Mounting structure of quartz cavity

Abstract

The utility model relates to the technical field of quartz cavity fixing, and discloses a mounting structure of a quartz cavity. The mounting structure of the quartz cavity comprises a bottom plate, a supporting column is fixedly mounted above the bottom plate, a connecting shaft is mounted at the top end of the supporting column in a penetrating manner, a limiting shaft is mounted in the center of the supporting column in a penetrating manner, a limiting rod is mounted on the rear side of the limiting shaft in a penetrating manner, and a transmission rod is mounted at the left end of the connecting shaft in a penetrating manner; when the upper portion of the movable plate bears the weight of the quartz cavity, the movable plate can drive the connecting blocks on the two sides to move downwards, so that the position of the upper end of the damping rod is changed, the upper end of the damping rod is connected with the movable shaft through the transmission blocks, and the movable shaft is fixedly connected with the transmission rods on the left side and the right side of the bottom plate; the damping rod can drive the transmission rod to rotate with the axis of the connecting shaft as the reference, so that the transmission rod drives the limiting frames to move upwards, and the distance between the limiting frames on the front side and the rear side can be reduced along with rotation of the transmission rod, so that the limiting frames can fix the quartz cavity conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz cavity fixing, in particular to a mounting structure of a quartz cavity. Background Art

[0002] A plasma quartz chamber is a closed chamber made of quartz material, which is often filled with plasma gas. Plasma is a high-temperature, high-density gas composed of positively charged ions and negatively charged electrons, and has conductive properties. This quartz chamber can be used in the fields of plasma physics research, plasma processing technology, and material surface modification. The plasma quartz chamber can effectively isolate the plasma from the outside world, thereby improving the purity and density of the plasma, while protecting external equipment from the influence of the plasma.

[0003] The existing referenceable Chinese utility model patent with announcement number CN205188475U discloses a mounting device for clamping a quartz cavity, which is mainly composed of a pair of semi-circular column arc-shaped clamping brackets and a fastening device; fastening side panels are provided at both ends of the clamping brackets, and a gripper is provided at the upper middle part of the clamping brackets. The inner surfaces of the two semi-circular column arc-shaped clamping brackets are closely attached to the semi-circular column arc-shaped buffer pads; bolts, nuts, and springs are used to adjust the spacing between the corresponding side panels on both sides of the clamping brackets, so that the semi-circular column arc-shaped clamping brackets can clamp the quartz cavity or be separated from the quartz cavity. The utility model mounting device is characterized by simple structure, convenient assembly and disassembly, low cost, and more practicality.

[0004] The existing quartz cavity installation structure generally limits the position of the clamps on both sides of the quartz cavity by bolts. When fixing, it is necessary to first determine the relative position between the quartz cavity and the fixing structure, and then tighten the bolts to fix it, which is very inconvenient. At the same time, during the process of tightening the bolts, the quartz cavity may be broken and damaged due to excessive pressure. Utility Model Content

[0005] 1. Technical issues to be resolved

[0006] In view of the deficiencies in the prior art, the utility model provides a quartz cavity installation structure, which has the advantages of being easy to fix and being able to avoid damage to the quartz cavity, thereby solving the above-mentioned technical problems.

[0007] (II) Technical solution

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a mounting structure of a quartz cavity comprises: a bottom plate, a supporting column is fixedly installed on the top of the bottom plate, a connecting shaft is inserted and installed on the top of the supporting column, a limiting shaft is inserted and installed on the center of the supporting column, a limiting rod is inserted and installed on the rear side of the limiting shaft, a transmission rod is inserted and installed on the left end of the connecting shaft, a movable shaft is fixedly installed on the front end of the transmission rod, a limiting frame is movably installed on the rear end of the transmission rod, a rubber pad is fixedly installed inside the limiting frame, a movable plate is movably installed on the top of the bottom plate, a limiting column is inserted and installed on the top of the movable plate, a supporting spring is inserted and installed on the outside of the limiting column, a connecting block is fixedly installed on the top of the movable plate, a transmission block is movably installed on the top of the connecting block, a damping rod is fixedly installed on the top of the transmission block, and a connecting spring is inserted and installed on the outside of the damping rod; the rubber pad can prevent damage to the surface of the quartz cavity.

[0009] As the preferred technical solution of the utility model, the support columns are symmetrically installed at the four corners of the base plate with the center of the base plate as the reference, the connecting axis is symmetrically installed front and back at the top ends of the left and right support columns at the front and back ends of the base plate, and the limiting axis is symmetrically installed at the center of the left and right support columns on the base plate with the center of the base plate as the reference; the support columns can support the connecting axis and the limiting axis.

