Combined platform

Abstract

The utility model relates to a combined platform which comprises an object carrying platform used for placing a workpiece. The locking unit has a first state so that the workpiece can be fixed to the carrying platform; the stroke unit is in driving connection with the carrying platform, so that the carrying platform can move between a first position and a second position; the guide rail unit is arranged in the driving direction of the stroke unit, one end of the guide rail unit is fixedly connected with the rack, and the other end of the guide rail unit is fixedly connected with the carrying platform. A guide rail unit independent of the stroke unit is arranged, and when the carrying platform moves, the guide rail unit slides along with the movement of the carrying platform. The driving of the travel unit to the loading platform does not affect the work of the guide rail unit, and the movement of the loading platform is limited and restrained by the guide rail unit, so that the levelness of the loading platform is actually controlled by the guide rail unit, and the height is independently controlled by the travel unit. Compared with the prior art, the wafer placing platform can achieve the purpose of improving the placing precision of the wafer placing platform.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a combined platform. Background Art

[0002] Wafer is a key raw material for making semiconductor integrated circuits. In order to perform precise processes such as processing or testing semiconductor wafers, the ZT combination platform system is more important than anything else. In particular, the wafer is placed on the platform for precise control, the stability of the combination platform, and the improvement of the overall process system.

[0003] As semiconductor manufacturing processes develop towards a more miniaturized direction, improving the inspection quality of wafers is an urgent problem to be solved. The wafer placement platform is a module used to place wafers on the wafer testing system. Conventional wafer placement platforms are often driven by linear motors. When the wafer placement platform is driven to move, interference will occur between the linear motor mover and the guide rail. Due to the track gap between the mover and the guide rail, and the mover has a certain stroke accuracy when moving, the horizontality and stroke accuracy of the wafer placement platform are affected. Therefore, the linear motor will affect the placement accuracy of the wafer placement platform during use, and then affect the inspection quality of the wafer. Utility Model Content

[0004] In order to achieve the purpose of improving the placement accuracy of a wafer placement platform, the utility model proposes a combined platform.

[0005] The technical solution adopted by the utility model is a combined platform, comprising

[0006] A loading platform for placing workpieces;

[0007] A locking unit having a first state so as to fix the workpiece on the loading platform;

[0008] A travel unit is drivingly connected to the loading platform so that the loading platform can move between a first position and a second position;

[0009] The guide rail unit is arranged along the driving direction of the travel unit, one end of the guide rail unit is fixedly connected to the frame, and the other end is fixedly connected to the loading platform.

[0010] Preferably, at least two guide rail units are provided.

[0011] Preferably, a plurality of guide rail units are evenly fixedly connected to the loading platform at the same distance / angle.

[0012] Preferably, the guide rail unit is a cross roller guide rail.

[0013] Preferably, the stroke unit is a first voice coil motor.

[0014] Preferably, the locking unit includes an adsorption hole opened on the loading platform, and a negative pressure mechanism connected to the adsorption hole, and the negative pressure mechanism is used to generate negative pressure and put the adsorption hole in the first state.

[0015] Preferably, it also includes:

[0016] The ejector unit comprises a second voice coil motor and an ejector, and the ejector penetrates the object-carrying platform and is driven and connected to the second voice coil motor.

[0017] Preferably, the loading platform includes a loading platform for placing the workpiece and a lifting platform connected to the loading platform, and the travel unit and the guide rail unit are both connected to the lifting platform.

[0018] Preferably, it also includes:

[0019] The rotating unit, the loading platform and the lifting platform are rotationally connected, and the rotating unit and the loading platform are drivingly connected.

[0020] Preferably, the rotating unit is an ironless linear motor.

