ALD (Atomic Layer Deposition) thick sublayer deposition coating system

Abstract

The utility model relates to the technical field of coating, in particular to an ALD thick sublayer deposition coating system which comprises a reactor, a lifting device and a conveying device, the reactor is provided with a top cover, the conveying device is used for transferring a product to be coated to the top cover, the conveying device comprises a conveying machine shell, a driving mechanism and a first guide rail, and the driving mechanism and the first guide rail are both arranged on the conveying machine shell. The bottom of the top cover is provided with a second guide rail. The tail end of the first guide rail abuts against the head end of the second guide rail. The driving mechanism is used for driving a to-be-coated product to be transferred to the second guide rail through the first guide rail, and the lifting device is used for driving the top cover to cover the reactor. According to the utility model, the product to be coated is positioned through the second guide rail, namely after the product to be coated is conveyed to the second guide rail, the lifting device can drive the top cover to descend to cover the reactor for reaction, and the product to be coated can still be stably fixed without being grabbed by a clamping jaw because the product to be coated is suspended to the second guide rail; therefore, the efficiency and the stability are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to an ALD thick sub-layer deposition film coating system. Background Art

[0002] As IC complexity continues to increase, according to the famous Moore's Law and the International Semiconductor Technology Development Roadmap published by the International Semiconductor Industry Association, the characteristic size of metal-oxide-semiconductor field-effect transistor devices in silicon-based semiconductor integrated circuits will reach the nanometer scale. Atomic layer deposition (ALD) has the characteristics of excellent three-dimensional conformality, large-area uniformity and precise sub-monolayer film thickness control, and is favored by the microelectronics industry and nanotechnology field.

[0003] In the prior art, for example, the Chinese invention patent with patent number 202011412184.4 discloses an ALD processing equipment and a processing method, which solves or partially solves the technical problems in the prior art that the deposited film has poor uniformity, difficult quality assurance, low film forming efficiency, long cycle, and waste of precursor sources, and therefore has technical superiority.

[0004] However, this solution still has the following shortcomings: after feeding, the product is grasped by a clamp and then sent into the reactor for coating by a lifting device. The movement of the clamp will affect the efficiency and stability of the product. Summary of the invention

[0005] The utility model provides an ALD thick sub-layer deposition coating system to solve the problems in the prior art, and improves efficiency and stability by optimizing the structure of fixing the product to be coated.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] The utility model provides an ALD thick sub-layer deposition coating system, including a reactor, a lifting device and a conveying device, the reactor is provided with a top cover, the lifting device is used to drive the top cover to lift and lower to realize opening or closing of the reactor, the conveying device is used to transfer the product to be coated to the top cover, the conveying device includes a conveyor shell, a driving mechanism and a first guide rail all arranged on the conveyor shell, a second guide rail is arranged at the bottom of the top cover, the end of the first guide rail is in conflict with the head end of the second guide rail; the driving mechanism is used to drive the product to be coated to be transferred to the second guide rail via the first guide rail, and the lifting device is used to drive the top cover to close to the reactor when the product to be coated is suspended on the second guide rail.

[0008] Furthermore, it also includes a loading shell, which is arranged on the top of the reactor and connected to the reactor, one side of the loading shell is connected to the conveying device, the lifting device is installed on the loading shell, and the top cover is slidably arranged on the loading shell; an isolation mechanism is arranged between the loading shell and the conveying device, and the isolation mechanism is used to cut off the connection between the loading shell and the conveying device.

[0009] Furthermore, the isolation mechanism includes a lifting motor, a lifting transmission module and an isolation door. The isolation door can be lifted and lowered between the loading shell and the conveying device. The lifting motor is driven and connected to the isolation door via the lifting transmission module.

[0010] Furthermore, a feed port is provided on one side of the conveyor housing, and a feed door and an opening and closing mechanism for driving the feed door to open and close are installed on the feed port.

[0011] Furthermore, the opening and closing mechanism includes an opening and closing seat, an opening and closing cylinder, an opening and closing guide rail, an opening and closing slider, a first limit piece and a second limit piece. The opening and closing slider is installed on the opening and closing seat, and the opening and closing slider is slidably set on the opening and closing guide rail; the number of opening and closing cylinders is multiple, and the opening and closing cylinders are installed on the opening and closing seat, and the piston rods of the opening and closing cylinders are connected to the feeding door; the first limit piece and the second limit piece are both installed on the conveyor housing and are respectively located at both ends of the opening and closing guide rail, and the first limit piece and the second limit piece are respectively used to interfere with the opening and closing seat.

[0012] Furthermore, openings are respectively provided on both sides of the loading shell, and baffles are detachably provided on the openings.

[0013] Furthermore, the conveying device also includes a hanger, which is slidably arranged on the second guide rail and is used to hang the product to be coated.

[0014] Furthermore, the conveying device also includes a grabbing member, which is slidably arranged on the second guide rail, and the driving mechanism drives the connected grabbing member, and the grabbing member is used to grab the hanging rack and drive the hanging rack to move.

