Dust removal device for single crystal furnace vacuum system

Abstract

The utility model provides a dust removal device for a single crystal furnace vacuum system, which comprises a filtering tank, a dust removal device and a dust removal device, the filtering tank is provided with an upper-end opening and a lower-end opening, and the upper-end opening is communicated with a single crystal furnace and used for containing volatile matters falling during working of the single crystal furnace; the recycling pipeline horizontally extends in the first direction and is provided with a first opening, a second opening and a third opening, the first opening and the second opening are formed in the two opposite ends, in the first direction, of the recycling pipeline respectively, and the third opening is located between the first opening and the second opening and communicates with the lower end opening of the filtering tank; the filter tank is used for recovering volatile matters falling from the filter tank; the dust discharging assembly comprises a movable baffle arranged in the recycling pipeline and is used for pushing volatile matters falling into the recycling pipeline out of the recycling pipeline; the first recycling box body is communicated with one of the first opening and the second opening of the recycling pipeline so as to collect volatile matters pushed out of the recycling pipeline when the dust discharging assembly moves towards one of the first opening and the second opening.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal production, in particular to a dust removal device for a vacuum system of a single crystal furnace. Background Art

[0002] A dust removal device is usually installed on the vacuum system of a single crystal furnace to prevent high-temperature volatiles in the single crystal furnace from being drawn into the vacuum pump and affecting the performance of the vacuum pump. In the prior art, all volatiles are first drawn into the dust removal system and stored in the dust removal system, and then cleaned up when the single crystal furnace is shut down or dismantled.

[0003] However, as the size of the single crystal furnace increases, the amount of material fed into the single crystal furnace is also increasing, and the single crystal furnace also increases with the operating time, resulting in more volatiles. Excessive accumulation of volatiles in the dust removal system can easily cause quality problems and safety hazards in single crystal production. For example, manual operation errors during the operation of the single crystal furnace can easily cause volatiles to return to the furnace along the pipeline, causing difficulty in crystallization on the furnace table, seriously affecting single crystal production. Utility Model Content

[0004] In view of this, the utility model provides a dust removal device for a single crystal furnace vacuum system, which is used to solve the single crystal quality problems and safety hazards caused by the accumulation of volatiles during the long-term production process of the single crystal furnace.

[0005] In order to solve the above technical problems, the utility model provides a dust removal device for a single crystal furnace vacuum system, comprising:

[0006] The filter tank has an upper opening and a lower opening, wherein the upper opening is connected to the single crystal furnace and is used to receive volatiles that fall into the single crystal furnace when the single crystal furnace is working;

[0007] A recovery pipe extending horizontally along a first direction and having a first opening, a second opening and a third opening, wherein the first opening and the second opening are respectively arranged at two opposite ends of the recovery pipe in the first direction, and the third opening is located between the first opening and the second opening and communicated with the lower end opening of the filter tank, for recovering volatiles falling from the filter tank;

[0008] A dust removal assembly includes a baffle disposed in the recovery duct and movable in a first direction in the recovery duct to push volatiles falling into the recovery duct out of the recovery duct;

[0009] The first recovery box is connected to one of the first opening or the second opening of the recovery duct to collect volatiles pushed out from the recovery duct when the dust exhaust assembly moves toward one of the first opening or the second opening, and is connected to the vacuum system.

[0010] In one embodiment of the present invention, the dust exhaust assembly further includes a first push rod connected to the baffle and a first driving member driving the first push rod to move along a first direction.

[0011] The first push rod extends into the recovery pipe from the other end of the first opening or the second opening of the recovery pipe.

[0012] The first driving member is arranged outside the recovery pipeline.

[0013] In one embodiment of the utility model, the dust removal device for the vacuum system of the single crystal furnace further includes:

[0014] The second recovery box is detachably connected to the other of the first opening or the second opening of the recovery duct to collect volatiles pushed out from the recovery duct when the dust exhaust assembly moves toward the other of the first opening or the second opening.

[0015] In one embodiment of the present utility model, a first fixing seat is provided on the second recovery box, and the first driving member is fixed on the first fixing seat.

[0016] In one embodiment of the utility model, the dust removal device for the vacuum system of the single crystal furnace further includes:

[0017] An isolation component is disposed between the first recovery box and the third opening, and is used to isolate or connect the pipeline between the first recovery box and the third opening, and includes:

[0018] An isolation valve, the isolation valve extends into the recovery pipeline from the second direction and is used to isolate the pipeline between the first recovery box and the third opening;

[0019] A second driving member, the second driving member is arranged outside the recovery pipeline, and the second driving member is used to drive the isolation valve to move back and forth along a second direction, and the second direction intersects with the first direction;

[0020] A second push rod, one end of which is connected to the second driving member, and the other end of which is connected to the isolation valve.

