Thermal insulation device for transfer valve of reaction chamber

Abstract

The utility model relates to a heat insulation device for a transmission valve of a reaction chamber, and belongs to the technical field of atomic layer deposition coating equipment. The reaction chamber comprises a reaction chamber body and a transmission valve, wherein heat insulation assemblies are symmetrically mounted at a feeding port of the reaction chamber body up and down in the vertical direction; the heat insulation assembly structurally comprises an air cylinder installation plate, an air cylinder is installed on the air cylinder installation plate, a telescopic frame is arranged in the telescopic direction of the air cylinder in a matched mode, a guide rail is assembled on the telescopic frame, and a driving block is arranged in the guide rail in a sliding fit mode. The driving block is connected with one end of the cylinder driving plate, and the other end of the cylinder driving plate is connected with the output end of the cylinder; the side wall of the driving block is fixedly connected with a telescopic shaft, the telescopic shaft extends into the reaction chamber body, a baffle plate is mounted at the bottom of the telescopic shaft, and a heat insulation baffle plate is assembled on the baffle plate. High-temperature radiation of the reaction chamber to the transmission valve can be isolated, damage to the transmission valve is reduced, and the service life of the transmission valve is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of atomic layer deposition coating equipment, in particular to a heat insulation device for a reaction chamber transmission valve. Background Art

[0002] In advanced ALD (atomic layer deposition) coating equipment, the transfer valve is a critical component. It is firmly installed at the feed port of the reaction chamber by bolts and sealing rings.

[0003] However, the reaction chamber usually works in a high temperature environment, which is often accompanied by strong thermal radiation. This high temperature radiation will inevitably irradiate the valve plate of the transfer valve, causing continuous thermal shock to it. Under such working conditions for a long time, the material of the transfer valve is easily ablated by the high temperature radiation, resulting in deformation, cracks and other damages on the surface of the valve plate. This damage will not only reduce the service life of the transfer valve, but may also cause the sealing failure of the transfer valve.

[0004] Therefore, in order to solve this problem, it is necessary to design a heat insulation device for the reaction chamber transfer valve. Utility Model Content

[0005] In view of the shortcomings of the above-mentioned existing production technology, the applicant provides a heat insulation device for a reaction chamber transfer valve, which can isolate the high-temperature radiation of the reaction chamber to the transfer valve, thereby reducing damage to the transfer valve and extending its service life.

[0006] The technical solution adopted by the utility model is as follows: a heat insulation device for a reaction chamber transmission valve, comprising a reaction chamber body and a transmission valve, wherein a heat insulation component is symmetrically installed up and down in the vertical direction at the feed port of the reaction chamber body; the structure of the heat insulation component comprises: a cylinder mounting plate, a cylinder is mounted on the cylinder mounting plate, a telescopic frame is arranged along the telescopic direction of the cylinder, a guide rail is mounted on the telescopic frame, and a driving block is slidably fitted in the guide rail; the driving block is connected to one end of the cylinder driving plate, and the other end of the cylinder driving plate is connected to the output end of the cylinder; the side wall of the driving block is fixedly connected to the telescopic shaft, the telescopic shaft extends into the reaction chamber body, a baffle is installed at the bottom of the telescopic shaft, and a heat insulation baffle is mounted on the baffle.

[0007] As a further improvement of the above technical solution:

[0008] Preferably, a bellows is sleeved on the periphery of the telescopic shaft, and the bellows is mounted on the cylinder mounting plate.

[0009] Preferably, a sealing ring is provided between the bellows and the cylinder mounting plate and fixed by bolts.

[0010] Preferably, a sealing ring is provided at the contact end of the bellows and the telescopic shaft and fixed by bolts.

[0011] Preferably, a first limit assembly for upper positioning is provided on the top of the telescopic frame; the structure of the first limit assembly is: it includes a first buffer mounting plate fixed on the telescopic frame, a hydraulic buffer is assembled on the first buffer mounting plate, and the hydraulic buffer moves along the length direction of the guide rail.

