Baffle plate for protecting coating material from being plated on cooling copper plate

Abstract

The utility model provides a baffle plate for plating a coating material on a cooling copper plate, the baffle plate is in a rectangular strip shape, a mounting hole is formed in the plate surface of the baffle plate, a threaded piece is inserted into the mounting hole, the baffle plate is fixed on the surface of the cooling baffle plate through the threaded piece, and the included angle between the bottom surface of the baffle plate and the vertical direction is 80 degrees. According to the baffle plate for plating the coating material on the cooling copper plate, the baffle plate is arranged on the cooling plate, so that the target material can be effectively prevented from being sputtered on the cooling plate, the cleaning frequency and difficulty of the cooling plate are reduced, manpower and material resources are saved, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering, in particular to a baffle plate used for protecting coating materials from being plated onto a cooling copper plate. Background Art

[0002] Coating technology is a material used to enhance the transmission, reflection or polarization properties of optical components. It is composed of thin layers of materials such as oxides, metals or rare earths. Coating technology generally has two methods: physical vapor deposition (PVD) and chemical vapor deposition (CVD). Physical vapor deposition (PVD) bombards the target material with plasma, and the target atoms detach from the target material and fall on the substrate surface to form a thin film; chemical vapor deposition (CVD) grows a dielectric film on the surface of the wafer through a chemical reaction.

[0003] During the coating process, the target material will be sputtered onto the cooling plate outside the film material by the action of ions. When there is too much accumulation, it will affect the cooling effect of the cooling plate, so it needs to be removed and cleaned regularly. However, it is difficult to remove the cooling plate, which will increase the workload. When the surface coating of the cooling plate is removed by sandblasting, the cooling copper tube on the cooling plate will be thinned and easily leak, affecting the normal operation and service life of the equipment. Utility Model Content

[0004] The utility model aims to provide a baffle plate for protecting coating materials from being plated onto a cooling copper plate, so as to solve the technical problem that during the coating process, target materials are sputtered onto the cooling plate outside the film material through the action of electric ions.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: to provide a baffle for protecting the coating material from being plated onto the cooling copper plate, the baffle being in the shape of a rectangular strip, a mounting hole being opened on the plate surface of the baffle, a threaded member being inserted into the mounting hole, the baffle being fixed to the surface of the cooling baffle by the threaded member, and the angle between the bottom surface of the baffle and the vertical direction is 80°.

[0006] In one embodiment, the baffle is an aluminum baffle.

[0007] In one embodiment, the baffle is a hollow structure, and the wall thickness of the baffle is 2 mm.

[0008] In one embodiment, a plurality of the mounting holes are evenly distributed on the baffle.

[0009] In one embodiment, the threaded member is a screw.

[0010] In one embodiment, the cross section of the baffle is rectangular, and the width of the baffle is 25 mm.

[0011] One or more of the above technical solutions in the embodiments of the present utility model have at least the following technical effects or advantages:

[0012] The baffle plate for protecting the coating material from being plated onto the cooling copper plate provided in the embodiment of the utility model can effectively prevent the target material from being sputtered onto the cooling plate by setting the baffle plate on the cooling plate, thereby reducing the number and difficulty of cleaning the cooling plate, saving manpower and material resources, and improving work efficiency;

[0013] By setting the angle between the bottom surface of the baffle and the vertical direction to 80°, the portion of the target material sputtered onto the baffle can slide down along the inclined surface of the baffle to avoid accumulation on the baffle and affecting the protective effect of the baffle; in addition, the inclined baffle can increase its effective protection area (projected area) to improve the protection effect.

[0014] By providing mounting holes and threaded parts for the baffle, the baffle can be conveniently fixed on the cooling plate, and the baffle can also be disassembled and replaced as needed, thereby increasing the service life and flexibility of the baffle. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 A schematic structural diagram of a baffle provided in an embodiment of the utility model.

[0017] The reference numerals are as follows:

[0018] 1. baffle; 11. board surface; 12. mounting hole; 13. hollow hole. DETAILED DESCRIPTION

[0019] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0020] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0021] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0022] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] See also Figure 1 The embodiment of the present application provides a baffle for protecting a coating material from being plated onto a cooling copper plate. The baffle is in the shape of a rectangular strip. A mounting hole 12 is provided on a plate surface 11 of the baffle 1. A threaded member is inserted into the mounting hole 12. The baffle 1 is fixed to the surface of the cooling baffle by a threaded member (specifically, a screw, etc.), and the angle between the bottom surface of the baffle 1 and the vertical direction is 80°.

[0024] In one embodiment, the baffle is an aluminum baffle 1. The aluminum baffle 1 has the advantage of being lightweight, so that the baffle 1 is relatively light. When a thick coating accumulates on the surface of the baffle 1, the baffle 1 can be easily removed (the baffle 1 is connected to the cooling plate via a threaded member), and when sandblasting the baffle 1, since the aluminum baffle 1 is relatively soft, it is easier to sandblast and remove the coating on the surface of the baffle 1.

[0025] In one embodiment, the baffle 1 is a hollow structure, and the wall thickness of the baffle 1 is 2 mm. By setting the baffle 1 as a hollow structure, the baffle 1 is further reduced in weight while ensuring that the baffle 1 has a certain strength.

[0026] In one embodiment, the baffle plate is evenly provided with a plurality of mounting holes 12. By providing a plurality of evenly distributed mounting holes 12, the baffle plate 1 is more firmly mounted on the cooling plate, and the baffle plate 1 is prevented from being loosened from the cooling plate during sputtering.

[0027] In one embodiment, the cross section of the baffle is rectangular, and the width of the baffle 1 is 25 mm.

[0028] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A baffle plate for protecting a coating material from being plated onto a cooling copper plate, characterized in that: The baffle is in the shape of a rectangular strip, with a mounting hole on the plate surface, a threaded member inserted into the mounting hole, the baffle is fixed to the surface of the cooling baffle by the threaded member, and the angle between the bottom surface of the baffle and the vertical direction is 80°.

2. A baffle plate for protecting a coating material from being plated onto a cooling copper plate according to claim 1, characterized in that: The baffle is an aluminum baffle.

3. A baffle plate for protecting a coating material from being plated onto a cooling copper plate according to claim 1, characterized in that: The baffle plate is a hollow structure, and the wall thickness of the baffle plate is 2 mm.

4. A baffle plate for protecting a coating material from being plated onto a cooling copper plate according to claim 1, characterized in that: A plurality of mounting holes are evenly distributed on the baffle.

5. The baffle plate for protecting the coating material from being plated onto the cooling copper plate according to claim 1, characterized in that: The threaded member is a screw.

6. The baffle plate for protecting the coating material from being plated onto the cooling copper plate according to claim 1, characterized in that: The cross section of the baffle is rectangular, and the width of the baffle is 25 mm.

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