Sealing rotary plate valve for single crystal furnace
By designing a sealed rotary plate valve for single crystal furnace, the automatic start-stop function is achieved using the combination of rotary plate, rotary handle, rotary plate and torsion spring, which solves the problem of manual adjustment of the existing rotary plate valve and improves working efficiency and device stability.
Patent Information
- Application Number
- CN202421442130.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-24
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-06-24
AI Technical Summary
The existing rotary plate valve cannot start and stop automatically, and the staff needs to manually adjust it, resulting in the staff monitoring it by the side, which reduces work efficiency.
A sealed rotary plate valve for a single crystal furnace is designed, and the automatic start-stop function is achieved by combining the rotary plate, the rotary handle, the rotary plate and the torsion spring.
The valve main body is automatically started and stopped without the need for staff to manually open or close, which reduces the work difficulty of staff, improves work efficiency, and improves the stability of the device.
Smart Images
Figure CN222559204U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of rotary plate valves for single crystal furnaces, in particular to a sealing rotary plate valve for single crystal furnaces. Background Art
[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method. The single crystal furnace includes a furnace bottom plate, a main furnace chamber, a furnace cover, an isolation valve chamber, an auxiliary furnace chamber, a seed crystal lifting and rotating mechanism, and a crucible lifting and rotating mechanism. The function of the isolation valve is to provide a channel for the seed crystal or single crystal to enter the auxiliary furnace chamber, while maintaining the local pressure and temperature of the upper and lower furnace chambers.
[0003] With respect to the above-mentioned related technologies, the inventors believe that the following defects exist: the existing rotary plate valve can only be adjusted manually and cannot be started and stopped automatically, which results in the need for workers to monitor during the operation, thereby reducing the work efficiency of the workers. Utility Model Content
[0004] In order to solve the above problems, the utility model provides a sealed rotary plate valve for a single crystal furnace.
[0005] The above-mentioned technical objective of the utility model is achieved through the following technical scheme: a sealed rotary plate valve for a single crystal furnace, comprising a valve body, the valve body comprising a first through-tube, a connecting piece fixedly arranged on the side wall of the first through-tube and a second through-tube fixedly arranged on the connecting piece away from the side wall of the first through-tube, the side wall of the connecting piece is penetrated by a through hole, the first through-tube, the through hole and the second through-tube are directly opposite, a rotary plate is rotatably arranged in the through-hole, a rotating groove is arranged on the inner top wall of the through-hole, a rotating handle is rotatably arranged in the rotating groove, the rotating handle and the rotary plate are fixed to each other, a rotating groove is arranged on the inner wall of the rotating groove, a rotating plate is rotatably arranged in the rotating groove, the rotating plate and the rotating handle are fixed to each other, a torsion spring is sleeved on the outer wall of the rotating handle, the upper end of the torsion spring is fixed to the bottom surface of the rotating plate, and the bottom surface of the torsion spring is fixed to the inner bottom wall of the rotating groove.
[0006] By adopting the above technical solution, when the valve body is in use, the rotary plate rotates under the action of the airflow, and then the rotating handle rotates under the action of the rotary plate, and then the rotating plate rotates under the action of the rotating handle, and then the airflow passes through the connecting piece, so that the valve body is opened. Subsequently, when the airflow stops, the rotating plate is reset under the action of the torsion spring, and then the rotating handle is reset under the action of the rotating plate, and then the rotary plate is reset under the action of the rotating handle, and then the valve body is closed. In this process, the valve body can be automatically started and stopped without the need for the staff to manually open or close, thereby reducing the difficulty of the staff's work and improving the staff's work efficiency.
[0007] Furthermore, a plurality of blocking grooves are provided in a circular array on the inner wall of the rotating groove, a plurality of fixed grooves facing the plurality of blocking grooves are provided in a circular array on the side wall of the rotating handle, and a plurality of fixed blocks are slidably arranged in the plurality of fixed grooves, and the plurality of fixed blocks are slidably connected to the plurality of blocking grooves.
