Ground rail robot

Abstract

The ground rail robot comprises a robot main body which is arranged in a sliding mode, the robot main body comprises a lower driving box, a mechanical arm base table is arranged on the lower driving box in a rotating mode, a multi-shaft mechanical arm which simulates a human hand to take and place a piece basket is arranged on the mechanical arm base table, and a piece basket grabbing device is arranged at the end of the multi-shaft mechanical arm. A plurality of sheet basket temporary storage tables are arranged on the robot body, parts of the sheet basket temporary storage tables serve as full sheet basket temporary storage parts, and the rest of the sheet basket temporary storage tables serve as empty sheet basket temporary storage parts; the lower driving box is provided with a piece basket taking and placing response device, the piece basket taking and placing response device receives a piece basket taking and placing port signal and slides to the corresponding piece basket taking and placing port, and the multi-axis mechanical arm is matched with the empty piece basket temporary storage part and the full piece basket temporary storage part through the piece basket grabbing device to carry out piece basket loading and unloading at the current port, so that an efficient and automatic piece basket loading and unloading structure is formed.

Description

Technical Field

[0001] The utility model relates to semiconductor preparation technology and use equipment, in particular to silicon wafer preparation and use equipment, specifically, a ground rail robot. Background Art

[0002] The loading and unloading of the film baskets on the edge polishing machine are all done manually. Each edge polishing machine has 4 ports. When a large number of edge polishing machines are working at the same time, a large number of ports are required for loading and unloading the film baskets. The edge polishing machine is large in size, which results in a long journey to each edge polishing machine. The workload of the operators is high, and there is also the problem of untimely loading and unloading of the film baskets.

[0003] Therefore, it is necessary to provide a ground rail robot to solve the above problems. Utility Model Content

[0004] The utility model aims to provide a ground rail robot.

[0005] The utility model achieves the above-mentioned purpose through the following technical solutions:

[0006] A ground rail robot comprises a robot body which is slidably arranged, the robot body comprises a lower driving box, a manipulator base is rotatably arranged on the lower driving box, a multi-axis manipulator arm simulating human hands to take and place a film basket is arranged on the manipulator base, and a film basket grabbing device is arranged at the end of the multi-axis manipulator arm;

[0007] A plurality of temporary storage tables for tablet baskets are arranged on the robot body, some of which are used as temporary storage parts for full tablet baskets, and the rest are used as temporary storage parts for empty tablet baskets;

[0008] A film basket pick-and-place response device is provided on the lower driving box. The film basket pick-and-place response device receives the film basket pick-and-place port signal and slides to the corresponding film basket pick-and-place port. The multi-axis robotic arm uses the film basket grasping device to cooperate with the empty film basket temporary storage part and the full film basket temporary storage part to load and unload the film basket at the current port, forming an efficient automatic loading and unloading film basket structure.

[0009] Furthermore, one of the full sheet basket temporary storage part and the empty sheet basket temporary storage part comprises a temporary storage plate, a lower support frame is arranged below the temporary storage plate, and an upper auxiliary reinforcement frame is arranged above the temporary storage plate.

[0010] Furthermore, the full sheet basket temporary storage part and the empty sheet basket temporary storage part further include a corresponding set of temporary storage tables, and the corresponding card slot plates on the set of temporary storage tables are combined to form a temporary storage slot placement area, and a temporary storage slot plate is arranged in the temporary storage slot placement area.

[0011] Furthermore, the film basket grabbing device includes a film basket grabbing setting table, and the film basket grabbing setting table is correspondingly provided with an opening and closing type grabbing block A and an opening and closing type grabbing block B.

[0012] Furthermore, both the opening and closing grabbing block A and the opening and closing grabbing block B are provided with corresponding grooves for clamping the sheet basket.

[0013] Furthermore, the lower driving box is slidably arranged on the ground rail sliding part.

[0014] Furthermore, a lower drive box driving structure is arranged in the ground rail sliding part.

[0015] Furthermore, the driving structure of the lower driving box is formed by a combination of a motor, a lead screw, and a lead screw screw connecting platform.

[0016] Compared with the prior art, the multi-axis robot arm end of the utility model uses a sheet basket grabbing and loading device to cooperate with an empty sheet basket temporary storage part and a full sheet basket temporary storage part to load and unload the sheet basket of the current port, forming an efficient and automatic loading and unloading of the sheet basket, reducing human resource occupation and ensuring efficient and orderly progress of the side-throwing operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the utility model.

[0018] Figure 2 Schematic diagram of the tablet basket grabbing device.

