Pneumatic valve control device and silane safety air supply system

Abstract

The utility model relates to a pneumatic valve control device and a safe silane gas supply system. The pneumatic valve control device comprises a plurality of air supply pipelines and an adapter, the adapter comprises an input port and at least two output ports, the input port of the adapter is connected with an air source through a first air supply pipeline, and the first output port of the adapter is connected with a control mechanism through a second air supply pipeline. A second output port of the adapter is connected with the pneumatic valve through a third air supply pipeline; according to the device, all the air supply pipelines are communicated through the arrangement of the adapters, so that the pneumatic valve is driven by air supplied by the air source under the control of the control mechanism, and the state of the pneumatic valve can be flexibly controlled according to application requirements. In the silane gas supply system, the pneumatic valve connected with the silane gas cylinder is controlled through the pneumatic valve control device, the pressure of the silane gas cylinder during gas supply can be reduced, the stability of a silane gas transmission pipeline is improved, and then the safety and reliability of the silane gas supply system are improved.

Description

Technical Field

[0001] The present application relates to the technical field of silane gas delivery, and in particular to a pneumatic valve control device and a silane safety gas delivery system. Background Art

[0002] Silane is the silicon source for chemical vapor deposition processes such as single crystal silicon, polycrystalline silicon epitaxial wafers, silicon dioxide, silicon nitride, and phosphorus silicon glass in the semiconductor industry, and is widely used in the production and development of solar cells, silicon copier drums, photoelectric sensors, optical fibers, and special glass. However, silane is extremely flammable and can spontaneously combust in the air. When using silane gas, a series of safety protection and detection measures need to be set up, such as setting up explosion-proof walls, flow-limiting holes, and flame detection or gas detection and other safety measures.

[0003] The pressure at the outlet of the silane cylinder is relatively high. When silane is delivered, the instantaneous flow and pressure from the cylinder outlet to the gas cabinet are relatively high, which can easily cause a large impact on the silane delivery pipeline, making the silane delivery process present a greater safety risk. Utility Model Content

[0004] Based on this, it is necessary to provide a pneumatic valve control device with high safety and a silane safety gas supply system.

[0005] In a first aspect, the present application provides a pneumatic valve control device, the device comprising:

[0006] Several air supply pipelines;

[0007] The adapter comprises an input port and at least two output ports, the input port of the adapter is connected to the air source through a first air supply pipeline, the first output port of the adapter is connected to the control mechanism through a second air supply pipeline, and the second output port of the adapter is connected to the pneumatic valve through a third air supply pipeline, wherein:

[0008] The adapter is used to conduct the air supply pipelines so that the gas delivered by the air source can drive the pneumatic valve under the control of the control mechanism.

[0009] In one of the embodiments, the control mechanism is further connected to the gas cabinet for transmitting the gas from the gas source to the gas cabinet when the control mechanism is turned on.

[0010] In one embodiment, the control mechanism includes a switch, and the switch is used to determine the conductive state of the control mechanism.

[0011] In one embodiment, the control mechanism includes a timing module, and the timing module is used to determine the time when the control mechanism is turned on or off.

[0012] In a second aspect, the present application provides a silane safety gas delivery system, which includes: a silane gas cylinder, a pneumatic valve, a silane gas cabinet, and a pneumatic valve control device as provided in the first aspect above, the silane gas cylinder is connected to the silane gas cabinet through the pneumatic valve, and the pneumatic valve is also connected to the pneumatic valve control device, wherein:

[0013] The silane gas cylinder is used to open the bottle mouth under the control of the pneumatic valve and send the silane gas to the silane gas cabinet. The state of the pneumatic valve is determined by the pneumatic valve control device.

[0014] In one of the embodiments, the pneumatic valve is detachably connected to the bottle mouth of the silane gas cylinder, and the pneumatic valve is used to control the opening or closing of the bottle mouth of the silane gas cylinder.

[0015] In one embodiment, the system further includes a purge device, one end of which is connected to the silane gas cylinder and the other end is connected to the silane gas cabinet, and the purge device is used to purge residual gas in the pipeline between the silane gas cylinder and the silane gas cabinet.

[0016] In one embodiment, the system further comprises a distribution device, which is connected to the silane gas cabinet and is used to distribute the silane gas to different devices.

[0017] In one of the embodiments, the system further includes a detection device, which is used to detect the operating environment of the system to determine whether there is a gas leak.

[0018] In one embodiment, the detection device includes a gas detector and a UV / IR detector.