[0010] As the preferred technical solution of the utility model, the limit rod is rotatably connected to the support column through the limit shaft, the transmission rod is rotatably connected to the support column through the connecting shaft, and the movable shaft connects the two transmission rods on the left and right sides of the front and rear ends of the base plate; the limit rod can limit the position of the lower end of the limit frame.

[0011] As the preferred technical solution of the utility model, the limit frame is installed at the ends of the transmission rods on the front and rear sides of the base plate in a mirror-symmetrical manner with the center of the base plate as the reference, and the limit frame is rotationally connected to the limit rod and the transmission rod; the limit frame can limit the position of the quartz cavity.

[0012] As a preferred technical solution of the utility model, the bottom end of the limit column is fixedly connected to the top surface of the base plate, the bottom end of the movable plate contacts the upper end of the support spring, and a sliding connection is formed between the movable plate and the limit column; the limit column can limit the movement direction of the movable plate.

[0013] As the preferred technical solution of the utility model, the transmission block is installed at the upper and lower ends of the damping rod in a mirror-symmetrical manner with the center of the damping rod as the reference, and the upper and lower ends of the connecting spring are respectively fixedly connected with the transmission blocks at the upper and lower ends of the damping rod; the transmission block can facilitate the damping rod to form a rotational connection with the connecting block at the bottom and a rotational connection with the movable shaft at the top.

[0014] As the preferred technical solution of the utility model, the damping rod is rotationally connected through the lower transmission block, the connecting block and the movable plate, and the upper end of the damping rod is rotationally connected through the connecting block and the movable shaft; the damping rod can absorb part of the elastic force of the connecting spring to prevent the connecting spring from rebounding too quickly.

[0015] Compared with the prior art, the utility model provides a quartz cavity installation structure, which has the following beneficial effects:

[0016] 1. The utility model sets a movable plate, the lower side of the movable plate contacts with the supporting spring, the movable plate is inserted and installed above the limiting column, and forms a sliding connection with the limiting column. When the movable plate bears the weight of the quartz cavity above the movable plate, the movable plate will drive the connecting blocks on both sides to move downward, thereby changing the position of the upper end of the damping rod. Since the upper end of the damping rod is connected to the movable shaft through the transmission block, and the movable shaft is fixedly connected to the transmission rods on the left and right sides of the bottom plate, the damping rod will drive the transmission rod to rotate with the axis of the connecting shaft as the reference, so that the transmission rod drives the limit frame to move upward, and the distance between the limit frames on the front and rear sides will decrease with the rotation of the transmission rod, so that the limit frame can fix the quartz cavity. When the quartz cavity is taken out and an upward pulling force is applied to the quartz cavity, the movable plate will be reset under the drive of the supporting spring, and the transmission rod will also be reset accordingly, so that the distance between the limit frames is increased to facilitate the removal of the quartz cavity.

[0017] 2. The utility model sets a damping rod, and the damping rod is connected to the movable shaft and the connecting block through a transmission block. The upper and lower ends of the connecting spring are fixedly connected with the transmission blocks at the upper and lower ends of the damping rod respectively. When the movable plate moves downward under the weight of the quartz cavity, the damping rod will be stretched, and the transmission block will stretch the connecting spring. After the position of the movable plate tends to be stable, the connecting spring will shrink and reduce the distance between the upper and lower ends of the damping rod, thereby rotating the transmission rod. After the rubber pad on the inner wall of the limit frame contacts the quartz cavity, the connecting spring will stop shrinking. This method can fix the quartz cavity while maintaining a certain pressure between the limit frame and the quartz cavity, thereby preventing the quartz cavity from being broken due to excessive pressure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the connection structure between the bottom plate and the movable plate of the utility model;

[0020] Figure 3 This is a schematic diagram of the connection structure between the movable plate and the movable shaft of the utility model;

[0021] Figure 4 This is a schematic diagram of the connection structure between the limit frame and the limit rod of the utility model;

[0022] Among them: 1. bottom plate; 11. support column; 12. connecting shaft; 13. limit shaft; 14. limit rod; 15. transmission rod; 16. movable shaft; 17. limit frame; 18. rubber pad; 2. movable plate; 21. limit column; 22. support spring; 23. connecting block; 24. transmission block; 25. damping rod; 26. connecting spring. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0024] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] See also Figure 1 - Figure 4 In this embodiment, the installation structure of the quartz chamber includes: a base plate 1, a support column 11 is fixedly installed on the top of the base plate 1, a connecting shaft 12 is inserted through the top of the support column 11, a limiting shaft 13 is inserted through the center of the support column 11, a limiting rod 14 is inserted through the rear side of the limiting shaft 13, a transmission rod 15 is inserted through the left end of the connecting shaft 12, a movable shaft 16 is fixedly installed on the front end of the transmission rod 15, a limiting frame 17 is movably installed on the rear end of the transmission rod 15, and a rubber pad 18 is fixedly installed inside the limiting frame 17.

