Pin seat assembly and probe station for LED test

Abstract

The utility model discloses a pin seat assembly and a probe station for LED testing, which relate to the technical field of semiconductor detection and comprise an assembly body, a swing part and a probe mounting part. Two first bearing mounting holes which are distributed up and down are formed in the swing part in the vertical direction, a first supporting bearing is arranged in each first bearing mounting hole, and the two first supporting bearings are used for mounting a swing shaft; the swing part is provided with first holding receding grooves corresponding to the first bearing mounting holes, the first holding receding grooves communicate with the corresponding first bearing mounting holes, and the swing part is provided with first locking screws corresponding to the first holding receding grooves in a penetrating mode. The first supporting bearing is tightly fixed in the first bearing mounting hole by tightening the first locking screw, so that zero-clearance positioning between the first supporting bearing and the first bearing mounting hole is realized, the mounting clearance of the first supporting bearing is eliminated to a certain extent, and the positioning precision and stability are improved; and mounting and dismounting of the first supporting bearing and the swing shaft are facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor detection, in particular to a needle seat assembly and a probe station for LED testing. Background Art

[0002] During the wafer testing process, it is usually necessary to test the wafer dies. The way to test the dies is roughly as follows: the probe tip contacts the pad on the die, the test system inputs a specific electrical signal to the die through the probe, and receives the electrical signal fed back by the die through the probe. The test system determines whether the die is qualified based on the feedback signal. The die tester will install the probe on a manual displacement platform to form a probe module. The user can fine-tune the position of the probe through the displacement platform so that the probe moves along the X-axis, Y-axis or Z-axis, so that the position of the probe can match the position of the die.

[0003] In the prior art, in order to achieve the miniaturization of the needle seat assembly, such as patent No. CN202221255308.7, the horizontal adjustment of the probe is achieved by rotating within a horizontal angle, and the probe mounting part is installed on the rotating body. The rotating body rotates to drive the probe to rotate. It is well known that the rotating shaft is rotatably mounted through a bearing, but when the bearing is installed, there is a gap between the bearing mounting hole and the bearing, which is not conducive to the stability of positioning and the accuracy of angle adjustment. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a needle seat assembly for LED testing, which can eliminate the bearing installation gap to a certain extent, improve the positioning stability and the accuracy of angle adjustment.

[0005] The utility model also provides a probe station.

[0006] According to an embodiment of the utility model, a needle seat assembly for LED testing includes an assembly body, a swinging part and a probe mounting part. The swinging part is arranged on the assembly body, and the swinging part has two first bearing mounting holes distributed up and down in the vertical direction, and each of the first bearing mounting holes is provided with a first support bearing, and the two first support bearings are used to install the swing shaft; the swinging part is provided with a first clamping avoidance groove corresponding to each of the first bearing mounting holes, and the first clamping avoidance groove is connected with the corresponding first bearing mounting hole, and the swinging part is provided with a first locking screw corresponding to the first clamping avoidance groove, and the spacing of the first clamping avoidance groove can be adjusted by tightening the first locking screw, so as to achieve zero clearance positioning between the first support bearing and the first bearing mounting hole. The probe mounting part is pivotally connected to the swing shaft and is used to install the probe.

[0007] According to an embodiment of the utility model, a LED test pin socket assembly has at least the following beneficial effects:

[0008] The utility model using the above-mentioned embodiment can tightly fix the first support bearing in the first bearing mounting hole by tightening the two first locking screws distributed up and down, thereby eliminating the installation clearance of the bearing to a certain extent, and realizing zero clearance positioning between the first support bearing and the first bearing mounting hole, which is beneficial to improving the positioning accuracy and positioning stability of the swing shaft, as well as the accuracy of angle adjustment; and, when disassembling and assembling the swing shaft, by loosening the first locking screw, the first bearing mounting hole of the swing shaft will relax the clamping force on the first support bearing under the elastic deformation of the material, thereby facilitating the installation and disassembly of the first support bearing and the swing shaft.