[0019] The above-mentioned pneumatic valve control device includes several air supply pipelines and adapters, the adapter includes an input port and at least two output ports, the input port of the adapter is connected to the gas source through the first air supply pipeline, the first output port of the adapter is connected to the control mechanism through the second air supply pipeline, and the second output port of the adapter is connected to the pneumatic valve through the third air supply pipeline; the device conducts each air supply pipeline through the setting of the adapter, so that the gas delivered by the air source can drive the pneumatic valve under the control of the control mechanism, avoiding the traditional way of controlling the pneumatic valve through the PLC (Programmable Logic Controller) signal, and can flexibly control the state of the pneumatic valve according to application requirements. In the silane gas supply system, the pneumatic valve connected to the silane gas cylinder is controlled by the pneumatic valve control device proposed in this application, which can reduce the pressure of the silane gas cylinder during gas supply, improve the stability of the silane gas transmission pipeline, and thus improve the safety and reliability of the silane gas supply system. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] FIG1 is a connection diagram of a pneumatic valve control device according to an embodiment;

[0022] FIG2 is a schematic diagram of the connection of a silane safety gas delivery system according to an embodiment;

[0023] FIG. 3 is a connection diagram of a silane safety gas delivery system according to another embodiment. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0025] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0026] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0027] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0028] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0029] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0030] First, the technical background of this application and the terms that may be involved are briefly explained.

[0031] Silane, also known as silane gas, is a compound of silicon and hydrogen, including monosilane (SiH 4) , disilane (Si2H6) and some higher silicon hydride compounds, with the general formula Si n H 2n+2 Among them, monosilane is the most common, and sometimes it is also referred to as silane. It is an important special gas used in semiconductor microelectronics technology. Silane can spontaneously combust in the air and is very easy to explode. Therefore, the silane gas supply system is equipped with a series of safety protection and detection measures to improve the safety of the gas supply system.

[0032] BSGS (Bulk Specialty Gas Supply System) is a large-flow special gas supply system. In the BSGS system, the BSGS gas cabinet can realize the continuous and uninterrupted safe supply of special gases. During the gas delivery process of silane gas, the silane in the silane gas cylinder needs to be delivered to the gas cabinet of the BSGS system for the subsequent use of silane gas.

[0033] Due to the characteristics of silane gas, the bottle mouth of silane gas cylinder is generally controlled by pneumatic valve instead of traditional screw drive valve. The pneumatic valve is opened by external driving gas, where the driving gas is a gas with stable performance, such as inert gas, or a gas with stable state such as nitrogen. Usually, the outlet pressure of silane gas cylinder is greater than 1000PSI. When delivering gas to BSGS gas cabinet, the instantaneous flow and pressure of silane gas from the outlet of silane gas cylinder to BSGS gas cabinet are very large, which has a great impact on the silane gas transmission pipeline and poses a safety risk.

[0034] In one embodiment, as shown in FIG1 , a pneumatic valve control device is provided, which includes: a plurality of air supply pipelines and an adapter, the adapter including an input port and at least two output ports, the input port of the adapter is connected to an air source via a first air supply pipeline, the first output port of the adapter is connected to a control mechanism via a second air supply pipeline, and the second output port of the adapter is connected to a pneumatic valve via a third air supply pipeline, wherein: the adapter is used to connect the air supply pipelines so that the gas delivered by the air source can drive the pneumatic valve under the control of the control mechanism.

[0035] Among them, the adapter is a component used to connect with the control component and form a passage between the air source, the pneumatic valve and the control component. For example, the adapter can be a three-way adapter. In the prior art, when driving the pneumatic valve to open, an air supply pipeline is generally directly set between the air source and the pneumatic valve. Under the control of the PLC, the driving air of the air source is sent to the pneumatic valve, so that the pneumatic valve is opened under the drive of the driving air. The pneumatic valve control device provided in the present application is provided with an adapter in the air supply pipeline. The adapter has an input port and at least two output ports. The input port is connected to the air source through a first air supply pipeline, the first output port is connected to the control mechanism through a second air supply pipeline, and the second output port is connected to the pneumatic valve through a second air supply pipeline.

[0036] Illustratively, when the air source of the pneumatic valve control device of this embodiment is turned on, if the control mechanism is also in the on state, the driving gas will be diverted to the second air supply pipeline, causing the gas pressure of the third air supply pipeline to decrease, which is insufficient to drive the pneumatic valve to open, and the pneumatic valve remains closed.

