Novel high-pressure differential-pressure core structure

Abstract

The utility model relates to a novel high pressure differential pressure core structure, which is characterized by comprising a sintering base, a pressure sensing chip, a pressure sensing diaphragm, a ceramic pad, a chip body and a pressing ring, the pressure sensing chip is arranged in the sintering base, the pressure sensing diaphragm is arranged in the sintering base, a gold wire is arranged on the chip body, and the ceramic pad is arranged on the pressing ring. The sintering base seals the stainless steel sintering base in a glass insulator sintering mode, four groups of pins are led out, the chip body is connected to the pins on the sintering base through gold wire binding wires, and the other end of the chip body presses the pressure sensing diaphragm through the pressing ring. According to the utility model, the high-performance silicon piezoresistive pressure sensing chip is adopted and is assembled by using an all-welded sealing structure, the silicon oil is filled in a high-vacuum environment, and the measuring diaphragm made of hastelloy isolates a measured medium from the pressure sensing chip, and also enables the core body to reliably measure pressure signals of various strong corrosive media for a long time.

Description

Technical Field

[0001] The utility model relates to a high-pressure differential core structure, in particular to a novel high-pressure differential core structure. Background Art

[0002] Differential pressure cores are widely used in the measurement of lubricating oil and fuel. For example, when the flow rate needs to be measured, the pressure difference on both sides of the pipeline pressure is needed to calculate the flow value. At this time, a differential pressure sensor that can sense the pressure on both sides of the pipeline is needed. The core of the sensor is the pressure core. Lubricating oil and fuel are corrosive measuring media. Both the positive and negative pressure ends of the differential pressure sensor need to use diaphragm isolation technology to protect the chip from being contaminated by the measuring medium. The pressure measurement range of traditional differential pressure cores is mostly within 2MPa. There is currently no mature and reliable solution for differential pressure measurement at higher pressures. Utility Model Content

[0003] The purpose of the utility model is to provide a novel high-pressure differential core structure to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a novel high-pressure differential pressure core structure, including a sintered base, a pressure-sensitive chip, a pressure-sensitive diaphragm, a ceramic pad, a chip body and a pressure ring, the sintered base is provided with a pressure-sensitive chip inside, the pressure-sensitive diaphragm is provided to the inside of the sintered base, the chip body is provided with gold wire, the sintered base adopts a glass insulator sintering method to seal the stainless steel sintered base and lead out four groups of pins, the chip body is connected to the pins on the sintered base with gold wire binding wires, the other end of the chip body is pressed against the pressure-sensitive diaphragm with a pressure ring, and the pressure ring and the sintered base are welded together by laser welding to form a first laser weld and a second laser weld, and are sealed at both ends of the sintered base.

[0005] The sintered base is filled with high-purity silicone oil in a vacuum manner, and an oil filling inlet is provided on the sintered base; the oil filling inlet is welded to the sintered base with a plug.

[0006] As a further improvement of the present invention, 730 glue is provided in the sintering base, and the 730 glue fixes the chip body to the sintering base.

[0007] As a further improvement of the present invention, 968-2 glue is further provided in the sintered base, and the 968-2 glue fixes the pressure-sensitive chip into the sintered base.

[0008] As a further improvement of the present invention, the cross section of the sintered base is circular.

[0009] As a further improvement of the present invention, an annular groove is provided on the sintering base, and the sintering base is T-shaped.

[0010] As a further improvement of the utility model, the pressure-sensitive diaphragm is made of 50um thick and corrosion-resistant Hastelloy alloy.

[0011] According to the above description of the technical solution, compared with the prior art, the technical features and beneficial technical effects of the technical solution include the following:

[0012] (1) The core of the sensor adopts a high-performance silicon piezoresistive pressure-sensitive chip, which is assembled using a fully welded sealed structure and filled with silicone oil in a high vacuum environment. The measuring diaphragm made of Hastelloy alloy can isolate the measured medium from the pressure-sensitive chip while enabling the core to perform long-term and reliable measurements of pressure signals of various highly corrosive media.

