Nitrogen recycling device for ultrapure water tank

Abstract

The utility model belongs to the technical field of ultrapure water tanks, and discloses an ultrapure water tank nitrogen recycling device which comprises a base, an ultrapure water tank is fixedly connected to the upper surface of the base, the two sides of the ultrapure water tank are communicated with a water supplementing pipe and a water draining pipe respectively, and a nitrogen tank is placed on the upper surface of the base. And a conveying pipe is communicated between the nitrogen tank and the ultrapure water tank. By arranging the storage tank, when the ultrapure water tank is used for supplementing water, nitrogen enters the storage tank through the gas conveying pipe and does not need to be discharged to the outside to cause waste, and when water is drained, the servo motor rotates reversely, the threaded rod controls the sliding seat to slide upwards, the electromagnetic valve is opened, the nitrogen returns to the ultrapure water tank, the nitrogen is supplemented and recycled, the nitrogen is saved, and the cost is reduced. And resources are saved.

Description

Technical Field

[0001] The utility model belongs to the technical field of ultrapure water tanks, and in particular relates to a nitrogen recycling device for an ultrapure water tank. Background Art

[0002] Ultrapure water, also known as UP water, has a resistivity of 18MΩ*cm (25°C). It is commonly used in the integrated circuit industry for cleaning semiconductor raw materials and utensils, preparing photolithography masks, and as a water vapor source for silicon wafer oxidation. To prevent water pollution, it is usually stored in nitrogen-sealed containers filled with inert gases such as nitrogen.

[0003] When the ultrapure water tank is replenished and drained, the volume of the liquid inside changes, and the space that can accommodate nitrogen changes. In order to balance the pressure, when the liquid level changes, the nitrogen in the ultrapure water tank needs to be discharged and replenished, which easily causes a large amount of nitrogen waste. Utility Model Content

[0004] In order to solve the above problems, the purpose of the utility model is to provide an ultrapure water tank nitrogen recycling device.

[0005] To achieve the above-mentioned purpose, the utility model proposes a nitrogen recycling device for an ultrapure water tank, comprising a base, the upper surface of the base is fixedly connected to the ultrapure water tank, the two sides of the ultrapure water tank are respectively connected to a water supply pipe and a drainage pipe, a nitrogen tank is placed on the upper surface of the base, a delivery pipe is connected between the nitrogen tank and the ultrapure water tank, the upper surface of the base is fixedly connected to a storage tank, the storage tank and the ultrapure water tank are connected to a gas delivery pipe, an exhaust component is provided in the storage tank, and the exhaust component is used to extract and recover the nitrogen in the ultrapure water tank.

[0006] In one example, solenoid valves are installed on both the gas pipe and the delivery pipe, a filter box is fixedly connected to the upper surface of the storage tank, an activated carbon filter element is filled in the filter box, and the filter box is connected to the gas pipe and the storage tank.

[0007] In one example, the vacuum assembly includes a sliding seat, which is located in the preservation tank and is slidably connected to the preservation tank. A servo motor is fixedly connected to the base, and the main shaft of the servo motor passes through the base and the preservation tank and is rotatably connected to the base and the preservation tank. The main shaft of the servo motor is fixedly connected to a threaded rod, which passes through the sliding seat and is threadedly connected to the sliding seat.

[0008] In one example, the side wall of the storage tank is connected to a transverse pipe, and a switch valve is installed on the transverse pipe.

[0009] In one example, a rubber ring is fixedly connected to the outer side of the sliding seat, the rubber ring is elastic, the rubber ring contacts the inner wall of the preservation tank, the inner wall of the preservation tank is fixedly connected to a limiting ring, the lower surface of the limiting ring is fixedly connected to a vertical rod, the vertical rod passes through the sliding seat and is slidably connected to the sliding seat, and the connection position between the horizontal tube and the preservation tank is located above the limiting ring.

[0010] In one example, a liquid level meter is installed on one side of the ultrapure water tank.