[0012] Preferably, a second limit assembly for lower limit is arranged on the side of the driving block; the structure of the second limit assembly is as follows: it includes a second buffer mounting plate fixed on the driving block, and a limit block is arranged below the second buffer mounting plate.

[0013] Preferably, the reaction chamber body is provided with a through hole for assembly, and a heat insulation component is installed at the through hole.

[0014] Preferably, a sealing ring for sealing is provided at the contact end between the thermal insulation component and the reaction chamber body.

[0015] The beneficial effects of the utility model are as follows:

[0016] The utility model has a compact structure and is easy to operate. It can use a cylinder to drive the heat insulation baffle to move according to the operating state of the reaction chamber to cover or open the feeding port between the transmission valve and the reaction chamber, thereby reducing the temperature rise of the transmission valve and effectively avoiding the loss of service life of the valve plate of the transmission valve due to high temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall layout structure of the utility model.

[0018] Figure 2 This is a schematic diagram of the structure of the thermal insulation component of the utility model.

[0019] Figure 3 for Figure 2 Exploded view of.

[0020] Wherein: 1. Reaction chamber body; 2. Heat insulation assembly; 3. Transfer valve;

[0021] 201, cylinder mounting plate; 202, cylinder; 203, telescopic frame; 204, guide rail; 205, drive block; 206, cylinder drive plate; 207, telescopic shaft; 208, bellows; 209, baffle; 210, heat insulation baffle; 211, first limit assembly; 212, second limit assembly;

[0022] 2111, first buffer mounting plate; 2112, hydraulic buffer;

[0023] 2121. Second buffer mounting plate; 2122. Limiting block. DETAILED DESCRIPTION

[0024] The specific implementation of the present utility model is described below in conjunction with the accompanying drawings.

[0025] like Figure 1 to Figure 3 As shown, the heat insulation device for the reaction chamber transfer valve of this embodiment includes a reaction chamber body 1 and a transfer valve 3, and a heat insulation component 2 is symmetrically installed in the vertical direction at the feed port of the reaction chamber body 1; the structure of the heat insulation component 2 includes: a cylinder mounting plate 201, a cylinder 202 is installed on the cylinder mounting plate 201, a telescopic frame 203 is arranged along the telescopic direction of the cylinder 202, a guide rail 204 is assembled on the telescopic frame 203, and a driving block 205 is slidably engaged in the guide rail 204; the driving block 205 is connected to one end of the cylinder driving plate 206, and the other end of the cylinder driving plate 206 is connected to the output end of the cylinder 202; the side wall of the driving block 205 is fixedly connected to the telescopic shaft 207, the telescopic shaft 207 extends into the reaction chamber body 1, a baffle 209 is installed at the bottom of the telescopic shaft 207, and a heat insulation baffle 210 is assembled on the baffle 209.

[0026] In this embodiment, a bellows 208 is sleeved on the periphery of the telescopic shaft 207 , and the bellows 208 is mounted on the cylinder mounting plate 201 .

[0027] In this embodiment, a sealing ring is provided between the bellows 208 and the cylinder mounting plate 201 and fixed by bolts.

[0028] In this embodiment, a sealing ring is provided between the contact ends of the bellows 208 and the telescopic shaft 207 and fixed by bolts.

[0029] In this embodiment, a first limit assembly 211 for upper positioning is provided on the top of the telescopic frame 203; the structure of the first limit assembly 211 is: it includes a first buffer mounting plate 2111 fixed on the telescopic frame 203, and a hydraulic buffer 2112 is assembled on the first buffer mounting plate 2111, and the hydraulic buffer 2112 moves along the length direction of the guide rail 204.

[0030] In this embodiment, a second limit assembly 212 for lower limit is provided on the side of the driving block 205; the structure of the second limit assembly 212 is: it includes a second buffer mounting plate 2121 fixed on the driving block 205, and a limit block 2122 is provided below the second buffer mounting plate 2121.

