Protective overlay measuring device

Abstract

The utility model discloses a protective overlay measuring device, and relates to the technical field of semiconductor manufacturing. The device comprises a measuring table. According to the utility model, after the driving mechanism drives the threaded sleeve to drive the central column to continuously descend and displace, the transverse rod penetrating through the interior of the central column drives the transverse sleeve to displace together with the measuring assembly; when the tip cone rod is driven to descend and move together to be in contact with the limiting assembly, the tip cone rod is pushed by the limiting assembly to slide laterally to be separated from the transverse sleeve so as to release the limitation on the transverse sleeve, so that the measuring assembly can be driven to descend to be close to the upper part of the wafer to be measured and the position of the wafer to be measured is limited. The position of the measuring assembly is limited through the arrangement of the limiting assembly and the cooperation of the tip cone rod, so that the distance between the bottom of the measuring assembly and the upper portion of the to-be-measured wafer can be controlled, and the situation that the bottom of the measuring assembly makes contact with the surface of the wafer, friction damage is caused, the measuring precision is affected, and the quality of the wafer is damaged is prevented.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a protective overlay measuring device. Background Art

[0002] In the semiconductor manufacturing process, wafers are processed by overlay. After processing, the wafers need to be inspected for overlay marks by overlay measurement equipment. The mercury lamp of the overlay measurement equipment passes through the optical path component to form interference fringes and find the surface of the wafer being measured. At the same time, the optical path lens magnifies the object being measured, and the deviation between the two layers of film will be magnified and captured, and finally an image is formed and quantified to obtain the deviation data between the photolithography layers.

[0003] In the prior art, after searching, Chinese Patent No. CN202222362836.9 discloses a protective overlay measuring device, including a carrying plate and an overlay frame, a first mounting plate is arranged on the upper side of the overlay frame, a slide groove is opened on the upper side of the overlay frame, a rotating rod is arranged on the lower side of the first mounting plate, a transmission motor is installed at the position of the upper side of the first mounting plate corresponding to the rotating rod, a laser measuring component is installed on the lower side of the rotating rod, an air duct is arranged on the upper end of the laser measuring component, a first electric push rod is installed on one side of the first mounting plate, and first support plates are arranged at both ends of the upper side of the carrying plate.

[0004] When detecting overlay marks, a focusing detection device is usually used to detect the wafer. In the above scheme, the detection laser head is protected by a laser measuring component and a rubber pad is used to protect it to avoid damage to the material. However, in actual operation, the detection component needs to be close to the top of the wafer for detection. When the measuring component continues to descend without a height limit, it may contact the wafer under test and cause friction with its surface, thereby causing damage to the wafer during measurement and reducing the measurement efficiency and detection quality of the wafer.

[0005] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content

[0006] In view of the problems in the related technology, the utility model proposes a protective overlay measurement device to overcome the above technical problems existing in the existing related technology.

[0007] In order to solve the above technical problems, the utility model is realized by the following technical solutions:

[0008] The utility model discloses a protective overlay measuring device, comprising a measuring platform, a measuring frame fixedly installed on the top of the measuring platform, an external sleeve fixedly installed on the outer surface of the measuring frame, a measuring component inserted in the interior of the external sleeve, a transverse sleeve fixedly installed on the outer surface of the measuring component, a fixing frame fixedly installed on the top of the measuring platform, a driving mechanism arranged on the top of the fixing frame, a threaded sleeve threadedly connected to the outer surface of the driving mechanism, a center column fixedly connected to one end of the threaded sleeve, a cross bar passing through and slidably connected to the interior of the center column, a connecting spring fixedly connected to one end of the cross bar, the other end of the connecting spring extends to the interior of the transverse sleeve and is fixedly connected thereto, a limiting component is arranged on the top of the measuring platform, and a top cone rod fixedly installed on the outer surface of the cross bar.

[0009] Furthermore, the measuring assembly comprises a measuring head, a probe is arranged at the bottom of the measuring head, a side through groove is opened on the outer surface of the external sleeve, and the transverse sleeve is fixed to the outer surface of the measuring head.

