Marine pressure sensor based on diffused silicon piezoresistive effect

Abstract

The utility model relates to the technical field of marine pressure sensors, in particular to a marine pressure sensor based on diffused silicon piezoresistive effect, which comprises a metal shell cavity and a main circuit board, a substrate cavity is arranged at the lower end of the metal shell cavity, a base cavity is arranged in the substrate cavity, the main circuit board is connected onto the base cavity, and the main circuit board is connected onto the metal shell cavity. An output pin is connected to one side of the main circuit board, an output wire is connected to the output pin, a pressing ring is connected to the position, close to the base cavity, of the lower end of the interior of the metal shell cavity, a diffusion silicon core is arranged on the main circuit board, and a barrel threaded fastener is connected to the upper portion of the interior of the metal shell cavity. An outer sealing ring is arranged outside the base cavity, a diffusion silicon core body sealing ring is arranged at the bottom connecting position of the base cavity and the base cavity, a connecting thread is arranged at the connecting position of the metal shell cavity and the base cavity, and a fastening thread is arranged at the connecting position of the metal shell cavity and the barrel threaded fastener.

Description

Technical Field

[0001] The utility model relates to the technical field of marine pressure sensors, in particular to a marine pressure sensor based on diffused silicon piezoresistive effect. Background Art

[0002] The existing technology uses an isolation diaphragm, a metal shell and a ceramic substrate by filling the cavity in the middle of the shell with silicone oil. Pads and wires are made on the ceramic substrate, and the wires are bonded to the ceramic substrate. The wires on the ceramic substrate are connected to the pins of the base to avoid wire breakage. The silicone oil sealed inside the cavity transmits external force to the diffused silicon pressure chip, thereby measuring pressure and protecting the chip. This solution solves packaging defects such as bubbles and chip displacement to a certain extent.

[0003] Although this method solves the problem of pressure measurement to a certain extent, its structure is not suitable for ship use. In the shaking environment of the ship, it is easy to cause seal failure and structural damage. The metal shell is easily corroded and has a short service life.

[0004] Therefore, it is necessary to design a marine pressure sensor based on diffused silicon piezoresistive effect to solve the problems in the above-mentioned background technology. Utility Model Content

[0005] The utility model aims to solve the problems in the prior art and proposes a marine pressure sensor based on diffused silicon piezoresistive effect.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A marine pressure sensor based on diffused silicon piezoresistive effect comprises a metal shell cavity and a main circuit board, wherein a base cavity is provided at the lower end of the metal shell cavity, a pedestal cavity is provided inside the base cavity, a main circuit board is connected to the pedestal cavity, an output pin is connected to one side of the main circuit board, an output wire is connected to the output pin, a pressure ring is connected to the lower end of the metal shell cavity near the base cavity, a diffused silicon core is provided on the main circuit board, a barrel threaded fastener is connected to the upper part of the metal shell cavity, an outer sealing ring is provided outside the base cavity, a diffused silicon core sealing ring is provided at the connection between the base cavity and the bottom of the base cavity, a connecting thread is provided at the connection between the metal shell cavity and the base cavity, and a fastening thread is provided at the connection between the metal shell cavity and the barrel threaded fastener.

[0008] As a preferred solution of the utility model, the outer sealing ring and the diffused silicon core sealing ring are rubber rings.

[0009] As a preferred solution of the utility model, the base cavity, the pedestal cavity, the metal shell cavity, the pressure ring and the cylinder threaded fastener are made of stainless steel, and a through hole communicating with the metal shell cavity is provided in the pressure ring.

[0010] As a preferred solution of the utility model, a water inlet groove is provided in the middle of the base cavity, and the water inlet groove in the base cavity is communicated with the diffusion silicon core.

[0011] As a preferred solution of the utility model, the cylindrical threaded fastener is provided with external threads on the outside.

[0012] As a preferred solution of the utility model, the inner cavity of the metal shell cavity is provided with a signal output channel.