[0031] In this embodiment, the reaction chamber body 1 is provided with a through hole for assembly, and the heat insulation component 2 is installed at the through hole.

[0032] In this embodiment, a sealing ring for sealing is provided at the contact end between the heat insulation component 2 and the reaction chamber body 1 .

[0033] In actual work, the working method of the utility model is as follows:

[0034] According to the operating status of the reaction chamber, when the high temperature in the reaction chamber body 1 radiates to the transfer valve 3, the cylinder 202 starts to work, and the insulation baffles 210 in the upper and lower symmetrical insulation components 2 move toward each other, eventually forming an insulation layer to block the high temperature radiation from the feed port toward the transfer valve 3.

[0035] The utility model has a reasonable structure and is easy to operate. The cylinder 202 drives the heat insulation baffle 210 to move to block or open the feed port between the transfer valve 3 and the reaction chamber body 1, thereby reducing the temperature rise of the transfer valve 3 and effectively preventing the valve plate of the transfer valve 3 from wasting its service life due to high temperature.

[0036] The above description is an explanation of the utility model, not a limitation of the utility model. The scope of the utility model is defined by the claims. Any form of modification can be made within the protection scope of the utility model.

Claims

1. A heat insulation device for a reaction chamber transfer valve, characterized in that: It comprises a reaction chamber body (1) and a transfer valve (3), wherein a heat insulation component (2) is symmetrically installed vertically at the feed port of the reaction chamber body (1); The structure of the heat insulation component (2) comprises: a cylinder mounting plate (201), a cylinder (202) is mounted on the cylinder mounting plate (201), a telescopic frame (203) is arranged along the telescopic direction of the cylinder (202), a guide rail (204) is mounted on the telescopic frame (203), and a driving block (205) is slidably mounted in the guide rail (204); the driving block (205) is connected to one end of the cylinder driving plate (206), and the other end of the cylinder driving plate (206) is connected to the output end of the cylinder (202); the side wall of the driving block (205) is fixedly connected to the telescopic shaft (207), the telescopic shaft (207) extends into the reaction chamber body (1), a baffle (209) is mounted at the bottom of the telescopic shaft (207), and a heat insulation baffle (210) is mounted on the baffle (209).

2. The heat insulation device for a reaction chamber transfer valve according to claim 1, characterized in that: The outer periphery of the telescopic shaft (207) is also sleeved with a bellows (208), and the bellows (208) is mounted on the cylinder mounting plate (201).

3. The heat insulation device for a reaction chamber transfer valve according to claim 2, characterized in that: A sealing ring is provided between the bellows (208) and the cylinder mounting plate (201) and fixed by bolts.

4. The heat insulation device for a reaction chamber transfer valve according to claim 2, characterized in that: A sealing ring is provided at the contact end of the bellows (208) and the telescopic shaft (207) and is fixed by bolts.

5. The heat insulation device for a reaction chamber transfer valve according to claim 1, characterized in that: A first limit assembly (211) for upper positioning is provided on the top of the telescopic frame (203); The structure of the first limit assembly (211) is as follows: it comprises a first buffer mounting plate (2111) fixed on the telescopic frame (203), a hydraulic buffer (2112) is assembled on the first buffer mounting plate (2111), and the hydraulic buffer (2112) moves along the length direction of the guide rail (204).

6. The heat insulation device for a reaction chamber transfer valve according to claim 1, characterized in that: A second limit assembly (212) for lower limit is provided on the side of the driving block (205); The structure of the second limit assembly (212) is as follows: it comprises a second buffer mounting plate (2121) fixed on the driving block (205), and a limit block (2122) is arranged below the second buffer mounting plate (2121).

7. The heat insulation device for a reaction chamber transfer valve according to claim 1, characterized in that: The reaction chamber body (1) is provided with a through hole for assembly, and a heat insulation component (2) is installed at the through hole.

8. The heat insulation device for a reaction chamber transfer valve according to claim 7, characterized in that: A sealing ring for sealing is provided at the contact end between the heat insulation component (2) and the reaction chamber body (1).

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