Chip carrying disc feeding and discharging equipment

Abstract

The utility model discloses chip loading and unloading equipment, which comprises a loading disc, a loading line, an unloading line, a transfer platform and a transfer device, and is characterized in that the loading disc is used for accommodating a chip; the feeding line is provided with a feeding platform and used for conveying carrying discs to the feeding platform in the first direction. The discharging line and the feeding line are arranged side by side in the second direction, the discharging line is provided with a discharging platform, the discharging platform and the feeding platform are located at the same end of the discharging line and the feeding line, the discharging line is used for conveying a carrying disc of the discharging platform in the first direction, and the second direction is perpendicular to the first direction; the transfer platform is opposite to the feeding platform and the discharging platform in the first direction in a spaced mode so as to temporarily store carrying discs. The transfer device is arranged between the transfer platform and the feeding platform and / or between the transfer platform and the discharging platform in the first direction and used for transferring the carrying discs on the feeding platform to the transfer platform and transferring the carrying discs on the transfer platform to the discharging platform. The chip carrying disc feeding and discharging equipment can simplify feeding and discharging operation and improve the transportation efficiency.

Description

Technical Field

[0001] The utility model relates to semiconductor chip manufacturing equipment, in particular to chip carrier loading and unloading equipment. Background Art

[0002] Thin film deposition equipment is one of the key equipment in semiconductor manufacturing. It needs to be equipped with a chip carrier loading and unloading machine to realize the docking and transportation of the carrier loaded with chips and the thin film deposition equipment. First, the carrier needs to be taken out from the carrier basket, transported and transferred to the entrance of the thin film deposition equipment, and then the coated chips and carrier are received from the exit of the thin film deposition equipment, and the carrier basket is grabbed and introduced into the carrier basket. Finally, the basket filled with carriers is transported to the unloading port for docking with other process equipment.

[0003] In the related art, the loading channel and unloading channel of the chip carrier loading and unloading equipment exist separately, and loading and unloading are performed at different positions. Employees need to perform loading operations at designated loading positions and unloading operations at designated unloading positions, which is cumbersome. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a chip carrier loading and unloading device, which can simplify loading and unloading operations and improve transportation efficiency.

[0005] The chip carrier loading and unloading device according to the embodiment of the utility model comprises:

[0006] A carrier plate for holding chips;

[0007] A loading line, having a loading platform, the loading line is used to transport the carrier plate to the loading platform along a first direction;

[0008] A material unloading line is arranged in parallel with the material loading line along a second direction, the material unloading line has a material unloading platform, the material unloading platform and the material loading platform are located at the same end of the material unloading line and the material loading line, the material unloading line is used to transport the carrier plate of the material unloading platform along the first direction, and the second direction is perpendicular to the first direction;

[0009] A transfer platform, arranged opposite to and spaced apart from the loading platform and the unloading platform along the first direction, for temporarily storing the carrier;

[0010] A transfer device is arranged along the first direction between the transfer platform and the loading platform and / or the transfer platform and the unloading platform, and is used to transfer the loading tray of the loading platform to the transfer platform, and transfer the loading tray of the transfer platform to the unloading platform.

[0011] The chip carrier loading and unloading equipment according to the embodiment of the utility model has at least the following beneficial effects: the loading line and the unloading line are arranged in parallel, the loading platform and the unloading platform are located at the same end of the loading line and the unloading line, the transfer platform is aligned with the loading platform and the unloading platform at this end, the transfer device transfers the carrier of the loading platform to the transfer platform in this interval area, and transports the carrier of the transfer platform to the unloading platform, and loads and unloads the carrier at the same position to simplify manual operation and improve transportation efficiency.

[0012] According to some embodiments of the utility model, it also includes: a carrier, the carrier is provided with a plurality of carrying positions for carrying the carrier plate, the loading line includes a loading conveying platform, a loading transfer device and the loading platform arranged in sequence along a first direction, the loading conveying platform is used to convey the carrier to the loading transfer device, the loading transfer device is used to carry the carrier and convey the carrier plate in the carrier to the loading platform.