[0009] According to some embodiments of the utility model, an axial hole is opened in the vertical direction at one end of the probe mounting portion away from the probe, and the probe mounting portion is provided with a second clamping avoidance groove corresponding to the axial hole, and the second clamping avoidance groove is connected to the axial hole, and a second locking screw is passed through the probe mounting portion corresponding to the second clamping avoidance groove, and the spacing of the second clamping avoidance groove can be adjusted by tightening the second locking screw.

[0010] According to some embodiments of the present invention, a cam is provided on the component body, and the cam abuts against an end of the probe mounting portion away from the probe, and the rotation of the cam can drive the probe mounting portion to swing.

[0011] According to some embodiments of the utility model, the component body is provided with a conical second bearing mounting hole along the axial direction of the cam, and two second support bearings arranged along the axial direction are provided in the second bearing mounting hole, and the second support bearing is used to mount the rotating shaft, and the rotating shaft is drivingly connected to the cam; a bearing clamping cone sleeve is provided between the second support bearing and the second bearing mounting hole, wherein the outer ring of the second support bearing away from the cam is folded outward to form a flange, and the bottom surface of the flange stops at the end of the bearing clamping cone sleeve, and a clamping screw is provided on the component body along the axial direction of the cam, and the nut of the clamping screw stops at the top surface of the flange.

[0012] According to some embodiments of the utility model, a toggle portion is provided at one end of the cam; a first adjusting screw is threadedly connected to the component body along a vertical direction, and a bottom of the first adjusting screw stops at the toggle portion.

[0013] According to some embodiments of the utility model, a first step hole is provided on the component body corresponding to the installation position of the first adjusting screw, a first step nut is provided in the first step hole, and the first adjusting screw is installed in the first step nut; a third clamping avoidance groove is provided on the component body, the third clamping avoidance groove is connected with the first step hole, and a third locking screw is passed through the component body corresponding to the third clamping avoidance groove, and the spacing of the third clamping avoidance groove can be adjusted by tightening the third locking screw.

[0014] According to some embodiments of the utility model, the component body further comprises a mounting seat, a Z-direction movable seat and a Y-direction movable seat. The mounting seat is used to be mounted on a probe station. The Z-direction movable seat is slidably mounted on the mounting seat and can slide along the Z-axis direction. The Y-direction movable seat is slidably mounted on the Z-direction movable seat and can slide along the Y-axis direction, and the swinging portion is arranged on the Y-direction movable seat.

[0015] According to some embodiments of the utility model, a second adjusting screw is threaded on the Z-direction moving seat, and when the second adjusting screw rotates, the Z-direction moving seat can move along the Z-axis direction relative to the Y-direction moving seat; the Z-direction moving seat is provided with a second step hole, a second step nut is provided in the second step hole, and the second adjusting screw is located in the second step nut; a fourth clamping avoidance groove is opened on the Z-direction moving seat, and the fourth clamping avoidance groove is connected with the second step hole, and the Z-direction moving seat is provided with a fourth locking screw corresponding to the fourth clamping avoidance groove, and the spacing of the fourth clamping avoidance groove can be adjusted by tightening the fourth locking screw.

[0016] According to some embodiments of the present utility model, the Y-axis moving seat is slidably mounted on the Z-axis moving seat via a double slider.

[0017] According to some embodiments of the utility model, a third adjusting screw is threaded on the Y-axis moving seat, and when the third adjusting screw rotates, the Y-axis moving seat can move relative to the mounting seat along the Y-axis direction; the Y-axis moving seat is provided with a third step hole, and a third step nut is provided in the third step hole, and a fourth adjusting screw is provided in the third step nut; a fifth clamping avoidance groove is opened on the Y-axis moving seat, and the fifth clamping avoidance groove is connected with the third step hole, and the Y-axis moving seat is provided with a fifth locking screw corresponding to the fifth clamping avoidance groove, and the spacing of the fifth clamping avoidance groove can be adjusted by tightening the fifth locking screw.

[0018] According to some embodiments of the present utility model, the Z-axis movable seat is slidably mounted on the mounting seat via a double slider.

[0019] A probe station according to an embodiment of the utility model is provided with a needle holder assembly for LED testing as described in the above embodiment.

