Magnetron sputtering coating machine for metal target material

Abstract

The utility model relates to the technical field of magnetron sputtering coating equipment, in particular to a metal target magnetron sputtering coating machine which comprises a coating machine body, a driving part is arranged in the coating machine body, and a magnetron sputtering assembly and a target moving assembly are arranged at the output end of the driving part. A first transmission wheel is arranged at the output end of the driving part, a rotating disc is arranged at the end, away from the driving part, of the first transmission wheel, and a first sliding part is arranged at the end, away from the first transmission wheel, of the rotating disc. The metal target magnetron sputtering coating machine has the beneficial effects that when the metal target magnetron sputtering coating machine is used for coating a workpiece, the position, corresponding to the target, of the magnetron sputtering assembly is continuously changed, so that the uniformity of sputtering degrees generated in different areas of the target is ensured, and the phenomenon that due to different losses of the different areas of the target, the coating quality is influenced is avoided. And therefore, the utilization rate of the target material is improved, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering coating equipment, in particular to a metal target material magnetron sputtering coating machine. Background Art

[0002] Vacuum magnetron sputtering coating is a surface coating technology that uses a magnetic field to control the sputtering of metal targets in a vacuum environment, depositing metal atoms on the surface of the substrate to form a thin film with excellent performance and special functions. First, the studio is evacuated to a high vacuum state through a vacuum system to eliminate the interference of impurities such as oxygen on the sputtering process. Then, a magnetic field is generated through the magnetron system to accelerate the atoms on the metal target and sputter them onto the surface of the substrate. Finally, the rotation and tilt angle of the substrate are controlled by the substrate motion system to achieve uniform coating coverage. Application areas include optics, electronics, aerospace, automotive and other industries. In the field of optics, magnetron sputtering coating is widely used in the manufacture of optical components such as lenses, filters, and reflectors to improve optical transmittance and corrosion resistance. In the field of electronics, sputtering coating technology can be used to prepare conductive films, magnetic films, optoelectronic films, etc. to meet the needs of electronic devices for functional materials.

[0003] The diamond metal-based high thermal conductivity composite material magnetron sputtering device disclosed in Chinese patent CN115572953B includes a magnetron sputtering coating machine, a magnetron sputtering target and a target material, as well as a horizontal truncated table, an active vertical axis, and a cross-shaped horizontal plate. Each cross-shaped horizontal plate is provided with four slides, a driven vertical axis and a horizontal carrier, and an irregular slide groove is formed on the top of the horizontal truncated table.

[0004] However, the diamond metal-based high thermal conductivity composite material magnetron sputtering device still has the following problems during actual use:

[0005] Since the target atoms need to move toward the workpiece through the magnetic field in the magnetron sputtering coating equipment and finally sputter onto the surface of the workpiece, and the magnetic field lines of force in the magnetron sputtering coating equipment are not evenly distributed, resulting in different degrees of sputtering in different areas of the target material. Therefore, the loss of the target material in different areas is inconsistent. When a certain area of ​​the target material is sputtered and perforated, the entire target material needs to be scrapped and replaced. The utilization rate of the target material is low. When some precious metal targets (such as gold, platinum, etc.) are used, the production cost will be increased.

[0006] Therefore, the present application proposes a metal target magnetron sputtering coating machine to solve the above problems. Utility Model Content

[0007] The purpose of the utility model is to overcome the shortcomings of the prior art, solve the problems mentioned in the background technology, and provide a metal target magnetron sputtering coating machine.

[0008] The purpose of the utility model is achieved through the following technical solutions: a metal target magnetron sputtering coating machine, comprising a coating machine body, a driving member is arranged inside the coating machine body, and a magnetron sputtering assembly and a target moving assembly are arranged at the output end of the driving member;

[0009] A first transmission wheel is arranged at the output end of the driving member, a rotating disk is arranged at one end of the first transmission wheel away from the driving member, and a first sliding member is arranged at one end of the rotating disk away from the first transmission wheel;

[0010] A mounting plate is arranged on the top of the magnetron sputtering assembly, a second sliding member is arranged on the mounting plate, and a first sliding groove is opened on the mounting plate;

[0011] The target material moving assembly includes a partition, a second slide groove is opened on the partition, a first rotating shaft and a second rotating shaft are rotatably connected on the partition, one end of the first rotating shaft is fixedly connected to the second transmission wheel, the end of the first rotating shaft away from the second transmission wheel is fixedly connected to the first gear, the end of the second rotating shaft away from the partition is provided with a second gear, a gear ring is provided below the partition, the gear ring is respectively meshed with the first gear and the second gear, and a target material is provided inside the gear ring.

[0012] Preferably, the first sliding member is located inside the first sliding groove, and the mounting plate is slidably connected to the rotating disk via the first sliding member.