[0013] To sum up, the technical effects and advantages of the utility model are as follows: the marine pressure sensor based on the diffused silicon piezoresistive effect is optimized for the use of sealing rings and the selection of pressure rings in the airtight packaging of the device, the design of the columnar stainless steel shell and the cavity structure, the design of the stainless steel base and the pedestal, the design of the sealing of the barrel threaded fasteners, and the overall thread selection and design, which enhances the impact resistance, improves the chip protection reliability, and extends the service life of the equipment. The columnar structure is better suitable for ship use and can cope with the harsh marine environment. The strength is improved. Multiple rubber rings are used for sealing inside the cavity to ensure the sealing of the sensor. The water flow is in direct contact with the diffused silicon core to ensure the accuracy of the data. A stainless steel output channel is provided to protect the output wire, and a barrel threaded fastener is used to protect the output end. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is the overall structure diagram of the utility model;

[0015] Figure 2 This is the internal structure diagram of the utility model.

[0016] In the figure: 1. base cavity; 2. outer sealing ring; 3. diffused silicon core sealing ring; 4. base cavity; 5. main circuit board; 6. output pin; 7. connecting thread; 8. output wire; 9. metal shell cavity; 10. fastening thread; 11. cylinder thread fastener; 12. pressure ring; 13. diffused silicon core. DETAILED DESCRIPTION

[0017] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0018] Reference Figure 1 and Figure 2A marine pressure sensor based on diffused silicon piezoresistive effect comprises a metal shell cavity 9 and a main circuit board 5, a base cavity 1 is provided at the lower end of the metal shell cavity 9, a base cavity 4 is provided inside the base cavity 1, a main circuit board 5 is connected to the base cavity 4, an output pin 6 is connected to one side of the main circuit board 5, an output wire 8 is connected to the output pin 6, a pressure ring 12 is connected to the lower end of the metal shell cavity 9 near the base cavity 1, a diffused silicon core 13 is provided on the main circuit board 5, a barrel threaded fastener 11 is connected to the upper part of the metal shell cavity 9, an outer sealing ring 2 is provided outside the base cavity 1, a diffused silicon core sealing ring 3 is provided at the connection between the base cavity 1 and the bottom of the base cavity 4, a connecting thread 7 is provided at the connection between the metal shell cavity 9 and the base cavity 1, and a fastening thread 10 is provided at the connection between the metal shell cavity 9 and the barrel threaded fastener 11.

[0019] Reference Figure 1 and Figure 2 The outer sealing ring 2 and the diffused silicon core sealing ring 3 are rubber rings. The key point of the assembled columnar sensor structure lies in the use of the outer sealing ring 2 and the diffused silicon core sealing ring 3. On the basis of the internal and external threaded connection, the outer sealing ring 2 and the diffused silicon core sealing ring 3 are added for secondary sealing reinforcement, which cleverly enhances the airtightness of the device.

[0020] Reference Figure 1 and Figure 2 The base cavity 1, the base cavity 4, the metal shell cavity 9, the pressure ring 12 and the cylinder threaded fastener 11 are made of stainless steel. A through hole connected to the metal shell cavity 9 is provided in the pressure ring 12. Type 304 stainless steel has strong corrosion resistance and low price. Considering factors such as the airtightness of the connection between the base cavity 4 and the metal shell cavity 9, the base cavity 4 and the metal shell cavity 9 use the same material, which will have better airtightness and reliability. The cylinder threaded fastener 11 is provided with an external thread on the outside. A plurality of cavities are provided in the assembled columnar sensor structure. The cavity components are connected to each other through various connecting threads. The reasonable design of each internal thread and external thread is an important factor in ensuring the stability of the device. The tight connection of the internal and external threads can not only ensure the impact resistance of the device, but also ensure the airtightness of the device.

[0021] Reference Figure 1 and Figure 2A water inlet groove is provided in the middle of the base cavity 1, and the water inlet groove in the base cavity 1 is communicated with the diffused silicon core 13. The internal cavity of the metal shell cavity 9 is provided with a signal output channel. When the diffused silicon core 13 is subjected to pressure, it will deform. The deformation transmits data to the chip through the wire, which is reflected as a resistance change and output as an electrical signal after passing through the main circuit board 5. In this process, due to the good physical properties of the diffused silicon core 13, the pressure can be transmitted to the internal chip without loss. The internal cavity structure of the assembled columnar sensor is specially designed for ship use. Considering the wave impact encountered by ships during use, the base cavity 4 is provided with a stainless steel pressure ring 12 to fix the core to avoid damage to the internal core due to displacement and collision caused by impact.

