Furnace cover structure of silicon core furnace

Abstract

The utility model relates to a silicon core furnace cover structure which structurally comprises a furnace cover body, a pair of main observation window assemblies which are adjacently arranged in the circumferential direction of a center opening are arranged on the furnace cover body, CCD detection port assemblies are adjacently arranged on the outer sides of the two main observation window assemblies in the circumferential direction of the center opening respectively, and CCD cameras are installed on the CCD detection port assemblies. A pressure gauge assembly and a pressure relief opening assembly are arranged on the furnace cover body, and a steam baffle is arranged on the outer edge of the furnace cover body. The device has the advantages that the structural design is reasonable, the installation positions of the double observation windows and the double CCD cameras are arranged, the use requirements of the large-diameter silicon core furnace can be met, the observation view field is widened, the measurement and observation requirements of crystal growth are effectively met, and the production stability is ensured.

Description

Technical Field

[0001] The utility model relates to a silicon core furnace cover structure and belongs to the technical field of silicon core furnaces. Background Art

[0002] The furnace cover is an important component of the silicon core furnace in the single crystal growth process. It has important functions such as maintaining a high temperature and stable environment, preventing impurities from entering the furnace, preventing gas leakage in the furnace, and maintaining good airtightness.

[0003] The furnace cover of the prior art silicon core furnace is generally only provided with a CCD camera and an observation window. For a silicon core furnace with a larger diameter, the observation field is narrow and cannot meet the measurement and observation requirements of crystal growth. Utility Model Content

[0004] The utility model proposes a silicon core furnace cover structure, which aims to overcome the above-mentioned shortcomings of the prior art, broaden the observation field of view and facilitate the measurement and observation of crystal growth through the design of a rationally structured double observation window and a CCD camera installation position.

[0005] The technical solution of the utility model is: a silicon core furnace cover structure, which includes a furnace cover body, a pair of main observation window assemblies arranged adjacently along the circumference of the central opening, a CCD detection port assembly is arranged adjacently on the outer side of the two main observation window assemblies along the circumference of the central opening, a CCD camera is installed on the CCD detection port assembly, a pressure gauge assembly and a pressure relief port assembly are arranged on the furnace cover body, and a steam baffle is arranged on the outer edge of the furnace cover body. The above structural design can meet the measurement and observation needs of crystal growth of large-diameter furnace covers.

[0006] Preferably, in order to further specify and rationalize the structural design, the angle between the line connecting the two main observation window assemblies and the center of the furnace cover body is 58±5°, and the angle between the line connecting the main observation window assembly and the corresponding adjacent CCD detection port assembly and the center of the furnace cover body is 32±5°.

[0007] Preferably, an observation window protective cover is installed on the main observation window assembly.

[0008] Preferably, the furnace cover body is provided with a water distributor assembly, which is respectively connected to the cooling water inlet and return pipes and the cooling water pipes that flow evenly through the furnace cover body, the CCD detection port assembly and the inner side of the main observation window assembly. It is used for the cooling water inlet and return water to be divided and merged in the furnace cover body, the CCD detection port assembly and the main observation window assembly to achieve a cooling effect.

[0009] Preferably, a steam baffle is provided on the outer edge of the furnace cover body.

[0010] The advantages of the utility model are as follows: reasonable structural design, dual observation windows and dual CCD camera installation positions are provided, which can meet the use requirements of large-caliber silicon core furnaces, broaden the observation field of view, effectively meet the measurement and observation requirements of crystal growth, and ensure production stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional exploded structural schematic diagram of the silicon core furnace cover structure of the utility model.

[0012] Figure 2 It is a top view structural schematic diagram of the silicon core furnace cover structure of the utility model.

[0013] In the figure, 1 is the furnace cover body, 2 is the CCD detection port assembly, 3 is the main observation window assembly, 4 is the observation window protection cover, 5 is the water distributor assembly, 6 is the pressure gauge assembly, 7 is the pressure relief port assembly, and 8 is the steam baffle. DETAILED DESCRIPTION

[0014] The present invention is further described in detail below in conjunction with embodiments and specific implementation methods.

