Self-cleaning tail gas filtering treatment equipment

Abstract

The utility model provides self-cleaning tail gas filtering treatment equipment which is internally provided with a first filter used for filtering tail gas; a first cleaning valve and a second cleaning valve are arranged on the first filter, and clean gas or liquid enters the first filter cavity from the first cleaning valve and is discharged from the second cleaning valve to form a circulation path opposite to the tail gas, so that the clean gas or liquid can take away particles accumulated on the first filter assembly; according to the self-cleaning device, the first filter assembly is arranged on the first filter assembly to remove or reduce particles accumulated on the first filter assembly, the first filter assembly is cleaned, the self-cleaning effect is achieved, meanwhile, the cleaning time is short, the first filter assembly does not need to be replaced regularly, the first filter does not need to be disassembled, the equipment shutdown maintenance time is saved, and the cost of replacing the first filter assembly is saved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor exhaust gas filtration, and in particular to a self-cleaning exhaust gas filtration and treatment device. Background Art

[0002] In the production process of chips, various acidic waste gases, alkaline waste gases or organic waste gases are generated in many processes. Various particulate matter may be mixed in these waste gases. For example, in the process of thin film deposition, the reaction raw materials are not completely reacted or the byproducts may form tiny particles. These particles may contain organic matter, metal salts, silicon-based or fluoride, etc.; dry or wet etching will produce reaction byproducts, some of which exist in the form of solid particles, especially plasma etching may produce polymer particles; in the chemical mechanical polishing process, various particulate pollutants are also produced. The size of these particles can range from a few nanometers to a few microns, which has a direct impact on the performance and yield of semiconductor devices. Therefore, effective filtration and control of particulate matter in exhaust gas is an important part of semiconductor manufacturing.

[0003] In the prior art, filters are usually used to filter exhaust gas. However, as the use time accumulates, particulate matter will accumulate on the filter net, resulting in a decrease in filtering efficiency. Under normal circumstances, the filter net needs to be replaced regularly. However, when replacing the filter net, the equipment needs to be disassembled, resulting in a long downtime for equipment maintenance. At the same time, the filter net is a consumable material, which increases the cost of the manufacturer. Utility Model Content

[0004] In order to solve the above-mentioned technical problems, the present application provides a self-cleaning exhaust gas filtration and treatment equipment, including a first intake pipe assembly, a first filter and a first exhaust pipe assembly which are connected in sequence, a first filter cavity is formed in the first filter, a first filter assembly is arranged in the first filter cavity, the exhaust gas enters the first filter cavity from the first intake pipe assembly, is filtered by the first filter assembly and then enters the first exhaust pipe assembly, a first cleaning valve and a second cleaning valve are arranged on the first filter, the clean gas or liquid enters the first filter cavity from the first cleaning valve and is discharged from the second cleaning valve, forming a flow path opposite to the exhaust gas.

[0005] In some embodiments of the present application, the first filter assembly includes a first filter part, a second filter part and a third filter part; the first filter part is arranged at one end of the first filter cavity and fixedly arranged to the inner wall of the first filter, and a first chamber is formed between the first filter part and the first filter; the second filter part is arranged at the other end of the first filter cavity and fixedly arranged to the inner wall of the first filter, a second chamber is formed between the second filter part and the first filter part, and a third chamber is formed between the second filter part and the first filter; the third filter part is arranged in the second chamber and fixedly connected to the first filter part.

[0006] In some embodiments of the present application, the third filter portion is hollow and cylindrical with one end open, the first filter portion is provided with a through hole, and the open end of the third filter portion is provided on the through hole of the first filter portion. After the exhaust gas enters the first chamber, a part of it passes through the filter hole on the first filter portion and enters the second chamber, and the other part enters the third filter portion, and enters the second chamber through the filter hole on the third filter portion, and finally enters the third chamber through the filter hole on the second filter portion.

[0007] In some embodiments of the present application, the first cleaning valve and the second cleaning valve are both one-way solenoid valves.

[0008] In some embodiments of the present application, a second filter, a second intake pipe assembly and a second exhaust pipe assembly are also included, one end of the second intake pipe assembly is connected to the first intake pipe assembly, and the other end is connected to the second filter; one end of the second exhaust pipe assembly is connected to the first exhaust pipe assembly, and the other end is connected to the second filter.