[0013] According to some embodiments of the utility model, the carrier is provided with a plurality of the bearing positions along a third direction, the third direction is perpendicular to the second direction and the first direction, the loading and transferring device comprises a lifting platform and a lifting component transmission-connected to the lifting platform, the lifting platform is provided with a transfer component capable of conveying the carrier along the first direction, the lifting component can drive the lifting platform to lift along the third direction, the loading and conveying platform is provided with a pushing component, the pushing component comprises a pushing fixing portion and a pushing portion capable of extending and retracting along the first direction relative to the pushing fixing portion, the pushing fixing portion is connected to the loading and conveying platform, and the pushing portion faces the loading platform;

[0014] The lifting assembly is configured to: drive the lifting platform to move along the third direction so that one of the load-bearing positions in the carrier of the lifting platform is located between the push-out portion and the loading platform, the push-out portion extends along the first direction to push the carrier in the load-bearing position to move to the loading platform, the push-out portion retracts along the first direction to the outside of the lifting platform, and drives the lifting platform to move along the third direction so that another of the load-bearing positions is located between the push-out portion and the loading platform.

[0015] According to some embodiments of the utility model, the unloading line includes an unloading platform and an unloading conveying platform arranged in sequence and at intervals along the first direction, the loading transfer device also includes a switching component that is transmission-connected to the lifting component, the switching component can convey the lifting component and the lifting platform along the second direction, and the lifting platform is located between the unloading platform and the unloading conveying platform, the unloading platform is provided with a pushing component, the pushing component includes a pushing fixing part, a lifting fixing part that can be telescopic along the first direction relative to the pushing fixing part, and a pushing part that can be telescopic along the third direction relative to the lifting fixing part, and the pushing fixing part is connected to the unloading platform;

[0016] The lifting assembly is configured as follows: the switching assembly drives the lifting assembly and the lifting platform to move between the unloading platform and the unloading conveying platform, the lifting platform is aligned with the unloading platform, and the lifting platform is driven to move along the third direction so that one of the bearing positions in the carrier of the lifting platform is aligned with the loading plate on the unloading platform, the pushing portion extends relative to the lifting and fixing portion along the third direction to a side of the loading plate of the unloading platform away from the lifting platform, the lifting and fixing portion extends toward the lifting platform along the first direction to push the loading plate of the unloading platform to move into the bearing position, the pushing portion retracts along the third direction to below the loading plate on the unloading platform, the lifting and fixing portion retracts along the first direction to a side of the loading plate of the unloading platform away from the lifting platform, and drives the lifting platform to move along the third direction so that another bearing position is aligned with the loading plate of the unloading platform.

[0017] According to some embodiments of the present utility model, the unloading platform includes an unloading conveying component and a temporary storage component, the unloading conveying component includes a placement segment and a storage segment sequentially distributed along the first direction, the placement segment is located on a side of the storage segment away from the unloading conveying platform, the temporary storage component is mounted on the storage segment, the temporary storage component is provided with a plurality of storage positions along a third direction, the two sides of the storage position are mounted on the two sides of the storage segment, and the storage position can be raised and lowered along the third direction;

[0018] The temporary storage component is configured to: rise along the third direction to align one of the storage positions with the carrier located in the placement section, the unloading conveying component conveys the carrier in the placement section to the storage section and is located in the storage position, and rise along the third direction to align the next storage position with the carrier located in the placement section; when the switching component drives the lifting platform to move between the unloading platform and the unloading conveying platform, the lifting component drives the lifting platform to move along the third direction to align one of the carrying positions in the carrier frame of the lifting platform with the carrier in one of the storage positions, and pushes the carrier in the storage position into the carrying position through the pushing portion.

[0019] According to some embodiments of the utility model, the loading and conveying platform, the lifting platform, the loading platform, the unloading platform, and the unloading and conveying platform are all provided with a belt line capable of conveying the carrier along the first direction.

[0020] According to some embodiments of the utility model, it also includes: a carrier, the carrier is provided with a plurality of carrying positions for carrying the carrier plate, the unloading line includes a unloading platform, a unloading transfer device and a unloading conveying platform arranged in sequence along a first direction, the unloading transfer device is used to carry a carrier capable of storing a plurality of carrying carrier plates, the unloading conveying platform carries the carrier plate conveyed by the unloading platform through the carrier, and the unloading conveying platform is used to receive the carrier of the unloading transfer device.