[0020] The probe station of the utility model eliminates the installation clearance of the first supporting bearing to a certain extent, which is beneficial to improving the positioning accuracy and positioning stability of the swing shaft, as well as the accuracy of angle adjustment; moreover, when disassembling and assembling the swing shaft, by loosening the first locking screw, the first bearing mounting hole of the swing shaft will relax the clamping force on the first supporting bearing under the action of the elastic deformation of the material, thereby facilitating the assembly and disassembly of parts.

[0021] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0023] Figure 1 This is a schematic diagram of the overall structure of a needle holder assembly for LED testing according to an embodiment of the utility model;

[0024] Figure 2 This is a structural schematic diagram of a swinging portion of a needle holder assembly for LED testing according to an embodiment of the utility model;

[0025] Figure 3 This is a structural schematic diagram of a probe mounting portion of a needle holder assembly for LED testing according to an embodiment of the utility model;

[0026] Figure 4 This is a structural schematic diagram of a bearing-holding cone sleeve of a needle seat assembly for LED testing according to an embodiment of the utility model;

[0027] Figure 5 A cross-sectional view of a bearing-holding cone sleeve of a needle seat assembly for LED testing according to an embodiment of the utility model;

[0028] Figure 6 A cross-sectional view of a first adjusting screw of a needle holder assembly for LED testing according to an embodiment of the utility model;

[0029] Figure 7 This is a structural schematic diagram of a third adjusting screw of a needle holder assembly for LED testing according to an embodiment of the utility model;

[0030] Figure Number:

[0031] 100, assembly body; 101, swinging part; 102, probe mounting part; 103, first support bearing; 104, swinging shaft; 105, first clamping avoidance groove; 106, first locking screw; 107, second clamping avoidance groove; 108, second locking screw; 109, cam; 110, second support bearing; 111, rotating shaft; 112, bearing clamping cone sleeve; 113, flange; 114, clamping screw; 115 , toggle part; 116, first adjusting screw; 117, first step nut; 118, third clamping avoidance groove; 119, third locking screw; 120, mounting seat; 121, second adjusting screw; 122, second step nut; 123, fourth clamping avoidance groove; 124, fourth locking screw; 125, third adjusting screw; 126, third step nut; 127, fifth clamping avoidance groove; 128, fifth locking screw. DETAILED DESCRIPTION

[0032] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0033] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0034] In the description of the present utility model, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0035] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0036] In addition, the technical solutions between the various embodiments of the present invention can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0037] Reference Figures 1 to 7 As shown, an LED test needle holder assembly of an embodiment of the utility model comprises an assembly body 100, a swinging part 101 and a probe mounting part 102. The swinging part 101 is arranged on the assembly body 100, and the swinging part 101 has two first bearing mounting holes distributed up and down in the vertical direction, and each first bearing mounting hole is provided with a first support bearing 103, and the two first support bearings 103 are used to mount the swing shaft 104; the swinging part 101 is provided with a first clamping avoidance groove 105 corresponding to each first bearing mounting hole, and the first clamping avoidance groove 105 is connected with the corresponding first bearing mounting hole, and the swinging part 101 is penetrated with a first locking screw 106 corresponding to the first clamping avoidance groove 105, and the spacing of the first clamping avoidance groove 105 can be adjusted by tightening the first locking screw 106, so as to achieve zero clearance positioning between the first support bearing 103 and the first bearing mounting hole. The probe mounting part 102 is pivotally connected to the swing shaft 104, and is used to mount the probe.

[0038] The utility model using the above-mentioned embodiment can tightly fix the first support bearing 103 in the first bearing mounting hole by tightening the two first locking screws 106 distributed up and down, thereby realizing zero-gap positioning between the first support bearing 103 and the first bearing mounting hole, and eliminating the mounting gap of the first support bearing 103 to a certain extent, which is beneficial to improving the positioning accuracy and positioning stability of the swing shaft 104, as well as the accuracy of angle adjustment; and, when disassembling and assembling the swing shaft 104, by loosening the first locking screw 106, the first bearing mounting hole of the swing shaft 104 will relax the clamping force on the first support bearing 103 under the elastic deformation of the material, thereby facilitating the installation and disassembly of the first support bearing 103 and the swing shaft 104.