[0008] By adopting the above technical solution, when the staff needs to manually open or close the valve body, the staff needs to turn the rotating handle, so that the rotary plate rotates under the action of the rotating handle. Then, the staff needs to slide the fixed block, so that one end of the fixed block slides into the blocking groove, so that the fixed block fixes the rotating handle, and the rotating handle cannot be rotated, thereby reducing the probability of the valve body automatically starting and stopping when the staff manually opens or closes the valve body, thereby improving the stability of the device.
[0009] Furthermore, a sliding groove is provided on the inner wall of the plurality of the fixing grooves, a sliding rod is slidably arranged in the sliding groove, and a first inclined surface is provided on the edge where the upper surface of the plurality of the fixing blocks intersects with the side wall away from the blocking groove.
[0010] By adopting the above technical solution, when the staff needs to slide the fixed block to make one end of the fixed block slide into the blocking groove, the staff needs to slide the sliding rod, so that the sliding rod gradually approaches and finally presses against the first inclined surface, so that the fixed block slides in the direction close to the blocking groove under the action of the sliding rod, and then one end of the fixed block slides into the blocking groove, thereby reducing the difficulty of sliding the fixed block for the staff, thereby reducing the difficulty of the staff's work.
[0011] Furthermore, a reset groove is provided on the inner bottom wall of the fixed groove, a reset block is slidably arranged in the reset groove, a reset spring is fixedly arranged on the side wall of the reset block, the other end of the reset spring is fixedly arranged on the inner wall of the reset groove, and the reset block and the fixed block are fixed to each other.
[0012] By adopting the above technical solution, when the sliding rod is separated from the first inclined surface, the reset block slides in the direction away from the blocking groove under the action of the reset spring, and then the fixed block slides in the direction away from the blocking groove under the action of the reset block, so that the fixed block is separated from the blocking groove, and then the fixed block is reset, thereby reducing the difficulty of resetting the fixed block for the staff, thereby reducing the difficulty of the staff's work.
[0013] Furthermore, a limiting rod is fixedly arranged on the inner bottom wall of the slide groove, a limiting groove is provided on the bottom surface of the slide rod, the limiting rod and the limiting groove match each other, and the diameter of the limiting rod gradually increases from top to bottom.
[0014] By adopting the above technical solution, when the staff slides the slide bar downward, the limit rod and the limit groove gradually approach each other. Then, when one end of the fixed block slides into the blocking groove, the limit rod is completely in the limit groove. At this time, since the diameter of the limit rod gradually increases from top to bottom, the limit rod limits the slide bar, thereby reducing the probability of the slide bar sliding upward due to external force, thereby improving the stability of the device.
[0015] Furthermore, a plurality of the fixing blocks are provided with chamfers at one end close to the blocking groove.
[0016] By adopting the above technical solution, the chamfer reduces the difficulty of sliding one end of the fixed block into the blocking groove, thereby reducing the work difficulty of the staff.
[0017] Furthermore, the limiting rod is made of rubber material.
[0018] By adopting the above technical solution, the rubber has good elasticity, and the limit rod made of rubber material increases the maximum static friction upper limit between the limit rod and the limit groove, thereby further reducing the probability of the sliding rod sliding upward due to external force, thereby improving the stability of the device.
[0019] In summary, the utility model has the following beneficial effects:
[0020] 1. In the present application, when the valve body is in use, the rotary plate rotates under the action of the airflow, and then the rotary handle rotates under the action of the rotary plate, and then the rotary plate rotates under the action of the rotary handle, and then the airflow passes through the connecting piece, so that the valve body is opened. Subsequently, when the airflow stops, the rotary plate is reset under the action of the torsion spring, and then the rotary handle is reset under the action of the rotary plate, and then the rotary plate is reset under the action of the rotary handle, and then the valve body is closed. In this process, the valve body can be automatically started and stopped without the need for the staff to manually open or close, thereby reducing the difficulty of the staff's work and improving the staff's work efficiency;
[0021] 2. In this application, when the staff needs to manually open or close the valve body, the staff needs to turn the rotating handle, so that the rotary plate rotates under the action of the rotating handle. Then, the staff needs to slide the fixed block, so that one end of the fixed block slides into the blocking groove, so that the fixed block fixes the rotating handle, and the rotating handle cannot be rotated, thereby reducing the probability of the valve body automatically starting and stopping when the staff manually opens or closes the valve body, thereby improving the stability of the device;
[0022] 3. In the present application, when the staff needs to slide the fixed block so that one end of the fixed block slides into the blocking groove, the staff needs to slide the sliding rod, so that the sliding rod gradually approaches and finally presses against the first inclined surface, so that the fixed block slides toward the blocking groove under the action of the sliding rod, and then one end of the fixed block slides into the blocking groove, thereby reducing the difficulty of sliding the fixed block for the staff, thereby reducing the difficulty of the staff's work. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;
[0024] Figure 2 It is a schematic diagram of the cross-sectional structure of the valve body in the embodiment of the utility model;
[0025] Figure 3 It is a schematic cross-sectional structure diagram of a connecting member and a rotating plate in an embodiment of the utility model;
[0026] Figure 4 This utility model embodiment Figure 3 Schematic diagram of the cross-sectional structure of A.