[0027] The support columns 11 are symmetrically installed at the four corners of the base plate 1 with the center of the base plate 1 as the reference, the connecting shaft 12 is symmetrically installed at the top ends of the support columns 11 on the left and right sides of the base plate 1 at the front and back ends, and the limiting shaft 13 is symmetrically installed at the center of the support columns 11 on the left and right sides of the base plate 1 with the center of the base plate 1 as the reference.

[0028] The limiting rod 14 is rotatably connected to the support column 11 via the limiting shaft 13 , the transmission rod 15 is rotatably connected to the support column 11 via the connecting shaft 12 , and the movable shaft 16 connects the two transmission rods 15 at the left and right sides of the front and rear ends of the bottom plate 1 .

[0029] The limit frame 17 is installed at the ends of the transmission rods 15 on the front and rear sides of the bottom plate 1 in a mirror-symmetrical manner with the center of the bottom plate 1 as the reference. The limit frame 17 is rotationally connected to the limit rod 14 and the transmission rod 15.

[0030] Specifically, the base plate 1 can limit the position of the support column 11, the support column 11 can support the connecting shaft 12 and the limit shaft 13, the connecting shaft 12 can facilitate the rotation of the transmission rod 15, the limit shaft 13 can facilitate the rotation of the limit rod 14, the limit rod 14 can limit the position of the lower end of the limit frame 17, the transmission rod 15 can drive the limit frame 17 to move, the movable shaft 16 can facilitate the rotational connection between the transmission rod 15 and the connecting block 23, the limit frame 17 can limit the position of the quartz cavity, and the rubber pad 18 can prevent damage to the surface of the quartz cavity.

[0031] A movable plate 2 is movably installed above the base plate 1, a limiting column 21 is inserted and installed above the movable plate 2, a supporting spring 22 is inserted and installed on the outer side of the limiting column 21, a connecting block 23 is fixedly installed above the movable plate 2, a transmission block 24 is movably installed above the connecting block 23, a damping rod 25 is fixedly installed above the transmission block 24, and a connecting spring 26 is inserted and installed on the outer side of the damping rod 25.

[0032] The bottom end of the limiting column 21 is fixedly connected to the top surface of the bottom plate 1 , and the bottom end of the movable plate 2 is in contact with the upper end of the supporting spring 22 , so that a sliding connection is formed between the movable plate 2 and the limiting column 21 .

[0033] The transmission block 24 is installed at the upper and lower ends of the damping rod 25 in a mirror-symmetrical manner with the center of the damping rod 25 as a reference, and the upper and lower ends of the connecting spring 26 are fixedly connected to the transmission blocks 24 at the upper and lower ends of the damping rod 25 respectively.

[0034] The damping rod 25 is rotatably connected to the movable plate 2 via the lower transmission block 24 and the connecting block 23 , and the upper end of the damping rod 25 is rotatably connected to the movable shaft 16 via the connecting block 23 .

[0035] Specifically, the movable plate 2 can drive the connecting block 23 to move, the limit column 21 can limit the movement direction of the movable plate 2, the support spring 22 can facilitate the resetting of the movable plate 2, the connecting block 23 can limit the position of the transmission block 24, and the transmission block 24 can facilitate the damping rod 25 to form a rotational connection with the connecting block 23 at the bottom and a rotational connection with the movable shaft 16 at the top. The damping rod 25 can absorb part of the elastic force of the connecting spring 26 to prevent the connecting spring 26 from rebounding too quickly, and the connecting spring 26 can prevent the quartz cavity from being subjected to excessive force.

