High-strength target copper backboard body

Abstract

The utility model discloses a high-strength target material copper backboard body, the back surface of the copper backboard body is provided with a groove, the lower end surface of the copper backboard body is rotatably connected with a base, the inner wall of the base is rotatably connected with a second threaded rod, one end of the second threaded rod penetrates through the side wall of the base and is fixedly connected with a handle, and the other end of the second threaded rod is fixedly connected with the copper backboard body. The surface of the second threaded rod is in threaded connection with a moving block, the upper end face of the moving block is rotationally connected with a rotating rod, and one end of the rotating rod is rotationally connected into the groove. By arranging the handle, when a worker rotates the handle clockwise, the second threaded rod rotates clockwise to drive the moving block to move in the front direction; the angle between the copper back plate body and the base is increased, meanwhile, a worker rotates the handle anticlockwise, the movable block can move towards the back face, the angle between the copper back plate body and the base assembly is reduced, when a target material block is welded, the angle between the base and the copper back plate body can be adjusted according to the thickness of the target material, and the welding effect is better.

Description

Technical Field

[0001] The utility model relates to the technical field of target materials, in particular to a high-strength target material copper back plate body. Background Art

[0002] The sputtering target is mainly composed of target blanks, backing plates, etc. The target blank is the target material bombarded by high-speed ion beams and is the core part of the sputtering target. During the sputtering coating process, after the target is hit by ions, the atoms on the surface of the target are sputtered and deposited on the substrate to form an electron film. Since high-purity metals are usually soft, the sputtering target needs to be installed on a special machine to complete the sputtering process. The inside of the machine is in a high-pressure and high-vacuum environment, so the backing plate is mainly used to fix the sputtering target material and needs to have good electrical conductivity and thermal conductivity. The metal target is the target material bombarded by high-speed energetic particles. In order to expand the size of the target, several target sheets are often spliced ​​on the backing plate. When splicing, several rectangular target sheets with a certain thickness are spliced ​​edge to edge together, and then the spliced ​​targets are welded to the backing plate together.

[0003] Patent No. CN216427395U discloses a copper target material in the sputtering target material of the vacuum coating industry. The utility model has a reasonable structural design. The copper target material in the sputtering target material of the vacuum coating industry described in the utility model belongs to the field of target materials, and can determine the position of the copper target material block on the target material back plate, which is beneficial to improve the accuracy of the welding position of the copper target material block. The movable positioning frame and the fixed positioning frame perform lateral pressure on the copper target material block placed in the internal area, which can improve the fit between the first copper target material and the second copper target material, and reduce the risk of the first copper target material and the second copper target material shaking during the welding process, causing the joint gap to expand.

[0004] However, the copper target material in the above-mentioned existing sputtering target material in the vacuum coating industry cannot adjust the angle of the copper back plate body during welding, so that the target material can only be welded horizontally. When welding targets of different thicknesses, it is easy to cause different welding depths and welds, affecting the welding effect of the target material.

[0005] In order to solve the above problems, the utility model provides a high-strength target copper back plate body. Utility Model Content

[0006] In view of the deficiencies in the prior art, the utility model provides a high-strength target copper back plate body to solve the technical problem in the prior art that "during welding, the angle of the copper back plate body cannot be adjusted, so that the target material can only be welded horizontally, and when welding targets of different thicknesses, it is easy to cause differences in welding penetration and weld beads, affecting the welding effect of the target material."

[0007] To achieve the above objectives, the utility model is implemented through the following technical solutions: a high-strength target copper backplate body, comprising a copper backplate body, a groove is opened on the back of the copper backplate body, the lower end face of the copper backplate body is rotatably connected to a base, the inner wall of the base is rotatably connected to a second threaded rod, one end of the second threaded rod passes through the side wall of the base and is fixedly connected to a handle, the surface of the second threaded rod is threadedly connected to a moving block, the upper end face of the moving block is rotatably connected to a rotating rod, and one end of the rotating rod is rotatably connected in the groove.

[0008] As a preferred technical solution of the utility model, two sliding grooves are symmetrically opened on the front side of the copper back plate body, and a first threaded rod is slidably connected in the two sliding grooves respectively, one end of the first threaded rod is fixedly connected to a support plate, and a nut is threadedly connected to the surface of the first threaded rod.

[0009] As a preferred technical solution of the utility model, the front side of the copper back plate body is slidably connected to two clamping blocks, and the back sides of the two clamping blocks are fixedly connected to connecting rods.

[0010] As a preferred technical solution of the utility model, the connecting rod slides in the sliding groove, and one end of the connecting rod is fixedly connected to a first limiting block.

[0011] As a preferred technical solution of the utility model, a target body is arranged on the front side of the copper back plate body, and the inner wall of the clamping block abuts against the surface of the target body.

[0012] As a preferred technical solution of the utility model, the front side of the copper back plate body is fixedly connected with anti-skid grooves, and the nut abuts against the surface of the anti-skid grooves.

[0013] The utility model provides a high-strength target copper back plate body, which has the following beneficial effects:

[0014] 1. By setting a handle, when the staff turns the handle clockwise, the second threaded rod rotates clockwise, driving the moving block to move toward the front direction, thereby increasing the angle between the copper back plate body and the base. At the same time, when the staff turns the handle counterclockwise, the moving block can be moved toward the back direction, thereby reducing the angle between the copper back plate body and the base assembly. When welding the target block, the angle between the base and the copper back plate body can be adjusted according to the thickness of the target material to achieve a better welding effect.