[0027] In the figure: 1. valve body; 11. first through pipe; 12. connecting piece; 13. second through pipe; 2. through hole; 21. rotating groove; 22. rotating groove; 23. blocking groove; 24. fixed groove; 25. reset groove; 26. slide groove; 27. limit groove; 3. rotating plate; 31. rotating handle; 32. rotating plate; 33. torsion spring; 4. fixed block; 5. reset block; 51. reset spring; 6. slide rod; 61. first inclined surface; 7. limit rod; 8. chamfer. DETAILED DESCRIPTION
[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.
[0029] like Figure 1-4As shown, the embodiment of the present application discloses a sealed rotary plate valve for a single crystal furnace, comprising a valve body 1, a rotary plate 3, a rotating handle 31, a rotating plate 32, a torsion spring 33, a fixed block 4, a reset block 5, a reset spring 51, a sliding rod 6 and a limit rod 7. The valve body 1 comprises a first through pipe 11, a connecting member 12 and a second through pipe 13. The first through pipe 11 is a circular tubular structure, and its axis is horizontal. The connecting member 12 is fixedly arranged on the side wall of the first through pipe 11, and a through hole 2 is provided through the side wall of the connecting member 12. A rotating groove 21 is provided on the inner top wall of the through hole 2, and a rotating groove 22 is provided on the inner wall of the rotating groove 21. The second through pipe 13 is a circular tubular structure, and its axis coincides with the axis of the first through pipe 11. The second through pipe 13 is fixedly arranged on the side wall of the connecting member 12 away from the first through pipe 11, and the first through pipe 11, the through hole 2 and the second through pipe 13 are directly opposite. The rotary plate 3 is a circular plate-shaped structure, and the rotary plate 3 is rotatably arranged in the through hole 2. The rotating handle 31 is a round rod-shaped structure with a vertical axis. The rotating handle 31 is rotatably disposed in the rotating groove 21, and the rotating handle 31 and the rotating plate 3 are fixed to each other. The rotating plate 32 is rotatably disposed in the rotating groove 22, and its axis coincides with the axis of the rotating handle 31, and the rotating plate 32 and the rotating handle 31 are fixed to each other. The torsion spring 33 is sleeved on the outer wall of the rotating handle 31, and the upper end of the torsion spring 33 is fixed to the bottom surface of the rotating plate 32, and the bottom surface of the torsion spring 33 is fixed to the inner bottom wall of the rotating groove 22.
[0030] When the valve body 1 is in use, the rotary plate 3 rotates under the action of the airflow, and then the rotating handle 31 rotates under the action of the rotary plate 3, so that the rotating plate 32 rotates under the action of the rotating handle 31, and then the airflow passes through the connecting piece 12, so that the valve body 1 is opened. Subsequently, when the airflow stops, the rotating plate 32 is reset under the action of the torsion spring 33, and then the rotating handle 31 is reset under the action of the rotating plate 32, so that the rotary plate 3 is reset under the action of the rotating handle 31, and then the valve body 1 is closed. In this process, the valve body 1 can be automatically started and stopped without the need for the staff to manually open or close, thereby reducing the difficulty of the staff's work and improving the staff's work efficiency.
