Sintering furnace for producing silicon carbide products

Abstract

The utility model relates to the technical field of sintering furnaces, and provides a sintering furnace for producing silicon carbide products, which comprises a furnace body and a pair of telescopic hydraulic cylinders, the telescopic hydraulic cylinders are fixed at the top of the furnace body, a heating cavity is arranged in the furnace body, an induction coil is mounted in the heating cavity, and a cooling component is arranged at the top of the furnace body. The lifting loading and unloading assembly is arranged in the furnace body and comprises a sealing layer, the sealing layer is installed at the bottom of the furnace body, and a second hydraulic cylinder is installed at the bottom of the sealing layer. By means of the technical scheme, the problems that in the related technology, temperature loss exists every time when a switch enters and exits a product, the temperature rising speed is low, heat efficiency is not high, the internal temperature can be lost every time materials are cooled, then the materials need to be heated again for a long time to recover to the normal temperature state, equipment energy consumption is large, and the cost is low are solved. And the production cost of a factory is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of sintering furnaces, and specifically to a sintering furnace used for producing silicon carbide products. Background Art

[0002] Sintering furnace refers to a special equipment that makes the powder compact obtain the required physical, mechanical properties and microstructure through sintering. The sintering furnace is used to dry the slurry on the silicon wafer, remove the organic components in the slurry, and complete the sintering of the aluminum back field and the gate line.

[0003] A vacuum sintering furnace is a furnace that performs protective sintering on heated materials in a vacuum environment. There are many heating methods, such as resistance heating, induction heating and microwave heating. After the material is sintered in the vacuum sintering furnace, inert protective gas needs to be filled into the furnace body to cool the material.

[0004] However, the previous sintering furnaces had the following problems: each time the furnace was turned on and off, there was temperature loss when the product was put in and out, resulting in slow heating speed and low thermal efficiency. In addition, each time the material was cooled, the internal temperature would also be lost, and it would take a long time to heat it again to return to the normal temperature state, resulting in high energy consumption of the equipment and increased factory production costs.

[0005] Therefore, improvements are made to address the above problems. Utility Model Content

[0006] The utility model proposes a sintering furnace for the production of silicon carbide products, which solves the problem in the related art that each time the product is switched in and out, there is temperature loss, resulting in slow heating speed and low thermal efficiency, and each time the material is cooled, the internal temperature is lost, and it is necessary to reheat for a long time to restore to the normal temperature state, resulting in high energy consumption of the equipment and increased production costs of the factory.

[0007] The technical solution of the utility model is as follows:

[0008] A furnace body and a pair of telescopic hydraulic cylinders, wherein the telescopic hydraulic cylinders are fixed to the top of the furnace body;

[0009] A heating chamber and a plurality of induction coils, wherein the heating chamber is disposed in the furnace body and the induction coils are installed in the heating chamber;

[0010] A cooling assembly, wherein the cooling assembly is arranged on the top of the furnace body;

[0011] A lifting and loading and unloading assembly is arranged inside the furnace body, and the lifting and loading and unloading assembly comprises a sealing layer, and the sealing layer is installed at the bottom of the furnace body, and a second hydraulic cylinder is installed at the bottom of the sealing layer.

[0012] As a further technical solution, a heat insulation platform is installed at the output end of the second hydraulic cylinder, a limited position frame is provided on the surface of the heat insulation platform, a sealing ring is provided on the inner surface of the furnace body, and an inner sealing layer is provided at the bottom of the furnace body.

[0013] As a further technical solution, the cooling assembly includes a top cover, which is fixed to the output end of the telescopic hydraulic cylinder. An air cavity is opened in the top cover, and a plurality of cooling air holes are opened on the inner surface of the top cover. A vacuum pump is fixedly connected to the outside of the top cover, and an air pipe is connected to the output end of the vacuum pump and the air cavity.