[0039] Reference Figure 3As shown, it can be understood that an axial hole is provided in the vertical direction at one end of the probe mounting part 102 away from the probe, and a second clamping avoidance groove 107 is provided in the probe mounting part 102 corresponding to the axial hole, and the second clamping avoidance groove 107 is connected to the axial hole. A second locking screw 108 is passed through the probe mounting part 102 corresponding to the second clamping avoidance groove 107, and the spacing of the second clamping avoidance groove 107 can be adjusted by tightening the second locking screw 108. By tightening the second locking screw 108, the installation gap between the axial hole and the swing shaft 104 can be eliminated to a certain extent, so that the probe mounting part 102 and the swing shaft 104 are tightly connected, and when the probe mounting part 102 is disassembled, the second locking screw 108 is loosened, and the axial hole of the probe mounting part 102 will relax the clamping force on the swing shaft 104 under the elastic deformation of the material, which is convenient for installation and disassembly.

[0040] It is understandable that the swing shaft 104 is designed as a stepped shaft, and the shaft diameter of the shaft section of the swing shaft 104 corresponding to the probe mounting part 102 is larger than the shaft diameter of the first support bearing 103 , which facilitates the disassembly of the probe mounting part 102 .

[0041] It is understandable that the swing shaft 104 is provided with a shaft ring below the probe mounting portion 102 for abutting against the probe mounting portion 102 to achieve positioning.

[0042] It can be understood that a cam 109 is disposed on the component body 100 , and the cam 109 abuts against an end of the probe mounting portion 102 away from the probe, and the rotation of the cam 109 can drive the probe mounting portion 102 to swing.

[0043] Reference Figures 4 to 5 As shown, it can be understood that the component body 100 is provided with a conical second bearing mounting hole along the axial direction of the cam 109, and two second support bearings 110 arranged along the axial direction are provided in the second bearing mounting hole, and the second support bearing 110 is used to install the rotating shaft 111, and the rotating shaft 111 is drivingly connected to the cam 109; a bearing clamping cone sleeve 112 is provided between the second support bearing 110 and the second bearing mounting hole, wherein the outer ring of the second support bearing 110 away from the cam 109 is folded outward to form a flange 113, and the bottom surface of the flange 113 stops at the end of the bearing clamping cone sleeve 112, and a clamping screw 114 is provided on the component body 100 along the axial direction of the cam 109, and the nut of the clamping screw 114 stops at the top surface of the flange 113. The outer wall of the bearing clamping cone sleeve 112 is formed into a cone, and the inner hole is a cylindrical hole. When the clamping screw 114 is tightened, the nut of the clamping screw 114 gives an axial thrust to the second support bearing 110. The bearing clamping cone sleeve 112 clamps the second support bearing 110 under the action of the flange 113 of the second support bearing 110, thereby eliminating the positioning clearance of the second support bearing 110.

[0044] Reference Figure 6As shown, it can be understood that a toggle portion 115 is provided at one end of the cam 109; a first adjusting screw 116 is screwed to the component body 100 in the vertical direction, and the bottom of the first adjusting screw 116 stops at the toggle portion 115. The first adjusting screw 116 can be raised or lowered relative to the component body 100 by rotating, thereby acting on the toggle portion 115, and the toggle portion 115 drives the cam 109 to rotate.

[0045] Reference Figure 1 and Figure 2 As shown, it can be understood that the component body 100 is provided with a first step hole corresponding to the installation position of the first adjustment screw 116, and a first step nut 117 is provided in the first step hole, and the first adjustment screw 116 is installed in the first step nut 117; the component body 100 is provided with a third clamping avoidance groove 118, and the third clamping avoidance groove 118 is connected with the first step hole, and the component body 100 is provided with a third locking screw 119 corresponding to the third clamping avoidance groove 118, and the spacing of the third clamping avoidance groove 118 can be adjusted by tightening the third locking screw 119. The first step nut 117 is installed in the first step hole, and the first step hole is clamped to the first step nut 117 by tightening the third locking screw 119. This design facilitates the installation and disassembly of the thread pair and is conducive to ensuring the adjustment accuracy of the needle seat.

