hole, and the fourth reflector 422 reflects the light upward in the vertical direction to the positioning camera 5 through the second exit hole 424.

[0059] Encapsulating the third reflector 421 and the fourth reflector 422 in the second housing 423 can reduce light loss and facilitate overall adjustment of the installation position and angle of the second reflective portion 42 .

[0060] Optionally, an elastic buffer is also provided between the bonding head 2 and the driving end of the driving unit. When the driving unit drives the bonding head down to the workpiece, the elastic buffer is deformed by pressure, so that the bonding head 2 is elastically pressed against the workpiece, thereby ensuring that the bonding head 2 presses the consumables to be bonded onto the workpiece and preventing the bonding head 2 from damaging the workpiece.

[0061] like Figure 7As shown, optionally, the elastic buffer comprises a spring sheet 6. In order to prevent the spring sheet 6 from blocking the light, a light through hole 61 is provided on the spring sheet 6 for the light to pass through.

[0062] Optionally, the fixed end of the bonding head 2 is fixedly connected to the outer side of the spring sheet 6, the movable end of the bonding head 2 is fixedly connected to the inner side of the spring sheet 6, the driving part is connected to the fixed end of the bonding head, and after the driving part drives the bonding head down to the workpiece, the driving part drives the fixed end of the bonding head to continue to descend, so that the spring sheet 6 is compressed and deformed, and downward pressure is provided to the workpiece through the movable end of the bonding head.

[0063] Such an arrangement can ensure the connection strength between the bond head 2 and the spring sheet 6, and ensure that when the driving unit drives the bond head down to the workpiece, the elastic sheet is deformed by pressure and vertically presses the bond head down, ultimately making the bond head elastically pressed against the workpiece.

[0064] Optionally, the bonding device in the embodiment of the present application further includes a clamping mechanism and a cutting mechanism arranged on the mounting bracket 1, wherein: the clamping mechanism is used to clamp the consumables. When the driving unit drives the bonding head 2 to press down, the bonding head 2 presses the consumables clamped by the clamping mechanism and bonds to the workpiece. The cutting mechanism is used to cut the consumables after the bonding is completed.

[0065] The clamping mechanism clamps the consumables to prevent the consumables from shrinking, ensuring that the bonding head 2 presses the consumables and bonds them to the workpiece. The cutting mechanism cuts off the consumables after welding is completed, so that the consumables bonded to the workpiece are disconnected from the subsequent consumables.

[0066] An embodiment of the present application also provides a bonding machine, which includes a workpiece loading device, a workpiece conveying device, a consumable feeding device, a unloading device and the bonding device described in any one of the above, wherein: the workpiece loading device is located at the first end of the workpiece conveying device, and is used to convey the workpiece to be bonded to the workpiece conveying device; the workpiece conveying device is used to convey the workpiece from the workpiece loading device to the unloading device; the consumable feeding device is located above the workpiece conveying device, and is used to provide the bonding device with consumables required for bonding; the bonding device is used to press and bond the consumables to the workpiece to be bonded conveyed by the workpiece conveying device; the unloading device is located at the second end of the workpiece conveying device, and is used to receive the workpiece that has completed bonding.

[0067] Through the cooperation of the workpiece loading device, the workpiece conveying device, the consumable feeding device, the unloading device and the bonding device, the bonding machine realizes automatic bonding of the workpiece and automatic loading and unloading of the workpiece, and the bonding efficiency is greatly improved.

[0068] The above description of the present application is sufficiently detailed and has certain particularities. Those skilled in the art should understand that the description in the embodiments is merely exemplary, and all changes made without departing from the true spirit and scope of the present application should fall within the scope of protection of the present application. The scope of protection claimed in the present application is defined by the claims, not by the above description in the embodiments. Moreover, the embodiments mentioned in the present application are not limited to being implemented individually, and some embodiments can also be implemented in combination.

Claims

1. A bonding device, characterized in that: The bonding device comprises a mounting bracket, a bonding actuator and a positioning mechanism, wherein: The bonding actuator includes a driving part and a bonding head, wherein the driving part is arranged on the mounting bracket, the bonding head is connected to the driving end of the driving part, and the driving part is used to drive the bonding head to press down onto the workpiece so that the bonding head implements bonding to the workpiece; The positioning mechanism comprises an objective lens, a reflection mechanism and a positioning camera which are arranged on the mounting bracket from bottom to top, wherein the objective lens is located at the bottom of the mounting bracket and is arranged close to the bonding head, and an optical channel located in the mounting bracket is formed between the objective lens and the reflection mechanism; After the light reflected from the target bonding position of the workpiece enters the objective lens, it is converged upward by the objective lens through the optical channel to the reflection mechanism. The reflection mechanism is configured to reflect the light upward into the positioning camera. The positioning camera is configured to take pictures and locate the bonding position.

