Retainer capable of reducing chemical corrosion of fastening surface

Abstract

The utility model discloses a retainer capable of reducing chemical corrosion of a fastening surface, which comprises a retainer component and a retainer, the retainer component is connected with the retainer through a bolt, the retainer is annular, a groove is arranged on the lower surface of the retainer, an installation groove is arranged on the upper surface of the retainer, an O-shaped ring corresponding to the installation groove is arranged in the installation groove, and the O-shaped ring is connected with the retainer component through a bolt. A plurality of evenly-distributed threaded holes are formed in the circumference, close to the outer diameter, of the upper surface of the protective ring. According to the retainer capable of reducing the chemical corrosion of the fastening surface, the structure of the retainer is changed, so that grinding fluid is effectively prevented from entering the fastening surface of the retainer, the influence caused by the corrosion of the grinding fluid is reduced, the huge cost caused by maintenance and replacement is reduced, and the operation benefit of an enterprise is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip processing, in particular to a retaining ring capable of reducing chemical corrosion of a fastening surface. Background Art

[0002] In the current semiconductor chip processing field, one of the processing steps requires the use of a component, which is translated as a retaining ring or a retaining ring. Wafers need to be ground, and in this process, a retaining ring and a grinding pad are used, and the two need to be used together. The wafer is loaded in the retaining ring, and the retaining ring is placed on the upper surface of the grinding pad. During operation, the grinding pad will rotate on the lower surface of the retaining ring. The coordinated grinding between the two becomes the key factor in the success or failure of wafer grinding. The retaining ring has two main uses. One is to prevent the wafer from being thrown out due to centrifugal force during the grinding process, causing damage to personnel and equipment, so that it is always kept in the retaining ring; the other function is to retain a certain amount of grinding fluid, so that it is fully in contact with the wafer, a chemical reaction occurs, and the surface of the wafer is corroded, and then mechanical grinding is used to achieve the purpose of polishing.

[0003] Since the grinding fluid has the characteristics of corrosion, it is aggressive to various components of mechanical grinding equipment, especially to the fastening surface of the retainer, which will destroy the surface material, cause a huge change in roughness, and affect the fastening accuracy. At present, the structure of the retainer often causes leakage accidents, and it can only be repaired or even scrapped later. In addition, the processing accuracy of the retainer is within a few threads, the manufacturing cost is relatively high, and the maintenance is difficult. Once it is scrapped, the loss is huge, which is a big loss for the company using this product. In order to delay and reduce the occurrence of this situation, a retainer with a new structure is designed. Utility Model Content

[0004] The purpose of the utility model is to provide a retaining ring that reduces chemical corrosion on the fastening surface. By changing its structure, it can effectively block the grinding fluid from entering the fastening surface of the retaining ring, reduce the impact of grinding fluid corrosion, reduce the huge cost of maintenance and replacement, and further improve the business efficiency of the enterprise.

[0005] To achieve the above-mentioned purpose, the utility model provides a retaining ring for reducing chemical corrosion of a fastening surface, comprising a retaining ring assembly and a retaining ring, wherein the retaining ring assembly is connected to the retaining ring by bolts, the retaining ring is annular, a groove is provided on the lower surface of the retaining ring, an installation groove is provided on the upper surface of the retaining ring, an O-ring corresponding to the installation groove is provided in the installation groove, and a plurality of evenly distributed threaded holes are provided on the circumference of the upper surface of the retaining ring near the outer diameter.

[0006] Preferably, the retaining ring assembly is circular, and its diameter is consistent with the outer diameter of the retaining ring.

[0007] Preferably, a plurality of mounting through holes corresponding to the threaded holes are provided on the upper surface of the retaining ring assembly, and the retaining ring assembly is connected to the retaining ring by bolts.

[0008] Preferably, an O-ring quick-release opening is provided at the outer diameter of the mounting groove, and the O-ring quick-release opening is located on the upper surface of the retaining ring.

[0009] Preferably, the straight-line distances between the O-ring quick-release opening and two upper and lower adjacent threaded holes of the O-ring quick-release opening are the same.