[0009] In some embodiments of the present application, a second filter cavity is formed in the second filter, and a second filter component is disposed in the second filter cavity.

[0010] In some embodiments of the present application, a third cleaning valve and a fourth cleaning valve are further provided on the second filter, and the cleaning gas or liquid enters the second filter cavity from the third cleaning valve and is discharged from the fourth cleaning valve, forming a flow path opposite to the exhaust gas.

[0011] In some embodiments of the present application, the first air intake pipe assembly includes an air collecting barrel, and the air collecting barrel is used to collect and buffer the exhaust gas.

[0012] In some embodiments of the present application, the first exhaust pipe assembly includes a blower, and the blower is used to discharge the filtered exhaust gas.

[0013] In some embodiments of the present application, the first intake pipe assembly and the first exhaust pipe assembly both include manual valves, and the manual valves are used to control the opening and closing of the first intake pipe assembly and the second intake pipe assembly.

[0014] Compared with the prior art, the utility model has the following advantages and beneficial effects: the self-cleaning exhaust gas filtration treatment equipment of the present application is provided with a first filter, and the first filter is used to filter the exhaust gas; the first filter is provided with a first cleaning valve and a second cleaning valve, and the cleaning gas or liquid enters the first filter cavity from the first cleaning valve and is discharged from the second cleaning valve to form a flow path opposite to the exhaust gas, so that the cleaning gas or liquid can take away the particles accumulated on the first filter component to remove or reduce the particles accumulated on the first filter component, realize the cleaning of the first filter component, and achieve the effect of self-cleaning. At the same time, the cleaning time is short, and there is no need to replace the first filter component regularly, and there is no need to disassemble the first filter, which saves the time of equipment downtime maintenance and saves the cost of replacing the first filter component.

[0015] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings constituting a part of this document are used to provide a further understanding of this document. The exemplary embodiments and descriptions of this document are used to explain this document and do not constitute an improper limitation on this document. In the accompanying drawings:

[0017] Figure 1 It is a schematic structural diagram from a first angle of a self-cleaning exhaust gas filtering and processing device provided by an exemplary embodiment of the present application;

[0018] Figure 2 It is a second angle structural schematic diagram of a self-cleaning exhaust gas filtering and processing device provided by an exemplary embodiment of the present application;

[0019] Figure 3 It is a front view of a self-cleaning exhaust gas filtering and processing device provided by an exemplary embodiment of the present application;

[0020] Figure 4 yes Figure 3 Sectional view at AA.

[0021] In the figure:

[0022] 10. First air intake pipe assembly; 101. Air collecting barrel; 20. First filter; 201. First filter assembly; 2011. First filter section; 2012. Second filter section; 2013. Third filter section; 202. First chamber; 203. Second chamber; 204. Third chamber; 30. First exhaust pipe assembly; 301. Blower; 40. First cleaning valve; 50. Second cleaning valve; 60. Second filter; 70. Second air intake pipe assembly; 80. Second exhaust pipe assembly. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application. It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other arbitrarily.

[0024] In the production process of chips, various acidic waste gases, alkaline waste gases or organic waste gases are generated in many processes. Various particulate matter may be mixed in these waste gases. For example, in the process of thin film deposition, the reaction raw materials are not completely reacted or the byproducts may form tiny particles. These particles may contain organic matter, metal salts, silicon-based or fluoride, etc.; dry or wet etching will produce reaction byproducts, some of which exist in the form of solid particles, especially plasma etching may produce polymer particles; in the chemical mechanical polishing process, various particulate pollutants are also produced. The size of these particles can range from a few nanometers to a few microns, which has a direct impact on the performance and yield of semiconductor devices. Therefore, effective filtration and control of particulate matter in exhaust gas is an important part of semiconductor manufacturing.

[0025] In the prior art, filters are usually used to filter exhaust gas. However, as the use time accumulates, particulate matter will accumulate on the filter net, resulting in a decrease in filtering efficiency. Under normal circumstances, the filter net needs to be replaced regularly. However, when replacing the filter net, the equipment needs to be disassembled, resulting in a long downtime for equipment maintenance. At the same time, the filter net is a consumable material, which increases the cost of the manufacturer.