[0046] Reference Figure 1 As shown, it can be understood that the component body 100 also includes a mounting seat 120, a Z-axis movable seat and a Y-axis movable seat. The mounting seat 120 is used to be mounted on the probe station. The Z-axis movable seat is slidably mounted on the mounting seat 120 and can slide along the Z-axis direction. The Y-axis movable seat is slidably mounted on the Z-axis movable seat and can slide along the Y-axis direction, and the swinging portion 101 is arranged on the Y-axis movable seat.

[0047] Reference Figure 1 to Figure 2 As shown, it can be understood that the Z-axis moving seat is threaded with a second adjusting screw 121, and when the second adjusting screw 121 rotates, the Z-axis moving seat can move relative to the Y-axis moving seat along the Z-axis direction; the Z-axis moving seat is provided with a second step hole, and a second step nut 122 is provided in the second step hole, and the second adjusting screw 121 is located in the second step nut 122; the Z-axis moving seat is provided with a fourth clamping avoidance groove 123, and the fourth clamping avoidance groove 123 is connected to the second step hole, and the Z-axis moving seat is provided with a fourth locking screw 124 corresponding to the fourth clamping avoidance groove 123, and the spacing of the fourth clamping avoidance groove 123 can be adjusted by tightening the fourth locking screw 124. Similarly, the second step nut 122 is installed in the second step hole, and the second step hole is clamped with the second step nut 122 by tightening the fourth locking screw 124. This design facilitates the installation and disassembly of the thread pair and is conducive to ensuring the adjustment accuracy of the needle seat.

[0048] It can be understood that the Y-direction moving seat is slidably mounted on the Z-direction moving seat via the double sliders.

[0049] Reference Figure 1 and Figure 7 As shown, it can be understood that the Y-axis moving seat is threaded with a third adjusting screw 125, and when the third adjusting screw 125 rotates, the Y-axis moving seat can move relative to the mounting seat 120 along the Y-axis direction; the Y-axis moving seat is provided with a third step hole, in which a third step nut 126 is provided, and in which a fourth adjusting screw is provided; the Y-axis moving seat is provided with a fifth clamping avoidance groove 127, which is connected to the third step hole, and the Y-axis moving seat is provided with a fifth locking screw 128 corresponding to the fifth clamping avoidance groove 127, and the spacing of the fifth clamping avoidance groove 127 can be adjusted by tightening the fifth locking screw 128. Similarly, the third step nut 126 is installed in the third step hole, and by tightening the fifth locking screw 128, the third step hole is clamped with the third step nut 126, so that the design is convenient for the installation and disassembly of the thread pair, and is conducive to ensuring the adjustment accuracy of the needle seat.

[0050] It can be understood that the Z-axis movable seat is slidably mounted on the mounting seat 120 via double sliders.

[0051] A probe station according to an embodiment of the utility model is provided with a needle holder assembly for LED testing as in the above embodiment.

[0052] The probe station of the utility model eliminates the installation clearance of the first support bearing 103 to a certain extent, which is beneficial to improving the positioning accuracy and positioning stability of the swing shaft 104, as well as the accuracy of angle adjustment; moreover, when disassembling and assembling the swing shaft 104, by loosening the first locking screw 106, the first bearing mounting hole of the swing shaft 104 will relax the clamping force on the first support bearing 103 under the action of the elastic deformation of the material, thereby facilitating the assembly and disassembly of parts.

[0053] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0054] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A needle holder assembly for LED testing, characterized in that: include: Component body; A swinging part is arranged on the component body, the swinging part is provided with two first bearing mounting holes distributed up and down in the vertical direction, each of the first bearing mounting holes is provided with a first support bearing, and the two first support bearings are used to install the swinging shaft; the swinging part is provided with a first clamping avoidance groove corresponding to each of the first bearing mounting holes, the first clamping avoidance groove is communicated with the corresponding first bearing mounting hole, the swinging part is penetrated with a first locking screw corresponding to the first clamping avoidance groove, and the spacing of the first clamping avoidance groove can be adjusted by tightening the first locking screw; and The probe mounting portion is pivotally connected to the swing shaft and is used for mounting the probe.

