Eutectic heating table structure

Abstract

The utility model discloses a eutectic heating table structure, which comprises a heating table seat, a plurality of ventilation pipelines are arranged in the heating table seat, one ends of the plurality of ventilation pipelines are respectively communicated with the top surface of the heating table seat to form a plurality of air suction holes, and the diameters of any two air suction holes are unequal; and the other ends of the plurality of ventilation pipelines are respectively communicated with the side surface of the heating pedestal to form a plurality of joint holes. According to the eutectic heating table structure, the plurality of air suction holes with different diameters are formed in the heating table base, and the different air suction holes can be used for adsorbing substrates with different models and sizes, so that the processing requirements of the substrates with different models can be met, the application range is greatly widened, and the equipment cost during semiconductor chip production is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip production, in particular to a eutectic heating platform structure. Background Art

[0002] The semiconductor chip packaging production process includes a eutectic heating process in which the wafer and substrate are placed on a heating table for heating and fixing. The eutectic heating table is provided with suction holes to adsorb the substrate. The existing eutectic heating table has low applicability and needs to be provided with different eutectic heating tables for wafers and substrates of different models and sizes, resulting in high equipment costs. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a eutectic heating platform structure with a wide application range.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a eutectic heating platform structure, including a heating platform, in which a plurality of ventilation pipes are provided, one end of the plurality of ventilation pipes are respectively connected to the top surface of the heating platform to form a plurality of air intake holes, and the diameters of any two of the air intake holes are not equal; the other ends of the plurality of ventilation pipes are respectively connected to the side surfaces of the heating platform to form a plurality of joint holes.

[0005] Furthermore, the number of the air suction holes is three.

[0006] Furthermore, it also includes a trachea quick connector, which is connected to the connector hole.

[0007] Furthermore, a mounting bracket is provided on the heating platform, and the air pipe quick connector is detachably mounted on the mounting bracket.

[0008] Furthermore, the mounting bracket is connected to the heating base by screws, snap-fit ​​connection or interference fit.

[0009] Furthermore, it also includes an elastic member, which is used to drive the trachea quick connector to move towards the direction close to the connector hole.

[0010] Furthermore, the elastic member is a spring, a spring sheet or a spring washer.

[0011] Furthermore, the elastic member is sleeved on the trachea quick connector.

[0012] Furthermore, it also includes a pressure regulating valve, which is connected to the joint hole.

[0013] Furthermore, the pressure regulating valves are arranged in a one-to-one correspondence with the number of the ventilation pipes.

[0014] The beneficial effect of the utility model is that the eutectic heating platform structure is provided with a plurality of suction holes of different diameters on the heating platform seat, and the different suction holes can be used to adsorb substrates of different models and sizes, thereby meeting the processing requirements of substrates of different models, greatly improving the scope of application, and being conducive to reducing the equipment cost during the production of semiconductor chips. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A top view of the eutectic heating platform structure of the first embodiment of the present utility model;

[0016] Figure 2 It is a side view of the eutectic heating platform structure of the first embodiment of the present utility model.

[0017] Description of labels:

[0018] 1. Heating base; 11. Ventilation duct; 111. Air intake hole;

[0019] 2. Trachea quick connector;

[0020] 3. Install the bracket;

[0021] 4. Elastic parts;

[0022] 5. Pressure regulating valve. DETAILED DESCRIPTION

[0023] In order to explain the technical content, achieved objectives and effects of the present invention in detail, the following is an explanation in conjunction with the implementation modes and the accompanying drawings.

[0024] Please refer to Figure 1 and Figure 2 A eutectic heating platform structure includes a heating platform 1, wherein the heating platform 1 is provided with a plurality of ventilation pipes 11, one end of each of the ventilation pipes 11 is connected to the top surface of the heating platform 1 to form a plurality of air intake holes 111, and the diameters of any two of the air intake holes 111 are not equal; the other ends of each of the ventilation pipes 11 are connected to the side surfaces of the heating platform 1 to form a plurality of joint holes.

[0025] From the above description, it can be seen that the beneficial effect of the utility model is that the eutectic heating table structure is provided with a plurality of suction holes 111 of different diameters on the heating table 1, and different suction holes 111 can be used to adsorb substrates of different models and sizes, which can meet the processing requirements of substrates of different models, greatly improve the scope of application, and help reduce the equipment cost during the production of semiconductor chips.

[0026] Furthermore, the number of the air intake holes 111 is three.

[0027] Furthermore, it also includes a trachea quick connector 2, and the trachea quick connector 2 is communicated with the connector hole.

[0028] As can be seen from the above description, the trachea quick connector 2 enables the ventilation duct 11 to be quickly and conveniently connected to an external air suction device.

[0029] Furthermore, a mounting bracket 3 is provided on the heating platform 1 , and the air pipe quick connector 2 can be detachably mounted on the mounting bracket 3 .

[0030] It can be seen from the above description that the mounting bracket 3 can fix the position of the trachea quick connector 2 to prevent the Qiguang quick connector from bending under the action of external force.

[0031] Furthermore, the mounting bracket 3 is connected to the heating platform 1 by screws, snap-fit ​​connection or interference fit.

[0032] It can be seen from the above description that after the mounting bracket 3 is damaged, the heating platform 1 does not need to be replaced together with the mounting bracket 3 .

[0033] Furthermore, it also includes an elastic member 4, and the elastic member 4 is used to drive the trachea quick connector 2 to move towards the direction close to the connector hole.

[0034] It can be seen from the above description that the elastic member 4 enables the trachea quick connector 2 to be more tightly inserted into the connector hole, thereby reducing the risk of air leakage.