[0011] The ultrapure water tank nitrogen recycling device proposed by the utility model can bring the following beneficial effects:

[0012] First, by setting up a storage tank, when replenishing water, the servo motor is turned on, driving the threaded rod to rotate, the threaded rod controls the sliding seat to slide down, the solenoid valve opens, and the nitrogen enters the storage tank through the gas pipe, and does not need to be discharged to the outside to cause waste. When draining water, the servo motor reverses, the threaded rod controls the sliding seat to slide up, the solenoid valve opens, and the nitrogen returns to the ultrapure water tank to replenish the nitrogen, forming a recycling of nitrogen, saving nitrogen and saving resources;

[0013] Secondly, by setting a horizontal pipe, the sliding seat descends, and the nitrogen in the ultrapure water tank enters the preservation tank. The solenoid valve on the gas pipe is closed, and the switch valve on the horizontal pipe is opened to allow the nitrogen to rush out of the preservation tank. The nitrogen tank injects fresh nitrogen into the ultrapure water tank to replace the nitrogen. When discharging the nitrogen, the ultrapure water tank is not connected to the outside world to avoid contamination of the ultrapure water tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention.

[0015] In the attached picture:

[0016] Figure 1 The utility model is a structural schematic diagram of an ultrapure water tank nitrogen recycling device.

[0017] Figure 2 This is a schematic diagram of the structure of a water supply pipe and a drainage pipe of an ultrapure water tank nitrogen recycling device of the utility model.

[0018] Figure 3 The utility model is a schematic diagram of the cross-sectional structure of a storage tank of an ultrapure water tank nitrogen recycling device.

[0019] Figure 4 for Figure 3 Schematic diagram of the structure enlarged at point A in the middle.

[0020] In the figure: 1. base; 2. ultrapure water tank; 3. water supply pipe; 4. drainage pipe; 5. nitrogen tank; 6. delivery pipe; 7. storage tank; 8. gas pipe; 9. exhaust assembly; 10. solenoid valve; 11. filter box; 91. sliding seat; 92. servo motor; 93. threaded rod; 12. horizontal pipe; 13. switch valve; 14. rubber ring; 15. limit ring; 16. vertical rod; 17. liquid level gauge. DETAILED DESCRIPTION

[0021] In order to more clearly illustrate the overall concept of the present invention, a detailed description is given below in the form of examples in conjunction with the accompanying drawings.

[0022] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0023] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0024] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] In the present utility model, unless otherwise clearly specified and limited, the first feature "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. In the description of this specification, the description of reference terms "one scheme", "some schemes", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the scheme or example are included in at least one scheme or example of the present utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same scheme or example. Moreover, the specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more schemes or examples.

[0026] like Figure 1 to Figure 4 As shown, an embodiment of the utility model proposes a nitrogen recycling device for an ultrapure water tank, comprising a base 1, the upper surface of the base 1 is fixedly connected to an ultrapure water tank 2, the two sides of the ultrapure water tank 2 are respectively connected to a water supply pipe 3 and a drainage pipe 4, a nitrogen tank 5 is placed on the upper surface of the base 1, a delivery pipe 6 is connected between the nitrogen tank 5 and the ultrapure water tank 2, a storage tank 7 is fixedly connected to the upper surface of the base 1, a gas delivery pipe 8 is connected between the storage tank 7 and the ultrapure water tank 2, an exhaust component 9 is provided in the storage tank 7, the exhaust component 9 is used to extract and recover the nitrogen in the ultrapure water tank 2, the nitrogen tank 5 fills the internal nitrogen into the ultrapure water tank 2 for nitrogen-sealed storage, the ultrapure water tank 2 is replenished and drained through the water supply pipe 3 and the drainage pipe 4 on both sides, and during continuous water replenishment, the nitrogen tank 5 is filled with nitrogen and discharged. During the drainage process, the liquid level in the ultrapure water tank 2 changes. Since the space where the nitrogen in the ultrapure water tank 2 is located changes, it is necessary to supplement or discharge nitrogen. During the first drainage, the space where the internal nitrogen is located becomes larger. At this time, the nitrogen tank 5 transports nitrogen into the ultrapure water tank 2 through the delivery pipe 6. However, when the ultrapure water tank 2 starts to be replenished, the space for accommodating nitrogen becomes smaller. At this time, the exhaust component 9 inside the preservation tank 7 draws excess nitrogen into the preservation tank 7 for storage, and there is no need to discharge it to the outside to cause waste. Later, when the ultrapure water tank 2 is drained again and nitrogen needs to be supplemented, the nitrogen in the preservation tank 7 is filled into the ultrapure water tank 2. When replenishing water, it is extracted back through the exhaust component 9, forming a recycling method, saving nitrogen and resources.