[0021] According to some embodiments of the utility model, the transfer platform is provided with a loading transfer device and a unloading transfer device, the loading transfer device is used to transport the carrier along the conveying direction of the loading line, and the unloading transfer device is used to transport the carrier along the conveying direction of the unloading line.

[0022] According to some embodiments of the utility model, the loading transfer device and / or the unloading transfer device is a belt line structure.

[0023] According to some embodiments of the utility model, the transfer device is a transfer robot, which is arranged between the transfer platform and the loading platform or between the transfer platform and the unloading platform along the first direction, and the hand of the transfer robot is provided with a claw for clamping the carrier.

[0024] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0026] Figure 1 A schematic top view of a chip carrier loading and unloading device according to an embodiment of the utility model;

[0027] Figure 2 It is a front view schematic diagram of a chip carrier loading and unloading device according to an embodiment of the utility model;

[0028] Figure 3 This is a structural schematic diagram of a chip carrier loading and unloading device according to an embodiment of the utility model;

[0029] Figure 4 It is a structural schematic diagram of a material unloading and transferring device of a chip carrier unloading and loading equipment according to an embodiment of the utility model.

[0030] Figure Number:

[0031] Carrying plate 100;

[0032] Feeding line 200; feeding conveying platform 210; ejection part 211; feeding transfer device 220; lifting platform 221; lifting component 222; switching component 223; feeding platform 230;

[0033] Unloading line 300; unloading platform 310; pushing part 311; unloading conveying assembly 312; temporary storage assembly 313; storage component 3131; lifting drive component 3132; unloading conveying platform 320;

[0034] Transfer platform 400; loading transfer device 410; unloading transfer device 420;

[0035] Transfer device 500; Clamping jaw 510;

[0036] Carrier 600. DETAILED DESCRIPTION

[0037] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0038] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0039] In the description of the present utility model, "several" refers to one or more, and "multiple" refers to two or more. If there is a description of "first" or "second", it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0040] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0041] Reference Figures 1 to 4 As shown, the embodiment of the utility model proposes a chip carrier loading and unloading equipment, including: a carrier 100, a loading line 200, a unloading line 300, a transfer platform 400 and a transfer device 500, the carrier 100 has a plurality of chip placement positions arranged horizontally and vertically, and the chips can be directly placed in the chip placement positions to realize the transportation of the chips; the loading line 200 is used to transport the carrier 100 with unprocessed chips, and has a loading platform 230 to transport the carrier 100 to the loading platform 230 along a first direction, the unloading line 300 is arranged in parallel with the loading line 200 along a second direction, and the second direction is perpendicular to the first direction, and the unloading line 300 has an unloading platform 310, and the unloading platform 311 is provided. 0 and the loading platform 230 are located at the same end of the unloading line 300 and the loading line 200, the unloading line 300 will transport the carrier 100 of the unloading platform 310 along the first direction, and the loading line 200 and the unloading line 300 have opposite conveying directions; the transfer platform 400 is opposite to the loading platform 230 and the unloading platform 310 and is arranged at a distance along the first direction to temporarily store the carrier 100; the transfer device 500 is arranged between the transfer platform 400 and the loading platform 230 and / or the transfer platform 400 and the unloading platform 310 along the first direction, and is used to transfer the carrier 100 of the loading platform 230 to the transfer platform 400, and to transfer the carrier 100 of the transfer platform 400 to the unloading platform 310.

[0042] Among them, the loading line 200 transports the carrier 100 with unprocessed chips to the loading platform 230, the transfer device 500 transfers the carrier 100 on the loading platform 230 to the transfer platform 400, the transfer platform 400 transfers the carrier 100 to the next processing position, after the chip processing, the processed chip at the processing position is transferred to the transfer platform 400 again through the carrier 100, the transfer device 500 transfers the carrier 100 with processed chips on the transfer platform 400 to the unloading platform 310, and the unloading line 300 continues to transport the carrier 100 with processed chips along the first direction.