[0021] Compared with the prior art, the utility model has the following beneficial effects:

[0022] The present application discloses a combined platform, including a loading platform for placing a workpiece; a locking unit having a first state so that the workpiece is fixed to the loading platform; a travel unit, which is connected to the loading platform in a driving manner so that the loading platform can move between a first position and a second position; and a guide rail unit, which is arranged along the driving direction of the travel unit, and one end of the guide rail unit is fixedly connected to the frame and the other end is fixedly connected to the loading platform. First, the workpiece is locked when the locking unit is in the first state, so that the workpiece can be stably placed on the loading platform, and then the travel unit is set to drive the loading platform to move, and finally, a guide rail unit independent of the travel unit is provided, and when the loading platform moves, the guide rail unit will slide with the movement of the loading platform. The driving of the loading platform by the travel unit will not affect the work of the guide rail unit, and the movement of the loading platform is limited and constrained by the guide rail unit, so that the horizontality of the loading platform is actually controlled by the guide rail unit, and the height is controlled by the travel unit alone. Compared with the prior art, the combined platform disclosed in the present application can achieve the purpose of improving the placement accuracy of the wafer placement platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention is described in detail below with reference to the embodiments and drawings, wherein:

[0024] Figure 1 A schematic structural diagram of a combined platform provided according to an embodiment of the utility model is shown;

[0025] Figure 2 Shown according to Figure 1 A bottom view of a provided combined platform with the base removed;

[0026] Figure 3 Shown according to Figure 2 A cross-sectional view of a combined platform provided is taken along the section line FF.

[0027] Reference numerals:

[0028] 10. Loading platform; 11. Loading table; 12. Lifting platform; 13. Buffer;

[0029] 20. Locking unit; 21. Adsorption hole; 22. Negative pressure mechanism;

[0030] 30. Stroke unit;

[0031] 40. Guide rail unit;

[0032] 50. frame; 51. base; 52. fixed base;

[0033] 60. ejector unit; 61. second voice coil motor; 62. ejector;

[0034] 70. Rotation unit. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the utility model clearer, the following will be further described in detail with reference to the accompanying drawings. Examples of embodiments are shown in the accompanying drawings, in which the same reference numerals throughout represent the same or similar components or components with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be interpreted as limiting the utility model.

[0036] The utility model discloses a combined platform, please refer to Figures 1 to 3 ,include

[0037] The loading platform 10 is used to place the workpiece;

[0038] The locking unit 20 has a first state so as to fix the workpiece on the loading platform 10;

[0039] The travel unit 30 is drivingly connected to the loading platform 10 so that the loading platform 10 can move between a first position and a second position;

[0040] The guide rail unit 40 is arranged along the driving direction of the travel unit 30 , and one end of the guide rail unit 40 is fixedly connected to the frame 50 , and the other end of the guide rail unit 40 is fixedly connected to the loading platform 10 .

[0041] First, the workpiece is locked when the locking unit 20 is in the first state, so that the workpiece can be stably placed on the carrier platform 10. Then, a stroke unit 30 is provided to drive the carrier platform 10 to move. Finally, a guide rail unit 40 independent of the stroke unit 30 is provided. When the carrier platform 10 moves, the guide rail unit 40 will slide with the movement of the carrier platform 10. The driving of the carrier platform 10 by the stroke unit 30 will not affect the work of the guide rail unit 40, and the movement of the carrier platform 10 is limited and constrained by the guide rail unit 40, so that the horizontality of the carrier platform 10 is actually controlled by the guide rail unit 40, while the height is controlled by the stroke unit 30 alone. Compared with the prior art, the combined platform disclosed in the present application can achieve the purpose of improving the placement accuracy of the wafer placement platform.

[0042] The locking unit 20 may be a structure such as a clamp, a mechanical arm, a negative pressure device or a clamping component, and has a first state for fixing the workpiece on the loading platform 10, so as to achieve the purpose of stably placing the workpiece on the loading platform 10, thereby better cooperating with the movement of the stroke unit 30 and the guide rail unit 40. In addition, for some types of locking units 20, it is possible to have a second state to release the workpiece so that the workpiece can leave the loading platform 10, and for some locking units 20 that do not have a second state, other components can be used to assist the workpiece to leave the loading platform 10. For example, when the locking unit 20 is a clamping component, the workpiece fixed in the clamping component can be pushed out by the push rod component, and obviously, the workpiece can also be taken out manually.