[0037] It can be understood that the control of the pneumatic valve by the driving gas is to move the piston or diaphragm inside the pneumatic valve under the control of the driving gas to realize the opening or closing of the pneumatic valve. When the pressure of the driving gas meets the preset conditions, the pneumatic valve opens, and when the pressure of the driving gas does not meet the preset conditions, the pneumatic valve closes. In the pneumatic valve control device of this embodiment, based on the setting of the adapter, according to the change of the state of the control mechanism, when the control mechanism is closed, the driving gas of the air source is sent to the pneumatic valve through the adapter to drive the opening of the pneumatic valve. When the control mechanism is turned on, the driving gas of the air source is diverted to the control mechanism, and the pneumatic valve is closed accordingly. This embodiment does not require the traditional method of controlling the pneumatic valve through the PLC signal, and the state of the pneumatic valve can be flexibly controlled according to application requirements.

[0038] In a further embodiment, the control mechanism is also connected to the gas cabinet for delivering the gas from the gas source to the gas cabinet when the control mechanism is turned on.

[0039] The control mechanism may be a control panel, which includes a plurality of connection terminals for connecting different pipelines, valves, etc., and each connection terminal can be independently controlled. The control panel can realize the control of the pneumatic valve simply and clearly. When the control mechanism is a control panel, the control mechanism can be connected to the gas cabinet, and the diverted driving gas can be sent to the gas cabinet for circulation when the control mechanism is opened. At the same time, since the control mechanism is connected to the gas cabinet, the operator can also determine the time when the driving gas of the gas source starts to be transmitted according to the connected gas cabinet, so as to realize the operation of the control mechanism in a timely manner.

[0040] In another exemplary embodiment, the control mechanism includes a switch, and the switch is used to determine the conductive state of the control mechanism.

[0041] The control mechanism determines the conduction state of the control mechanism through a switch. Generally speaking, when the switch is turned on, it means that the control mechanism is turned on, the control mechanism will divert the driving gas, and the pneumatic valve is closed; when the switch is turned off, it means that the control mechanism is closed, the control mechanism does not divert the driver, and the pneumatic valve is opened under the drive of the driving gas. Exemplarily, the switch can be a knob, and the state of the control mechanism is determined by rotating the knob. Using a knob as a switch is simple to operate, easy to grasp and turn, and has good durability.

[0042] It can be understood that this embodiment has no limitation on the shape and structure of the switch, and the switch can also take other forms, not limited to the forms mentioned in the above embodiments, as long as it can achieve the control of the state of the control mechanism.

[0043] In another embodiment, the control mechanism includes a timing module, and the timing module is used to determine the time when the control mechanism is turned on or off.

[0044] As shown in the above example, the pressure at the outlet of the silane gas cylinder is very high, which will cause great pressure on the gas delivery pipeline during the gas delivery process, affecting the stability of the gas delivery pipeline. In this embodiment, a timing module is set in the control mechanism, and the timing module is used to determine the time when the control mechanism is turned on or off, so that the segmented gas delivery of the gas cylinder can be achieved; that is, the time for the pneumatic valve to be opened is segmented, so that the silane gas delivered by the gas cylinder can be delivered in batches, reducing the pressure on the gas delivery pipeline, and realizing the slow decompression and gas delivery of the silane gas.

[0045] For example, as the pneumatic valve is opened, high-pressure silane gas is delivered to the pipeline connected to the BSGS gas cabinet, and the control mechanism is immediately opened to close the pneumatic valve, reducing the pressure of the silane gas on the pipeline. After a pause, the pneumatic valve is opened again by controlling the control mechanism, and the silane gas is delivered to the BSGS gas cabinet. This cycle allows high-pressure gas to enter the pipeline relatively slowly until the gas cabinet is filled. This embodiment can reduce the impact of the high pressure in the gas cylinder on the pipeline and valve, and improve the safety of gas delivery. The timing module is used to time the time when the control mechanism is turned on or off, so as to achieve efficient control of the control mechanism.

[0046] In an exemplary embodiment, the gas delivered by the gas source is nitrogen. Nitrogen is a colorless and odorless gas with stable performance and generally does not react with other substances. It is widely used in applications requiring an anaerobic environment. By using nitrogen as the driving gas for a pneumatic valve, it can play a role in isolation and explosion prevention.

[0047] It can be understood that this embodiment has no limitation on the driving gas delivered by the gas source, and the driving gas can also be in other forms, not limited to the forms mentioned in the above embodiments, as long as it can achieve the purpose of driving the pneumatic valve to open.