[0043] In this embodiment, the main conveying method of the loading line 200 and the unloading line 300 along the first direction is to convey through a belt line structure, which includes an endless belt, a driving wheel and a plurality of driven wheels. The driving wheel and a driven wheel are located on the same horizontal straight line. The endless belt is sleeved on the outer circumference of the driving wheel and the driven wheel and is tightened. When the driving wheel rotates, the belt and the driven wheel are driven to rotate together. Among them, the manufacturing process of the belt line structure is mature and the manufacturing cost is lower.

[0044] It is worth understanding that the loading line 200 and the unloading line 300 are arranged in parallel, the loading platform 230 and the unloading platform 310 are located at the same end of the loading line 200 and the unloading line 300, and the transfer platform 400 is aligned with the loading platform 230 and the unloading platform 310 at this end. The transfer device 500 transfers the carrier 100 of the loading platform 230 to the transfer platform 400 in this interval area, and transports the carrier 100 of the transfer platform 400 to the unloading platform 310, and loads and unloads the carrier 100 at the same position to simplify manual operation and improve transportation efficiency.

[0045] Reference Figure 1 , Figure 2 and Figure 3 As shown, in some other embodiments of the utility model, the chip carrier loading and unloading equipment also includes: a carrier 600, the carrier 600 is provided with a plurality of loading positions for carrying the carrier 100, the loading line 200 includes a loading conveying platform 210, a loading transfer device 220 and a loading platform 230 arranged in sequence along the first direction, the loading conveying platform 210 is used to convey the carrier 600 to the loading transfer device 220, the loading transfer device 220 is used to carry the carrier 600 and convey the carrier 100 in the carrier 600 to the loading platform 230.

[0046] In this embodiment, the loading conveying platform 210, the loading transfer device 220 and the loading platform 230 are all provided with a horizontally erected belt line structure, and the belt line structure is used to realize the conveyance of the carrier 100. The carrier 600 includes two opposite side plates and a top plate, the two side plates are relatively connected to the two ends of the top plate, and the side plates are provided with a plurality of slots along the third direction, each slot of the two side plates corresponds to each other, and a bearing position is formed between the two corresponding slots, and the two opposite sides of the carrier 100 can be respectively inserted into the two corresponding slots, so that the bearing position carries the carrier 100.

[0047] It is worth understanding that the loading and conveying platform 210 conveys multiple carriers 100 to the loading and transferring device 220 at one time through the carrier 600 equipped with multiple carriers 100, and then conveys the multiple carriers 100 in the carrier 600 to the loading platform 230 in the form of a single carrier 100 through the loading and transferring device 220. The loading platform 230 only transfers a single carrier 100 to the lifting platform 221 at a time, which is convenient for subsequent chip processing.

[0048] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in some other specific embodiments of the present invention, the carrier 600 is provided with a plurality of bearing positions along the third direction, the third direction is perpendicular to the second direction and the first direction, the loading transfer device 220 includes a lifting platform 221 and a lifting component 222 which is transmission-connected to the lifting platform 221, the lifting platform 221 is provided with a transfer component which can transport the carrier 600 along the first direction, the lifting component 222 can drive the lifting platform 221 to lift along the third direction, the loading conveying platform 210 is provided with a push-out component, the push-out component includes a push-out fixing portion and a push-out portion 211 which can be telescopic relative to the push-out fixing portion along the first direction, the push-out fixing portion is connected to the loading conveying platform 210, and the push-out portion 211 faces the loading platform 230;

[0049] The lifting assembly 222 is configured to: drive the lifting platform 221 to move along the third direction so that a load-bearing position in the carrier 600 of the lifting platform 221 is located between the ejection portion 211 and the loading platform 230, the ejection portion 211 extends along the first direction to push the carrier 100 in the load-bearing position to move to the loading platform 230, the ejection portion 211 retracts along the first direction to the outside of the lifting platform 221, and drives the lifting platform 221 to move along the third direction so that another load-bearing position is located between the ejection portion 211 and the loading platform 230.

[0050] It is worth understanding that by lifting and lowering the lifting component 222 along the third direction, the multiple load-bearing positions distributed along the third direction in the carrier 600 on the lifting platform 221 can be aligned with the loading platform 230 in sequence, so that the carrier 100 in each load-bearing position can be aligned with the loading platform 230, and then the carrier 100 in the aligned load-bearing position is pushed onto the loading platform 230 by the pushing part 211, and the carrier 100 can be transported on the loading platform 230.

