High-speed high-precision two-dimensional motion platform for bonding machine

Abstract

The utility model discloses a high-speed high-precision two-dimensional motion platform for a bonding machine, and relates to the technical field of motion platforms for bonding machines, the high-speed high-precision two-dimensional motion platform comprises a Y-axis motor base and an X-axis motor base, the rear side of the top end of the Y-axis motor base is fixedly provided with a Y-axis motor fixed-coil slide rail, the upper end of the Y-axis motor fixed-coil slide rail is slidably provided with a Y-axis voice coil motor, and the X-axis voice coil motor is provided with a Y-axis voice coil. An X-axis motor fixed coil sliding rail is fixedly installed at the top end of the X-axis motor base, an X-axis voice coil motor is installed at the upper end of the X-axis motor fixed coil sliding rail in a sliding mode, a Y-axis voice coil motor fixed coil damper is installed at the lower end of the Y-axis voice coil motor, and an X-axis voice coil motor fixed coil damper is installed at the lower end of the X-axis voice coil motor. According to the device, the movement direction is determined through the X-axis motor sliding rail and the Y-axis motor sliding rail, high-speed and high-precision movement is achieved through cooperation of the two voice coil motors, vibration reduction is achieved through the magnetic dampers at the lower ends of the motors in the movement process, and a workpiece is prevented from directly colliding with a terminal of the sliding rails.

Description

Technical Field

[0001] The utility model relates to the technical field of bonding machine motion platforms, in particular to a high-speed and high-precision two-dimensional motion platform for a bonding machine. Background Art

[0002] Bonding machine is a device used to achieve the connection between chip and external leads in the semiconductor manufacturing process. With the rapid development of electronic products, especially the advancement of mobile devices and communication technology, the precision and reliability requirements for electronic components are getting higher and higher. Therefore, high-speed and high-precision two-dimensional motion platforms have begun to appear and are widely used. They can ensure the precise positioning and connection of microelectronic components (such as chips, resistors, capacitors, etc.) on printed circuit boards (PCBs) to facilitate subsequent spot welding.

[0003] The high-speed and high-precision motion platform needs to maintain stability and accuracy, and the mechanical vibration generated during the movement needs to be eliminated to avoid connection errors or damage to components caused by mechanical vibration, and to ensure the high-precision movement of the motion platform. Based on this, this solution provides a high-speed and high-precision two-dimensional motion platform for a bonding machine to solve the above-mentioned problems. Utility Model Content

[0004] In order to solve the above technical problems, a high-speed and high-precision two-dimensional motion platform for a bonding machine is provided. This technical solution solves the problem proposed in the above background technology that it is necessary to eliminate the mechanical vibrations generated during the movement process to avoid mechanical vibrations causing connection errors or damage to components, thereby ensuring that the motion platform can move with high precision.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A high-speed and high-precision two-dimensional motion platform for a bonding machine comprises a Y-axis motor base and an X-axis motor base, wherein the X-axis motor base is arranged on the left side of the Y-axis motor base, a Y-axis motor fixed circle slide rail is fixedly installed on the rear side of the top end of the Y-axis motor base, a Y-axis voice coil motor is slidably installed on the upper end of the Y-axis motor fixed circle slide rail, an X-axis motor fixed circle slide rail is fixedly installed on the top end of the X-axis motor base, an X-axis voice coil motor is slidably installed on the upper end of the X-axis motor fixed circle slide rail, a Y-axis voice coil motor fixed circle damper is installed at the lower end of the Y-axis voice coil motor, an X-axis voice coil motor fixed circle damper is installed at the lower end of the X-axis voice coil motor, a pair of the Y-axis voice coil motor fixed circle damper and the X-axis voice coil motor fixed circle damper are provided, and are symmetrically installed.

[0007] Preferably, an X-axis slide rail base is fixedly connected to the front side of the top end of the Y-axis motor base, and an X-axis high-precision slide rail is fixedly installed on the top end of the X-axis slide rail base.

[0008] Preferably, the top end of the X-axis high-precision slide rail is slidably connected to a Y-axis slide rail base, and the top end of the Y-axis slide rail base is slidably connected to a Y-axis high-precision slide rail.