[0021] In one embodiment of the utility model, a first cleaning port is provided on the first recovery box, and a second cleaning port is provided on the second recovery box. The first cleaning port and the second cleaning port are used to clean volatile substances.

[0022] In one embodiment of the utility model, a second fixing seat is provided on the recovery pipe, and the second driving member is fixed on the second fixing seat.

[0023] In one embodiment of the utility model, the dust removal device for the vacuum system of the single crystal furnace further includes:

[0024] A plurality of support bodies, the tops of which are respectively connected to the filter tank, the recovery pipe, the first recovery box, and the bottom of the second recovery box;

[0025] A plurality of universal wheels are arranged at the bottom of the plurality of supporting bodies.

[0026] In one embodiment of the utility model, the dust removal device for the single crystal furnace vacuum system also includes: a pressure gauge, which is arranged on the upper surface of the first recovery box and is used to reflect the air pressure of the first recovery box.

[0027] In one embodiment of the utility model, the dust removal device for the vacuum system of the single crystal furnace further includes: a pressure relief valve, which is arranged on the upper surface of the first recovery box.

[0028] The beneficial effects of the above technical solution of the utility model are as follows:

[0029] According to the dust removal device for the vacuum system of a single crystal furnace of the embodiment of the utility model, by setting a filter tank, a recovery pipe, a dust exhaust component, a first recovery box, and the connection relationship between the components, the volatiles dropped from the single crystal furnace are accumulated in the recovery pipe through the filter tank, and the volatiles are cleared from the end of the recovery pipe to the first recovery box through the dust exhaust component, so that the volatiles can be continuously cleaned when the single crystal furnace works for a long time, avoiding the accumulation of a large amount of volatiles, and preventing human operation errors from causing volatiles to return to the furnace along the pipe and causing difficulty in crystallization on the furnace table, thereby increasing the output of the single crystal furnace in disguise. At the same time, no manual real-time operation is required, which improves the efficiency of the staff and avoids the safety hazards of manually cleaning volatiles. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a schematic structural diagram of a dust removal device for a single crystal furnace vacuum system according to an embodiment of the utility model;

[0031] Figure 2 It is another structural schematic diagram of a dust removal device for a single crystal furnace vacuum system according to an embodiment of the utility model;

[0032] Figure 3 This is an overall schematic diagram of a dust removal device for a single crystal furnace vacuum system in a single crystal furnace system according to an embodiment of the utility model.

[0033] Reference numerals:

[0034] 1000, filter tank;

[0035] 100, recovery pipe; 101, first opening; 102, second opening; 103, third opening; 110, first recovery box; 111, first cleaning port; 120, second recovery box; 121, second cleaning port;

[0036] 200, dust exhaust assembly; 210, baffle; 220, first push rod; 230, first driving member; 240, first fixing seat;

[0037] 300, isolation assembly; 310, isolation valve; 320, second push rod; 330, second driving member; 340, second fixing seat;

[0038] 400, support body; 410, universal wheel;

[0039] 500, pressure gauge; 510, pressure relief valve; 520, evacuation pipe; 540, bolt;

[0040] 600. Single crystal furnace; 700. Vacuum device. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0042] Firstly, a dust removal device for a single crystal furnace vacuum system according to an embodiment of the utility model is described in detail below with reference to the accompanying drawings.

[0043] refer to Figure 1 , Figure 2 and Figure 3 , Figure 1 The structure diagram of the dust removal device for the vacuum system of a single crystal furnace according to an embodiment of the utility model is shown. Figure 2 Another structural schematic diagram of a dust removal device for a single crystal furnace vacuum system according to an embodiment of the utility model is shown. Figure 3 The overall schematic diagram of the dust removal device for the vacuum system of a single crystal furnace according to an embodiment of the utility model in the single crystal furnace system is shown.