[0051] In this embodiment, the push-out assembly is a telescopic cylinder, and the lifting assembly 222 is a screw slider structure, which includes a motor, a screw and a slider sleeved on the outer circumference of the screw, the slider is connected to the screw thread, the motor is connected to the screw transmission, the motor drives the screw to rotate, so that the slider moves along the axis of the screw, and the lifting platform 221 is fixedly connected to the slider and is lifted and lowered under the drive of the slider. A belt conveyor line for conveying the carrier 600 is provided on the loading platform 230.

[0052] The loading platform 230 is lower than the loading conveying platform 210, and a push-out assembly is arranged below the conveying surface of the belt line structure of the loading conveying platform 210, and the push-out portion 211 of the push-out assembly is aligned with the space above the conveying surface of the belt line structure of the loading platform 230 that supports the carrier 100, and the lifting platform 221 is driven down by the lifting assembly 222, so that a bearing position in the carrier 600 on the lifting platform 221 is aligned with the push-out portion 211, and the push-out portion 211 pushes the carrier 100 in the bearing position along the first direction to the conveying surface of the belt line structure of the loading platform 230. Generally speaking, the carrier 100 in the bearing position at the bottom of the carrier 600 on the lifting platform 221 is conveyed until the carrier 100 in the bearing position at the top of the carrier 600 is conveyed.

[0053] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in some specific embodiments of the present utility model, the unloading line 300 includes an unloading platform 310 and an unloading conveying platform 320 which are sequentially arranged at intervals along the first direction, the loading transfer device 220 also includes a switching component 223 which is transmission-connected to the lifting component 222, the switching component 223 can convey the lifting component 222 and the lifting platform 221 along the second direction, and the lifting platform 221 is located between the unloading platform 310 and the unloading conveying platform 320, the unloading platform 310 is provided with a pushing component, the pushing component includes a pushing fixing part, a lifting fixing part which can be telescopic relative to the pushing fixing part along the first direction, and a pushing part 311 which can be telescopic relative to the lifting fixing part along the third direction, and the pushing fixing part is connected to the unloading platform 310;

[0054] The lifting assembly 222 is configured as follows: the switching assembly 223 drives the lifting assembly 222 and the lifting platform 221 to move between the unloading platform 310 and the unloading conveying platform 320, the lifting platform 221 is aligned with the unloading platform 310, and the lifting platform 221 is driven to move along the third direction so that a bearing position in the carrier 600 of the lifting platform 221 is aligned with the carrier plate 100 on the unloading platform 310, and the pushing portion 311 extends relative to the lifting fixing portion along the third direction to the carrier plate 100 of the unloading platform 310. On the side away from the lifting platform 221, the lifting and fixing part extends toward the lifting platform 221 along the first direction to push the carrier 100 of the unloading platform 310 to move into the bearing position, and the pushing part 311 retracts along the third direction to below the carrier 100 on the unloading platform 310, and the lifting and fixing part retracts along the first direction to the side of the carrier 100 of the unloading platform 310 away from the lifting platform 221, driving the lifting platform 221 to move along the third direction so that the other bearing position is aligned with the carrier 100 of the unloading platform 310.

[0055] It is worth understanding that the loading transfer device 220 can transfer the carrier 100 between the loading platform 230 and the loading conveying platform 210, and can also move the lifting assembly 222 and the lifting platform 221 to between the unloading platform 310 and the unloading conveying platform 320 through the switching device, and transfer the carrier 100 of the unloading platform 310 to the unloading conveying platform 320, so that the loading transfer device 220 can be used for both loading and unloading, and can save equipment costs. At the same time, the empty carrier 600 after the lifting platform 221 is loaded can be directly transferred to the unloading line 300 to collect the carrier 100 without transferring the empty carrier 600, which improves the transfer efficiency of the lifting platform 221.

[0056] In this embodiment, the switching component 223 is also a lead screw slider structure, and the axial direction of the screw of the lead screw slider structure is arranged along the second direction.