[0009] Preferably, the Y-axis voice coil motor comprises a Y-axis motor magnetic shielding box, a Y-axis motor rotor and a Y-axis motor permanent magnet. The Y-axis motor magnetic shielding box is slidably mounted on the surface of the Y-axis motor fixed ring slide rail, and the Y-axis motor rotor and the Y-axis motor permanent magnet are both arranged inside the Y-axis motor magnetic shielding box. A pair of Y-axis motor permanent magnets are arranged, and the Y-axis motor rotor is arranged between two Y-axis motor permanent magnets.

[0010] Preferably, the X-axis voice coil motor comprises an X-axis motor magnetic shielding box, an X-axis motor rotor and an X-axis motor permanent magnet, the X-axis motor magnetic shielding box is slidably mounted on the surface of the X-axis motor fixed ring slide rail, the X-axis motor rotor and the X-axis motor permanent magnet are both arranged inside the X-axis motor magnetic shielding box, a pair of X-axis motor permanent magnets are arranged, and the X-axis motor rotor is arranged between two X-axis motor permanent magnets.

[0011] Preferably, the front end of the Y-axis motor rotor is fixedly connected to the rear end of the Y-axis high-precision slide rail.

[0012] Preferably, the right end of the X-axis motor rotor is fixedly connected to the left end of the Y-axis slide rail base.

[0013] Compared with the prior art, the utility model proposes a high-speed and high-precision two-dimensional motion platform for a bonding machine, which has the following beneficial effects:

[0014] 1. The utility model is a high-precision two-dimensional motion platform. The direction of movement is determined by the X-axis motor slide and the Y-axis motor slide, and two voice coil motors are used to achieve high-speed and high-precision movement. During the movement, the magnetic damper carried at the lower end of the motor is used to reduce the vibration of the motor to prevent the workpiece from directly colliding with the terminal of the slide. The magnetic damper achieves damping through the action of the magnetic field, and its damping force is proportional to the speed of the magnetizer, providing a stable damping force without friction and noise generated by friction. It is suitable for working conditions with high stability, high precision requirements and long service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a schematic diagram of the overall structure of the utility model under the second viewing angle.

[0017] The numbers in the figure are:

[0018] 1. Y-axis motor base; 101. Y-axis motor fixed circle slide rail; 2. X-axis motor base; 201. X-axis motor fixed circle slide rail; 3. Y-axis voice coil motor; 301. Y-axis motor magnetic shielding box; 302. Y-axis motor rotor; 303. Y-axis motor permanent magnet; 4. X-axis voice coil motor; 401. X-axis motor magnetic shielding box; 402. X-axis motor rotor; 403. X-axis motor permanent magnet; 5. X-axis slide rail base; 6. X-axis high-precision slide rail; 7. Y-axis slide rail base; 8. Y-axis high-precision slide rail; 9. Y-axis voice coil motor fixed circle damper; 10. X-axis voice coil motor fixed circle damper. DETAILED DESCRIPTION

[0019] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0020] Reference Figure 1-2 As shown, a high-speed and high-precision two-dimensional motion platform for a bonding machine includes a Y-axis motor base 1 and an X-axis motor base 2. The X-axis motor base 2 is arranged on the left side of the Y-axis motor base 1. A Y-axis motor fixed circle slide rail 101 is fixedly installed on the rear side of the top end of the Y-axis motor base 1. A Y-axis voice coil motor 3 is slidably installed on the upper end of the Y-axis motor fixed circle slide rail 101. An X-axis motor fixed circle slide rail 201 is fixedly installed on the top end of the X-axis motor base 2. An X-axis voice coil motor 4 is slidably installed on the upper end of the X-axis motor fixed circle slide rail 201. The lower end of the Y-axis voice coil motor 3 is installed with a Y-axis voice coil motor fixed coil damper 9, and the lower end of the X-axis voice coil motor 4 is installed with an X-axis voice coil motor fixed coil damper 10. The device determines the direction of movement through the X-axis motor slide rail and the Y-axis motor slide rail, and cooperates with the two voice coil motors to achieve high-speed and high-precision movement. During the movement, the magnetic damper carried by the lower end of the motor is used to reduce the vibration of the motor to prevent the workpiece from directly colliding with the terminal of the slide rail. A pair of Y-axis voice coil motor fixed coil dampers 9 and X-axis voice coil motor fixed coil dampers 10 are provided, and they are symmetrically installed. The magnetic damper achieves damping through the action of the magnetic field. Its damping force is proportional to the speed of the magnetizer, providing a stable damping force without friction and noise generated by friction. It is suitable for working conditions with high stability, high precision requirements and long life.