[0015] The beneficial effects of the utility model: the utility model positions the product to be coated by the second guide rail, that is, after the product to be coated is conveyed to the second guide rail, the lifting device can drive the top cover to descend to cover the reactor for reaction. Since the product to be coated is in a state of being suspended to the second guide rail, it can still be stably fixed without the need for gripping with a clamp, thereby improving efficiency and stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the utility model.

[0017] Figure 2 It is a side view of the utility model.

[0018] Figure 3It is a schematic diagram of the lifting device of the utility model.

[0019] Figure 4 This is a schematic diagram of the second guide rail of the utility model when transporting products to be coated.

[0020] Figure numerals: 1—reactor, 2—lifting device, 3—conveying device, 4—top cover, 5—loading shell, 6—isolating mechanism, 7—product to be coated, 8—bracket, 31—conveying shell, 32—driving mechanism, 33—first guide rail, 34—feeding port, 35—feeding door, 36—opening and closing mechanism, 41—second guide rail, 42—suspension member, 51—opening, 52—baffle, 61—lifting motor, 62—lifting transmission module, 63—isolating door, 64—lifting frame, 361—opening and closing seat, 362—opening and closing cylinder, 363—opening and closing guide rail, 364—opening and closing slider, 365—first limit member, 366—second limit member. DETAILED DESCRIPTION

[0021] In order to facilitate the understanding of those skilled in the art, the present invention is further described below in conjunction with the embodiments and drawings, and the contents mentioned in the implementation modes are not intended to limit the present invention. The present invention is described in detail below in conjunction with the drawings.

[0022] like Figures 1 to 4 As shown, the utility model provides an ALD thick sublayer deposition coating system, including a reactor 1, a lifting device 2 and a conveying device 3. The reactor 1 is provided with a top cover 4. The lifting device 2 is used to drive the top cover 4 to lift and lower to realize the opening or closing of the reactor 1. The conveying device 3 is used to transfer the product 7 to be coated to the top cover 4. The conveying device 3 includes a conveyor shell 31, a driving mechanism 32 and a first guide rail 33 all arranged on the conveyor shell 31. A second guide rail 41 is arranged at the bottom of the top cover 4, and the end of the first guide rail 33 is in conflict with the head end of the second guide rail 41; the driving mechanism 32 is used to drive the product 7 to be coated to be transferred to the second guide rail 41 via the first guide rail 33, and the lifting device 2 is used to drive the top cover 4 to cover the reactor 1 when the product 7 to be coated is hung on the second guide rail 41.

[0023] When the utility model is in operation, the lifting device 2 drives the top cover 4 to rise until the first guide rail 33 contacts the second guide rail 41 to form a track, and the conveying device 3 can drive the product 7 to be coated to slide along the first guide rail 33 to the second guide rail 41, and then the lifting device 2 drives the top cover 4 to descend and cover the reactor 1, so that the product 7 to be coated is suspended on the second guide rail 41, so that ALD thick sub-layer deposition coating can be performed; after the coating is completed, the lifting device 2 drives the top cover 4 to rise, and the conveying device 3 drives the coated product to return to its original position, and the coated product can be removed.

[0024] Specifically, in order to facilitate the loading and unloading of the product 7 to be coated, the second guide rail 41 of the utility model is slidably provided with a suspension member 42, so that the bracket 8 for transporting the product 7 to be coated can slide into the suspension member 42, and then the suspension member 42 moves to achieve the transmission effect.

[0025] The conveying device 3 of the utility model only needs to drive the product 7 to be coated to slide along the first guide rail 33 to the second guide rail 41 to complete the loading, and no clamping claws are required, making the action simpler.

[0026] In this embodiment, the utility model also includes a loading shell 5, which is arranged at the top of the reactor 1 and connected to the reactor 1, one side of the loading shell 5 is connected to the conveying device 3, the lifting device 2 is installed on the loading shell 5, and the top cover 4 is slidably arranged on the loading shell 5; an isolation mechanism 6 is arranged between the loading shell 5 and the conveying device 3, and the isolation mechanism 6 is used to cut off the connection between the loading shell 5 and the conveying device 3.

[0027] In actual use, the isolation mechanism 6 includes a lifting motor 61, a lifting transmission module and an isolation door 63. The isolation door 63 is liftably arranged between the loading shell 5 and the conveying device 3. The lifting motor 61 is driven to connect to the isolation door 63 via the lifting transmission module.

[0028] That is, when the present invention is working, the product 7 to be coated is suspended on the first guide rail 33, and the lifting motor 61 needs to control the isolation door 63 to open before it can be transferred to the second guide rail 41 by the conveying device 3. Then, the lifting motor 61 needs to control the isolation door 63 to descend and close after the conveying device 3 is reset. By setting the isolation door 63, the space inside the reactor 1 and the loading shell 5 is isolated during operation, that is, when vacuuming, only the space inside the reactor 1 and the loading shell 5 needs to be extracted, which is beneficial to energy saving.

[0029] In this embodiment, a feed port 34 is disposed on one side of the conveyor housing 31 , and a feed door 35 and an opening and closing mechanism 36 for driving the feed door 35 to open and close are installed on the feed port 34 .