[0010] Furthermore, the driving mechanism includes a motor, the output end of the motor is fixedly connected to a main shaft, one end of the main shaft is fixedly mounted with a screw, the other end of the screw extends to the upper surface of the measuring table and is rotatably connected thereto, and the threaded sleeve is threadedly connected to the outside of the screw.

[0011] Furthermore, a limiting sleeve is fixedly connected to the outer surface of the central column, a limiting rod is fixedly installed on the upper surface of the measuring platform, and the limiting sleeve penetrates and is slidably connected to the outside of the limiting rod.

[0012] Furthermore, the limiting assembly includes a limiting vertical rod, the outer surface of the limiting vertical rod is sleeved with a fixing sleeve, and the bottom of the fixing sleeve is fixedly connected to the upper surface of the measuring platform.

[0013] Furthermore, an inner cavity is provided inside the fixed sleeve, a lifting spring is fixedly installed inside the fixed sleeve, and the top end of the lifting spring is fixedly connected to the bottom end of the limit vertical rod;

[0014] The outer surface of the limiting upright pole is provided with a limiting hole, the internal thread of the fixing sleeve is connected with a limiting rod, the limiting rod passes through the fixing sleeve and extends to the inside of the limiting hole, and the number of the limiting holes is several.

[0015] Furthermore, a slide groove is provided on the top of the measuring platform, a loading platform is arranged on the top of the measuring platform, the bottom of the loading platform is slidably connected to the inside of the slide groove, and a loading plate is rotatably mounted on the top of the loading platform.

[0016] Furthermore, a second motor is arranged on the top of the measuring platform, a second rotating shaft is fixedly mounted on the output end of the second motor, an action gear is fixedly mounted on the top of the second rotating shaft, a toothed plate is fixedly mounted on the outer surface of the stage, and the action gear is meshed with the toothed plate.

[0017] The utility model has the following beneficial effects:

[0018] 1. The utility model connects one end of the cross bar with the connecting spring and extends it to the inside of the cross sleeve. When the driving mechanism drives the threaded sleeve to drive the center column to continuously move downward, the cross bar passing through the inside drives the cross sleeve and the measuring component to move together, and a limit assembly is arranged directly below the top cone rod. When the top cone rod is driven to move downward and contacts with the limit assembly, it is pushed to slide sideways and disengage from the cross sleeve to release the restriction on the cross sleeve, thereby driving the measuring component to move down to above the wafer to be measured and limit its position. The position of the measuring component is limited by the setting of the limit assembly and the cooperation of the top cone rod, so as to control the distance between the bottom of the measuring component and the top of the wafer to be measured, thereby preventing the bottom from contacting the surface of the wafer to cause friction damage to it, affecting the measurement accuracy and damaging the quality of the wafer, thereby achieving a self-protection effect on the measuring component and the wafer.

[0019] 2. The utility model elastically connects the limit vertical rod to the inside of the fixed sleeve through the lifting spring, so that the limit vertical rod can be pulled or pushed to drive the lifting spring to stretch or compress, so that the limit vertical rod can move up and down inside the inner cavity to adjust the height of its external extension. Then, when it is necessary to adjust the descent height of the measuring head, by adjusting the limited position of the limit vertical rod, the descent height limited position of the measuring head can be adjusted through the cooperation with the top cone rod, so that it can better adapt to measuring different types of measurement operations.

[0020] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the utility model embodiments, the drawings required for describing the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0023] Figure 2 This is the second schematic diagram of the three-dimensional structure of the utility model;

[0024] Figure 3 This is a schematic diagram of the cross-sectional structure of the fixed sleeve of the utility model;

[0025] Figure 4 For the utility model Figure 3 The enlarged structural diagram at A in the middle;

[0026] Figure 5 This is a schematic diagram of the structure of the measuring platform of the utility model;

[0027] Figure 6 For the utility model Figure 5 The enlarged structural diagram at B in the middle;

[0028] Figure 7 This is a schematic diagram of the limit pole structure of the utility model;