[0013] Preferably, the partition is fixedly connected to the inside of the coating machine body.

[0014] Preferably, the second sliding member is located inside the second sliding groove, and the mounting plate is slidably connected to the partition plate through the second sliding member.

[0015] Preferably, the second transmission wheel is connected to the first transmission wheel via a transmission belt.

[0016] Preferably, the horizontal height of the second gear is the same as the horizontal height of the first gear.

[0017] Preferably, support plates are provided at the bottom of the first gear and the second gear, and the gear ring is overlapped on the support plate.

[0018] Compared with the prior art, the utility model has the following beneficial effects:

[0019] When the metal target magnetron sputtering coating machine is coating a workpiece, the positions of the magnetron sputtering assembly and the target material are constantly changing, ensuring the uniformity of the sputtering degree produced in different areas of the target material, avoiding the situation where a certain area of ​​the target material is sputtered more strongly and perforated due to different losses in different areas of the target material, thereby improving the utilization rate of the target material and reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0021] Figure 1 It is a partial cross-sectional structural schematic diagram of an embodiment of the utility model;

[0022] Figure 2 This is a schematic structural diagram of the coating machine body according to an embodiment of the utility model;

[0023] Figure 3 It is a structural schematic diagram of the connection relationship between the driving member, the magnetron sputtering assembly and the target material moving assembly in the embodiment of the utility model;

[0024] Figure 4 This is a schematic diagram of the structure of the driving member of the embodiment of the utility model;

[0025] Figure 5 This is a schematic diagram of the structure of a magnetron sputtering assembly according to an embodiment of the utility model;

[0026] Figure 6 It is a schematic structural diagram of the target moving assembly according to an embodiment of the utility model.

[0027] In the figure: 1. Coating machine body; 101. Side door; 102. Observation window; 2. Driving member; 201. First transmission wheel; 202. Rotating disk; 203. First sliding member; 3. Magnetron sputtering assembly; 301. Mounting plate; 302. Second sliding member; 303. First slide groove; 4. Target moving assembly; 401. Partition; 402. Second slide groove; 403. First rotating shaft; 404. Second transmission wheel; 405. First gear; 406. Second rotating shaft; 407. Second gear; 408. Gear ring; 409. Target. DETAILED DESCRIPTION

[0028] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0030] Additional aspects and advantages of the present invention will be further described below in conjunction with the accompanying drawings, and some will become apparent from the following description or be learned through practice of the present invention.

[0031] like Figure 1 and Figure 3 As shown, a metal target magnetron sputtering coating machine comprises a coating machine body 1, a driving component 2 is arranged inside the coating machine body 1, a magnetron sputtering assembly 3 and a target moving assembly 4 are arranged at the output end of the driving component 2, and the magnetron sputtering assembly 3 is the same as the prior art or can be implemented by using the prior art.

[0032] like Figure 2 As shown, a side door 101 is provided on one side of the coating machine body 1, and an observation window 102 is provided on the side door 101. The coating machine body 1 is equipped with a vacuum system, an air intake system, an auxiliary heating system, and a workpiece turntable system. The vacuum system, the air intake system, the auxiliary heating system, and the workpiece turntable system are the same as the prior art or can be implemented by using the prior art.

[0033] like Figure 4As shown, a first transmission wheel 201 is provided at the output end of the driving member 2, a rotating disk 202 is provided at the end of the first transmission wheel 201 away from the driving member 2, a first sliding member 203 is provided at the end of the rotating disk 202 away from the first transmission wheel 201, the axis of the first transmission wheel 201 coincides with the axis of the rotating disk 202, and the axis of the first sliding member 203 does not coincide with the axis of the rotating disk 202.

[0034] like Figure 3-5 As shown, a mounting plate 301 is provided on the top of the magnetron sputtering assembly 3, a second sliding member 302 is provided on the mounting plate 301, a first sliding groove 303 is opened on the mounting plate 301, the first sliding member 203 is located inside the first sliding groove 303, and the mounting plate 301 is slidably connected to the rotating disk 202 through the first sliding member 203.