[0043] Specifically, the stroke unit 30 and the guide rail unit 40 are independently arranged, and the two respectively control the stroke accuracy and horizontality of the loading platform 10 without interfering with each other. On the one hand, it is easier and more convenient to select the type and parameters of the stroke unit 30 and the guide rail unit 40. On the other hand, when the stroke accuracy or horizontality is offset, the purpose of debugging the ZT combination platform can be achieved by simply adjusting / replacing the stroke unit 30 or the guide rail unit 40, which greatly improves the convenience and accuracy of maintenance.

[0044] In some embodiments, please refer to Figure 2 and Figure 3 , at least two guide rail units 40 are provided.

[0045] It should be noted that by providing at least two guide rail units 40, a higher level is obtained, which makes the leveling process more convenient and easier to level the loading platform 10. In addition, the more guide rail units 40 are provided, the better the stability of the entire system is, and when a problem occurs in one of the guide rail units 40, it is not easy to affect other guide rail units 40. Furthermore, since there are at least two guide rail units 40, the higher the degree of constraint on the loading platform 10 during the movement of the loading platform 10 between the first position and the second position, the easier it is to level the loading platform 10.

[0046] In some specific embodiments, a plurality of guide rail units 40 are evenly fixedly connected to the loading platform 10 at the same distance or at the same angle.

[0047] Specifically, by evenly arranging the guide rail units 40 at the same distance / angle, different guide rail units 40 are subjected to uniform force, so that each guide rail unit 40 can achieve good continuous performance during long-term and high-intensity use, and will not experience a decrease in accuracy due to long-term and high-intensity use.

[0048] In some specific embodiments, please refer to Figure 2 and Figure 3 , the guide rail unit 40 is a cross roller guide rail.

[0049] Specifically, the crossed roller guide is composed of two V-shaped raceway guides, a cage, and rollers. The rollers arranged crosswise reciprocate on the precision-ground V-shaped raceway surface, which can withstand loads in all directions and achieve high-precision linear motion.

[0050] In other embodiments, the guide rail unit 40 may be other types of guide rail structures such as a rectangular linear guide rail, a dovetail linear guide rail, and a circular linear guide rail.

[0051] Preferably, the cross roller guide is an anti-creep cross roller guide. Compared with the common cross roller guide, the anti-creep cross roller guide has an anti-creep gear inside to prevent the cage from accumulating displacement and reset each stroke to zero, thereby improving the linear motion with higher precision.

[0052] In some embodiments, please refer to Figure 2 and Figure 3 , the stroke unit 30 is a first voice coil motor.

[0053] It should be noted that, compared with the first voice coil motor and the linear motor, the voice coil motor does not require any mechanical transmission link. The current in the coil interacts with the permanent magnet to generate thrust, which can convert electrical energy into mechanical energy of linear motion, thereby realizing linear motion.

[0054] Among them, the first voice coil motor can have an extremely fast response time for short-distance movement, and can be perfectly adapted to the loading platform 10, so that the loading platform 10 has the advantages of smooth movement, fast response speed and high reliability.

[0055] In other embodiments, the stroke unit 30 may also be other types of stroke structures such as a cylinder, a rack and pinion structure, or other types of linear motors.

[0056] In some embodiments, please refer to Figures 1 to 3 The locking unit 20 includes an adsorption hole 21 opened on the loading platform 10 and a negative pressure mechanism 22 connected to the adsorption hole 21. The negative pressure mechanism 22 is used to generate negative pressure and put the adsorption hole 21 in the first state.

[0057] It should be noted that the locking unit 20 includes an adsorption hole 21 and a negative pressure mechanism 22, and the negative pressure generated by the negative pressure mechanism 22 tightly adsorbs the workpiece on the loading platform 10, thereby achieving the effect of fixing the workpiece. Fixing the workpiece by generating negative pressure can make the structural arrangement of the ZT combination platform more compact, so that the ZT combination platform has a better overall volume, and will not affect the matching of other equipment due to its excessive volume.

[0058] Furthermore, the negative pressure mechanism 22 stops generating negative pressure and places the adsorption holes 21 in the second state, thereby enabling external equipment or operators to remove the workpiece from the loading platform 10 .

[0059] Specifically, the negative pressure mechanism 22 is a structure such as a balance cylinder or a vacuum pump for generating negative pressure.

