Liquid medicine recycling device of power semiconductor discrete device corrosion cleaning equipment
By designing a drug liquid recycling device including a liquid discharge device, a recycling tank and a reuse device, the problem of the corrosion liquid with a decrease in concentration generated during the wet cleaning process in the prior art is solved, and efficient recycling and reuse of the drug liquid is achieved, reducing enterprise costs and waste of water resources.
Patent Information
- Application Number
- CN202420496722.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-14
- Publication Date
- 2025-02-28
- Estimated Expiration
- 2034-03-14
AI Technical Summary
The prior art is difficult to effectively recover and utilize corrosive liquids with reduced concentrations generated during the wet cleaning of power semiconductor discrete devices, resulting in increased processing and emission costs for enterprises and wasted water resources.
A drug liquid recycling device including a liquid discharge device, a recycling tank and a reuse device is designed. Through a pipe assembly composed of a Teflon tube and a protective tube, the corrosion liquid with reduced concentration is recovered from a multi-trough cleaning machine, and reused through a furnace tube cleaning machine to realize the recycling of the drug liquid.
It effectively reduces the processing and emission costs of enterprises, saves water resources, realizes efficient recycling and reuse of medicine liquids, and reduces the environmental impact of the production link.
Smart Images
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Abstract
Description
Technical Field
[0001] The utility model relates to a chemical solution recycling device for corrosion cleaning equipment of power semiconductor discrete devices, belonging to the technical field of semiconductor wet cleaning. Background Art
[0002] The wet cleaning process for power semiconductor discrete devices is a relatively mature process. It needs to undergo wet etching cleaning many times during the entire manufacturing process. The corrosion concentration of chemical reagents after multiple uses in the wet cleaning process does not meet the process requirements. The wet etching equipment automatically chooses to discharge the corrosion liquid into the concentrated fluorine liquid pipeline according to the use time of the chemical reagents and the number of operation batches. It is then handed over to the power department for processing and has no use value. Before the subsequent re-liquidation, in order to ensure the correctness of the chemical reagent ratio, it is necessary to flush the acid tank and discharge a large amount of dilute fluorine liquid.
[0003] The treatment of concentrated fluorine liquid and the large amount of dilute fluorine liquid used to flush concentrated fluorine tanks and pipes has become a difficult problem for enterprises. If they need to be treated and discharged in compliance with standards, enterprises will not only increase costs but also waste a lot of water resources. How to recycle the corrosion liquid with reduced concentration in the corrosion cleaning equipment is the focus of the current wet cleaning process of power semiconductor discrete devices. Utility Model Content
[0004] The technical problem to be solved by the utility model is to provide a power semiconductor discrete device corrosion cleaning equipment liquid recycling device in view of the above-mentioned prior art, which can recycle the corrosion liquid with reduced concentration, reduce enterprise costs, save energy and reduce consumption.
[0005] The technical solution adopted by the utility model to solve the above-mentioned problem is: a liquid recovery and utilization device for corrosion cleaning equipment of power semiconductor discrete devices, including a drainage device, a recovery tank and a reuse device, the drainage device, the recovery tank and the reuse device are connected by a pipe assembly, the pipe assembly includes a drainage main pipe and a liquid inlet main pipe, the drainage device and the recovery tank are connected by the drainage main pipe, and the recovery tank and the reuse device are connected by the liquid inlet main pipe.
[0006] There are several drainage devices, and the drainage port of any drainage device is connected to one end of a drainage branch pipe, and the other end of the drainage branch pipe is connected to the drainage main pipe. A drainage pump is provided in each drainage device.
[0007] The liquid discharge device is a multi-tank cleaning machine.
[0008] There are multiple recycling devices, and the liquid inlet of any recycling device is connected to one end of the liquid inlet branch pipe, and the other end of the liquid inlet branch pipe is connected to the liquid inlet main pipe.
[0009] The recycling devices are furnace tube cleaning machines, respectively. The furnace tube cleaning machines are respectively provided with liquid level sensors, and the liquid inlets are respectively provided with control valves.
[0010] The main liquid discharge pipe, the main liquid inlet pipe, the liquid discharge branch pipe and the liquid inlet branch pipe respectively comprise Teflon tubes, and a protective tube is sleeved on the Teflon tubes.