[0044] like Figure 1 , Figure 2 and Figure 3As shown, in one embodiment of the utility model, a dust removal device for a single crystal furnace vacuum system (hereinafter referred to as a dust removal device) includes: a filter tank 1000, a recovery pipe 100, a dust exhaust assembly 200, and a first recovery box 110. The filter tank 1000 has an upper opening and a lower opening, and the upper opening is connected to the single crystal furnace 600 and is used to hold volatiles that fall into the single crystal furnace 600 when it is working. The recovery pipe 100 extends horizontally along a first direction and has a first opening 101, a second opening 102, and a third opening 103. The first opening 101 and the second opening 102 are respectively arranged at two opposite ends of the recovery pipe in the first direction. The third opening 103 is located between the first opening 101 and the second opening 102 and is connected to the lower opening 1100 of the filter tank 1000, and is used to recover volatiles that fall from the filter tank 1000. The dust exhaust assembly 200 includes a baffle 210 disposed in the recovery duct 100 and movable in the recovery duct 100 along a first direction to push the volatiles falling into the recovery duct 100 out of the recovery duct 100. The first recovery box 110 is connected to one of the first opening 101 or the second opening 102 of the recovery duct 100 to collect the volatiles pushed out of the recovery duct 100 when the dust exhaust assembly 200 moves toward one of the first opening 101 or the second opening 102, and is connected to the vacuum system. In the embodiment of the utility model, the first recovery box 110 is connected to the first opening 101 as an example.

[0045] Specifically, the filter tank 1000 is used to carry out preliminary recovery of volatiles generated when the single crystal furnace 600 is working. As the volatiles continue to accumulate when the single crystal furnace 600 is working, excessive volatiles fall into the recovery pipe 100 along the funnel at the bottom of the filter tank 1000, and the volatiles are cleared out from the end of the recovery pipe 100 through the push of the dust exhaust component 200, thereby achieving continuous cleaning of volatiles during the production process of the single crystal furnace 600, which not only avoids excessive accumulation of volatiles as the running time of the single crystal furnace 600 increases, but also avoids human cleaning errors that cause volatiles to return to the furnace along the pipe, causing difficulties in crystallization on the furnace table, thereby indirectly increasing the output of the single crystal furnace 600.

[0046] like Figure 1 and Figure 2As shown, in one embodiment of the utility model, the dust exhaust assembly 200 further includes: a first push rod 220 connected to the baffle 210 and a first driving member 230 driving the first push rod 220 to move along the first direction. The first push rod 220 extends into the recovery pipe 100 from the end where the other of the first opening 101 or the second opening 102 of the recovery pipe 100 is located, and the first driving member 230 is arranged outside the recovery pipe 100. In the embodiment of the utility model, the first push rod 220 extends into the recovery pipe 100 from the second opening 102 as an example. At this time, the first driving member 230 drives the baffle 210 to move back and forth along the first direction of the recovery pipe 100, and pushes the volatiles to the first opening 101 of the recovery pipe 100, so that the volatiles fall into the first recovery box 110. The opening direction of the first opening 101 is along the first direction, and is detachably connected to the first recovery box 110 in the first direction.

[0047] Among them, the first recovery box 110 is arranged on the other side of the first push rod 220 connected to the relative baffle 210. At this time, the dust exhaust assembly 200 pushes most of the volatiles to the first recovery box 110. Therefore, the first recovery box 110 can use a large-volume material piece to accumulate a large amount of volatiles and promote the cooling of the volatiles, avoid the high temperature of the volatiles, and reduce the safety hazards of employees disassembling the first recovery box 110.

[0048] Since a trace amount of volatiles may remain in the recovery pipe when the baffle of the dust exhaust assembly is pushed forward in the first direction and scrapes off the volatiles, a second recovery box may be further provided in the utility model.

[0049] like Figure 1 and Figure 2 As shown, in one embodiment of the present invention, the dust removal device further includes: a second recovery box 120, which is detachably connected to the other of the first opening 101 or the second opening 102 of the recovery duct 100 to collect volatiles pushed out from the recovery duct 100 when the dust exhaust assembly 200 moves toward the other of the first opening 101 or the second opening 102. In the present invention, the connection between the second recovery box 120 and the second opening 102 is taken as an example, the opening direction of the second opening 102 is downward, and it is detachably connected to the second recovery box 120 in the vertical direction. At this time, the dust exhaust assembly 200 pushes the trace volatiles to the second recovery box 120. Compared with the first recovery box 110, the second recovery box 120 can be made of a small volume material piece for accumulating trace volatiles.

[0050] like Figure 1 and Figure 2As shown, in one embodiment of the present invention, a first fixing seat 240 is provided on the second recovery box 120, and the first driving member 230 is fixed on the first fixing seat 240. The first fixing seat 240 is used to support the first driving member 230 to prevent the first driving member 230 from shaking when extending or retracting, thereby improving stability.

[0051] Since the single crystal furnace operates for a long time, the volatiles increase, and the volatiles in the first recovery box may exceed the safety threshold. It may be necessary to disassemble the first recovery box and clean the volatiles therein. Therefore, an isolation component can be provided in the utility model to achieve the air pressure environment for disassembling and assembling the first recovery box.