2. The LED test pin socket assembly according to claim 1, characterized in that: An axial hole is formed in the vertical direction at one end of the probe mounting portion away from the probe, and a second clamping avoidance groove is formed in the probe mounting portion corresponding to the axial hole. The second clamping avoidance groove is connected to the axial hole, and a second locking screw is passed through the probe mounting portion corresponding to the second clamping avoidance groove. The spacing of the second clamping avoidance groove can be adjusted by tightening the second locking screw.

3. The LED testing needle holder assembly according to claim 1, characterized in that: A cam is arranged on the component body, and the cam abuts against an end of the probe mounting portion away from the probe. The rotation of the cam can drive the probe mounting portion to swing.

4. The LED testing needle holder assembly according to claim 3, characterized in that: The component body is provided with a conical second bearing mounting hole along the axial direction of the cam, and two second support bearings arranged along the axial direction are provided in the second bearing mounting hole, and the second support bearing is used to mount a rotating shaft, and the rotating shaft is drivingly connected to the cam; a bearing clamping cone sleeve is provided between the second support bearing and the second bearing mounting hole, wherein the outer ring of the second support bearing away from the cam is folded outward to form a flange, and the bottom surface of the flange stops at the end of the bearing clamping cone sleeve, and a clamping screw is provided on the component body along the axial direction of the cam, and the nut of the clamping screw stops at the top surface of the flange.

5. The LED testing needle holder assembly according to claim 3, characterized in that: One end of the cam is provided with a toggle portion; the component body is threadedly connected with a first adjusting screw in a vertical direction, and the bottom of the first adjusting screw stops at the toggle portion.

6. The LED testing needle holder assembly according to claim 5, characterized in that: The component body is provided with a first step hole corresponding to the installation position of the first adjusting screw, and a first step nut is provided in the first step hole, and the first adjusting screw is installed in the first step nut; the component body is provided with a third clamping avoidance groove, and the third clamping avoidance groove is connected with the first step hole, and the component body is provided with a third locking screw corresponding to the third clamping avoidance groove, and the spacing of the third clamping avoidance groove can be adjusted by tightening the third locking screw.

7. The LED testing needle holder assembly according to claim 1, characterized in that: The component body also includes: A mounting base, used for mounting on a probe station; A Z-direction movable seat is slidably mounted on the mounting seat and is capable of sliding along the Z-axis direction; and The Y-direction moving seat is slidably mounted on the Z-direction moving seat and can slide along the Y-axis direction. The swinging part is arranged on the Y-direction moving seat.

8. The LED testing needle holder assembly according to claim 7, characterized in that: A second adjusting screw is threaded on the Z-direction moving seat, and when the second adjusting screw rotates, the Z-direction moving seat can move along the Z-axis direction relative to the Y-direction moving seat; the Z-direction moving seat is provided with a second step hole, a second step nut is provided in the second step hole, and the second adjusting screw is located in the second step nut; a fourth clamping avoidance groove is provided on the Z-direction moving seat, and the fourth clamping avoidance groove is connected with the second step hole, and the Z-direction moving seat is provided with a fourth locking screw corresponding to the fourth clamping avoidance groove, and the spacing of the fourth clamping avoidance groove can be adjusted by tightening the fourth locking screw.

9. The LED testing needle holder assembly according to claim 7, characterized in that: A third adjusting screw is threaded on the Y-axis moving seat, and when the third adjusting screw rotates, the Y-axis moving seat can move relative to the mounting seat along the Y-axis direction; the Y-axis moving seat is provided with a third step hole, in which a third step nut is provided, and in which a fourth adjusting screw is provided; a fifth clamping avoidance groove is provided on the Y-axis moving seat, and the fifth clamping avoidance groove is connected with the third step hole, and the Y-axis moving seat is provided with a fifth locking screw corresponding to the fifth clamping avoidance groove, and the spacing of the fifth clamping avoidance groove can be adjusted by tightening the fifth locking screw.

10. A probe station, characterized in that: A LED testing needle holder assembly as claimed in any one of claims 1 to 9 is provided.

Images