[0057] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in some specific embodiments of the present invention, the unloading platform 310 includes an unloading conveying component 312 and a temporary storage component 313, the unloading conveying component 312 includes a placement segment and a storage segment sequentially distributed along a first direction, the placement segment is located on a side of the storage segment away from the unloading conveying platform 320, the temporary storage component 313 is mounted on the storage segment, the temporary storage component 313 is provided with a plurality of storage positions along a third direction, the two sides of the storage position are mounted on the two sides of the storage segment, and the storage position can be raised and lowered along the third direction;

[0058] The temporary storage component 313 is configured to: rise along the third direction to align a storage position with the carrier 100 located in the placement section, the unloading conveying component 312 conveys the carrier 100 in the placement section to the storage section and is located in the storage position, and rise along the third direction to align the next storage position with the carrier 100 located in the placement section; when the switching component 223 drives the lifting platform 221 to move between the unloading platform 310 and the unloading conveying platform 320, the lifting component 222 drives the lifting platform 221 to move along the third direction, so that a load-bearing position in the carrier 600 of the lifting platform 221 is aligned with the carrier 100 in a storage position, and the carrier 100 in the storage position is pushed into the load-bearing position through the pushing portion 311.

[0059] It is worth understanding that the unloading platform 310 collects multiple carriers 100 transferred from the transfer platform 400 through the temporary storage component 313, and stores them through the temporary storage component 313 to avoid affecting the conveying rhythm of the carriers 100, and the lifting platform 221 of the loading transfer device 220 can receive the carriers 100 carried in the temporary storage component 313 more quickly, reducing the residence time of the lifting platform 221 of the loading transfer device 220 in the unloading line 300, so as to improve production efficiency.

[0060] In the present embodiment, the unloading platform 310 is conveyed along the first direction by the unloading conveying assembly 312. The unloading conveying assembly 312 is a belt line structure, and the temporary storage assembly 313 has a plurality of storage positions along the third direction. Specifically, the temporary storage assembly 313 includes a storage member 3131 and a lifting drive member 3132. The structure of the storage member 3131 is similar to that of the carrier 600. The storage member 3131 is provided with a plurality of storages sequentially distributed along the third direction, and the structure of the storage position is the same as that of the bearing position. The lifting drive member 3132 is connected to the storage member 3131 by transmission to drive the storage member 3131 to move up and down along the third direction. When the carrier 100 is not conveyed, the storage member 3131 rises along the third direction by the lifting drive member 3132, so that the top bearing position of the storage member 3131 is located at the position where the conveying surface of the unloading conveying assembly 312 is about to bear the carrier 100. The carrier 100 is first The tray 100 is placed in the placement section and then transported to the storage section along the second direction. When the tray 100 is transported to the storage section, the tray 100 will just move to the top storage position of the storage element 3131, and then the storage element 3131 rises, and the storage position at the second top of the storage element 3131 is aligned with the new tray 100 on the unloading conveying component 312. The new tray 100 on the unloading conveying component 312 enters the second top of the storage element 3131, and the cycle continues until the bottom storage position of the storage element 3131 is also equipped with a tray 100. At this time, the storage element 3131 is full of trays 100, and the switching component 223 can switch the lifting platform 221 to the unloading line 300 to transfer the tray 100 in the storage element 3131. Of course, when the storage element 3131 is not full of trays 100, the switching component 223 can switch the lifting platform 221 to the unloading line 300 and transfer the tray 100 in the storage element 3131.

[0061] In some specific embodiments of the present invention, the chip carrier loading and unloading equipment also includes: a carrier 600, the carrier 600 is provided with a plurality of carrying positions for carrying the carrier 100, the unloading line 300 includes an unloading platform 310, an unloading transfer device and an unloading conveying platform 320 arranged in sequence along the first direction, the unloading transfer device is used to carry the carrier 600 that can store a plurality of carrying carriers 100, the unloading conveying platform 320 carries the carrier 100 conveyed by the unloading platform 310 through the carrier 600, and the unloading conveying platform 320 is used to receive the carrier 600 of the unloading transfer device.

[0062] It is worth understanding that the unloading line 300 can also be equipped with a separate unloading transfer device to collect multiple carriers 100 into a carrier 600, and then the unloading transfer device transports the carrier 600 with multiple carriers 100 to the unloading conveying platform 320 for subsequent chip transportation.