[0011] Compared with the prior art, the utility model has the advantages of: a power semiconductor discrete device corrosion cleaning equipment liquid recycling device, which can recycle the corrosion liquid with reduced concentration generated in the process production link of the multi-slot cleaning machine, reduce enterprise costs, save energy and reduce consumption. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 This is a schematic diagram of a chemical solution recycling device for a power semiconductor discrete device corrosion cleaning equipment according to an embodiment of the utility model;
[0013] Figure 2 is a schematic diagram of a tube assembly;
[0014] In the figure, 1 is a multi-tank cleaning machine, 2 is a liquid discharge pump, 3 is a liquid discharge branch pipe, 4 is a liquid discharge main pipe, 5 is a recovery tank, 6 is a liquid inlet main pipe, 7 is a liquid inlet branch pipe, 8 is a furnace tube cleaning machine, 9 is a Teflon tube, and 10 is a protective tube. DETAILED DESCRIPTION
[0015] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0016] like Figure 1 As shown, a liquid recovery and utilization device for etching and cleaning equipment of power semiconductor discrete devices in this embodiment includes four drainage devices, a recovery tank 5 and three recycling devices. The drainage ports of the drainage devices are respectively connected to one end of the drainage branch pipe 3, and the other end of the drainage branch pipe 3 is connected to the recovery tank 5 through the drainage main pipe 4. The drainage devices are respectively provided with drainage pumps 2, and the drainage pumps 2 pump the corrosion liquid with reduced concentration generated by the production process of the drainage device into the recovery tank 5 through the drainage branch pipe 3 and the drainage main pipe 4. The liquid inlet of the recycling device is respectively connected to one end of the liquid inlet branch pipe 7, and the other end of the liquid inlet branch pipe 7 is connected to the recovery tank 5 through the liquid inlet main pipe 6. The recovery tank 5 is provided with a liquid inlet pump, and the liquid inlet pump diverts the collected corrosion liquid in the recovery tank 5 to the liquid inlet branch pipe 7 through the liquid inlet main pipe 6, and then flows into the corresponding recycling device to achieve recycling.
[0017] The liquid discharge device is respectively a multi-tank cleaning machine 1.
[0018] The recycling devices are furnace tube cleaning machines 8, each of which is provided with a liquid level sensor. The liquid level sensor is used to detect the liquid level inside the three furnace tube cleaning machines in real time. A control valve is provided on the liquid inlet, and the control valve is used to realize the opening and closing of the liquid inlet pipe. The corrosive liquid in the recovery tank is supplied to the furnace tube cleaning machine with the least liquid among the three furnace tube cleaning machines.
[0019] like Figure 2 As shown, the main drain pipe, the main inlet pipe, the drain branch pipe and the inlet branch pipe respectively include Teflon pipes 9, and a protective pipe 10 is sleeved on the Teflon pipe 9. Considering that the corrosiveness of the chemical agent increases, once the pipeline is damaged, it is very easy to cause harm to the operator. The double-sleeve pipeline solution is adopted to avoid dangerous contact between the operator and the chemical agent and ensure the health of the operator.
[0020] The present application can recycle and utilize the corrosive liquid with reduced concentration generated in the process production link of the multi-tank cleaning machine, thereby reducing enterprise costs, saving energy and reducing consumption.
[0021] In addition to the above embodiments, the present invention also includes other implementation modes. Any technical solutions formed by equivalent transformation or equivalent replacement should fall within the protection scope of the claims of the present invention.
Claims
1. A device for recycling chemical solution of corrosion cleaning equipment for power semiconductor discrete devices, characterized in that: It includes a liquid discharge device, a recovery tank and a recycling device, wherein the liquid discharge device, the recovery tank and the recycling device are connected via a pipe assembly, wherein the pipe assembly includes a liquid discharge main pipe and a liquid inlet main pipe, wherein the liquid discharge device and the recovery tank are connected via the liquid discharge main pipe, and wherein the recovery tank and the recycling device are connected via the liquid inlet main pipe.
2. The device for recycling chemical solution of power semiconductor discrete device corrosion cleaning equipment according to claim 1, characterized in that: There are several drainage devices, and the drainage port of any drainage device is connected to one end of a drainage branch pipe, and the other end of the drainage branch pipe is connected to the drainage main pipe. A drainage pump is provided in each drainage device.
3. The device for recycling chemical solution of power semiconductor discrete device corrosion cleaning equipment according to claim 2, characterized in that: The liquid discharge device is a multi-tank cleaning machine.
4. The device for recycling chemical solution of power semiconductor discrete device corrosion cleaning equipment according to claim 2, characterized in that: There are multiple recycling devices, and the liquid inlet of any recycling device is connected to one end of the liquid inlet branch pipe, and the other end of the liquid inlet branch pipe is connected to the liquid inlet main pipe.
5. The device for recycling chemical solution of power semiconductor discrete device corrosion cleaning equipment according to claim 4, characterized in that: The recycling devices are furnace tube cleaning machines, respectively. The furnace tube cleaning machines are respectively provided with liquid level sensors, and the liquid inlets are respectively provided with control valves.
6. The device for recycling chemical solution of power semiconductor discrete device corrosion cleaning equipment according to claim 5, characterized in that: The main liquid discharge pipe, the main liquid inlet pipe, the liquid discharge branch pipe and the liquid inlet branch pipe respectively comprise Teflon tubes, and a protective tube is sleeved on the Teflon tubes.