[0010] Preferably, the groove edge of the mounting groove is provided with a rounded corner edge.

[0011] Preferably, there are a plurality of grooves, which are evenly distributed on the lower surface of the guard ring along the circumference of the guard ring.

[0012] Therefore, the utility model adopts the above-mentioned retaining ring for reducing chemical corrosion of the fastening surface, by shifting the threaded hole to near the outer diameter, so that the threaded hole is away from the grinding liquid inlet, and also reserves space for processing the O-ring mounting groove. By opening the mounting groove and the O-ring on the upper surface of the retaining ring, a sealing surface is formed with the retaining ring assembly, and a circle of isolation belt is formed in the direction where the grinding liquid can easily enter, thereby effectively blocking the grinding liquid from entering the fastening surface of the retaining ring, reducing the impact of grinding liquid corrosion, reducing the huge cost of maintenance and replacement, and further improving the business efficiency of the enterprise.

[0013] The technical solution of the utility model is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of a retainer for reducing chemical corrosion of a fastening surface according to the utility model;

[0015] Figure 2 It is a schematic diagram of a retainer in a retainer for reducing chemical corrosion of a fastening surface of the utility model;

[0016] Figure 3 It is a schematic diagram of a retainer assembly and a retainer connection in a retainer for reducing chemical corrosion of a fastening surface of the utility model;

[0017] Figure 4 The utility model is a schematic diagram of an O-ring quick-release port in a retaining ring for reducing chemical corrosion of a fastening surface.

[0018] Reference numerals

[0019] 1. Guard ring; 2. Mounting groove; 3. Threaded hole; 4. Guard ring assembly; 5. Mounting through hole; 6. O-ring quick release port; 7. Groove. DETAILED DESCRIPTION

[0020] The technical solution of the utility model is further described below through the accompanying drawings and embodiments.

[0021] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "include" or "comprise" and the like mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0022] Example

[0023] like Figure 1 As shown, a retaining ring 1 for reducing chemical corrosion of a fastening surface comprises a retaining ring assembly 4 and a retaining ring 1. The retaining ring assembly 4 is connected to the retaining ring 1 by bolts. The retaining ring 1 is annular and the retaining ring assembly 4 is circular, and its diameter is consistent with the outer diameter of the retaining ring 1.

[0024] like Figure 3 As shown, a plurality of evenly distributed threaded holes 3 are provided on the circumference of the upper surface of the retaining ring 1 near the outer diameter. A plurality of mounting through holes 5 corresponding to the threaded holes 3 are provided on the upper surface of the retaining ring assembly 4, and the retaining ring assembly 4 is connected to the retaining ring 1 by bolts. The bolts are connected to the threaded holes 3 on the retaining ring 1 through the mounting through holes 5 to connect the retaining ring assembly 4 and the retaining ring 1 together. The existing structure of the retaining ring 1 is that the upper surface of the retaining ring 1 is a finely machined plane with dozens of threaded holes 3 evenly distributed. The existing threaded holes 3 are located on the central pitch circle of the inner and outer diameters of the retaining ring 1, and the threaded holes 3 are now shifted to a position close to the outer diameter. There are two purposes for doing this, one is to keep away from the grinding liquid inlet, and the other is to reserve space for machining the O-ring mounting groove 2.

[0025] The lower surface of the guard ring 1 is provided with a plurality of grooves 7, which are evenly distributed on the lower surface of the guard ring 1 along the circumference of the guard ring 1. The lower surface of the guard ring 1 is in contact with a grinding pad, on which a grinding liquid is provided. The grinding liquid enters the annular hollow portion of the guard ring 1 through the grooves 7 on the lower surface of the guard ring 1, contacts the wafer, and grinds the wafer.