[0036] When in use, the lower part of the movable plate 2 contacts with the supporting spring 22, and the movable plate 2 is inserted and installed above the limiting column 21, and forms a sliding connection with the limiting column 21. When the movable plate 2 bears the weight of the quartz cavity above, the movable plate 2 will drive the connecting blocks 23 on both sides to move downward, thereby changing the position of the upper end of the damping rod 25. Since the upper end of the damping rod 25 is connected to the movable shaft 16 through the transmission block 24, and the movable shaft 16 is fixedly connected to the transmission rods 15 on the left and right sides of the bottom plate 1, the damping rod 25 will drive the transmission rod 15 to rotate with the axis of the connecting shaft 12 as the reference, so that the transmission rod 15 drives the limiting frame 17 to move upward, and the distance between the limiting frames 17 on the front and rear sides will decrease with the rotation of the transmission rod 15, so that the limiting frame 17 can fix the quartz cavity. When the quartz cavity is taken out and an upward pulling force is applied to the quartz cavity, the movable plate 2 will be moved under the belt of the supporting spring 22 When the movable plate 2 is reset, the transmission rod 15 will also be reset, so that the distance between the limit frames 17 is increased to facilitate the removal of the quartz cavity. The damping rod 25 is connected to the movable shaft 16 and the connecting block 23 through the transmission block 24. The upper and lower ends of the connecting spring 26 are respectively fixedly connected with the transmission blocks 24 at the upper and lower ends of the damping rod 25. When the movable plate 2 moves downward under the weight of the quartz cavity, the damping rod 25 will be stretched, and the transmission block 24 will stretch the connecting spring 26. After the position of the movable plate 2 tends to be stable, the connecting spring 26 will shrink and reduce the distance between the upper and lower ends of the damping rod 25, so that the transmission rod 15 rotates. After the rubber pad 18 on the inner wall of the limit frame 17 contacts the quartz cavity, the connecting spring 26 will stop shrinking. This method can fix the quartz cavity while maintaining a certain pressure between the limit frame 17 and the quartz cavity, thereby preventing the quartz cavity from being broken due to excessive pressure.

[0037] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. The installation structure of the quartz chamber is characterized by: include: A bottom plate (1), a support column (11) is fixedly mounted on the top of the bottom plate (1), a connecting shaft (12) is inserted through the top of the support column (11), a limit shaft (13) is inserted through the center of the support column (11), a limit rod (14) is inserted through the rear side of the limit shaft (13), a transmission rod (15) is inserted through the left end of the connecting shaft (12), a movable shaft (16) is fixedly mounted on the front end of the transmission rod (15), a limit frame (17) is movably mounted on the rear end of the transmission rod (15), and the limit frame (17) A rubber pad (18) is fixedly installed inside the bottom plate (1), a movable plate (2) is movably installed above the bottom plate (1), a limiting column (21) is inserted and installed above the movable plate (2), and a support spring (22) is inserted and installed outside the limiting column (21), a connecting block (23) is fixedly installed above the movable plate (2), a transmission block (24) is movably installed above the connecting block (23), a damping rod (25) is fixedly installed above the transmission block (24), and a connecting spring (26) is inserted and installed outside the damping rod (25).

2. The installation structure of the quartz chamber according to claim 1, characterized in that: The support columns (11) are symmetrically mounted at the four corners of the bottom plate (1) with the center of the bottom plate (1) as a reference, the connecting shaft (12) is symmetrically mounted at the top ends of the support columns (11) on the left and right sides of the bottom plate (1) at the front and rear ends, and the limiting shaft (13) is symmetrically mounted at the center of the support columns (11) on the left and right sides of the bottom plate (1) with the center of the bottom plate (1) as a reference.

3. The installation structure of the quartz chamber according to claim 1, characterized in that: The limiting rod (14) is rotatably connected to the support column (11) via the limiting shaft (13), the transmission rod (15) is rotatably connected to the support column (11) via the connecting shaft (12), and the movable shaft (16) connects the two transmission rods (15) at the front and rear ends and the left and right sides of the bottom plate (1).

4. The installation structure of the quartz chamber according to claim 1, characterized in that: The limit frame (17) is mounted at the ends of the transmission rods (15) on the front and rear sides of the base plate (1) in a mirror-symmetrical manner with the center of the base plate (1) as a reference, and the limit frame (17) is rotationally connected to the limit rod (14) and the transmission rod (15).

5. The installation structure of the quartz chamber according to claim 1, characterized in that: The bottom end of the limiting column (21) is fixedly connected to the top surface of the bottom plate (1), the bottom end of the movable plate (2) is in contact with the upper end of the supporting spring (22), and a sliding connection is formed between the movable plate (2) and the limiting column (21).

6. The installation structure of the quartz chamber according to claim 1, characterized in that: The transmission block (24) is mounted on the upper and lower ends of the damping rod (25) in a mirror-symmetrical manner with the center of the damping rod (25) as a reference, and the upper and lower ends of the connecting spring (26) are respectively fixedly connected to the transmission blocks (24) at the upper and lower ends of the damping rod (25).

7. The installation structure of the quartz chamber according to claim 1, characterized in that: The damping rod (25) is rotationally connected to the movable plate (2) via the lower transmission block (24), the connecting block (23), and the upper end of the damping rod (25) is rotationally connected to the movable shaft (16) via the connecting block (23).

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