[0052] like Figure 1 and Figure 2 As shown, in one embodiment of the utility model, the dust removal device also includes: an isolation assembly 300, an isolation valve 310, a second driving member 330, and a second push rod 320. Among them, the isolation assembly 300 is arranged between the first recovery box 110 and the third opening 103, and is used to isolate or connect the pipeline between the first recovery box 110 and the third opening 103. The isolation valve 310 extends into the interior of the recovery pipeline 100 from the second direction, and is used to isolate the pipeline between the first recovery box 110 and the third opening 103. The second driving member 330 is arranged outside the recovery pipeline 100, and the second driving member 330 is used to drive the isolation valve 310 to move back and forth along the second direction, and the second direction intersects with the first direction. One end of the second push rod 320 is connected to the second driving member 330, and the other end is connected to the isolation valve 310. The isolation assembly 300 can isolate the airflow between the recovery pipeline 100 and the first recovery box 110, thereby ensuring a safe environment when the first recovery box 110 is disassembled and assembled.

[0053] like Figure 1 and Figure 2 As shown, in one embodiment of the utility model, a first cleaning port 111 is provided on the first recycling box 110, and a second cleaning port 121 is provided on the second recycling box 120. The first cleaning port 111 and the second cleaning port 121 are used to clean volatiles. The first cleaning port 111 and the second cleaning port 121 facilitate employees to clean the volatiles in the first recycling box 110 and the second recycling box 120 respectively, without opening the boxes, and the operation is convenient.

[0054] like Figure 1 and Figure 2 As shown, in one embodiment of the present invention, a second fixing seat 340 is provided on the recovery pipe 100, and the second driving member 330 is fixed on the second fixing seat 340. The second fixing seat 340 is used to support the second driving member 330 to prevent the second driving member 330 from shaking when extending or retracting, thereby improving stability.

[0055] like Figure 1 and Figure 2 As shown, in one embodiment of the utility model, the dust removal device further includes: a plurality of support bodies 400 and a plurality of universal wheels 410. The tops of the plurality of support bodies 400 are respectively connected to the bottoms of the filter tank 1000, the recovery pipe 100, the first recovery box 110, and the second recovery box 120. The plurality of universal wheels 410 are arranged at the bottoms of the plurality of support bodies 400. Through the plurality of support bodies 400 and the plurality of universal wheels 410, the filter tank 1000, the recovery pipe 100, the first recovery box 110, and the second recovery box 120 can be freely moved, which is convenient for employees to disassemble and assemble the boxes and adjust the positions of the components, thereby improving flexibility.

[0056] like Figure 1 and Figure 2 As shown, in one embodiment of the present utility model, the dust removal device further includes: a pressure gauge 500 , which is disposed on the upper surface of the first recovery box 110 , and is used to reflect the air pressure of the first recovery box 110 .

[0057] like Figure 1 and Figure 2 As shown, in one embodiment of the utility model, the dust removal device further includes: a pressure relief valve 510, which is arranged on the upper surface of the first recovery box 110. The pressure relief valve 510 is used to automatically release pressure when the air pressure in the first recovery box 110 and the recovery pipeline 100 exceeds a certain pressure value, so that the air pressure in the first recovery box 110 and the recovery pipeline 100 is within a set pressure range, thereby better protecting the recovery pipeline 100 and the first recovery box 110.

[0058] like Figure 1 As shown, in one embodiment of the utility model, the dust removal device further includes: an evacuation pipe 520, which is arranged on the upper surface of the first recovery box 110, and the evacuation pipe 520 is used to extract the air in the first recovery box 110. For example, when the first recovery box 110 needs to be installed, the first recovery box 110 is evacuated through the evacuation pipe 520 to the same pressure as the recovery pipeline 100. The evacuation pipe 520 can also be used for inflation. For example, when the first recovery box 110 needs to be disassembled, the first recovery box 110 is inflated through the evacuation pipe 520 to the same pressure as the normal pressure.

[0059] like Figure 1 and Figure 2As shown, in one embodiment of the utility model, the dust removal device further includes: a plurality of bolts 540, which are arranged at the first opening 101 and the second opening 102, and are used for fastening and connecting, thereby ensuring that the first recovery box 110, the second recovery box 120 and the recovery pipe 100 are connected stably, and the two recovery boxes are easy to disassemble and assemble due to the use of bolts. In other embodiments, the first discharge outlet 101 and the second discharge outlet 102 may also use other fasteners, such as buckles.

[0060] like Figure 3 As shown, in one embodiment of the present invention, the dust removal device further includes: a vacuum device 700, which is connected to the side wall of the filter tank 1000 and is used to make the air pressure inside the filter tank 1000 the same as the air pressure inside the single crystal furnace 600.

