Buffer used for being installed on wafer visual inspection placing table

Abstract

The utility model relates to a buffer used for being installed on a wafer visual inspection placing table. The buffer is mainly applied to a silicon wafer processing process. The device comprises a U-shaped clamping groove, a buffering column and a buffering cushion, the buffering cushion is arranged on the buffering column, and the buffering column is arranged on the U-shaped clamping groove. The design of the groove of the U-shaped clamping groove enables the U-shaped clamping groove to stably clamp the wafer placing table, and the position of the U-shaped clamping groove can be conveniently adjusted, so that the U-shaped clamping groove is suitable for wafers of any size. The main body is constructed by adopting PVC (polyvinyl chloride) and a latex pad, and is provided with a U-shaped clamping groove, and the U-shaped clamping groove is made of a PVC material, has better elasticity and is convenient to fix and move, so that the U-shaped clamping groove does not directly contact with the bottom of the wafer basket to collide with the bottom of the wafer basket when the U-shaped clamping groove is placed and falls down, and the broken edges caused by the situation are reduced. The positioning device can be applied to buffering of various wafers in accordance with sizes, can be debugged into different heights at the same time, can achieve a buffering effect, and can also avoid scratching among the wafers due to the fact that the wafers are jacked too high.

Description

Technical Field

[0001] The utility model discloses a buffer for being installed on a wafer visual inspection placement table, which is mainly applied to the processing process of semiconductor materials such as silicon wafers and the like, and is specifically used for wafer buffering during wafer visual inspection. Background Art

[0002] With the development of integrated circuit technology, the requirements for wafers, as the carrier used to manufacture integrated circuits, have become increasingly higher. Advanced processes have always been the target of competition among chip giants, especially today when Moore's Law is gradually slowing down or even failing, and any progress in advanced processes has received special attention.

[0003] But in fact, for chip manufacturers, improving the yield rate may be a more important challenge. Improving product yield is the only way to mass produce chips with different processes, and it is as important as the research and development of advanced processes. If advanced processes represent the leading technology of wafer fabs, then product yield represents the reliability and economy of its products. For cutting-edge logic wafer fabs, a 1% yield improvement means $150 million in net profit. Therefore, improving yield, as a topic throughout the entire life cycle of the chip, is the ultimate challenge that chip manufacturers need to face from beginning to end, and it is also a self-competition among chip manufacturers. The purpose of the utility model is to provide a buffer for installation on a wafer visual inspection placement table to prevent the wafer from colliding with the bottom of the wafer basket due to a series of actions such as picking up and putting down the wafer during visual inspection, thereby reducing defects caused by collisions and improving yields. Utility Model Content

[0004] In order to achieve the above functional requirements, the purpose of the utility model is to provide a buffer for installation on a wafer visual inspection placement table.

[0005] The purpose of the utility model can be achieved through the following technical scheme: the buffer consists of a U-shaped slot, a buffer column and a buffer pad, the buffer pad is on the buffer column, and the buffer column is on the U-shaped slot.

[0006] In an embodiment of the present invention, the U-shaped slot and the buffer column of the buffer are made of PVC material and are integrally formed.

[0007] In one embodiment of the utility model, the buffer is fixed on the wafer visual inspection placement table by a U-shaped slot and a buckle, and the wafer box is placed on the buffer to lift up the wafer through the height of the buffer.

[0008] In one embodiment of the present invention, the buffer column of the buffer is composed of four column pieces. The height of the column is determined by adjusting the number of column pieces, thereby adapting to wafer baskets of wafers of various sizes.

[0009] In one embodiment of the utility model, the core part of the buffer is a latex buffer pad, which is bonded to the buffer column by an adhesive to play a buffering role and is easy to replace.

[0010] Based on the above, the advantages and features of the embodiments of the utility model are that the fixture design can ensure that the wafer plays a buffering role in the dropping process of the wafer during visual inspection, thereby reducing the abnormal edge breakage of the wafer caused by collision. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 Schematic diagram of the planar structure of the buffer;

[0012] Figure 2 Plan view and operation diagram of the buffer;

[0013] Description of Figure Numbers:

[0014] 1 U-shaped card slot

[0015] 2 Buffer Column

[0016] 3 cushions DETAILED DESCRIPTION

[0017] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. It should be noted that the embodiments in this application and the features in the embodiments can be combined with each other arbitrarily without conflict.

[0018] The specific implementation of the utility model is described in detail below with reference to the accompanying drawings:

[0019] A buffer for installation on a wafer visual inspection placement table is mainly used for wafer visual inspection buffering. The buffer is fixed on the wafer placement table through a U-shaped card slot 1, so that the wafer basket is not misaligned; the detachable buffer column 2 can adjust the overall height of the device, so that the buffer can be suitable for wafer baskets of various sizes, and can prevent the wafer from being pushed too high, causing scratches between wafers. The buffer is made of PVC material and latex. The main features of using PVC material are its lightness, waterproof and moisture-proof, flame retardant and heat insulation, stable physical and chemical properties, chemical corrosion resistance, long service life, and economical price, which can make the fixing device and buffer column have a long service life; and the buffer pad 3 is made of latex material, which has good elasticity, can well expect the buffering effect, and has a long service life, and will not drop debris to affect the wafer. The U-shaped card slot 1 made of acid and alkali resistant PVC material is used to increase the firmness, so that the buffer will not move easily on the wafer placement table, and the acid and alkali resistant PVC has a certain elasticity to reduce the phenomenon of fracture caused by collision, as shown in the figure. The buffer 1 part is the positioning device.

[0020] The fixture design can meet the process requirements. Due to the presence of the buffer, the direct contact between the wafer and the bottom of the wafer basket can be effectively avoided, thereby reducing the number of defects caused by collision.

Claims

1. A buffer for mounting on a wafer visual inspection placement table, characterized in that: The buffer includes a U-shaped card slot, a buffer column and a buffer pad, wherein the buffer pad is on the buffer column, and the buffer column is on the U-shaped card slot, so as to ensure that the wafer is buffered during the drop process during visual inspection, thereby reducing the abnormal edge breakage of the wafer caused by collision.

2. A buffer for mounting on a wafer visual inspection placement table according to claim 1, characterized in that: The buffer column of the buffer is composed of four column pieces. The height of the column is determined by adjusting the number of column pieces, so as to adapt to the wafer basket of wafers of various sizes.

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