[0013] (2) Except for the Hastelloy thick diaphragm, the rest of the new high-pressure differential pressure core is made of all stainless steel. According to the different measuring ranges, high-precision pressure-sensitive chips of different ranges can be used. This makes the core have the characteristics of being able to design multiple ranges, wide range, high static pressure resistance, high precision, high stability, reliable operation, high frequency response, convenient installation and simple use, etc. It can work under harsh conditions. It can not only be used to measure pressure, but also can be used to measure height, speed, acceleration and other data with a little change. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a side view stereoscopic structural schematic diagram of the utility model.

[0015] Figure 2 It is a front view three-dimensional structural schematic diagram of the utility model.

[0016] Figure 3 It is a schematic diagram of the top structure of the utility model.

[0017] Figure 4 It is a schematic diagram of the cross-sectional structure of the utility model at AA.

[0018] Figure 5 It is a schematic diagram of the internal structure of the utility model from the front.

[0019] In the figure: 1. Sintered base; 2. Pressure-sensitive chip; 3. Pressure-sensitive diaphragm; 4. Ceramic pad; 5. Chip body; 6. Pressure ring; 7. First laser welding point; 8. Pin; 9. Gold wire; 10. 730 glue; 11. Second laser welding point; 12. Oil filling inlet; 13. 968-2 glue. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. All other embodiments obtained by ordinary technicians in the field without creative work based on the embodiments of the utility model shall fall within the scope of protection of the utility model.

[0021] See also Figure 1-5 The utility model provides an embodiment: a novel high-pressure differential pressure core structure, including a sintered base 1, a pressure-sensitive chip 2, a pressure-sensitive diaphragm 3, a ceramic pad 4, a chip body 5 and a pressure ring 6. The sintered base 1 is provided with a pressure-sensitive chip 2, the pressure-sensitive diaphragm 3 is provided to the inside of the sintered base 1, and a gold wire 9 is provided on the chip body 5. The sintered base 1 adopts a glass insulator sintering method to seal the stainless steel sintered base 1 and lead out four groups of pins 8. The chip body 5 is connected to the pins 8 on the sintered base 1 by binding wires with gold wires 9. The other end of the chip body 5 presses the pressure-sensitive diaphragm 3 with a pressure ring 6, and the pressure ring 6 is welded to the sintered base 1 by laser welding to form a first laser welding point 7 and a second laser welding point 11, and is sealed at both ends of the sintered base 1.

[0022] The core sensitive core adopts a high-performance silicon piezoresistive pressure-sensitive chip 2, which is assembled using a fully welded sealed structure and filled with silicone oil in a high vacuum environment. The measuring diaphragm made of Hastelloy can isolate the measured medium from the pressure-sensitive chip 2 while enabling the core to perform long-term and reliable measurements of pressure signals of various highly corrosive media.

[0023] The sintering base 1 is filled with high-purity silicone oil by vacuuming, and an oil filling inlet 12 is provided on the sintering base 1, and a plug is used to weld the oil filling inlet 12 to the sintering base 1; the sintering base 1 is provided with 730 glue 10, which fixes the chip body 5 to the sintering base 1, and the sintering base 1 is also provided with 968-2 glue 13, which fixes the pressure-sensitive chip 2 to the sintering base 1. The cross section of the sintering base 1 is circular, and an annular groove is opened on the sintering base 1. The sintering base 1 is T-shaped, and the pressure-sensitive diaphragm 3 is made of 50um thick and corrosion-resistant Hastelloy.

[0024] Except for the thick Hastelloy diaphragm, the rest of the new high-pressure differential pressure core is made of stainless steel. According to the different measuring ranges, high-precision pressure-sensitive chips 2 with different ranges can be used. This makes the core have the characteristics of being able to design multiple ranges, wide range, high static pressure resistance, high precision, high stability, reliable operation, high frequency response, convenient and simple installation and use, etc. It can work under harsh conditions. It can not only be used to measure pressure, but also can be used to measure height, speed, acceleration and other data with a little change.