[0029] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0030] 1. Measuring table; 2. Measuring frame; 3. External sleeve; 4. Measuring assembly; 5. Transverse sleeve; 6. Fixed frame; 7. Driving mechanism; 8. Threaded sleeve; 9. Center column; 10. Cross bar; 11. Connecting spring; 12. Limit assembly; 401. Measuring head; 402. Probe; 13. Side through slot; 701. Motor; 702. Main shaft; 703. Screw; 14. Limit sleeve; 15. Limit rod; 1201. Limit vertical rod; 1202. Fixed sleeve; 1203. Inner cavity; 1204. Lifting spring; 1205. Limit hole; 1206. Limit plug rod; 16. Slide; 17. Loading table; 18. Loading tray; 19. Second motor; 20. Second shaft; 21. Action gear; 22. Tooth plate; 23. Top cone rod. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] In the description of the present utility model, it should be understood that the terms "opening", "upper", "lower", "top", "middle", "inside" and the like indicating orientation or positional relationship are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0033] See also Figure 2 , Figure 3 As shown, the utility model is a protective overlay measuring device, comprising a measuring table 1, a measuring frame 2 is fixedly installed on the top of the measuring table 1, an external sleeve 3 is fixedly installed on the outer surface of the measuring frame 2, a measuring component 4 is inserted inside the external sleeve 3, a transverse sleeve 5 is fixedly installed on the outer surface of the measuring component 4, a fixing frame 6 is fixedly installed on the top of the measuring table 1, a driving mechanism 7 is arranged on the top of the fixing frame 6, a threaded sleeve 8 is threadedly connected to the outer surface of the driving mechanism 7, a center column 9 is fixedly connected to one end of the threaded sleeve 8, a cross bar 10 is passed through and slidably connected to the inside of the center column 9, a connecting spring 11 is fixedly connected to one end of the cross bar 10, the other end of the connecting spring 11 extends to the inside of the transverse sleeve 5 and is fixedly connected thereto, a limiting component 12 is arranged on the top of the measuring table 1, and a top cone rod 23 is fixedly installed on the outer surface of the cross bar 10.

[0034] When in use, the measuring assembly 4 is inserted into the inner side of the external sleeve 3. When the wafer needs to be measured, the driving mechanism 7 is started to rotate and drive the threaded sleeve 8 to move and descend outside it. Since the center column 9 is fixed to the threaded sleeve 8, the threaded sleeve 8 moves and drives the center column 9 and the cross bar 10 passing through it to move and descend together. At the same time, since one end of the cross bar 10 is fixed to the connecting spring 11 and extends to the inside of the cross sleeve 5, the cross bar 10 is driven to move and exerts pressure on the cross sleeve 5 to drive it to move and descend together. At this time, the cross sleeve 5 moves together with the measuring assembly 4 on the inner wall of the external sleeve 3. Since the top cone rod 23 is located at the bottom outside the cross bar 10, After continuous descending, the inclined surface at the bottom end of the top cone rod 23 gradually contacts the inclined surface in the opposite direction of the top of the limit assembly 12. At this time, the center column 9 drives the cross bar 10 to continue to descend and drives the top cone rod 23 to descend until the inclined surface of the top cone rod 23 completely disengages from the top surface of the limit assembly 12. The top cone rod 23 continues to descend and its outer convex surface contacts the top of the limit assembly 12 and is pushed to slide laterally inside the center column 9 and drives the connecting spring 11 to stretch until the top cone rod 23 is driven to displace laterally so that its other end disengages from the inside of the cross sleeve 5 to release the associated restriction on the cross sleeve 5. The cross sleeve 5 no longer continues to descend and the measuring assembly 4 no longer continues to descend. At this time, it is located above the wafer to be measured.