[0035] like Figure 1 , Figure 3 , Figure 5 and Figure 6 As shown, the target moving assembly 4 includes a partition 401, a second slide groove 402, a first rotating shaft 403, a second transmission wheel 404, a first gear 405, a second rotating shaft 406, a second gear 407, a gear ring 408 and a target 409. The partition 401 is fixedly connected to the inside of the coating machine body 1, and a second slide groove 402 is opened on the partition 401. The second sliding member 302 is located inside the second slide groove 402. The mounting plate 301 is slidably connected to the partition 401 through the second sliding member 302. The partition 401 is rotatably connected with the first rotating shaft 403 and the second rotating shaft 406. One end of the first rotating shaft 403 is fixedly connected to the second transmission wheel 404. The second transmission wheel 404 is driven by The belt is connected to the first transmission wheel 201 for transmission, the first gear 405 is fixedly connected to the end of the first rotating shaft 403 away from the second transmission wheel 404, the second gear 407 is provided at the end of the second rotating shaft 406 away from the partition 401, the number of the second rotating shaft 406 and the second gear 407 are both two, the horizontal height of the second gear 407 is the same as the horizontal height of the first gear 405, a gear ring 408 is provided below the partition 401, the gear ring 408 is meshed with the first gear 405 and the second gear 407 respectively, and a support plate is provided at the bottom of the first gear 405 and the second gear 407, the gear ring 408 is overlapped on the support plate, and a target material 409 is provided inside the gear ring 408.

[0036] The working process is as follows:

[0037] S1. When coating a workpiece, the driving member 2 is started, the driving member 2 drives the first transmission wheel 201 and the rotating disk 202 to rotate, the rotating disk 202 drives the first sliding member 203 to rotate, the first sliding member 203 drives the mounting plate 301 to reciprocate in the second sliding groove 402 during the sliding process in the first sliding groove 303, and the mounting plate 301 drives the magnetron sputtering assembly 3 to reciprocate;

[0038] S2. At the same time, the first transmission wheel 201 drives the second transmission wheel 404 to rotate through the transmission belt, the second transmission wheel 404 drives the first gear 405 to rotate through the first rotating shaft 403, and the first gear 405 drives the target 409 to rotate through the gear ring 408;

[0039] S3, the second gear 407 and the support plates at the bottom of the first gear 405 and the second gear 407 limit the rotating gear ring 408 and the target 409 to prevent the gear ring 408 and the target 409 from falling;

[0040] S4. Start the magnetron sputtering assembly 3. The position of the magnetron sputtering assembly 3 relative to the target material 409 is constantly changing, ensuring the uniformity of the sputtering degree produced in different areas of the target material 409, avoiding the situation where a certain area of ​​the target material 409 is strongly sputtered and perforated due to different losses in different areas of the target material 409, thereby improving the utilization rate of the target material 409 and reducing the production cost.

[0041] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. Metal target magnetron sputtering coating machine, characterized by: It comprises a coating machine body (1), wherein a driving component (2) is arranged inside the coating machine body (1), and a magnetron sputtering component (3) and a target material moving component (4) are arranged at the output end of the driving component (2); The output end of the driving member (2) is provided with a first transmission wheel (201), an end of the first transmission wheel (201) away from the driving member (2) is provided with a rotating disk (202), and an end of the rotating disk (202) away from the first transmission wheel (201) is provided with a first sliding member (203); A mounting plate (301) is arranged on the top of the magnetron sputtering assembly (3), a second sliding member (302) is arranged on the mounting plate (301), and a first sliding groove (303) is opened on the mounting plate (301); The target material moving assembly (4) comprises a partition (401), a second slide groove (402) is provided on the partition (401), a first rotating shaft (403) and a second rotating shaft (406) are rotatably connected to the partition (401), one end of the first rotating shaft (403) is fixedly connected to the second transmission wheel (404), one end of the first rotating shaft (403) away from the second transmission wheel (404) is fixedly connected to the first gear (405), and one end of the second rotating shaft (406) away from the partition (401) is provided with a second gear (407), a gear ring (408) is provided below the partition (401), the gear ring (408) is respectively meshed with the first gear (405) and the second gear (407), and a target material (409) is provided inside the gear ring (408).

2. The metal target magnetron sputtering coating machine according to claim 1, characterized in that: The first sliding member (203) is located inside the first sliding groove (303), and the mounting plate (301) is slidably connected to the rotating disk (202) via the first sliding member (203).

3. The metal target magnetron sputtering coating machine according to claim 1, characterized in that: The partition (401) is fixedly connected to the inside of the coating machine body (1).

4. The metal target magnetron sputtering coating machine according to claim 1, characterized in that: The second sliding member (302) is located inside the second sliding groove (402), and the mounting plate (301) is slidably connected to the partition plate (401) via the second sliding member (302).

5. The metal target magnetron sputtering coating machine according to claim 1, characterized in that: The second transmission wheel (404) is transmission-connected to the first transmission wheel (201) via a transmission belt.

6. The metal target magnetron sputtering coating machine according to claim 1, characterized in that: The horizontal height of the second gear (407) is the same as the horizontal height of the first gear (405).

7. The metal target magnetron sputtering coating machine according to claim 1, characterized in that: The bottoms of the first gear (405) and the second gear (407) are both provided with support plates, and the gear ring (408) is overlapped on the support plates.

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