[0025] The working principle of this equipment is that the sensitive core of the core adopts a high-performance silicon piezoresistive pressure-sensitive chip 2, which is assembled using a fully welded sealed structure and filled with silicone oil in a high vacuum environment. The measuring diaphragm made of Hastelloy can isolate the measured medium from the pressure-sensitive chip 2 while enabling the core to perform long-term and reliable measurements of pressure signals of various highly corrosive media. Except for the Hastelloy thick diaphragm, the rest of the new high-pressure differential pressure core is made of all stainless steel. According to the different measuring ranges, high-precision pressure-sensitive chips 2 of different ranges can be used. This enables the core to have the characteristics of being able to design multiple ranges, wide range, high static pressure resistance, high precision, high stability, reliable operation, high frequency response, convenient and simple installation and use, etc., and can work under harsh conditions.

[0026] This equipment can not only be used to measure pressure, but also can be used to measure height, speed, acceleration and other data with slight changes. The components of each part are more professional and standard, which is convenient for mass production and effectively reduces the production cost. The high-sensitivity pressure-sensitive chip is the key component of the core, which determines the stability and reliability of the core. Since it needs to sense a large pressure difference, in order to make the measurement more accurate and reliable, the design uses the domestically produced HB2104 chip for measurement, with a range of 0-10MPa, which can accurately sense the medium pressure conducted by the diaphragm. The core that measures the differential pressure in the flowing medium, the diaphragm will be especially corroded by the medium. In order to ensure the reliable operation of the core and improve its service life, the design uses 50um thick and corrosion-resistant Hastelloy as the manufacturing material of the pressure-sensitive diaphragm 3, which can be used reliably and stably in a corrosive environment for a long time.

Claims

1. A new type of high pressure differential core structure, characterized by: The invention comprises a sintered base (1), a pressure-sensitive chip (2), a pressure-sensitive diaphragm (3), a ceramic pad (4), a chip body (5) and a pressure ring (6); the sintered base (1) is provided with a pressure-sensitive chip (2); the pressure-sensitive diaphragm (3) is provided to the inside of the sintered base (1); a gold wire (9) is provided on the chip body (5); the sintered base (1) is sealed with a stainless steel sintered base (1) by sintering a glass insulator and four groups of pins (8) are led out; the chip body (5) is connected to the pins on the sintered base (1) by binding with a gold wire (9) (8), the other end of the chip body (5) is pressed against the pressure-sensitive diaphragm (3) by a pressure ring (6), and the pressure ring (6) is welded to the sintered base (1) by laser welding to form a first laser welding point (7) and a second laser welding point (11), and sealed at both ends of the sintered base (1); the sintered base (1) is filled with high-purity silicone oil into the interior of the sintered base (1) by vacuuming, and an oil filling inlet (12) is provided on the sintered base (1); the oil filling inlet (12) is welded to the sintered base (1) by a plug.

2. A novel high pressure differential core structure according to claim 1, characterized in that: The sintering base (1) is provided with 730 glue (10), and the 730 glue (10) fixes the chip body (5) into the sintering base (1).

3. A novel high pressure differential core structure according to claim 1, characterized in that: The sintered base (1) is also provided with 968-2 glue (13), and the 968-2 glue (13) fixes the pressure sensing chip (2) into the sintered base (1).

4. A novel high pressure differential core structure according to claim 1, characterized in that: The cross section of the sintered base (1) is circular.

5. A novel high pressure differential core structure according to claim 1, characterized in that: An annular groove is provided on the sintering base (1), and the sintering base (1) is T-shaped.

6. A novel high pressure differential core structure according to claim 1, characterized in that: The pressure-sensitive diaphragm (3) is made of 50 um thick, corrosion-resistant Hastelloy alloy.

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