[0031] A plurality of blocking grooves 23 are formed in a circumferential array on the inner wall of the rotating groove 21, and a plurality of fixing grooves 24 are formed in a circumferential array on the side wall of the rotating handle 31, which are directly opposite to the plurality of blocking grooves 23. The fixing block 4 is a rectangular block structure, and a plurality of fixing blocks 4 are provided and slidably disposed in the plurality of fixing grooves 24, and the plurality of fixing blocks 4 are all slidably connected to the plurality of blocking grooves 23.
[0032] When the staff needs to manually open or close the valve body 1, the staff needs to rotate the rotating handle 31, so that the rotary plate 3 rotates under the action of the rotating handle 31. Then, the staff needs to slide the fixing block 4, so that one end of the fixing block 4 slides into the blocking groove 23, so that the fixing block 4 fixes the rotating handle 31, so that the rotating handle 31 cannot rotate, thereby reducing the probability of the valve body 1 automatically starting and stopping when the staff manually opens or closes the valve body 1, thereby improving the stability of the device.
[0033] A sliding groove 26 is commonly formed on the inner walls of the plurality of fixed grooves 24 . The sliding rod 6 is a rectangular rod-shaped structure. The sliding rod 6 is slidably arranged in the sliding groove 26 . A first inclined surface 61 is formed on the edges where the upper surfaces of the plurality of fixed blocks 4 intersect with the side walls away from the blocking groove 23 .
[0034] When the staff needs to slide the fixed block 4 so that one end of the fixed block 4 slides into the blocking groove 23, the staff needs to slide the sliding rod 6, so that the sliding rod 6 gradually approaches and finally presses against the first inclined surface 61, so that the fixed block 4 slides in the direction close to the blocking groove 23 under the action of the sliding rod 6, and then one end of the fixed block 4 slides into the blocking groove 23, thereby reducing the difficulty of sliding the fixed block 4 for the staff, thereby reducing the difficulty of the staff's work.
[0035] A reset groove 25 is provided on the inner bottom wall of the fixed groove 24. The reset block 5 is a rectangular block structure. The reset block 5 is slidably arranged in the reset groove 25, and the reset block 5 is fixed to the fixed block 4. One end of the reset spring 51 is fixedly arranged on the side wall of the reset block 5, and the other end of the reset spring 51 is fixedly arranged on the inner wall of the reset groove 25.
[0036] When the slide rod 6 is separated from the first inclined surface 61, the reset block 5 slides in the direction away from the blocking groove 23 under the action of the reset spring 51, thereby causing the fixed block 4 to slide in the direction away from the blocking groove 23 under the action of the reset block 5, thereby separating the fixed block 4 from the blocking groove 23, thereby resetting the fixed block 4, thereby reducing the difficulty for the staff to reset the fixed block 4, thereby reducing the difficulty of the staff's work.
[0037] A limiting groove 27 is provided on the bottom surface of the slide rod 6. The limiting rod 7 is fixedly arranged on the inner bottom wall of the slide groove 26. The limiting rod 7 and the limiting groove 27 match each other, and the diameter of the limiting rod 7 gradually increases from top to bottom.
[0038] When the staff slides the slide bar 6 downward, the limit rod 7 gradually approaches the limit groove 27. Then, when one end of the fixed block 4 slides into the blocking groove 23, the limit rod 7 is completely in the limit groove 27. At this time, since the diameter of the limit rod 7 gradually increases from top to bottom, the limit rod 7 limits the slide bar 6, thereby reducing the probability of the slide bar 6 sliding upward due to external force, thereby improving the stability of the device.
[0039] In order to reduce the difficulty of the work of the staff, a plurality of fixed blocks 4 are provided with chamfers 8 at one end close to the blocking groove 23. The chamfers 8 reduce the difficulty of sliding one end of the fixed block 4 into the blocking groove 23, thereby reducing the difficulty of the work of the staff.
[0040] In order to improve the stability of the device, the limit rod 7 is made of rubber material. Rubber has good elasticity. The limit rod 7 made of rubber material increases the upper limit of the maximum static friction between the limit rod 7 and the limit groove 27, thereby further reducing the probability of the slide bar 6 sliding upward under external force, thereby improving the stability of the device.
