Novel in-situ laser energy measuring system

Abstract

The utility model discloses a novel in-situ laser energy measuring system, the measuring system comprises a measuring mechanism and an antifouling mechanism, the measuring mechanism comprises a linear lead-in, a reflector and an energy measuring instrument, after laser to be measured is injected into a cavity, the central position of the reflector rises to the laser position by adjusting the linear lead-in, and the energy measuring instrument is used for measuring the energy. The anti-fouling mechanism comprises an anti-fouling flange, a differential pumping pipeline and an air supply cavity, a long-strip-shaped cylindrical window extends out of the middle of the anti-fouling flange, a good isolation and anti-fouling effect is achieved, then when the differential pumping pipeline is operated, air slowly leaks into the anti-fouling mechanism from the air supply cavity, and the anti-fouling mechanism is used for measuring the energy of the laser. According to the measurement system, the mechanical structure and the reverse vacuum difference are additionally arranged to form a two-section type double antifouling structure, so that a more accurate, stable and economical laser energy measurement effect can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of in-situ laser energy measurement, in particular to a novel in-situ laser energy measurement system. Background Art

[0002] In-situ laser energy measurement technology, as a high-precision energy measurement method, plays an important role in the field of modern science and technology. It can monitor the distribution and changes of laser energy in real time and accurately. The measurement principle of in-situ laser energy measurement technology is mainly based on the physical effect produced by the interaction between laser and matter. When the laser beam irradiates the surface of the object to be measured, part of the energy is absorbed and part of the energy is reflected or transmitted. By accurately measuring these physical quantities, the energy distribution of the laser beam can be indirectly calculated.

[0003] The existing in-situ laser energy measurement system still has problems. In terms of measurement effect, particle contamination of the window flange will affect the laser transmittance, which will cause the measurement result to deviate from the actual laser energy value. In terms of economy, the contamination of the window flange requires the destruction of the equipment vacuum environment and the replacement of the window flange, which greatly increases the measurement cost. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a novel in-situ laser energy measurement system.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A novel in-situ laser energy measurement system, the measurement system comprising a measurement mechanism, a measurement cavity and an anti-fouling mechanism, the measurement mechanism consisting of a linear introduction, an energy measuring instrument and a reflector, the anti-fouling mechanism consisting of an anti-fouling flange, a differential extraction pipeline, an air delivery cavity and a dust cover;

[0007] A differential extraction pipeline is welded to the outer side of the right end flange of the anti-pollution flange, and the end face of the right end flange of the anti-pollution flange is connected to the measuring cavity. A measuring mechanism is installed inside the measuring cavity, and the right end of the measuring cavity is connected to the air supply cavity through a plug valve.

[0008] Preferably, an energy meter and a reflector are respectively arranged inside the measuring cavity, a linear guide is installed outside the measuring cavity, and a movable end of the linear guide extends into the inner side of the measuring cavity and is connected to the reflector.

[0009] Preferably, a window flange is installed at the right end of the air delivery cavity, a dust cover is installed on the window flange, and the laser to be measured is passed through the window flange port.

[0010] Preferably, a long cylindrical window extends from the middle of the anti-fouling flange.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. The long columnar anti-fouling flange is used to block pollutants on the edge and achieve better anti-fouling effect.

[0013] 2. The two-stage differential pumping system forms a vacuum gradient to effectively prevent pollutants from entering.

[0014] 3. The gate valve is used. When the valve body is closed, the air supply cavity is isolated from the vacuum of the main equipment to form an independent small cavity. The internal vacuum environment can be broken separately to replace the window flange, which greatly reduces the cost of window flange replacement.

[0015] 4. A dust cover is installed outside the vacuum, combined with the internal anti-fouling structure, which greatly extends the replacement cycle of the window flange. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more specifically and intuitively illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0017] Figure 1 This is a schematic diagram of the anti-fouling mechanism structure proposed by the utility model;

[0018] Figure 2 This is a schematic diagram of the measuring mechanism structure proposed by the utility model.

[0019] In the figure: 11, anti-fouling flange; 12, differential extraction pipeline; 13, gate valve; 14, air supply cavity; 15, dust cover; 21, linear introduction; 22, energy measuring instrument; 23, reflector; 24, window flange; 25, laser to be measured. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0021] Reference Figure 1-2 A novel in-situ laser energy measurement system, the measurement system includes a measurement mechanism, a measurement cavity and an anti-fouling mechanism, the measurement mechanism is composed of a linear guide 21, an energy measuring instrument 22 and a reflector 23, and the anti-fouling mechanism is composed of an anti-fouling flange 11, a differential extraction pipeline 12, an air delivery cavity 14 and a dust cover 15;

[0022] The differential extraction pipe 12 is welded to the outer side of the right end flange of the anti-fouling flange 11. The right end flange of the anti-fouling flange 11 is connected to the measuring cavity, and the left side is connected to the main equipment cavity. The measuring mechanism is installed inside the measuring cavity, and the right end of the measuring cavity is connected to the air supply cavity 14 through the gate valve 13.