[0027] Specifically, solenoid valves 10 are installed on the gas pipe 8 and the delivery pipe 6, a filter box 11 is fixedly connected to the upper surface of the storage tank 7, and an activated carbon filter element is filled in the filter box 11. The filter box 11 is connected to the gas pipe 8 and the storage tank 7. After the nitrogen tank 5 injects a maximum amount of nitrogen into the ultrapure water tank 2 at one time, the solenoid valve 10 on the delivery pipe 6 is closed. Before the nitrogen enters the storage tank 7, it first passes through the filter box 11 and the nitrogen is filtered to keep the nitrogen clean.

[0028] Specifically, the air extraction component 9 includes a sliding seat 91, which is located in the preservation tank 7 and is slidably connected to the preservation tank 7. A servo motor 92 is fixedly connected to the base 1. The main shaft of the servo motor 92 passes through the base 1 and the preservation tank 7 and is rotatably connected to the base 1 and the preservation tank 7. The main shaft of the servo motor 92 is fixedly connected to a threaded rod 93, which passes through the sliding seat 91 and is threadedly connected to the sliding seat 91. When replenishing water, when the air extraction component 9 extracts nitrogen into the preservation tank 7, the servo motor 92 is turned on at this time, driving the threaded rod 93 to rotate, the threaded rod 93 controls the sliding seat 91 to slide down, the solenoid valve 10 is opened, and the nitrogen enters the preservation tank 7 through the gas pipe 8. When draining water, the servo motor 92 reverses, the threaded rod 93 controls the sliding seat 91 to slide up, the solenoid valve 10 is opened, and the nitrogen returns to the ultrapure water tank 2 to replenish the nitrogen, thereby forming a recycling use of nitrogen, which is more convenient.

[0029] Specifically, the side wall of the preservation tank 7 is connected to the transverse pipe 12, and a switch valve 13 is installed on the transverse pipe 12. After the nitrogen is circulated for a period of time, the sliding seat 91 descends, allowing the nitrogen in the ultrapure water tank 2 to enter the preservation tank 7, the solenoid valve 10 on the gas supply pipe 8 is closed, and the switch valve 13 on the transverse pipe 12 is opened to allow the nitrogen to rush out of the preservation tank 7, while the nitrogen tank 5 injects fresh nitrogen into the ultrapure water tank 2 to replace the nitrogen. When the nitrogen is discharged, the ultrapure water tank 2 is not connected to the outside world to avoid contaminating the ultrapure water tank 2.

[0030] Specifically, the outer side of the sliding seat 91 is fixedly connected to a rubber ring 14, which is elastic and contacts the inner wall of the preservation tank 7. The inner wall of the preservation tank 7 is fixedly connected to a limiting ring 15, and the lower surface of the limiting ring 15 is fixedly connected to a vertical rod 16. The vertical rod 16 penetrates the sliding seat 91 and is slidably connected to the sliding seat 91. The connection position between the transverse tube 12 and the preservation tank 7 is located above the limiting ring 15. The rubber ring 14 on the sliding seat 91 contacts the inner wall of the preservation tank 7 to reduce the gap and prevent nitrogen leakage. An air vent is provided at the lower outer side of the preservation tank 7. The limiting ring 15 limits the range of movement of the sliding seat 91, so that the transverse tube 12 is always above the sliding seat 91 to prevent the sliding seat 91 from blocking the transverse tube 12.

[0031] Specifically, a liquid level gauge 17 is installed on one side of the ultrapure water tank 2 , and the liquid level gauge 17 is convenient for checking the liquid level in the ultrapure water tank 2 from the outside.