[0041] The use principle of a sealed rotary plate valve for a single crystal furnace in this embodiment is as follows: when the valve body 1 is in use, the rotary plate 3 rotates under the action of the airflow, and then the rotating handle 31 rotates under the action of the rotary plate 3, so that the rotating plate 32 rotates under the action of the rotating handle 31, and then the airflow passes through the connecting piece 12, so that the valve body 1 is opened. Subsequently, when the airflow stops, the rotating plate 32 is reset under the action of the torsion spring 33, and then the rotating handle 31 is reset under the action of the rotating plate 32, so that the rotary plate 3 is reset under the action of the rotating handle 31, and then the valve body 1 is closed. In this process, the valve body 1 can be automatically started and stopped without the need for the staff to manually open or close, thereby reducing the difficulty of the staff's work and improving the staff's work efficiency.
[0042] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.
Claims
1. A sealed rotary plate valve for a single crystal furnace, comprising a valve body (1), characterized in that: The valve body (1) comprises a first through-tube (11), a connecting piece (12) fixedly arranged on the side wall of the first through-tube (11), and a second through-tube (13) fixedly arranged on the side wall of the connecting piece (12) away from the first through-tube (11); a through hole (2) is provided through the side wall of the connecting piece (12); the first through-tube (11), the through hole (2) and the second through-tube (13) are directly opposite; a rotating plate (3) is rotatably arranged in the through-hole (2); a rotating groove (21) is provided on the inner top wall of the through-hole (2); the rotating groove (21) A rotating handle (31) is rotatably arranged inside, and the rotating handle (31) and the rotating plate (3) are fixed to each other. A rotating groove (22) is opened on the inner wall of the rotating groove (21), and a rotating plate (32) is rotatably arranged inside the rotating groove (22), and the rotating plate (32) and the rotating handle (31) are fixed to each other. A torsion spring (33) is sleeved on the outer wall of the rotating handle (31), and the upper end of the torsion spring (33) is fixed to the bottom surface of the rotating plate (32), and the bottom surface of the torsion spring (33) is fixed to the inner bottom wall of the rotating groove (22).
2. The sealed rotary plate valve for a single crystal furnace according to claim 1, characterized in that: A plurality of blocking grooves (23) are provided in a circular array on the inner wall of the rotating groove (21); a plurality of fixing grooves (24) facing the plurality of blocking grooves (23) are provided in a circular array on the side wall of the rotating handle (31); a fixing block (4) is slidably arranged in each of the plurality of fixing grooves (24); and the plurality of fixing blocks (4) are slidably connected to the plurality of blocking grooves (23).
3. The sealed rotary plate valve for a single crystal furnace according to claim 2, characterized in that: A sliding groove (26) is provided on the inner wall of the plurality of fixed grooves (24), a sliding rod (6) is slidably arranged in the sliding groove (26), and a first inclined surface (61) is provided on the edges where the upper surfaces of the plurality of fixed blocks (4) intersect with the side walls away from the blocking groove (23).
4. The sealed rotary plate valve for a single crystal furnace according to claim 2, characterized in that: A reset groove (25) is provided on the inner bottom wall of the fixed groove (24), a reset block (5) is slidably arranged in the reset groove (25), a reset spring (51) is fixedly arranged on the side wall of the reset block (5), the other end of the reset spring (51) is fixedly arranged on the inner wall of the reset groove (25), and the reset block (5) and the fixed block (4) are fixed to each other.
5. The sealed rotary plate valve for a single crystal furnace according to claim 3 is characterized in that: A limiting rod (7) is fixedly arranged on the inner bottom wall of the sliding groove (26), a limiting groove (27) is provided on the bottom surface of the sliding rod (6), the limiting rod (7) and the limiting groove (27) match each other, and the diameter of the limiting rod (7) gradually increases from top to bottom.
6. The sealed rotary plate valve for a single crystal furnace according to claim 2, characterized in that: A plurality of the fixing blocks (4) are each provided with a chamfer (8) at one end close to the blocking groove (23).
7. The sealed rotary plate valve for a single crystal furnace according to claim 5, characterized in that: The limiting rod (7) is a limiting rod (7) made of rubber material.