[0035] Furthermore, the elastic member 4 is a spring, a spring sheet or a spring washer.

[0036] It can be seen from the above description that the type of the elastic member 4 can be selected according to actual use requirements or production conditions.

[0037] Furthermore, the elastic member 4 is sleeved on the trachea quick connector 2 .

[0038] It can be seen from the above description that sleeve-arranging the elastic member 4 on the trachea quick connector 2 can reduce the occupied space and make the trachea quick connector 2 more evenly stressed in the circumferential direction.

[0039] Furthermore, it also includes a pressure regulating valve 5, and the pressure regulating valve 5 is connected with the joint hole.

[0040] It can be seen from the above description that the pressure regulating valve 5 is used to control the air pressure and thus adjust the suction force of the suction hole 111 .

[0041] Furthermore, the pressure regulating valves 5 are arranged in a one-to-one correspondence with the number of the ventilation pipes 11 .

[0042] It can be seen from the above description that the staff can individually adjust the suction force of the corresponding suction holes 111 through different pressure regulating valves 5 .

[0043] Please refer to Figure 1 and Figure 2, Embodiment 1 of the present utility model is: a eutectic heating platform structure, including a heating platform 1, in which a plurality of ventilation ducts 11 are provided, one end of the plurality of ventilation ducts 11 are respectively connected to the top surface of the heating platform 1 to form a plurality of air suction holes 111, and the diameters of any two air suction holes 111 are not equal; the other ends of the plurality of ventilation ducts 11 are respectively connected to the side surfaces of the heating platform 1 to form a plurality of joint holes. Specifically, the number of ventilation ducts 11, air suction holes 111 and joint holes is set in one-to-one correspondence. In this embodiment, the number of air suction holes 111 is three, and the three air suction holes 111 are arranged in sequence according to size along a straight line direction. In other embodiments, the number of air suction holes 111 can be set to two, four or more.

[0044] The eutectic heating platform structure further includes an air pipe quick connector 2, which is connected to the connector hole. The air pipe quick connector 2 and the connector hole are arranged in a one-to-one correspondence.

[0045] The heating platform 1 is provided with a mounting bracket 3, and the air pipe quick connector 2 is detachably mounted on the mounting bracket 3. Optionally, the mounting bracket 3 is screw-connected, snap-connected, or interference-fitted with the heating platform 1.

[0046] In order to make the trachea quick connector 2 and the connector hole tightly connected, the eutectic heating platform structure also includes an elastic member 4, which is used to drive the trachea quick connector 2 to move toward the connector hole. In this embodiment, the elastic member 4 is preferably a spring, and the elastic member 4 is sleeved on the trachea quick connector 2, and the two ends of the elastic member 4 respectively contact the mounting bracket 3 and the trachea quick connector 2. The number of elastic members 4 is set in a one-to-one correspondence with the number of trachea quick connectors 2. In other embodiments, the elastic member 4 can be set as a spring sheet or a spring pad.

[0047] In order to adjust the suction force of the suction hole 111, the eutectic heating stage structure further includes a pressure regulating valve 5, which is connected to the joint hole. The pressure regulating valve 5 is arranged in a one-to-one correspondence with the number of the ventilation pipes 11. The air inlet of the pressure regulating valve 5 is connected to the air pipe quick connector 2 through the connecting air pipe, and the air outlet of the pressure regulating valve 5 is connected to the external suction device through the connecting air pipe.

[0048] In summary, the eutectic heating table structure provided by the utility model is provided with a plurality of suction holes of different diameters on the heating table seat. Different suction holes can be used to adsorb substrates of different models and sizes, which can meet the processing requirements of substrates of different models, greatly improve the scope of application, and help reduce the equipment cost during the production of semiconductor chips.

[0049] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent transformations made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in the relevant technical field, are also included in the patent protection scope of the present invention.

Claims

1. A eutectic heating stage structure, characterized in that: It includes a heating base, in which a plurality of ventilation pipes are arranged, one end of the plurality of ventilation pipes are respectively connected to the top surface of the heating base to form a plurality of air suction holes, and the diameters of any two of the air suction holes are not equal; the other ends of the plurality of ventilation pipes are respectively connected to the side surfaces of the heating base to form a plurality of joint holes.

2. The eutectic heating stage structure according to claim 1, characterized in that: The number of the air suction holes is three.

3. The eutectic heating stage structure according to claim 1, characterized in that: It also includes a trachea quick connector, which is communicated with the connector hole.

4. The eutectic heating stage structure according to claim 3, characterized in that: The heating platform is provided with a mounting bracket, and the air pipe quick connector is detachably mounted on the mounting bracket.

5. The eutectic heating stage structure according to claim 4, characterized in that: The mounting bracket is connected to the heating base by screws, snap-fits or interference fits.

6. The eutectic heating stage structure according to claim 3, characterized in that: It also includes an elastic member, which is used to drive the trachea quick connector to move towards the direction close to the connector hole.

7. The eutectic heating stage structure according to claim 6, characterized in that: The elastic member is a spring, a spring sheet or an elastic washer.

8. The eutectic heating stage structure according to claim 6, characterized in that: The elastic piece is sleeved on the trachea quick connector.

9. The eutectic heating stage structure according to claim 1, characterized in that: It also includes a pressure regulating valve, which is communicated with the joint hole.

10. The eutectic heating stage structure according to claim 9, characterized in that: The pressure regulating valves are arranged in one-to-one correspondence with the number of the ventilation pipes.

Images