[0014] As a further technical solution, a refrigerant device is installed on the top of the top cover, the output end of the refrigerant device is connected to the air cavity, an air valve is arranged on the top of the top cover, a docking groove is opened at the bottom of the top cover, a docking layer is arranged on the top of the furnace body, and the docking groove is sealed and fitted with the docking layer.

[0015] As a further technical solution, a plurality of support frames are arranged on the top of the furnace body.

[0016] As a further technical solution, a heat insulating filler is arranged in the heating chamber.

[0017] As a further technical solution, the inner wall of the furnace body is provided with a ceramic fiber board layer and a corundum casting material layer.

[0018] As a further technical solution, an air return hole is opened at the bottom of the furnace body, and a sealing plug is arranged at the bottom of the thermal insulation platform, and the sealing plug is located in the air return hole.

[0019] The working principle and beneficial effects of the utility model are:

[0020] 1. The utility model is provided with a lifting and loading and unloading assembly, and a heat-insulating platform connected by a second hydraulic cylinder is provided inside the furnace body. The heat-insulating platform is used to place the material to be processed. A sealing ring is provided on the inner wall of the furnace body. The heat-insulating platform can be lifted up and fit with the sealing ring to seal the inside of the furnace body, which will not be affected by the cooling treatment, can reduce temperature loss, shorten the heating time of the next treatment, save energy consumption and save costs.

[0021] 2. The utility model is provided with a cooling component, which is located outside the furnace body. The telescopic hydraulic cylinder on the top is connected with a top cover. The interior of the top cover can be evenly cooled by a refrigerant device, an air cavity and air holes, so that the material can be quickly cooled without affecting the temperature inside the furnace body, and the cooling efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0023] Figure 1 It is a schematic diagram of the structure of the utility model;

[0024] Figure 2 This is the axonometric drawing of the utility model;

[0025] Figure 3 This is a cross-sectional view of the utility model;

[0026] Figure 4 For the utility model Figure 3 A partial enlarged view of part A;

[0027] In the figure: 1. furnace body; 2. telescopic hydraulic cylinder; 3. heating chamber; 4. induction coil; 5. lifting and loading and unloading assembly; 5-1. sealing layer; 5-2. second hydraulic cylinder; 5-3. thermal insulation platform; 5-4. limit frame; 5-5. sealing ring; 5-6. inner sealing layer; 6. cooling assembly; 6-1. top cover; 6-2. air cavity; 6-3. cooling air hole; 6-4. vacuum pump; 6-5. air pipe; 6-6. refrigerant equipment; 6-7. air valve; 6-8. docking groove; 6-9. docking layer; 7. support frame; 8. thermal insulation filler; 9. ceramic fiber board layer; 10. corundum casting material layer; 11. return air hole; 12. sealing plug. DETAILED DESCRIPTION

[0028] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] like Figure 1~Figure 4 As shown, this embodiment provides a sintering furnace for producing silicon carbide products, comprising

[0030] A furnace body 1 and a pair of telescopic hydraulic cylinders 2, wherein the telescopic hydraulic cylinders 2 are fixed on the top of the furnace body 1;

[0031] A heating chamber 3 and a plurality of induction coils 4, wherein the heating chamber 3 is provided in the furnace body 1 and the induction coils 4 are installed in the heating chamber 3;

[0032] A cooling assembly 6, wherein the cooling assembly 6 is arranged on the top of the furnace body 1;

[0033] The lifting and loading and unloading component 5 is arranged inside the furnace body 1. The lifting and loading and unloading component 5 includes a sealing layer 5-1, which is installed at the bottom of the furnace body 1. A second hydraulic cylinder 5-2 is installed at the bottom of the sealing layer 5-1, and an insulating platform 5-3 is installed at the output end of the second hydraulic cylinder 5-2. A limited position frame 5-4 is arranged on the surface of the insulating platform 5-3, a sealing ring 5-5 is arranged on the inner surface of the furnace body 1, and an inner sealing layer 5-6 is arranged at the inner bottom of the furnace body 1.