[0060] In some embodiments, please refer to Figure 2 and Figure 3 , also includes:

[0061] The ejector unit 60 includes a second voice coil motor 61 and an ejector 62 . The ejector 62 penetrates the object carrying platform 10 and is drivingly connected to the second voice coil motor 61 .

[0062] Specifically, the ZT combined platform also includes an ejector pin unit 60. The ejector pin 62 is lifted by the second voice coil motor 61 through the drive of the second voice coil motor 61, so as to come into contact with the workpiece, and then the workpiece is tested accordingly. The second voice coil motor 61 can be set to a more accurate position for the ejector pin 62. At the same time, due to the large thrust of the voice coil motor, the second voice coil motor 61 can form a stable contact with the workpiece.

[0063] Preferably, the ejector unit 60 also includes a Gothic guide rail, the contact angle of which can remain unchanged, and its rigidity is stable and the friction coefficient is small. Obviously, other types of guide rails can also be selected.

[0064] Preferably, the ejector pin 62 is a flexible ejector pin 62 , so as to prevent the ejector pin 62 from damaging the workpiece when ejecting.

[0065] It should be noted that both the first voice coil motor and the second voice coil motor 61 use voice coil motors as driving components, but different specifications and parameters can be selected between the two to adapt to different operations of the two.

[0066] In some embodiments, please refer to Figure 2 and Figure 3 The loading platform 10 is circular, the ejector unit 60 is located in the central area of ​​the loading platform 10, and multiple guide rail units 40 are evenly arranged at the same angle along the circumference of the loading platform 10 through the central axis. On the one hand, the placement accuracy of the ZT combination platform is improved, and on the other hand, the overall size of the ZT combination platform is reduced.

[0067] In some embodiments, please refer to Figure 2 and Figure 3 The loading platform 10 includes a loading platform 11 for placing workpieces and a lifting platform 12 connected to the loading platform 11 , and the travel unit 30 and the guide rail unit 40 are both connected to the lifting platform 12 .

[0068] Specifically, the loading platform 10 includes a loading platform 11 and a lifting platform 12, and the travel unit 30 and the guide rail unit 40 are both connected to the lifting platform 12. The arrangement of the loading platform 11 and the lifting platform 12 allows the operator to replace the loading platform 11 that matches the shape and size of the workpiece to be measured, thereby improving the adaptability of the ZT combination platform. In addition, the remaining components can be placed between the loading platform 11 and the lifting platform 12, which can save space and optimize the size of the ZT combination platform on the one hand, and protect the components placed between the loading platform 11 and the lifting platform 12 on the other hand.

[0069] Preferably, the loading platform 11 and the lifting platform 12 are connected via a buffer 13. The buffer 13 can filter out vibrations from the stroke unit 30 and movements during opening and closing during operation of the stroke unit 30, thereby achieving the purpose of improving stability performance.

[0070] In some specific embodiments, please refer to Figures 1 to 3 , also includes:

[0071] The rotating unit 70, the loading platform 11 and the lifting platform 12 are rotationally connected, and the rotating unit 70 and the loading platform 11 are drivingly connected.

[0072] Specifically, by providing a loading platform 11 and a lifting platform 12, and making the loading platform 11 and the lifting platform 12 rotatably connected, and further driving the loading platform 11 to rotate by the rotating unit 70, the workpiece on the loading platform 11 can rotate together with the loading platform 11, thereby facilitating other operations on the workpiece.

[0073] In some more specific embodiments, the rotating unit 70 is an ironless linear motor.

[0074] Specifically, the rotating unit 70 is an ironless linear motor. An ironless linear motor is a core used to generate linear motion. In the ZT combined platform disclosed in the present application, an ironless linear motor is used to replace a conventional rotating motor, thereby achieving the effect of improving accuracy and reducing volume.

[0075] It should be noted that the coreless linear motor runs smoothly, does not need to deal with gravity during assembly, is safer, and is easy to install. The coreless linear motor has no cogging effect, so it can ensure that the stage 11 is more stable during movement. In addition, the stroke of the coreless linear motor can be increased or decreased by the operator according to specific needs, and only the length of the stator guide rail needs to be increased. In theory, it can be extended indefinitely.

[0076] Preferably, please refer to Figure 2 and Figure 3 The coreless linear motor is located between the loading platform 11 and the lifting platform 12.