[0048] In combination with the above example, in another embodiment, as shown in Figure 2, a silane safety gas delivery system is provided, which includes: a silane gas cylinder, a pneumatic valve, a silane gas tank, and a pneumatic valve control device as provided in the above embodiment. The silane gas cylinder is connected to the silane gas tank through the pneumatic valve, and the pneumatic valve is also connected to the pneumatic valve control device. The silane gas cylinder is used to open the bottle mouth under the control of the pneumatic valve to send silane gas to the silane gas tank. The state of the pneumatic valve is determined by the pneumatic valve control device.

[0049] The silane gas cylinder is a steel cylinder, such as a Y-shaped steel cylinder, which is easy to carry and has high stability. Due to the particularity of silane gas, an independent silane station is generally set up for operating the silane gas. The silane safety gas delivery system of this embodiment is a system that sends the silane gas in the silane gas cylinder to the silane gas cabinet at the silane station.

[0050] In addition, when using the gas delivery system of this embodiment, if other problems arise during the gas delivery process, such as internal leakage of the valve, etc., when the silane gas needs to be discharged for maintenance, since the gas delivery system of this embodiment implements slow gas delivery in stages with reduced pressure, when the device failure is realized, the gas delivery can be interrupted in time when the pipeline is not filled with silane gas, thereby reducing the emission of silane gas during the maintenance of the gas delivery system, and correspondingly reducing the cost of processing the exhaust gas.

[0051] This embodiment controls the opening of the pneumatic valve through the pneumatic valve control device to deliver the silane gas in the silane cylinder to the silane gas cabinet, which can reduce the pressure of the silane cylinder when delivering gas, so that the silane gas can be delivered to the transmission pipeline relatively slowly, reducing the impact of the high-pressure gas in the cylinder on the pipeline and valve. On the basis of not changing the original silane station structure, this embodiment supplies the dangerous gas in the high-pressure cylinder in a decompression segmented manner, which can reduce the impact of the throttling effect on valves, pipelines and other components, extend the service life of the gas delivery system, increase the safety of the system, and is simple to operate, low in cost, and has strong practicality.

[0052] In a further embodiment, the pneumatic valve is detachably connected to the bottle mouth of the silane gas cylinder, and the pneumatic valve is used to control the opening or closing of the bottle mouth of the silane gas cylinder.

[0053] Among them, the pneumatic valve and the bottle mouth of the silane gas cylinder are detachably connected, which is convenient for updating or maintenance of the pneumatic valve. In order to further improve the tightness of the connection between the pneumatic valve and the bottle mouth, a sealing device, such as a sealing ring, can also be provided at the connection between the pneumatic valve and the bottle mouth to improve the airtightness of the connection.

[0054] In another embodiment, the system further includes a purging device, which is respectively connected to the silane gas cylinder and the silane gas cabinet, and is used to purge residual gas in the pipeline between the silane gas cylinder and the silane gas cabinet.

[0055] Among them, the purging device can be a Pigtail Box (pigtail pipe connection box), which is a commonly used device in special gas supply systems. It is used to purge the gas delivery pipeline to eliminate residual gas when the gas cylinder is replaced, maintain the pressure of the gas cylinder interface, and improve the safety and stability of the system.

[0056] In one embodiment, as shown in FIG. 3 , the system further includes a distribution device, which is connected to the silane gas cabinet and is used to distribute the silane gas to different devices.

[0057] Among them, the distribution device is connected to the silane gas cabinet to distribute silane gas to different terminal devices according to different application requirements. For example, the distribution device can be a VMB valve box (Valve Manifold Box). VMB is a closed pipeline distribution device used in the transportation process of special gases, including a gas inlet and multiple branches, each branch is used to connect with different equipment. The VMB device is equipped with a valve at the gas inlet, and each branch is equipped with manual valves, pressure gauges, filters and other components. When the distribution device distributes the silane gas, it can also adjust the pressure of the silane gas delivered to each device to achieve more stable gas delivery.

[0058] In one implementation, the separation device may also include a VMP valve manifold panel, which is an open distribution component used in the delivery process of special gases and also includes a gas inlet and multiple branches. In this embodiment, the structure of the VMP is similar to that of the VMB, and both are used to distribute silane gas to different terminal devices.

[0059] It is understandable that the above distribution device may also take other forms, and is not limited to the forms mentioned in the above embodiments, as long as it can achieve the function of distributing silane gas to different terminal devices.

[0060] In one embodiment, the system further includes a detection device, which is used to detect the operating environment of the system to determine whether there is a gas leak.