2. The bonding device according to claim 1, characterized in that The reflection mechanism includes a first reflection part and a second reflection part, wherein the first reflection part is configured to receive the light converged by the objective lens and reflect the light upward into the second reflection part, and the second reflection part is configured to reflect the light upward into the positioning camera.

3. The bonding device according to claim 2, characterized in that The first reflecting part includes a first reflecting mirror and a second reflecting mirror, and the second reflecting part includes a third reflecting mirror and a fourth reflecting mirror, wherein: The first reflector and the second reflector are both set at an angle of 45° and arranged in parallel, the reflective surface of the first reflector is opposite to the reflective surface of the second reflector, and the first reflector is located directly above the objective lens; The third reflector and the fourth reflector are both set at an angle of 45° and arranged in parallel, the reflective surface of the third reflector is opposite to the reflective surface of the fourth reflector, the third reflector is located directly above the second reflector, and the fourth reflector is located directly below the positioning camera; The first reflector receives the light converged by the objective lens and reflects the light along a first horizontal direction to the second reflector, the second reflector reflects the light upward along a vertical direction to the third reflector, the third reflector reflects the light along a second horizontal direction to the fourth reflector, and the fourth reflector reflects the light upward along a vertical direction to the positioning camera.

4. The bonding device according to claim 3, characterized in that The first reflecting part further comprises a first shell, the first reflecting mirror and the second reflecting mirror are arranged oppositely in the first shell, a first incident hole is arranged at the bottom of the first shell and is located directly above the objective lens, and a first exit hole is arranged at the top of the first shell and is located directly below the third reflecting mirror; The light rays converged by the objective lens are converged to the first reflector through the first incident hole, and the second reflector reflects the light rays upward in a vertical direction to the third reflector through the first exit hole.

5. The bonding device according to claim 3, characterized in that The second reflecting part further includes a second shell, the third reflecting mirror and the fourth reflecting mirror are arranged oppositely in the second shell, the bottom of the second shell is provided with a second incident hole located directly above the second reflecting mirror, and the top of the second shell is provided with a second exit hole located directly below the positioning camera; The light reflected by the second reflector is projected onto the third reflector through the second incident hole, and the fourth reflector reflects the light upward in a vertical direction toward the positioning camera through the second exit hole.

6. The bonding device according to claim 1, characterized in that An elastic buffer is also provided between the bonding head and the driving end of the driving unit. When the driving unit drives the bonding head to press down onto the workpiece, the elastic buffer is deformed by pressure, so that the bonding head is elastically pressed against the workpiece.

7. The bonding device according to claim 6, characterized in that The elastic buffer comprises a spring sheet, and a light through hole for light to pass through is arranged on the spring sheet.

8. The bonding device according to claim 7, characterized in that The fixed end of the bonding head is fixedly connected to the outer side of the spring sheet, and the movable end of the bonding head is fixedly connected to the inner side of the spring sheet. After the driving unit drives the bonding head down to the workpiece, the spring sheet is deformed by pressure, and the movable end of the bonding head provides downward pressure to the workpiece.

9. The bonding device according to claim 1, characterized in that: The bonding device further comprises a clamping mechanism and a cutting mechanism arranged on the mounting bracket, wherein: The clamping mechanism is used to clamp the consumables; When the driving unit drives the bonding head to press down, the bonding head presses the consumables clamped by the clamping mechanism and bonds to the workpiece; The cutting mechanism is used to cut off the consumables after bonding is completed.

10. A bonding machine, characterized in that: The bonding machine comprises a workpiece loading device, a workpiece conveying device, a consumable material feeding device, a material unloading device and a bonding device according to any one of claims 1 to 9, wherein: The workpiece feeding device is located at the first end of the workpiece conveying device, and is used to convey the workpiece to be bonded to the workpiece conveying device; The workpiece conveying device is used to convey the workpiece from the workpiece loading device to the unloading device; The consumable material feeding device is located above the workpiece conveying device, and is used to provide the bonding device with consumable materials required for bonding; The bonding device is used to press and bond the consumables to the workpiece to be bonded conveyed by the workpiece conveying device; The unloading device is located at the second end of the workpiece conveying device, and is used for receiving the workpiece after bonding.

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