[0026] like Figure 2As shown, the upper surface of the retaining ring 1 is provided with a mounting groove 2, and an O-ring corresponding to the mounting groove 2 is provided in the mounting groove 2. A circle of mounting grooves 2 is milled on the fine processing plane of the retaining ring 1, that is, the upper surface of the retaining ring 1 is provided with a mounting groove 2, and then the O-ring is placed in the mounting groove 2 to form a sealing surface with the retaining ring assembly 4, forming a circle of isolation belt in the direction where the grinding liquid is easy to enter, protecting the upper surface and the threaded hole 3, and playing a role in delaying and reducing the corrosion of the grinding liquid.

[0027] like Figure 4 As shown, an O-ring quick release port 6 is provided at the outer diameter of the mounting groove 2, and the O-ring quick release port 6 is located on the upper surface of the retaining ring 1. Considering the need for replacement of the O-ring in the later stage and the convenience of operation, a quick release port is designed on the side of the O-ring mounting groove 2, and the straight-line distance between the O-ring quick release port 6 and the two adjacent threaded holes 3 above and below the O-ring quick release port 6 is the same. The groove edge of the mounting groove 2 is provided with a rounded corner.

[0028] The depth of the mounting groove 2 is determined in proportion to the overall size of the retaining ring 1; the size of the rounded edge of the mounting groove 2 is determined in proportion to the overall size of the retaining ring 1; the displacement size of the threaded hole 3: the size of the O-ring mounting groove 2 is used as a reference, and the threaded hole 3 is processed away from its appropriate position; the O-ring quick-release port 6: is processed at the outer diameter of the O-ring mounting groove 2, which is on the outer diameter of the mounting groove 2 corresponding to the center of the two adjacent threaded holes 3 above and below, which is farther from the grinding liquid inlet than the inner diameter of the groove 7, and the size is based on the actual quick-release tool.

[0029] Therefore, the utility model adopts the above-mentioned retaining ring for reducing chemical corrosion of the fastening surface, by shifting the threaded hole to near the outer diameter, so that the threaded hole is away from the grinding liquid inlet, and also reserves space for processing the O-ring mounting groove. By opening the mounting groove and the O-ring on the upper surface of the retaining ring, a sealing surface is formed with the retaining ring assembly, and a circle of isolation belt is formed in the direction where the grinding liquid can easily enter, thereby effectively blocking the grinding liquid from entering the fastening surface of the retaining ring, reducing the impact of grinding liquid corrosion, reducing the huge cost of maintenance and replacement, and further improving the business efficiency of the enterprise.

[0030] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that they can still modify or replace the technical solution of the utility model with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the utility model.

Claims

1. A retainer for reducing chemical corrosion of a fastening surface, characterized in that: The invention comprises a retaining ring assembly and a retaining ring, wherein the retaining ring assembly is connected to the retaining ring by bolts, the retaining ring is annular, a groove is provided on the lower surface of the retaining ring, a mounting groove is provided on the upper surface of the retaining ring, an O-ring corresponding to the mounting groove is provided in the mounting groove, a plurality of evenly distributed threaded holes are provided on the circumference of the upper surface of the retaining ring near the outer diameter, an O-ring quick-release port is provided at the outer diameter of the mounting groove, the O-ring quick-release port is located on the upper surface of the retaining ring, and the straight-line distance between the O-ring quick-release port and two upper and lower adjacent threaded holes of the O-ring quick-release port is the same.

2. A retainer for reducing chemical corrosion of a fastening surface according to claim 1, characterized in that: The retaining ring component is circular, and its diameter is consistent with the outer diameter of the retaining ring.

3. A retainer for reducing chemical corrosion of a fastening surface according to claim 1, characterized in that: A plurality of mounting through holes corresponding to the threaded holes are arranged on the upper surface of the retaining ring assembly, and the retaining ring assembly is connected to the retaining ring through bolts.

4. A retainer for reducing chemical corrosion of a fastening surface according to claim 1, characterized in that: The groove edge of the installation groove is provided with a rounded corner edge.

5. A retainer for reducing chemical corrosion of fastening surfaces according to claim 1, characterized in that: There are a plurality of grooves, which are evenly distributed on the lower surface of the retaining ring along the circumference of the retaining ring.

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