[0021] Specifically, in the present embodiment, the front side of the top end of the Y-axis motor base 1 is fixedly connected to the X-axis slide rail base 5 , and the top end of the X-axis slide rail base 5 is fixedly installed with the X-axis high-precision slide rail 6 .

[0022] Specifically, in this embodiment, the top end of the X-axis high-precision slide rail 6 is slidably connected to the Y-axis slide rail base 7 , and the top end of the Y-axis slide rail base 7 is slidably connected to the Y-axis high-precision slide rail 8 .

[0023] Specifically, in the present embodiment, the Y-axis voice coil motor 3 comprises a Y-axis motor magnetic shielding box 301, a Y-axis motor rotor 302 and a Y-axis motor permanent magnet 303. The Y-axis motor magnetic shielding box 301 can prevent the external magnetic field from interfering with the internal sensitive devices, and protect the internal magnetic environment, so that the internal magnetic field remains stable, and the high precision of the motor movement is ensured. The Y-axis motor magnetic shielding box 301 is slidably mounted on the surface of the Y-axis motor fixed ring slide rail 101. The Y-axis motor rotor 302 and the Y-axis motor permanent magnet 303 are both arranged inside the Y-axis motor magnetic shielding box 301. A pair of Y-axis motor permanent magnets 303 are arranged, and the Y-axis motor rotor 302 is arranged between the two Y-axis motor permanent magnets 303. The voice coil motor is a precision motor driven based on the electromagnetic principle, and is widely used in occasions requiring fast response and high-precision positioning. Its working principle is: a fixed magnetic field is formed by two permanent magnets, and linear motion is generated by the movement of the rotor in the fixed magnetic field. When the current passes through the rotor, a force interacting with the fixed magnetic field is generated, driving the rotor to move axially, thereby realizing linear motion.

[0024] Specifically, in this embodiment, the X-axis voice coil motor 4 includes an X-axis motor magnetic shielding box 401, an X-axis motor rotor 402 and an X-axis motor permanent magnet 403. The X-axis motor magnetic shielding box 401 is slidably mounted on the surface of the X-axis motor fixed ring slide rail 201. The X-axis motor rotor 402 and the X-axis motor permanent magnet 403 are both arranged inside the X-axis motor magnetic shielding box 401. A pair of X-axis motor permanent magnets 403 are provided, and the X-axis motor rotor 402 is arranged between two X-axis motor permanent magnets 403. The working principle of the X-axis voice coil motor 4 is similar to that of the Y-axis voice coil motor 3, which will not be repeated here.

[0025] Specifically, in this embodiment, the front end of the Y-axis motor rotor 302 is fixedly connected to the rear end of the Y-axis high-precision slide rail 8. The workpiece discharge mechanism is arranged above the Y-axis high-precision slide rail 8. When the discharge mechanism places the workpiece on the Y-axis high-precision slide rail 8, the Y-axis voice coil motor starts to move, and then takes away the Y-axis high-precision slide rail 8 and the workpiece placed on the upper end, thereby realizing Y-axis feeding.

[0026] Specifically, in this embodiment, the right end of the X-axis motor rotor 402 is fixedly connected to the left end of the Y-axis slide rail base 7. When the Y-axis high-precision slide rail 8 is withdrawn from the Y-axis slide rail base 7, the workpiece discharge mechanism discharges the workpiece again, placing the workpiece on the Y-axis slide rail base 7, and the X-axis voice coil motor starts to move, and then takes away the Y-axis slide rail base 7 and the workpiece placed on the upper end, thereby realizing X-axis feeding.

[0027] The working principle of the utility model is as follows: a workpiece discharge mechanism is arranged above the Y-axis high-precision slide rail 8. When the discharge mechanism places the workpiece on the Y-axis high-precision slide rail 8, the Y-axis voice coil motor starts to move, and then takes away the Y-axis high-precision slide rail 8 and the workpiece placed on the upper end, thereby realizing Y-axis feeding; when the Y-axis high-precision slide rail 8 is withdrawn from the Y-axis slide rail base 7, the workpiece discharge mechanism discharges the workpiece again, places the workpiece on the Y-axis slide rail base 7, and the X-axis voice coil motor starts to move, and then takes away the Y-axis slide rail base 7 and the workpiece placed on the upper end, thereby realizing X-axis feeding.