[0035] The utility model connects one end of the cross bar 10 with the connecting spring 11 and extends it to the inside of the cross sleeve 5. When the driving mechanism 7 drives the threaded sleeve 8 to drive the center column 9 to continuously descend and move, the cross bar passing through the inside drives the cross sleeve 5 to move together with the measuring component 4, and sets a limit component 12 just below the top cone rod 23. When the top cone rod 23 is driven to descend and move together and contacts with the limit component 12, it is pushed to slide sideways and disengage from the cross sleeve 5 to release the restriction on the cross sleeve 5, thereby driving the measuring component 4 to descend to the top of the wafer to be measured and limit its position. The position of the measuring component 4 is limited by the setting of the limit component 12 and the cooperation of the top cone rod 23, so that the distance between the bottom of the measuring component 4 and the top of the wafer to be measured can be controlled, so as to prevent its bottom from contacting with the wafer surface to cause friction damage to it, affecting the measurement accuracy and destroying the quality of the wafer, thereby achieving a self-protection effect on the measuring component 4 and the wafer.

[0036] In one embodiment, for the above-mentioned measuring component 4, the measuring component 4 includes a measuring head 401, a probe 402 is arranged at the bottom of the measuring head 401, a side through groove 13 is opened on the outer surface of the external sleeve 3, and the transverse sleeve 5 is fixed to the outer surface of the measuring head 401.

[0037] The side through groove 13 is located on the side where the transverse sleeve 5 is located. When the transverse sleeve 5 is driven to move by the cross bar 10, the part extending out of the outer side of the external sleeve 3 drives the measuring head 401 and the probe 402 to move synchronously along the inner side of the side through groove 13. The side through groove 13 is convenient for providing a displacement path limiting function for the transverse sleeve 5 so that it always maintains the same horizontal line with the cross bar 10. After the displacement of the measuring head 401 and the probe 402 is stopped, they are placed above the wafer to be measured to measure it.

[0038] In one embodiment, for the above-mentioned driving mechanism 7, the driving mechanism 7 includes a motor 701, the output end of the motor 701 is fixedly connected to the main rotating shaft 702, one end of the main rotating shaft 702 is fixedly installed with a screw 703, the other end of the screw 703 extends to the upper surface of the measuring table 1 and is rotatably connected thereto, and the threaded sleeve 8 is threadedly connected to the outside of the screw 703.

[0039] By starting the motor 701, the main shaft 702 is driven to rotate and the screw 703 is driven to rotate. While the screw 703 rotates, the threaded sleeve 8 is driven to move outside it and the center column 9 is driven to move downward. The coordination of the motor 701, the main shaft 702, the screw 703 and other components can provide the center column 9 with displacement and downward power, and the screw 703 can rotate forward and reverse, thereby facilitating the provision of upward power, so that it can drive the measuring head 401 to return as the measurement operation progresses.

[0040] In one embodiment, for the above-mentioned center column 9, the outer surface of the center column 9 is fixedly connected to a limiting sleeve 14, the upper surface of the measuring platform 1 is fixedly installed with a limiting rod 15, and the limiting sleeve 14 passes through and is slidably connected to the outside of the limiting rod 15.

[0041] The limiting sleeve 14 is located on the outside of the center column 9 and on the opposite side of the threaded sleeve 8. When the screw rod 703 drives the threaded sleeve 8 to move, the limiting sleeve 14 is driven to slide and move on the outside of the limiting rod 15, thereby limiting the displacement path of the center column 9 so that it is always displaced and lifted in the vertical direction.

[0042] In one embodiment, for the above-mentioned limiting assembly 12, the limiting assembly 12 includes a limiting pole 1201, the outer surface of the limiting pole 1201 is sleeved with a fixing sleeve 1202, and the bottom of the fixing sleeve 1202 is fixedly connected to the upper surface of the measuring platform 1.

[0043] The limiting upright 1201 is supported inside by a fixed sleeve 1202 and the top of the limiting upright 1201 extends to the top. When the top cone rod 23 continues to descend, its inclined surface contacts the top of the limiting upright 1201 until it continues to descend and its outer convex surface contacts the top surface of the limiting upright 1201. After being pushed, the top cone rod 23 is pushed to move laterally and at the same time drives the cross bar 10 to slide laterally inside the center column 9 and drives the connecting spring 11 to extend outside along the inner side of the cross sleeve 5, so that the cross bar 10 releases the linkage effect on the cross sleeve 5, so that the cross sleeve 5 no longer continues to descend and the position of the measuring head 401 is limited.