[0063] Reference Figure 1 , Figure 2 and Figure 3 As shown, in some specific embodiments of the present utility model, the transfer platform 400 is provided with a loading transfer device 410 and a unloading transfer device 420. The loading transfer device 410 is used to transport the carrier 100 along the conveying direction of the loading line 200, and the unloading transfer device 420 is used to transport the carrier 100 along the conveying direction of the unloading line 300.

[0064] It is worth understanding that the transfer platform 400 transports the loaded carrier 100 through the loading transfer device 410 to transport the unprocessed chips to the processing position. When the carrier 100 with processed chips flows back to the transfer platform 400, the transfer platform 400 transports the carrier 100 with processed chips through the unloading transfer device 420 to realize the circulation of the carrier 100 before and after processing. At the same time, the transfer platform 400 can play a buffering role to adapt to the transportation rhythm.

[0065] In this embodiment, the loading transfer device 410 is aligned with the loading line 200, and the unloading transfer device 420 is aligned with the unloading line 300, and both the loading transfer device 410 and the unloading transfer device 420 are provided with a belt line structure, through which the carrier 100 is transported.

[0066] Reference Figure 1 , Figure 2 and Figure 3 As shown, in some specific embodiments of the present invention, the transfer device 500 is a transfer robot, which is arranged along the first direction between the transfer platform 400 and the loading platform 230 or the transfer platform 400 and the unloading platform 310, and the hand of the transfer robot is provided with a clamp 510 for clamping the carrier 100.

[0067] It is worth understanding that by clamping and transferring the carrier 100 through the transfer robot, the transfer efficiency and the conveying accuracy of the carrier 100 are higher.

[0068] In this embodiment, the clamping jaw 510 includes a plurality of clamping portions, and the clamping portions are used to clamp at least two opposite sides of the carrier 100 to ensure the fixing effect of the clamping jaw 510 on the carrier 100 .

[0069] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A chip carrier loading and unloading device, characterized in that: include: A carrier plate for holding chips; A loading line, having a loading platform, the loading line is used to transport the carrier plate to the loading platform along a first direction; A material unloading line is arranged in parallel with the material loading line along a second direction, the material unloading line has a material unloading platform, the material unloading platform and the material loading platform are located at the same end of the material unloading line and the material loading line, the material unloading line is used to transport the carrier plate of the material unloading platform along the first direction, and the second direction is perpendicular to the first direction; A transfer platform, arranged opposite to and spaced apart from the loading platform and the unloading platform along the first direction, for temporarily storing the carrier; A transfer device is arranged along the first direction between the transfer platform and the loading platform and / or the loading platform, and is used to transfer the loading tray of the loading platform to the transfer platform, and transfer the loading tray of the transfer platform to the unloading platform.

2. The chip carrier loading and unloading equipment according to claim 1, characterized in that: Also includes: A carrier, wherein the carrier is provided with a plurality of carrying positions for carrying the carrier plate, the loading line comprises a loading conveying platform, a loading transfer device and the loading platform which are sequentially arranged along a first direction, the loading conveying platform is used to convey the carrier to the loading transfer device, the loading transfer device is used to carry the carrier and convey the carrier plate in the carrier to the loading platform.

3. The chip carrier loading and unloading equipment according to claim 2, characterized in that: The carrier is provided with a plurality of the bearing positions along a third direction, the third direction is perpendicular to the second direction and the first direction, the loading and transferring device comprises a lifting platform and a lifting component which is transmission-connected to the lifting platform, the lifting platform is provided with a transfer component which can convey the carrier along the first direction, the lifting component can drive the lifting platform to lift along the third direction, the loading and conveying platform is provided with a pushing component, the pushing component comprises a pushing fixing part and a pushing part which can be extended and retracted along the first direction relative to the pushing fixing part, the pushing fixing part is connected to the loading and conveying platform, and the pushing part faces the loading and conveying platform; The lifting assembly is configured to: drive the lifting platform to move along the third direction so that one of the load-bearing positions in the carrier of the lifting platform is located between the push-out portion and the loading platform, the push-out portion extends along the first direction to push the carrier in the load-bearing position to move to the loading platform, the push-out portion retracts along the first direction to the outside of the lifting platform, and drives the lifting platform to move along the third direction so that another of the load-bearing positions is located between the push-out portion and the loading platform.