[0026] Based on this, an exemplary embodiment of the present application provides a self-cleaning exhaust gas filtration treatment device, in which a first filter is provided, and the first filter is used to filter the exhaust gas; a first cleaning valve and a second cleaning valve are provided on the first filter, and the cleaning gas or liquid enters the first filter cavity from the first cleaning valve and is discharged from the second cleaning valve to form a flow path opposite to the exhaust gas. In this way, the cleaning gas or liquid can take away the particles accumulated on the first filter component to remove or reduce the particles accumulated on the first filter component, thereby cleaning the first filter component and achieving a self-cleaning effect. At the same time, the cleaning time is short, and there is no need to regularly replace the first filter component or disassemble the first filter, which saves the time of equipment downtime maintenance and the cost of replacing the first filter component.

[0027] An exemplary embodiment of the present application provides a self-cleaning exhaust gas filtering and processing device, such as Figure 1 and 2As shown, the self-cleaning exhaust gas filtering and treating equipment comprises a first intake pipe assembly 10, a first filter 20 and a first exhaust pipe assembly 30 which are connected in sequence, a first filter cavity is formed in the first filter 20, a first filter assembly 201 is arranged in the first filter cavity, exhaust gas enters the first filter cavity from the first intake pipe assembly 10, is filtered by the first filter assembly 201 and then enters the first exhaust pipe assembly 30 for discharge; after long-term use, particles in the exhaust gas will accumulate on the first filter assembly 201, and will mainly accumulate on the surface of the first filter assembly 201 on one side along the exhaust gas flow direction. In order to clean the particles accumulated on the first filter component 201, a first cleaning valve 40 and a second cleaning valve 50 are provided on the first filter 20. When it is necessary to clean the particles accumulated on the first filter component 201, the first cleaning valve 40 can be connected to an external clean gas source or liquid, and the second cleaning valve 50 can be connected to an external gas or liquid recovery device, so that the clean gas or liquid enters the first filter cavity from the first cleaning valve 40 and is discharged from the second cleaning valve 50, forming a flow path opposite to the exhaust gas, so as to impact the particles attached to the first filter component 201, and make the particles discharged from the first filter cavity along with the air flow or liquid flow, so as to achieve the purpose of cleaning the first filter component 201 and achieve the effect of self-cleaning. At the same time, using this method to clean the first filter component 201, the cleaning time used is short, there is no need to regularly replace the first filter component 201, there is no need to disassemble the first filter 20, the time of equipment downtime maintenance is saved, the first filter component 201 can be reused, and the cost of replacing the first filter component 201 is saved.

[0028] In one embodiment, if Figure 4 As shown, the first filter assembly 201 includes a first filter part 2011, a second filter part 2012 and a third filter part 2013; the first filter part 2011 is arranged at one end of the first filter cavity and is fixedly arranged with the inner wall of the first filter 20, and a first chamber 202 is formed between the first filter part 2011 and the first filter 20; the second filter part 2012 is arranged at the other end of the first filter cavity and is fixedly arranged with the inner wall of the first filter 20, and a second chamber 203 is formed between the second filter part 2012 and the first filter part 2011, and a third chamber 204 is formed between the second filter part 2012 and the first filter 20; the third filter part 2013 is arranged in the second chamber 203 and is fixedly connected to the first filter part 2011. The exhaust gas enters the first chamber 202 through the first intake pipe assembly 10, then passes through the first filter 2011 and the third filter 2013, enters the second chamber 203, passes through the second filter 2012 again, enters the third chamber 204, and finally enters the first exhaust pipe assembly 30. The exhaust gas is discharged after multi-stage filtration, which can effectively filter particles in the exhaust gas and improve the particle filtering effect.

[0029] In one embodiment, the third filter portion 2013 is hollow and cylindrical with one end open. The first filter portion 2011 is provided with a through hole. The open end of the third filter portion 2013 is provided on the through hole of the first filter portion 2011. After the exhaust gas enters the first chamber 202, a part of it passes through the filter hole on the first filter portion 2011 and enters the second chamber 203, and the other part enters the third filter portion 2013 and enters the second chamber 203 through the filter hole on the third filter portion 2013, and finally enters the third chamber 204 through the filter hole on the second filter portion 2012.