[0028] This device determines the direction of movement through the X-axis motor slide and the Y-axis motor slide, and cooperates with two voice coil motors to achieve high-speed and high-precision movement. During the movement, the magnetic damper carried at the lower end of the motor is used to reduce the vibration of the motor to prevent the workpiece from directly colliding with the terminal of the slide. The magnetic damper achieves damping through the action of the magnetic field. Its damping force is proportional to the speed of the magnetizer, providing a stable damping force without friction and noise generated by friction. It is suitable for working conditions with high stability, high precision requirements and long life.

[0029] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and the specification only describe the principles of the utility model. The utility model may be subject to various changes and improvements without departing from the spirit and scope of the utility model. These changes and improvements fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A high-speed and high-precision two-dimensional motion platform for a bonding machine, characterized in that: The invention comprises a Y-axis motor base (1) and an X-axis motor base (2), wherein the X-axis motor base (2) is arranged on the left side of the Y-axis motor base (1), a Y-axis motor fixed circle slide rail (101) is fixedly installed on the rear side of the top end of the Y-axis motor base (1), a Y-axis voice coil motor (3) is slidably installed on the upper end of the Y-axis motor fixed circle slide rail (101), an X-axis motor fixed circle slide rail (201) is fixedly installed on the top end of the X-axis motor base (2), an X-axis voice coil motor (4) is slidably installed on the upper end of the X-axis motor fixed circle slide rail (201), a Y-axis voice coil motor fixed circle damper (9) is installed at the lower end of the Y-axis voice coil motor (3), an X-axis voice coil motor fixed circle damper (10) is installed at the lower end of the X-axis voice coil motor (4), and a pair of the Y-axis voice coil motor fixed circle damper (9) and the X-axis voice coil motor fixed circle damper (10) are both provided and are symmetrically installed.

2. The high-speed and high-precision two-dimensional motion platform for a bonding machine according to claim 1, characterized in that: The front side of the top end of the Y-axis motor base (1) is fixedly connected to an X-axis slide rail base (5), and the top end of the X-axis slide rail base (5) is fixedly installed with an X-axis high-precision slide rail (6).

3. The high-speed and high-precision two-dimensional motion platform for a bonding machine according to claim 2, characterized in that: The top end of the X-axis high-precision slide rail (6) is slidably connected to a Y-axis slide rail base (7), and the top end of the Y-axis slide rail base (7) is slidably connected to a Y-axis high-precision slide rail (8).

4. The high-speed and high-precision two-dimensional motion platform for a bonding machine according to claim 1, characterized in that: The Y-axis voice coil motor (3) comprises a Y-axis motor magnetic shielding box (301), a Y-axis motor rotor (302) and a Y-axis motor permanent magnet (303); the Y-axis motor magnetic shielding box (301) is slidably mounted on the surface of a Y-axis motor fixed ring slide rail (101); the Y-axis motor rotor (302) and the Y-axis motor permanent magnet (303) are both arranged inside the Y-axis motor magnetic shielding box (301); a pair of the Y-axis motor permanent magnets (303) are arranged; and the Y-axis motor rotor (302) is arranged between two Y-axis motor permanent magnets (303).

5. The high-speed and high-precision two-dimensional motion platform for a bonding machine according to claim 1, characterized in that: The X-axis voice coil motor (4) comprises an X-axis motor magnetic shielding box (401), an X-axis motor rotor (402) and an X-axis motor permanent magnet (403); the X-axis motor magnetic shielding box (401) is slidably mounted on the surface of an X-axis motor fixed ring slide rail (201); the X-axis motor rotor (402) and the X-axis motor permanent magnet (403) are both arranged inside the X-axis motor magnetic shielding box (401); a pair of X-axis motor permanent magnets (403) are arranged; and the X-axis motor rotor (402) is arranged between two X-axis motor permanent magnets (403).

6. The high-speed and high-precision two-dimensional motion platform for a bonding machine according to claim 4, characterized in that: The front end of the Y-axis motor rotor (302) is fixedly connected to the rear end of the Y-axis high-precision slide rail (8).

7. The high-speed and high-precision two-dimensional motion platform for a bonding machine according to claim 5, characterized in that: The right end of the X-axis motor rotor (402) is fixedly connected to the left end of the Y-axis slide rail base (7).

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