[0030] In actual use, the opening and closing mechanism 36 includes an opening and closing seat 361, an opening and closing cylinder 362, an opening and closing guide rail 363, an opening and closing slider 364, a first limit member 365 and a second limit member 366. The opening and closing slider 364 is installed on the opening and closing seat 361, and the opening and closing slider 364 is slidably set on the opening and closing guide rail 363; the number of the opening and closing cylinders 362 is multiple, and the opening and closing cylinders 362 are installed on the opening and closing seat 361, and the piston rod of the opening and closing cylinder 362 is connected to the feeding door 35; the first limit member 365 and the second limit member 366 are both installed on the conveyor housing 31 and are respectively located at the two ends of the opening and closing guide rail 363, and the first limit member 365 and the second limit member 366 are respectively used to interfere with the opening and closing seat 361.

[0031] The opening and closing mechanism 36 controls the feeding door 35 to cover the feeding port 34 or leave the feeding port 34 through the opening and closing cylinder 362; and after leaving the feeding port 34, it is necessary to cooperate with external equipment to control the opening and closing seat 361 to move along the opening and closing guide rail 363 to achieve the effect of fully opening the feeding port 34, and the judgment basis for opening the feeding port 34 is that the opening and closing seat 361 is in contact with the second limit member 366; similarly, before closing the feeding door 35, it is necessary to move the opening and closing seat 361 to contact the first limit member 365, and then the opening and closing cylinder 362 is actuated to ensure that the feeding door 35 accurately covers the feeding port 34.

[0032] That is, the loading of the product to be coated and the unloading of the coated product of the utility model are both realized through the feed port 34 on one side of the conveyor housing 31. The product 7 to be coated can be hung on a hook, which is hung on the first guide rail 33 and driven by the conveying device 3 to feed.

[0033] Specifically, openings 51 are respectively provided on both sides of the loading shell 5, and baffles 52 are detachably provided on the openings 51. The provision of the openings 51 facilitates the staff to lift up and open the loading shell 5 to clean the space inside the loading shell 5 and the reactor 1.

[0034] The above is only a preferred embodiment of the utility model, and does not limit the utility model in any form. Although the utility model is disclosed as a preferred embodiment as above, it is not used to limit the utility model. Any technician familiar with this profession can make some changes or modifications to equivalent embodiments of equivalent changes by using the technical content disclosed above without departing from the scope of the technical solution of the utility model. However, any simple modification, equivalent change and modification made to the above embodiments according to the technology of the utility model, which does not depart from the content of the technical solution of the utility model, belongs to the scope of the technical solution of the utility model.

Claims

1. An ALD thick sub-layer deposition coating system, comprising a reactor, a lifting device and a conveying device, wherein the reactor is provided with a top cover, the lifting device is used to drive the top cover to lift and lower to realize opening or closing of the reactor, and the conveying device is used to transfer the product to be coated to the top cover, characterized in that: The conveying device includes a conveyor housing, a driving mechanism and a first guide rail all arranged on the conveyor housing, a second guide rail is arranged at the bottom of the top cover, and the end of the first guide rail is in conflict with the head end of the second guide rail; the driving mechanism is used to drive the product to be coated to be transferred from the first guide rail to the second guide rail, and the lifting device is used to drive the top cover to close to the reactor when the product to be coated is hung on the second guide rail.

2. The ALD thick sub-layer deposition coating system according to claim 1, characterized in that: It also includes a loading shell, which is arranged on the top of the reactor and connected to the reactor, one side of the loading shell is connected to the conveying device, the lifting device is installed on the loading shell, and the top cover is slidably arranged on the loading shell; an isolation mechanism is arranged between the loading shell and the conveying device, and the isolation mechanism is used to isolate the connection between the loading shell and the conveying device.

3. The ALD thick sub-layer deposition coating system according to claim 2, characterized in that: The isolation mechanism comprises a lifting motor, a lifting transmission module and an isolation door. The isolation door is liftably arranged between the loading shell and the conveying device. The lifting motor is driven and connected to the isolation door via the lifting transmission module.

4. The ALD thick sub-layer deposition coating system according to claim 1, characterized in that: A feed port is arranged on one side of the conveyor housing, and a feed door and an opening and closing mechanism for driving the feed door to open and close are installed on the feed port.

5. The ALD thick sub-layer deposition coating system according to claim 4, characterized in that: The opening and closing mechanism includes an opening and closing seat, an opening and closing cylinder, an opening and closing guide rail, an opening and closing slider, a first limit piece and a second limit piece. The opening and closing slider is installed on the opening and closing seat, and the opening and closing slider is slidably set on the opening and closing guide rail; there are multiple opening and closing cylinders, which are installed on the opening and closing seat, and the piston rods of the opening and closing cylinders are connected to the feeding door; the first limit piece and the second limit piece are both installed on the conveyor housing and are respectively located at the two ends of the opening and closing guide rail, and the first limit piece and the second limit piece are respectively used to interfere with the opening and closing seat.

6. The ALD thick sub-layer deposition coating system according to claim 2, characterized in that: Openings are respectively arranged on both sides of the loading shell, and baffles are detachably arranged on the openings.

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