[0034] In this embodiment, in order to achieve the effect of reducing heat loss during the loading and unloading process of materials, a lifting and unloading assembly is designed, a sealing plate is installed at the bottom of the furnace body 1, and a second hydraulic cylinder 5-2 is installed on the basis of the sealing plate. The output end of the second hydraulic cylinder 5-2 is located inside the furnace body 1, and an insulating platform 5-3 with a certain gap on the inner wall of the furnace body 1 is provided at the output end of the second hydraulic cylinder 5-2. The insulating platform 5-3 is used to place materials, and a limit frame 5-4 is provided. The limit frame 5-4 is used to limit the placement position of the material. When processing materials, the insulating platform 5-3 can be lifted to the top by the second hydraulic cylinder 5-2. A sealing ring 5-5 is provided at the top of the inner wall of the furnace body 1, which can fit with the raised insulating platform 5-3 to seal the inside of the furnace body 1, thereby reducing temperature loss.

[0035] Furthermore, the cooling assembly 6 includes a top cover 6-1, which is fixed at the output end of the telescopic hydraulic cylinder 2. An air cavity 6-2 is opened in the top cover 6-1, and a plurality of cooling air holes 6-3 are opened on the inner surface of the top cover 6-1. A vacuum pump 6-4 is fixedly connected to the outside of the top cover 6-1, and an air pipe 6-5 is connected to the output end of the vacuum pump 6-4 and the air cavity 6-2. A refrigerant device 6-6 is installed on the top of the top cover 6-1, and the output end of the refrigerant device 6-6 is connected to the air cavity 6-2. An air valve 6-7 is arranged on the top of the top cover 6-1, a docking groove 6-8 is opened at the bottom of the top cover 6-1, and a docking layer 6-9 is arranged on the top of the furnace body 1, and the docking groove 6-8 and the docking layer 6-9 are sealed and fitted.

[0036] In this embodiment, in order to achieve rapid cooling of the processed materials, a cooling component 6 is designed. A top cover 6-1 is connected to the top of the furnace body 1 through a telescopic hydraulic cylinder 2. The top cover 6-1 can cover the top of the furnace body 1. An air cavity 6-2 and air holes are opened inside the top cover 6-1. A refrigerant device 6-6 is installed on the outside. The refrigerant device 6-6 can inject refrigerant gas into the air cavity 6-2 for rapid cooling, which will not affect the temperature inside the furnace body 1, and the interior can be vacuumed through a vacuum pump 6-4 during use.

[0037] Furthermore, a plurality of support frames 7 are arranged on the top of the furnace body 1 .

[0038] In this embodiment, a plurality of support frames 7 are provided, which are firmly supported on the ground.

[0039] Furthermore, a heat insulating filler 8 is provided in the heating chamber 3 .

[0040] In this embodiment, the heat-insulating filler 8 is used to reduce the impact on the outer wall of the furnace body 1 during heating, thereby avoiding excessively high temperature of the outer wall and wasting heat energy.

[0041] Furthermore, a ceramic fiber board layer 9 and a corundum casting material layer 10 are provided on the inner wall of the furnace body 1 .

[0042] In this embodiment, the ceramic fiber board layer 9 and the corundum casting material layer 10 are used to improve the heating and constant temperature heat conduction effects, thereby saving energy consumption.

[0043] Furthermore, an air return hole 11 is opened at the bottom of the furnace body 1 , and a sealing plug 12 is provided at the bottom of the insulation platform 5 - 3 , and the sealing plug 12 is located in the air return hole 11 .

[0044] In this embodiment, the air return holes 11 are used to reduce the hot air extruded outward when the heat insulation platform 5-3 rises, so that the internal temperature is kept at a certain balance, thereby reducing the energy consumption for the next heating.