[0015] 2. The clamping block is provided to determine the position of the target block on the copper back plate body, which is beneficial to improving the accuracy of the welding position of the target block. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of a high-strength target copper back plate body proposed by the utility model;

[0017] Figure 2 This is a schematic structural diagram of a high-strength target copper back plate body proposed by the utility model;

[0018] Figure 3 This is a schematic structural diagram of a high-strength target copper back plate body proposed by the utility model;

[0019] Figure 4 The utility model is a schematic structural diagram of a high-strength target copper back plate body.

[0020] In the figure: 1 copper back plate body, 2 clamping block, 3 connecting rod, 4 first limit block, 5 target body, 6 first threaded rod, 7 abutment plate, 8 nut, 9 base, 10 second threaded rod, 11 moving block, 12 rotating rod, 13 groove, 14 handle. DETAILED DESCRIPTION

[0021] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0022] refer to Figure 1-4 The utility model provides a technical solution: a high-strength target copper backing plate body, including a copper backing plate body 1, a groove 13 is opened on the back of the copper backing plate body 1, the lower end surface of the copper backing plate body 1 is rotatably connected to a base 9, the inner wall of the base 9 is rotatably connected to a second threaded rod 10, one end of the second threaded rod 10 passes through the side wall of the base 9 and is fixedly connected to a handle 14. By setting the handle 14, it is convenient to rotate the second threaded rod 10 and control the angle. The surface of the second threaded rod 10 is threadedly connected to a moving block 11, and the upper end surface of the moving block 11 is rotatably connected to a rotating rod 12, and one end of the rotating rod 12 is rotatably connected in the groove 13.

[0023] Among them, two sliding grooves are symmetrically opened on the front side of the copper back plate body 1, and the first threaded rod 6 is slidably connected in the two sliding grooves respectively. One end of the first threaded rod 6 is fixedly connected to a support plate 7, and the surface of the first threaded rod 6 is threadedly connected to a nut 8.

[0024] Among them, the front side of the copper back plate body 1 is slidably connected to two clamping blocks 2, the inner walls of the two clamping blocks 2 are provided with anti-slip grooves, and the back sides of the two clamping blocks 2 are fixedly connected to a connecting rod 3.

[0025] The connecting rod 3 slides in the sliding groove, and one end of the connecting rod 3 is fixedly connected to the first limiting block 4.

[0026] A target body 5 is disposed on the front surface of the copper back plate body 1 , and an inner wall of the clamping block 2 abuts against the surface of the target body 5 .

[0027] The front side of the copper back plate body 1 is fixedly connected with anti-skid grooves. By providing the anti-skid grooves, the clamping block 2 can clamp the target body 5 more stably, and the nut 8 abuts against the surface of the anti-skid grooves.

[0028] The working principle of the utility model is as follows: the staff places the target body 5 on the surface of the copper back plate body 1, moves the clamping block 2 to abut against the surface of the target body 5, and at the same time moves the first threaded rod 6 to the right side of the clamping block 2, tightens the nut 8, and completes the clamping of the target body 5. Then, according to the thickness of the target body 5, the staff turns the handle 14 clockwise to make the second threaded rod 10 rotate clockwise, driving the moving block 11 to move toward the front direction, so that the rotating rod 12 pushes the copper back plate body 1, so that the angle between the copper back plate body 1 and the base 9 is increased. When it is adjusted to a suitable angle, the target body 5 is welded to make the welding effect better.

[0029] The above is only a preferred specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and utility model concept of the utility model within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model.

Claims

1. A high-strength target copper backing plate body, comprising a copper backing plate body (1), characterized in that: The back side of the copper back plate body (1) is provided with a groove (13); the lower end face of the copper back plate body (1) is rotatably connected to a base (9); the inner wall of the base (9) is rotatably connected to a second threaded rod (10); one end of the second threaded rod (10) passes through the side wall of the base (9) and is fixedly connected to a handle (14); the surface of the second threaded rod (10) is threadedly connected to a moving block (11); the upper end face of the moving block (11) is rotatably connected to a rotating rod (12); one end of the rotating rod (12) is rotatably connected in the groove (13).

2. A high-strength target copper back plate body according to claim 1, characterized in that: The front side of the copper back plate body (1) is symmetrically provided with two slide grooves, and first threaded rods (6) are slidably connected in the two slide grooves respectively, one end of the first threaded rod (6) is fixedly connected with a stop plate (7), and a nut (8) is threadedly connected on the surface of the first threaded rod (6).

3. The high-strength target copper back plate body according to claim 1, characterized in that: The front side of the copper back plate body (1) is slidably connected to two clamping blocks (2), and the back sides of the two clamping blocks (2) are fixedly connected to connecting rods (3).

4. A high-strength target copper back plate body according to claim 3, characterized in that: The connecting rod (3) slides in the sliding groove, and one end of the connecting rod (3) is fixedly connected to a first limiting block (4).

5. The high-strength target copper back plate body according to claim 3, characterized in that: A target body (5) is arranged on the front surface of the copper back plate body (1), and the inner wall of the clamping block (2) abuts against the surface of the target body (5).

6. The high-strength target copper back plate body according to claim 1, characterized in that: The front side of the copper back plate body (1) is fixedly connected with an anti-skid pattern, and the nut (8) abuts against the surface of the anti-skid pattern.

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