[0023] An energy meter 22 and a reflector 23 are respectively arranged inside the measuring cavity, and a linear guide 21 is installed outside the measuring cavity, and the movable end of the linear guide 21 extends into the inner side of the measuring cavity and is connected to the reflector 23;

[0024] A window flange 24 is installed at the right end of the air delivery cavity 14, a dust cover 15 is installed on the window flange 24, and a laser 25 to be measured is passed through the port of the window flange 24;

[0025] The technical solution adopted above is that after the laser 25 to be measured enters the measuring cavity through the window flange 24, the linear introduction 21 is adjusted to make the center position of the reflector 23 rise to the laser, so that the laser is emitted from the side window flange and enters the energy measuring instrument 22 for energy measurement. At the same time, the valve body of the air supply cavity 14 is opened to allow gas to slowly leak in to create a vacuum gradient. At this time, the pollutants on the edge of the pipeline generated by the main equipment cavity are blocked outside when they reach the anti-pollution flange 11, and the pollutants in the center are also blocked by the reverse vacuum difference, forming a good anti-pollution effect in the cavity, and the external dust cover 15 protects the vacuum outside the window flange 24 from pollution.

[0026] A long cylindrical window extends from the middle of the anti-fouling flange 11;

[0027] In the technical solution adopted above, a long cylindrical window extends from the middle of the anti-pollution flange 11, achieving a better isolation and anti-pollution effect. After that, while the differential extraction pipeline 12 is running, gas slowly leaks into the air delivery chamber 14, forming a reverse vacuum difference to further isolate pollution.

[0028] Working principle:

[0029] This product achieves a better isolation and anti-fouling effect by adding an anti-fouling flange 11 to the front end of the measuring mechanism, and extending a long cylindrical window in the middle of the anti-fouling flange 11. At the same time, an air delivery cavity 14 is added to the laser incident window flange 24, and gas is slowly leaked into the cavity to form a vacuum gradient. Then, a differential extraction pipeline 12 is added to the anti-fouling flange 11 to ensure the vacuum degree of the main equipment while further expanding the reverse vacuum difference to form a double anti-fouling effect.

[0030] application:

[0031] In-situ laser energy measurement technology, as a high-precision energy measurement method, can monitor the distribution and changes of laser energy in real time and accurately. It is also extremely sensitive to the measurement environment. The measurement system is equipped with an anti-fouling mechanism to improve its blocking effect on pollutants and ensure the long-term stable operation of the measurement cavity. At the same time, the inner and outer spaces of the vacuum environment are kept clean, which effectively reduces the maintenance frequency of the air delivery cavity 14 and the anti-fouling flange 11, and further improves the service life of the system, thereby greatly improving the stability, accuracy and economy of the measurement system, so that the measurement system can be better and more widely used in various laser energy measurement scenarios. Whether it is scientific research experiments, industrial production or medical applications, the measurement of laser energy needs to be continuously tending towards more accurate and stable requirements, and the measurement system can play its important role.

[0032] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A novel in-situ laser energy measurement system, characterized in that: The measuring system comprises a measuring mechanism, a measuring cavity and an anti-fouling mechanism, wherein the measuring mechanism is composed of a linear guide (21), an energy measuring instrument (22) and a reflector (23), and the anti-fouling mechanism is composed of an anti-fouling flange (11), a differential extraction pipeline (12), an air delivery cavity (14) and a dust cover (15); A differential extraction pipe (12) is welded to the outer side of the right end flange of the anti-pollution flange (11); the end face of the right end flange of the anti-pollution flange (11) is connected to a measuring cavity; a measuring mechanism is installed inside the measuring cavity; and the right end of the measuring cavity is connected to an air supply cavity (14) via a gate valve (13).

2. A novel in-situ laser energy measurement system according to claim 1, characterized in that: An energy meter (22) and a reflector (23) are respectively arranged inside the measuring cavity, and a linear guide (21) is installed outside the measuring cavity, and a movable end of the linear guide (21) extends into the inside of the measuring cavity and is connected to the reflector (23).

3. A novel in-situ laser energy measurement system according to claim 2, characterized in that: A window flange (24) is installed at the right end of the air delivery cavity (14), a dust cover (15) is installed on the window flange (24), and the laser (25) to be measured is passed through the port of the window flange (24).

4. A novel in-situ laser energy measurement system according to claim 1, characterized in that: A long cylindrical window extends from the middle of the anti-fouling flange (11).

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