[0015] like Figure 1 , 2 As shown, a silicon core furnace cover structure includes a furnace cover body 1, on which a pair of main observation window assemblies 3 are adjacently arranged along the circumferential direction of the center opening, on which the main observation window assemblies 3 are provided, and on which observation window protection cover plates 4 are installed, and on the outer sides of the two main observation window assemblies 3, a CCD detection port assembly 2 is adjacently arranged along the circumferential direction of the center opening, on which the CCD detection port assembly 2 is installed a CCD camera, and on the furnace cover body 1, a water distributor assembly 5, a pressure gauge assembly 6, and a pressure relief port assembly 7 are also provided, and a steam baffle 8 is provided on the outer edge of the furnace cover body 1.

[0016] In order to further specify and rationalize the structural design, the angle between the two main observation window assemblies 3 and the center of the furnace cover body 1 is 58±5°, and the angle between the main observation window assembly 3 and the corresponding adjacent CCD detection port assembly 2 and the center of the furnace cover body 1 is 32±5°.

[0017] Specifically, the furnace cover body 1 is a vital component in the single crystal growth process, and is responsible for maintaining a high temperature and stable environment, preventing impurities from entering the furnace, preventing gas leakage in the furnace, and maintaining good air tightness. For a large-diameter furnace cover body 1, in order to meet the measurement and observation requirements of crystal growth, two CCD detection port assemblies 2 as camera installation positions and two main observation window assemblies 3 are configured on the furnace cover body 1.

[0018] The CCD inspection port assembly 2 mainly includes a camera port cover plate and a filter glass, which is used to install a CCD camera, and the liquid level and crystal growth can be observed through the CCD inspection port assembly 2. The dual-camera solution can meet the use requirements of the large-diameter furnace cover body 1 and can observe the field of view more comprehensively.

[0019] The main observation window assembly 3 mainly includes an observation window cover plate and a filter glass, which is used for personnel to observe the liquid level and crystal growth through the main observation window assembly 3. The double observation window solution can meet the use requirements of the large-diameter furnace cover body 1 and provide a more comprehensive observation field of view.

[0020] The observation window protection cover plate 4 is used to protect the glass on the main observation window assembly 3 .

[0021] The water distributor assembly 5 is respectively connected to the cooling water inlet and return pipes and the cooling water pipes that flow evenly through the furnace cover body 1, the CCD detection port assembly 2 and the inner side of the main observation window assembly 3, and is used for the diversion and confluence of the cooling water inlet and return water in the furnace cover body 1, the CCD detection port assembly 2 and the main observation window assembly 3 to achieve a cooling effect.

[0022] The pressure gauge assembly 6 is used to display the pressure in the furnace.

[0023] The pressure relief port assembly 7 is used to relieve pressure in time when the pressure in the cavity reaches a critical value.

[0024] The steam damper 8 is used to prevent the hot air flow in the furnace from overflowing and endangering the safety of personnel when the furnace cover is opened.

[0025] All the components mentioned above are prior art, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0026] The above is only a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the protection scope of the present invention.

Claims

1. A silicon core furnace cover structure, comprising a furnace cover body (1), characterized in that: The furnace cover body (1) is provided with a pair of main observation window assemblies (3) adjacent to each other along the circumferential direction of the central opening; a CCD detection port assembly (2) is adjacent to each other on the outer sides of the two main observation window assemblies (3) along the circumferential direction of the central opening; a CCD camera is installed on the CCD detection port assembly (2); the furnace cover body (1) is provided with a pressure gauge assembly (6) and a pressure relief port assembly (7); and a steam baffle (8) is provided on the outer edge of the furnace cover body (1).

2. A silicon core furnace cover structure as claimed in claim 1, characterized in that: The angle between the main observation window assembly (3) and the center of the furnace cover body (1) is 58±5°, and the angle between the main observation window assembly (3) and the corresponding adjacent CCD detection port assembly (2) and the center of the furnace cover body (1) is 32±5°.

3. A silicon core furnace cover structure as claimed in claim 1, characterized in that: The main observation window assembly (3) is provided with an observation window protective cover plate (4).

4. A silicon core furnace cover structure as claimed in claim 1, characterized in that: The furnace cover body (1) is provided with a water distributor assembly (5), and the water distributor assembly (5) is respectively connected to an external cooling water inlet and return pipe and a cooling water pipe that flows evenly through the furnace cover body (1), the CCD detection port assembly (2) and the inner side of the main observation window assembly (3).

5. The silicon core furnace cover structure according to claim 1, characterized in that: A steam baffle (8) is provided on the outer edge of the furnace cover body (1).

Images