[0022] Working principle: Marine pressure sensor based on diffused silicon piezoresistive effect, a cavity is provided inside the metal shell cavity 9, a base cavity 1 is placed at the bottom of the pressure sensor structure for water intake and data collection, a water inlet groove is provided in the base cavity 1, the water inlet groove is communicated with the diffused silicon core 13, a base cavity 4 is connected to the bottom of the metal shell cavity 9, a cavity is provided inside the base cavity 4, and the diffused silicon core 13 is placed, a pressure ring 12 is located above the base cavity 4, and is connected by threads to fix the diffused silicon core 13, an output pin 6 is placed in the metal shell cavity 9, and a barrel threaded fastener 11 is located at the top of the pressure sensor structure, and the sealing ring in the airtight package of the device is used in the same manner as The selection of the pressure ring, the design of the columnar stainless steel shell and the cavity structure, the design of the stainless steel base and the pedestal, the design of the sealing of the cylinder threaded fasteners, and the overall thread selection and design have been optimized to enhance the impact resistance, improve the chip protection reliability, and extend the service life of the equipment. The columnar structure can be better suitable for ship use and cope with the harsh marine environment. The strength is improved. Multiple rubber rings are used for sealing inside the cavity to ensure the sealing of the sensor. The water flow is in direct contact with the diffused silicon core 13 to ensure the accuracy of the data. A stainless steel output channel is provided to protect the output wire 8, and a cylinder threaded fastener 11 is provided to protect the output end.

[0023] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A marine pressure sensor based on diffused silicon piezoresistive effect, comprising a metal housing cavity (9) and a main circuit board (5), characterized in that: The lower end of the metal shell cavity (9) is provided with a base cavity (1), the base cavity (1) is provided with a base cavity (4), the base cavity (4) is connected to a main circuit board (5), one side of the main circuit board (5) is connected to an output pin (6), the output pin (6) is connected to an output wire (8), the lower end of the metal shell cavity (9) near the base cavity (1) is connected to a pressure ring (12), the main circuit board (5) is provided with a diffused silicon core ( 13), the upper part of the interior of the metal shell cavity (9) is connected to a barrel threaded fastener (11), the outside of the base cavity (1) is provided with an external sealing ring (2), the bottom connection of the base cavity (1) and the base cavity (4) is provided with a diffused silicon core sealing ring (3), the connection between the metal shell cavity (9) and the base cavity (1) is provided with a connecting thread (7), and the connection between the metal shell cavity (9) and the barrel threaded fastener (11) is provided with a fastening thread (10).

2. A marine pressure sensor based on diffused silicon piezoresistive effect according to claim 1, characterized in that: The outer sealing ring (2) and the diffused silicon core sealing ring (3) are rubber rings.

3. A marine pressure sensor based on diffused silicon piezoresistive effect according to claim 1, characterized in that: The base cavity (1), the pedestal cavity (4), the metal shell cavity (9), the pressure ring (12) and the cylinder threaded fastener (11) are made of stainless steel, and a through hole communicating with the metal shell cavity (9) is provided in the pressure ring (12).

4. A marine pressure sensor based on diffused silicon piezoresistive effect according to claim 1, characterized in that: A water inlet groove is provided in the middle of the base cavity (1), and the water inlet groove in the base cavity (1) is communicated with the diffusion silicon core (13).

5. A marine pressure sensor based on diffused silicon piezoresistive effect according to claim 1, characterized in that: The cylindrical threaded fastener (11) is provided with external threads on the outside.

6. A marine pressure sensor based on diffused silicon piezoresistive effect according to claim 1, characterized in that: The inner cavity of the metal shell cavity (9) is provided with a signal output channel.

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