[0030] In one embodiment, in order to further improve the filtering effect of particles, a porous material or fiberboard can be set in the second chamber 203 to further filter the particles in the exhaust gas. At the same time, when cleaning the first filter component 201, the porous material or fiberboard in the second chamber 203 can be cleaned, so that the porous material or fiberboard can achieve a self-cleaning effect.

[0031] like Figure 1 and 2 As shown, the first air intake pipe assembly 10 includes an air collecting barrel 101, which is used to collect and buffer the exhaust gas. The first exhaust pipe assembly 30 includes a blower 301, which is used to discharge the filtered exhaust gas. The first air intake pipe assembly 10 and the first exhaust pipe assembly 30 both include a manual valve, which is used to control the opening and closing of the first air intake pipe assembly 10 and the second air intake pipe assembly 70.

[0032] In one embodiment, the first cleaning valve 40 and the second cleaning valve 50 are both one-way solenoid valves. When the device is working normally, the first cleaning valve 40 and the second cleaning valve 50 are both in a closed state. When the first filter assembly 201 needs to be cleaned, the valves on the first air intake pipe assembly 10 and the first exhaust pipe assembly 30 are first closed. The control system can control the first cleaning valve 40 and the second cleaning valve 50 to open, and pass clean gas or liquid into the first filter chamber through an external device. The clean liquid or gas enters the third chamber 204 through the first cleaning valve 40 to clean the particles attached to the surface of the second filter part 2012, then enters the second chamber 203 to clean the particles on the third filter part 2013 and the first filter part 2011, and finally enters the first chamber 202 and is discharged through the second cleaning valve 50. The flow direction of the clean gas or liquid is opposite to the flow direction of the exhaust gas, which can well clean the particles attached to the surface of the first filter assembly 201, so that the first filter assembly 201 achieves a self-cleaning effect.

[0033] In order to prevent the first filter 20 from being shut down for maintenance during the cleaning process, Figures 1 to 3As shown, the device further includes a second filter 60, a second air intake pipe assembly 70 and a second exhaust pipe assembly 80. One end of the second air intake pipe assembly 70 is connected to the first air intake pipe assembly 10, and the other end is connected to the second filter 60; one end of the second exhaust pipe assembly 80 is connected to the first exhaust pipe assembly 30, and the other end is connected to the second filter 60. Preferably, the second air intake pipe assembly 70 is connected to the first air intake pipe assembly 10 through a three-way valve; the second exhaust pipe assembly 80 is connected to the first exhaust pipe assembly 30 through a three-way valve or a three-way pipe with a reducing diameter. Manual valves are provided on the second air intake pipe assembly 70 and the second exhaust pipe assembly 80, and the manual valves are used to control the closing and opening of the second air intake pipe assembly 70 and the second exhaust pipe assembly 80. When cleaning the first filter assembly 201 in the first filter 20, the manual valves on the first intake pipe assembly 10 and the first exhaust pipe assembly 30 can be closed, and the manual valves on the second intake pipe assembly 70 and the second exhaust pipe assembly 80 can be opened to allow the exhaust gas to flow into the second filter 60 through the second intake pipe assembly 70 and the second exhaust pipe assembly 80 for filtration. In this way, there is no need to stop the machine to clean the first filter assembly 201, and production will not be delayed.

[0034] In one embodiment, a second filter cavity is formed in the second filter 60, and a second filter assembly is disposed in the second filter cavity. The structure of the second filter assembly can be the same as that of the first filter assembly 201, or different. For example, the second filter assembly can be a multi-layer filter mesh arranged sequentially from bottom to top.

[0035] In order to clean the second filter assembly, in one embodiment, a third cleaning valve and a fourth cleaning valve are also provided on the second filter 60, and the cleaning gas or liquid enters the second filter cavity from the third cleaning valve and is discharged from the fourth cleaning valve, forming a flow path opposite to the exhaust gas. In this way, the particles accumulated on the second filter assembly can be cleaned to achieve a self-cleaning effect.