[0044] The limit vertical rod 1201 is supported directly below the top cone rod 23 by the fixed sleeve 1202, so that when the top cone rod 23 continues to descend, it contacts the limit vertical rod 1201 to generate friction and push it to move laterally to make it separate from the cross sleeve 5, thereby indirectly limiting the position of the measuring head 401. When the measuring operation is completed, the screw 703 rotates in the opposite direction to drive the center column and the cross bar 10 to move upward in the opposite direction, and the top cone rod 23 gradually rises away from the limit vertical rod 1201. After it is separated from the restriction, the tension of the connecting spring 11 at one end of the cross bar 10 disappears and automatically rebounds, driving the connecting section of the cross bar 10 to reset to the inside of the cross sleeve 5. Then, when the center column 9 rises, it cooperates with the cross bar 10 to drive the cross sleeve 5 and the measuring head 401 to rise together to increase the distance from the wafer below, so as to facilitate material removal.

[0045] In one embodiment, for the above-mentioned fixed sleeve 1202, an inner cavity 1203 is opened inside the fixed sleeve 1202, and a lifting spring 1204 is fixedly installed inside the fixed sleeve 1202, and the top of the lifting spring 1204 is fixedly connected to the bottom of the limiting pole 1201;

[0046] The outer surface of the limiting vertical rod 1201 is provided with a limiting hole 1205, the internal thread of the fixing sleeve 1202 is connected to the limiting rod 1206, the limiting rod 1206 passes through the fixing sleeve 1202 and extends to the inside of the limiting hole 1205, and the limiting holes 1205 are multiple in number.

[0047] The lifting spring 1204 is located inside the inner cavity 1203 provided inside the fixed sleeve 1202. The limiting vertical rod 1201 is pulled to make it slide inside the inner cavity 1203 to stretch or squeeze the bottom lifting spring 1204, so that it is lifted and lowered inside the fixed sleeve 1202 until it moves to the appropriate position. The limiting plug rod 1206 is rotated to make it pass along the outer side of the fixed sleeve 1202 to the inside of the limiting hole 1205 corresponding to the outside of the limiting vertical rod 1201 and be threadedly locked with it, thereby fixing the position of the limiting vertical rod 1201.

[0048] The limit rod 1201 is elastically connected to the inside of the fixed sleeve 1202 through the lifting spring 1204, so that the limit rod 1201 can be pulled or pushed to drive the lifting spring 1204 to stretch or compress it, so that the limit rod 1201 can move up and down inside the inner cavity 1203 to adjust the height of its external extension. Then, when it is necessary to adjust the descent height of the measuring head 401, by adjusting the limited position of the limit rod 1201, the descent height limit position of the measuring head 401 can be adjusted through the cooperation with the top cone rod 23, so that it can better adapt to measuring different types of measurement operations.

[0049] In one embodiment, for the above-mentioned measuring platform 1, a slide groove 16 is opened on the top of the measuring platform 1, and a loading platform 17 is arranged on the top of the measuring platform 1. The bottom of the loading platform 17 is slidably connected to the inside of the slide groove 16, and a loading plate 18 is rotatably installed on the top of the loading platform 17.

[0050] The loading tray 18 is supported upward by the loading table 17. When the wafer needs to be measured, it is placed on the top of the loading tray 18. The loading table 17 is pushed to make its bottom slide inside the slide groove 16 so as to be displaced above the measuring table 1 until the top loading tray 18 is moved to the bottom of the probe 402 and then stops moving.

[0051] By slidingly connecting the bottom of the loading platform 17 to the inside of the slide groove 16, the loading tray 18 can be moved to the measuring position of the probe 402 by pushing the loading platform 17, so that the position of the loading tray 18 is flexible and convenient for loading operations.