[0045] When it is needed, start the telescopic hydraulic cylinder 2 to lift the top cover 6-1 upwards, then start the second hydraulic cylinder 5-2 to lift the top cover 6-1, put the material into the limit frame 5-4 on the insulation platform 5-3, then the insulation platform 5-3 falls, close the top cover 6-1 and start the induction coil 4 for heating, the temperature is transferred to the furnace body 1 through the ceramic fiber board and the corundum casting material layer 10, after the treatment is completed, start the second hydraulic cylinder 5-2, lift the insulation platform 5-3 to the top and fit it with the sealing ring 5-5, then start the refrigerant equipment 6-6 for cooling treatment, the refrigerant enters through the air cavity 6-2 and the air holes, and evenly covers the inside, after the treatment is completed, open the top cover 6-1, take out the material, replace it with a new material and repeat the action.

[0046] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A sintering furnace for the production of silicon carbide products, characterized in that: include A furnace body (1) and a pair of telescopic hydraulic cylinders (2), wherein the telescopic hydraulic cylinders (2) are fixed on the top of the furnace body (1); A heating chamber (3) and a plurality of induction coils (4), wherein the heating chamber (3) is disposed in the furnace body (1), and the induction coils (4) are installed in the heating chamber (3); A cooling component (6), wherein the cooling component (6) is arranged on the top of the furnace body (1); A lifting and loading and unloading assembly (5), wherein the lifting and loading and unloading assembly (5) is arranged inside the furnace body (1), and the lifting and loading and unloading assembly (5) comprises a sealing layer (5-1), wherein the sealing layer (5-1) is installed at the bottom of the furnace body (1), and a second hydraulic cylinder (5-2) is installed at the bottom of the sealing layer (5-1).

2. A sintering furnace for producing silicon carbide products according to claim 1, characterized in that: The output end of the second hydraulic cylinder (5-2) is provided with a heat insulating platform (5-3), a limit position frame (5-4) is provided on the surface of the heat insulating platform (5-3), a sealing ring (5-5) is provided on the inner surface of the furnace body (1), and an inner sealing layer (5-6) is provided on the inner bottom of the furnace body (1).

3. A sintering furnace for producing silicon carbide products according to claim 1, characterized in that: The cooling assembly (6) comprises a top cover (6-1), the top cover (6-1) is fixed to the output end of the telescopic hydraulic cylinder (2), an air cavity (6-2) is provided in the top cover (6-1), a plurality of cooling air holes (6-3) are provided on the inner surface of the top cover (6-1), a vacuum pump (6-4) is fixedly connected to the outside of the top cover (6-1), and an air pipe (6-5) is connected between the output end of the vacuum pump (6-4) and the air cavity (6-2).

4. A sintering furnace for producing silicon carbide products according to claim 3, characterized in that: A refrigerant device (6-6) is installed on the top of the top cover (6-1), the output end of the refrigerant device (6-6) is connected to the air cavity (6-2), an air valve (6-7) is arranged on the top of the top cover (6-1), a docking groove (6-8) is opened on the bottom of the top cover (6-1), a docking layer (6-9) is arranged on the top of the furnace body (1), and the docking groove (6-8) and the docking layer (6-9) are sealed and fitted.

5. The sintering furnace for producing silicon carbide products according to claim 1, characterized in that: A plurality of support frames (7) are arranged on the top of the furnace body (1).

6. A sintering furnace for producing silicon carbide products according to claim 1, characterized in that: A heat-insulating filler (8) is arranged in the heating chamber (3).

7. A sintering furnace for producing silicon carbide products according to claim 1, characterized in that: The inner wall of the furnace body (1) is provided with a ceramic fiber board layer (9) and a corundum casting material layer (10).

8. A sintering furnace for producing silicon carbide products according to claim 2, characterized in that: An air return hole (11) is provided at the bottom of the furnace body (1), and a sealing plug (12) is provided at the bottom of the heat insulation platform (5-3), wherein the sealing plug (12) is located in the air return hole (11).

Images