[0077] It should be noted that since the coreless linear motor has a smaller size in the thickness direction, it can be installed between the stage 11 and the lifting platform 12 without increasing the thickness of the ZT combination platform. At the same time, it can better protect the coreless linear motor from being damaged by impact from foreign objects.

[0078] In some embodiments, please refer to Figure 2 and Figure 3 The frame 50 includes a base 51 , one end of the guide rail unit 40 is fixedly connected to the base 51 , and the other end is fixedly connected to the loading platform 10 .

[0079] In some embodiments, please refer to Figure 2 and Figure 3 The frame 50 further includes a fixing seat 52. The guide rail unit 40 is not only fixedly connected to the base 51, but also connected to the fixing seat 52. This makes the guide rail unit 40 more stable. In addition, the ejector unit 60 and the locking unit 20 can also be connected to the fixing seat 52, making the overall structure more compact.

[0080] In some embodiments, please refer to Figure 2 and Figure 3The stage 11 is circular, and the top of the frame 50 is arranged along the circumference of the stage 11 and close to the stage 11, so as to limit the stage 11 when the stage 11 rotates.

[0081] In the description of this specification, if the terms "embodiment one", "this embodiment", "in an embodiment" and the like appear, it means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model or the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example; moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in an appropriate manner.

[0082] In the description of this specification, the terms "connect", "install", "fix", "set", "have", etc. are all understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0083] In the description of this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprises", "comprising" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprising a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0084] The above description of the embodiments is to facilitate ordinary technicians in the technical field to understand and apply the technology of this case. People familiar with the technology in this field can obviously make various modifications to these examples easily and apply the general principles described here to other embodiments without creative work. Therefore, this case is not limited to the above embodiments. Modifications to the following situations should all be within the scope of protection of this case: ① A new technical solution based on the technical solution of the utility model and combined with existing common knowledge, the technical effect produced by the new technical solution does not exceed the technical effect of the utility model; ② The equivalent replacement of some features of the technical solution of the utility model by using known technology, the technical effect produced is the same as the technical effect of the utility model; ③ The technical solution of the utility model can be expanded based on the technical solution of the utility model, and the substantive content of the expanded technical solution does not exceed the technical solution of the utility model; ④ The equivalent transformation made by using the contents of the specification and drawings of the utility model is directly or indirectly applied to other related technical fields.

Claims

1. A combined platform, characterized in that: include A loading platform for placing workpieces; A locking unit having a first state so as to fix the workpiece on the loading platform; A travel unit is drivingly connected to the loading platform, so that the loading platform can move between a first position and a second position; The guide rail unit is arranged along the driving direction of the travel unit, one end of the guide rail unit is fixedly connected to the frame, and the other end is fixedly connected to the loading platform.

2. A combined platform according to claim 1, characterized in that: At least two guide rail units are provided.

3. A combined platform according to claim 2, characterized in that: The plurality of guide rail units are evenly fixedly connected to the loading platform at the same distance and angle.

4. A combined platform according to claim 1, characterized in that: The guide rail unit is a cross roller guide rail.

5. A combined platform according to claim 1, characterized in that: The stroke unit is a first voice coil motor.

6. A combined platform according to claim 1, characterized in that: The locking unit includes an adsorption hole opened on the loading platform and a negative pressure mechanism connected to the adsorption hole, wherein the negative pressure mechanism is used to generate negative pressure and put the adsorption hole in the first state.

7. A combined platform according to claim 1, characterized in that: Also includes: The ejector unit includes a second voice coil motor and an ejector, and the ejector passes through the object carrying platform and is drivingly connected to the second voice coil motor.

8. A combined platform according to any one of claims 1 to 7, characterized in that: The loading platform comprises a loading platform for placing workpieces and a lifting platform connected to the loading platform, and the travel unit and the guide rail unit are both connected to the lifting platform.

9. A combined platform according to claim 8, characterized in that: Also includes: The rotating unit is connected to the loading platform in a rotational manner, and the rotating unit is connected to the loading platform in a driving manner.

10. A combined platform according to claim 9, characterized in that: The rotating unit is an iron-coreless linear motor.

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