[0019] Figure 3 It is a schematic diagram of a temporary storage section for a full sheet basket and a temporary storage section for an empty sheet basket. DETAILED DESCRIPTION Example

[0020] See also Figure 1-3 This embodiment shows a ground rail robot, including a robot body 1 that is slidably arranged, the robot body 1 includes a lower driving box 2, a manipulator base 21 is rotatably arranged on the lower driving box 2, a multi-axis manipulator 3 simulating human hands to take and place a film basket is arranged on the manipulator base 21, and a film basket grabbing device 4 is arranged at the end of the multi-axis manipulator 3;

[0021] A plurality of sheet basket temporary storage stations 5 are arranged on the robot body 1, some of which are used as full sheet basket temporary storage parts 51, and the rest are used as empty sheet basket temporary storage parts 52;

[0022] A film basket pick-and-place response device is provided on the lower driving box 2. The film basket pick-and-place response device receives the film basket pick-and-place port signal and slides to the corresponding film basket pick-and-place port. The multi-axis robot arm 3 uses the film basket grasping device 4, cooperates with the empty film basket temporary storage part 52 and the full film basket temporary storage part 51, to load and unload the film basket at the current port, forming an efficient automatic loading and unloading film basket structure.

[0023] One of the full sheet basket temporary storage part 51 and the empty sheet basket temporary storage part 52 includes a temporary storage plate 53 , a lower support frame 531 is arranged below the temporary storage plate 53 , and an upper auxiliary reinforcement frame 532 is arranged above the temporary storage plate 53 .

[0024] The full sheet basket temporary storage part 51 and the empty sheet basket temporary storage part 52 further include a corresponding set of temporary storage tables 54, and the corresponding card slot plates 541 on the set of temporary storage tables 54 are combined to form a temporary storage slot placement area, and a temporary storage slot plate 542 is arranged in the temporary storage slot placement area.

[0025] The film basket grabbing device 4 comprises a film basket grabbing setting table 41 , on which an opening and closing grabbing block A42 and an opening and closing grabbing block B43 are correspondingly arranged.

[0026] Both the opening and closing grabbing block A42 and the opening and closing grabbing block B43 are provided with corresponding grooves 44 for clamping the sheet basket.

[0027] The lower driving box 2 is slidably disposed on the ground rail sliding portion 100 .

[0028] A lower driving box driving structure is disposed in the floor rail sliding portion 100 .

[0029] The driving structure of the lower driving box is formed by a combination of a motor, a lead screw, and a lead screw screw connecting platform.

[0030] Compared with the prior art, the multi-axis robot arm end of the utility model uses a sheet basket grabbing and loading device to cooperate with an empty sheet basket temporary storage part and a full sheet basket temporary storage part to load and unload the sheet basket of the current port, forming an efficient and automatic loading and unloading of the sheet basket, reducing human resource occupation and ensuring efficient and orderly progress of the side-throwing operation.

[0031] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A ground rail robot, characterized in that: The robot body comprises a sliding arrangement, the robot body comprises a lower driving box, a manipulator base is rotatably arranged on the lower driving box, a multi-axis manipulator arm simulating human hands to take and place a film basket is arranged on the manipulator base, and a film basket grabbing device is arranged at the end of the multi-axis manipulator arm; A plurality of temporary storage tables for tablet baskets are arranged on the robot body, some of which are used as temporary storage parts for full tablet baskets, and the rest are used as temporary storage parts for empty tablet baskets; A film basket pick-and-place response device is provided on the lower driving box. The film basket pick-and-place response device receives the film basket pick-and-place port signal and slides to the corresponding film basket pick-and-place port. The multi-axis robotic arm uses the film basket grasping device to cooperate with the empty film basket temporary storage part and the full film basket temporary storage part to load and unload the film basket at the current port, forming an efficient automatic loading and unloading film basket structure.

2. A ground rail robot according to claim 1, characterized in that: One of the full sheet basket temporary storage part and the empty sheet basket temporary storage part comprises a temporary storage plate, a lower support frame is arranged below the temporary storage plate, and an upper auxiliary reinforcement frame is arranged above the temporary storage plate.

3. A ground rail robot according to claim 2, characterized in that: The full sheet basket temporary storage part and the empty sheet basket temporary storage part further include a group of corresponding temporary storage tables, and the corresponding card slot plates on the group of temporary storage tables are combined to form a temporary storage slot placement area, and the temporary storage slot placement area is provided with a temporary storage slot plate.

4. A ground rail robot according to claim 1, characterized in that: The film basket grabbing device comprises a film basket grabbing setting platform, on which an opening and closing grabbing block A and an opening and closing grabbing block B are correspondingly arranged.

5. A ground rail robot according to claim 4, characterized in that: Both the opening and closing grabbing block A and the opening and closing grabbing block B are provided with corresponding grooves for clamping the sheet basket.

6. A ground rail robot according to claim 1, characterized in that: The lower driving box is slidably arranged on the ground rail sliding part.

7. A ground rail robot according to claim 6, characterized in that: A lower driving box driving structure is arranged in the ground rail sliding part.

8. A ground rail robot according to claim 7, characterized in that: The driving structure of the lower driving box is formed by a combination of a motor, a lead screw, and a lead screw screw connecting platform.

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