[0061] In the above-mentioned embodiment of the utility model, the first driving member and the second driving member are telescopic cylinders, which do not require manual real-time operation, and the time and frequency of the telescopic movement are adjustable.

[0062] In summary, according to the embodiment of the utility model, a filter tank volatile cleaning device can realize continuous cleaning of volatiles when the single crystal furnace is working for a long time, avoiding the accumulation of a large amount of volatiles, and preventing human operation errors from causing volatiles to return to the furnace along the pipeline and causing difficulty in crystallization on the furnace table, thereby increasing the output of the single crystal furnace in disguise. At the same time, no manual real-time operation is required, which improves the efficiency of the staff and avoids the safety hazards of manual cleaning of volatiles.

[0063] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. The words "connect" or "connected" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0064] The above is a preferred embodiment of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A dust removal device for a single crystal furnace vacuum system, characterized in that: include: A filter tank having an upper opening and a lower opening, wherein the upper opening is connected to the single crystal furnace and is used to receive volatiles that fall into the single crystal furnace when the single crystal furnace is working; a recovery pipe extending horizontally along a first direction and having a first opening, a second opening and a third opening, wherein the first opening and the second opening are respectively arranged at two opposite ends of the recovery pipe in the first direction, and the third opening is located between the first opening and the second opening and communicates with the lower end opening of the filter tank, for recovering volatiles falling from the filter tank; a dust exhaust assembly, comprising a baffle disposed in the recovery duct and movable in the recovery duct along the first direction to push volatiles falling into the recovery duct out of the recovery duct; The first recovery box is connected to one of the first opening or the second opening of the recovery duct to collect volatiles pushed out from the recovery duct when the dust exhaust assembly moves toward one of the first opening or the second opening, and is connected to a vacuum system.

2. The dust removal device for a single crystal furnace vacuum system according to claim 1, characterized in that: The dust exhaust assembly further includes a first push rod connected to the baffle and a first driving member driving the first push rod to move along the first direction. The first push rod extends into the recovery pipe from the end where the other of the first opening or the second opening of the recovery pipe is located. The first driving member is arranged outside the recovery pipeline.

3. The dust removal device for a single crystal furnace vacuum system according to claim 2, characterized in that: The dust removal device for the single crystal furnace vacuum system also includes: The second recovery box is detachably connected to the other of the first opening or the second opening of the recovery duct to collect volatiles pushed out from the recovery duct when the dust exhaust assembly moves toward the other of the first opening or the second opening.

4. The dust removal device for a single crystal furnace vacuum system according to claim 3, characterized in that: The second recovery box is provided with a first fixing seat, and the first driving member is fixed on the first fixing seat.

5. The dust removal device for a single crystal furnace vacuum system according to claim 3, characterized in that: Also includes: An isolation component is disposed between the first recovery box and the third opening, and is used to isolate or connect the pipeline between the first recovery box and the third opening, and includes: an isolation valve, the isolation valve extending from the second direction into the interior of the recovery pipeline, and used to isolate the pipeline between the first recovery box and the third opening; a second driving member, the second driving member being disposed outside the recovery pipeline, the second driving member being used to drive the isolation valve to move back and forth along the second direction, the second direction intersecting the first direction; A second push rod, one end of the second push rod is connected to the second driving member, and the other end of the second push rod is connected to the isolation valve.

6. The dust removal device for a single crystal furnace vacuum system according to claim 3, characterized in that: The first recovery box is provided with a first cleaning port, and the second recovery box is provided with a second cleaning port. The first cleaning port and the second cleaning port are used to clean the volatile matter.

7. The dust removal device for a single crystal furnace vacuum system according to claim 5, characterized in that: A second fixing seat is arranged on the recovery pipeline, and the second driving member is fixed on the second fixing seat.

8. The dust removal device for a single crystal furnace vacuum system according to any one of claims 3 to 7, characterized in that: Also includes: A plurality of support bodies, the tops of which are respectively connected to the filter tank, the recovery pipe, the first recovery box, and the bottom of the second recovery box; A plurality of universal wheels are arranged at the bottom of the plurality of supporting bodies.

9. The dust removal device for a single crystal furnace vacuum system according to claim 1, characterized in that: Also includes: A pressure gauge is provided on the upper surface of the first recovery box, and is used to reflect the air pressure of the first recovery box.

10. The dust removal device for a single crystal furnace vacuum system according to claim 1, characterized in that: Also includes: A pressure relief valve is arranged on the upper surface of the first recovery box.

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