4. The chip carrier loading and unloading equipment according to claim 3, characterized in that: The unloading line includes an unloading platform and an unloading conveying platform which are sequentially arranged at intervals along the first direction, the loading transfer device also includes a switching component which is transmission-connected to the lifting component, the switching component can convey the lifting component and the lifting platform along the second direction, and the lifting platform is located between the unloading platform and the unloading conveying platform, the unloading platform is provided with a pushing component, the pushing component includes a pushing fixing part, a lifting fixing part which can be telescopic along the first direction relative to the pushing fixing part, and a pushing part which can be telescopic along the third direction relative to the lifting fixing part, and the pushing fixing part is connected to the unloading platform; The lifting assembly is configured as follows: the switching assembly drives the lifting assembly and the lifting platform to move between the unloading platform and the unloading conveying platform, the lifting platform is aligned with the unloading platform, and the lifting platform is driven to move along the third direction so that one of the bearing positions in the carrier of the lifting platform is aligned with the loading plate on the unloading platform, the pushing portion extends relative to the lifting and fixing portion along the third direction to a side of the loading plate of the unloading platform away from the lifting platform, the lifting and fixing portion extends toward the lifting platform along the first direction to push the loading plate of the unloading platform to move into the bearing position, the pushing portion retracts along the third direction to below the loading plate on the unloading platform, the lifting and fixing portion retracts along the first direction to a side of the loading plate of the unloading platform away from the lifting platform, and drives the lifting platform to move along the third direction so that another bearing position is aligned with the loading plate of the unloading platform.

5. The chip carrier loading and unloading equipment according to claim 4, characterized in that: The unloading platform includes an unloading conveying component and a temporary storage component. The unloading conveying component includes a placement section and a storage section sequentially distributed along the first direction. The placement section is located at a side of the storage section away from the unloading conveying platform. The temporary storage component is mounted on the storage section. The temporary storage component is provided with a plurality of storage positions along a third direction. Both sides of the storage position are mounted on both sides of the storage section, and the storage position can be raised and lowered along the third direction. The temporary storage component is configured to: rise along the third direction to align one of the storage positions with the carrier located in the placement section, the unloading conveying component conveys the carrier in the placement section to the storage section and is located in the storage position, and rise along the third direction to align the next storage position with the carrier located in the placement section; when the switching component drives the lifting platform to move between the unloading platform and the unloading conveying platform, the lifting component drives the lifting platform to move along the third direction to align one of the carrying positions in the carrier frame of the lifting platform with the carrier in one of the storage positions, and pushes the carrier in the storage position into the carrying position through the pushing portion.

6. The chip carrier loading and unloading equipment according to claim 4, characterized in that: The loading and conveying platform, the lifting platform, the loading platform, the unloading platform, and the unloading and conveying platform are all provided with a belt line capable of conveying the carrier along the first direction.

7. The chip carrier loading and unloading equipment according to claim 1, characterized in that: Also includes: A carrier, wherein the carrier is provided with a plurality of carrying positions for carrying the carrier plate, the unloading line comprises an unloading platform, an unloading transfer device and an unloading conveying platform which are sequentially arranged along a first direction, the unloading transfer device being used to carry a carrier capable of storing a plurality of carrying carrier plates, the unloading conveying platform carries the carrier plate conveyed by the unloading platform through the carrier, and the unloading conveying platform being used to receive the carrier of the unloading transfer device.

8. The chip carrier loading and unloading equipment according to claim 1, characterized in that: The transfer platform is provided with a loading transfer device and a unloading transfer device. The loading transfer device is used to transport the carrier along the conveying direction of the loading line, and the unloading transfer device is used to transport the carrier along the conveying direction of the unloading line.

9. The chip carrier loading and unloading equipment according to claim 8, characterized in that: The loading transfer device and / or the unloading transfer device is a belt line structure.

10. The chip carrier loading and unloading equipment according to claim 1, characterized in that: The transfer device is a transfer robot, which is arranged between the transfer platform and the loading platform or between the transfer platform and the unloading platform along the first direction, and the hand of the transfer robot is provided with a clamping claw for clamping the carrier.

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