[0036] In this application, the terms "comprises", "comprising" or any other variations thereof are intended to cover non-exclusive inclusion, so that an article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such article or device. In the absence of more restrictions, the elements defined by the sentence "comprising..." do not exclude the presence of other identical elements in the article or device comprising the elements.

[0037] Although the preferred embodiments of the present application have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0038] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the intention of the present application also includes these modifications and variations.

Claims

1. A self-cleaning exhaust gas filtering and processing device, comprising a first intake pipe assembly (10), a first filter (20) and a first exhaust pipe assembly (30) which are connected in sequence, wherein a first filter cavity is formed in the first filter (20), and a first filter assembly (201) is arranged in the first filter cavity, exhaust gas enters the first filter cavity from the first intake pipe assembly (10), is filtered by the first filter assembly (201), and then enters the first exhaust pipe assembly (30), characterized in that: The first filter (20) is provided with a first cleaning valve (40) and a second cleaning valve (50), and the cleaning gas or liquid enters the first filter cavity from the first cleaning valve (40) and is discharged from the second cleaning valve (50), forming a flow path opposite to that of the exhaust gas; The first filter assembly (201) comprises a first filter part (2011), a second filter part (2012) and a third filter part (2013); the first filter part (2011) is arranged at one end of the first filter cavity and is fixedly arranged on the inner wall of the first filter (20), and a first chamber (202) is formed between the first filter part (2011) and the first filter (20); the second filter part (2012) is arranged at the other end of the first filter cavity and is fixedly arranged on the inner wall of the first filter (20), a second chamber (203) is formed between the second filter part (2012) and the first filter part (2011), and a third chamber (204) is formed between the second filter part (2012) and the first filter (20); the third filter part (2013) is arranged in the second chamber (203) and is fixedly connected to the first filter part (2011); The third filter part (2013) is hollow and cylindrical with one end open. The first filter part (2011) is provided with a through hole. The open end of the third filter part (2013) is arranged on the through hole of the first filter part (2011). After the exhaust gas enters the first chamber (202), a part of it passes through the filter hole on the first filter part (2011) and enters the second chamber (203), and the other part enters the third filter part (2013), passes through the filter hole on the third filter part (2013), enters the second chamber (203), and finally passes through the filter hole on the second filter part (2012) and enters the third chamber (204).

2. The self-cleaning exhaust gas filtering and processing equipment according to claim 1, characterized in that: The first cleaning valve (40) and the second cleaning valve (50) are both one-way solenoid valves.

3. The self-cleaning exhaust gas filtering and processing equipment according to claim 1, characterized in that: It also includes a second filter (60), a second intake pipe assembly (70) and a second exhaust pipe assembly (80); one end of the second intake pipe assembly (70) is connected to the first intake pipe assembly (10), and the other end is connected to the second filter (60); one end of the second exhaust pipe assembly (80) is connected to the first exhaust pipe assembly (30), and the other end is connected to the second filter (60).

4. The self-cleaning exhaust gas filtering and processing equipment according to claim 3 is characterized in that: A second filter cavity is formed in the second filter (60), and a second filter assembly is arranged in the second filter cavity.

5. The self-cleaning exhaust gas filtering and processing equipment according to claim 3, characterized in that: The second filter (60) is also provided with a third cleaning valve and a fourth cleaning valve, and the cleaning gas or liquid enters the second filter cavity from the third cleaning valve and is discharged from the fourth cleaning valve, forming a flow path opposite to that of the exhaust gas.

6. The self-cleaning exhaust gas filtering and processing equipment according to claim 1, characterized in that: The first air intake pipe assembly (10) comprises an air collecting barrel (101), and the air collecting barrel (101) is used to collect and buffer exhaust gas.

7. The self-cleaning exhaust gas filtering and processing equipment according to claim 1, characterized in that: The first exhaust pipe assembly (30) comprises a blower (301), and the blower (301) is used to discharge filtered exhaust gas.

8. The self-cleaning exhaust gas filtering and processing equipment according to claim 1, characterized in that: The first air intake pipe assembly (10) and the first air exhaust pipe assembly (30) both comprise manual valves, and the manual valves are used to control the opening and closing of the first air intake pipe assembly (10) and the second air intake pipe assembly (70).

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