[0032] Working principle: The nitrogen tank 5 fills the internal nitrogen into the ultrapure water tank 2 for nitrogen-sealed storage. The ultrapure water tank 2 is replenished and drained through the water replenishment pipe 3 and the drainage pipe 4 on both sides. During the continuous replenishment and drainage process, the liquid level in the ultrapure water tank 2 is changing. During the first drainage, the space where the internal nitrogen is located becomes larger. At this time, the nitrogen tank 5 transports nitrogen into the ultrapure water tank 2 through the delivery pipe 6. However, when the ultrapure water tank 2 starts to be replenished, the space for accommodating nitrogen becomes smaller, and the servo motor 92 is turned on, driving the threaded rod 93 to rotate, and the threaded rod 93 controls the sliding seat 91 to slide down. , the solenoid valve 10 is opened, and the nitrogen enters the storage tank 7 through the gas pipe 8. When draining, the servo motor 92 reverses, the threaded rod 93 controls the sliding seat 91 to slide up, the solenoid valve 10 is opened, and the nitrogen returns to the ultrapure water tank 2 to replenish the nitrogen. After the nitrogen is circulated for a period of time, the sliding seat 91 descends, allowing the nitrogen in the ultrapure water tank 2 to enter the storage tank 7, the solenoid valve 10 on the gas pipe 8 is closed, and the switch valve 13 on the horizontal pipe 12 is opened to allow the nitrogen to rush out of the storage tank 7, and the nitrogen tank 5 injects fresh nitrogen into the ultrapure water tank 2 to replace the nitrogen.

[0033] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0034] The above description is only an embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention shall be included in the scope of the claims of the present invention.

Claims

1. An ultrapure water tank nitrogen recycling device, characterized in that: The invention comprises a base (1), the upper surface of the base (1) is fixedly connected to an ultrapure water tank (2), the two sides of the ultrapure water tank (2) are respectively connected to a water supply pipe (3) and a drainage pipe (4), a nitrogen tank (5) is placed on the upper surface of the base (1), a delivery pipe (6) is connected between the nitrogen tank (5) and the ultrapure water tank (2), the upper surface of the base (1) is fixedly connected to a storage tank (7), a gas delivery pipe (8) is connected between the storage tank (7) and the ultrapure water tank (2), and an exhaust component (9) is provided in the storage tank (7), and the exhaust component (9) is used to extract and recover nitrogen in the ultrapure water tank (2).

2. The ultrapure water tank nitrogen recycling device according to claim 1, characterized in that: The gas delivery pipe (8) and the delivery pipe (6) are both equipped with a solenoid valve (10); the upper surface of the storage tank (7) is fixedly connected to a filter box (11); an activated carbon filter element is filled in the filter box (11); the filter box (11) is in communication with the gas delivery pipe (8) and the storage tank (7).

3. The ultrapure water tank nitrogen recycling device according to claim 1, characterized in that: The air extraction assembly (9) comprises a sliding seat (91), the sliding seat (91) is located in the preservation tank (7) and is slidably connected to the preservation tank (7), a servo motor (92) is fixedly connected to the base (1), a main shaft of the servo motor (92) passes through the base (1) and the preservation tank (7) and is rotatably connected to the base (1) and the preservation tank (7), the main shaft of the servo motor (92) is fixedly connected to a threaded rod (93), the threaded rod (93) passes through the sliding seat (91) and is threadedly connected to the sliding seat (91).

4. The ultrapure water tank nitrogen recycling device according to claim 3, characterized in that: The side wall of the storage tank (7) is connected to a transverse pipe (12), and a switch valve (13) is installed on the transverse pipe (12).

5. The ultrapure water tank nitrogen recycling device according to claim 4, characterized in that: The outer side of the sliding seat (91) is fixedly connected to a rubber ring (14), the rubber ring (14) is elastic, the rubber ring (14) contacts the inner wall of the storage tank (7), the inner wall of the storage tank (7) is fixedly connected to a limiting ring (15), the lower surface of the limiting ring (15) is fixedly connected to a vertical rod (16), the vertical rod (16) penetrates the sliding seat (91) and is slidably connected to the sliding seat (91), and the connection position between the horizontal tube (12) and the storage tank (7) is located above the limiting ring (15).

6. The ultrapure water tank nitrogen recycling device according to claim 1, characterized in that: A liquid level meter (17) is installed on one side of the ultrapure water tank (2).

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