[0061] Among them, the detection device is a device used to detect, monitor and measure the environmental parameters of the gas supply system to protect the detection system. Due to the particularity of silane gas, a detection device is set in the gas supply system. In the event of leakage or combustion, it can be dealt with in a timely manner to avoid serious harm caused by system failure or equipment aging. Exemplarily, the detection device can be a sensor, a gas detector, an infrared detector, etc. Different types of detection devices can detect different objects and improve the safety of the gas supply system.

[0062] In an exemplary embodiment, the detection device includes a gas detector and a UV / IR detector.

[0063] Among them, the gas detector is a detection device used to detect the concentration of target gas in the air. It can promptly alarm when the target gas leaks. It is often used to detect flammable, explosive, toxic and other gas delivery systems.

[0064] UV / IR detector is a detection device specially used to detect ultraviolet (UV) and infrared (IR) radiation, which is usually used in fire detection and gas leak detection. UV / IR detector can be used for early detection of fire, because the combustion process produced by flame will release UV and IR radiation, UV / IR detector can detect these radiations, so as to find fire in time and trigger alarm system.

[0065] In some other embodiments, the silane gas safety gas delivery system is also provided with protection measures such as explosion-proof walls and flow-limiting holes. Among them, the explosion-proof wall is a safety facility used to isolate explosions, which can separate the explosion risk area from other areas. The explosion-proof wall is usually made of flame-retardant materials and can resist the explosion shock wave and flame propagation, reducing the scope of damage caused by the explosion. The flow-limiting hole is a device used to prevent the flame from passing through a pipe or container. It is usually set at the vent of equipment such as a pipe to prevent the flame from passing through and extending to other areas. The design of the flow-limiting hole can contain and extinguish the flame when it passes through, thereby preventing the spread of fire or explosion.

[0066] The silane gas safety delivery system of this embodiment controls the pneumatic valve connected to the silane gas cylinder through the pneumatic valve control device, so that the silane gas can be delivered into the transmission pipeline relatively slowly, reducing the impact of the high-pressure gas in the gas cylinder on the pipeline and valve, improving the stability of the silane gas transmission pipeline, and thereby improving the safety and reliability of the silane gas delivery system.

[0067] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic description of the above terms does not necessarily refer to the same embodiment or example.

[0068] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0069] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A pneumatic valve control device, characterized in that: The device comprises: Several air supply pipelines; The adapter comprises an input port and at least two output ports, the input port of the adapter is connected to the air source through a first air supply pipeline, the first output port of the adapter is connected to the control mechanism through a second air supply pipeline, and the second output port of the adapter is connected to the pneumatic valve through a third air supply pipeline, wherein: The adapter is used to conduct the air supply pipelines so that the gas delivered by the air source can drive the pneumatic valve under the control of the control mechanism.

2. The device according to claim 1, characterized in that The control mechanism is also connected to the gas cabinet, and is used to transmit the gas from the gas source to the gas cabinet when the control mechanism is turned on.

3. The device according to claim 2, characterized in that The control mechanism includes a switch, and the switch is used to determine the conductive state of the control mechanism.

4. The device according to claim 2, characterized in that The control mechanism comprises a timing module, and the timing module is used to determine the time when the control mechanism is turned on or off.

5. A silane safe gas delivery system, characterized in that: The system includes: a silane gas cylinder, a pneumatic valve, a silane gas cabinet, and The pneumatic valve control device according to any one of claims 1 to 4, wherein the silane gas cylinder is connected to the silane gas cabinet through the pneumatic valve, and the pneumatic valve is also connected to the pneumatic valve control device, wherein: The silane gas cylinder is used to open the bottle mouth under the control of the pneumatic valve to send the silane gas to the silane gas cabinet, and the state of the pneumatic valve is determined by the pneumatic valve control device.

6. The system according to claim 5, characterized in that The pneumatic valve is detachably connected to the bottle mouth of the silane gas cylinder, and the pneumatic valve is used to control the opening or closing of the bottle mouth of the silane gas cylinder.

7. The system according to claim 5, characterized in that The system also includes a purge device, one end of which is connected to the silane gas cylinder and the other end is connected to the silane gas cabinet. The purge device is used to purge residual gas in the pipeline between the silane gas cylinder and the silane gas cabinet.

8. The system according to claim 5, characterized in that The system further comprises a distribution device, which is connected to the silane gas cabinet and is used for distributing the silane gas to different equipments.

9. The system according to claim 5, characterized in that The system further comprises a detection device, which is used to detect the operating environment of the system to determine whether there is a gas leak.

10. The system according to claim 9, characterized in that The detection device includes a gas detector and a UV / IR detector.

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