[0052] In one embodiment, for the above-mentioned measuring platform 1, a second motor 19 is arranged on the top of the measuring platform 1, a second rotating shaft 20 is fixedly installed on the output end of the second motor 19, an action gear 21 is fixedly installed on the top of the second rotating shaft 20, and a tooth plate 22 is fixedly installed on the outer surface of the stage 17, and the action gear 21 is meshed with the tooth plate 22.

[0053] By starting the second motor 19 to drive the second rotating shaft 20 to rotate, the action gear 21 is driven to rotate. When the action gear 21 rotates, it drives the toothed plate 22 meshing with it to move, thereby driving the stage 17 to move so that its bottom slides inside the slide groove 16. In this way, the stage 17 can drive the top carrier plate 18 to gradually approach the position to be tested, thereby reducing manual contact with the wafer on the carrier plate 18 to avoid affecting the detection.

[0054] In summary, with the aid of the above technical solution of the utility model, by fixing the motor 701 on the top of the fixed frame 6, when it is necessary to measure the wafer, the second motor 19 is started to drive the second rotating shaft 20 to drive the action gear 21 to rotate to drive the toothed plate 22 to drive the stage 17 to slide and move, and the stage 17 drives the top loading plate 18 to approach the position to be measured after continuous displacement, and the stage 17 stops moving and places the loading plate 18 under the probe 402, at this time, the motor 701 is started to drive the main rotating shaft 702 to drive the screw 703 to rotate to drive the threaded sleeve 8 to move outside it, and while the threaded sleeve 8 moves, it drives the center column 9 and the cross bar 10 to move downward together, and at the same time, because one end of the cross bar 10 extends to the inside of the cross sleeve 5, it drives the cross sleeve 5 and the measuring head 401 to move downward synchronously along the inner wall of the external sleeve 3 along the inner side through groove 13, and at the same time, the limit sleeve 14 on the other side of the center column 9 is driven to move outside the limit rod 15 The sliding displacement is used to limit the displacement path of the center column 9, and the cross bar 10 continues to descend until the top cone rod 23 is continuously in contact with the limit vertical rod 1201 on the ground and is pushed to move laterally, driving the cross bar 10 to move laterally and stretching the connecting spring 11 to extend outward until the connecting end of the cross bar 10 and the connecting spring 11 are completely separated from the interior of the cross sleeve 5 and the joint restriction on the cross sleeve 5 is released. The measuring head 401 indirectly stops moving so that the probe 402 at the bottom stays above the wafer. Thus, the center column 9 and the cross bar 10 are driven to move by a synchronous driving source, while the measuring head 401 is driven to move synchronously, and its descending position is limited by the cooperation with the limit vertical rod 1201 to prevent the probe 402 from excessively contacting the wafer surface to damage its surface and to prevent damage to the probe 402 itself, thereby protecting the wafer and the probe itself, improving the safety of the measurement operation and improving the efficiency of the measurement operation.

[0055] Through the above technical scheme, 1. By connecting one end of the cross bar 10 with the connecting spring 11 and extending it to the inside of the cross sleeve 5, when the driving mechanism 7 drives the threaded sleeve 8 to drive the center column 9 to continuously move downward, the cross bar running through the inside drives the cross sleeve 5 to move together with the measuring component 4, and by setting a limit component 12 just below the top cone rod 23, when the top cone rod 23 is driven to move downward together and contacts with the limit component 12, it is pushed to slide sideways and disengage from the cross sleeve 5 to release the restriction on the cross sleeve 5, thereby driving the measuring component 4 to descend to the top of the wafer to be measured and limit its position. By setting the limit component 12 and cooperating with the top cone rod 23, the position of the measuring component 4 is limited, thereby controlling the distance between the bottom of the measuring component 4 and the top of the wafer to be measured, preventing Its bottom contacts the surface of the wafer and causes friction damage to it, affecting the measurement accuracy and destroying the quality of the wafer, thereby playing a self-protection effect on the measuring component 4 and the wafer; 2. The limit rod 1201 is elastically connected to the inside of the fixed sleeve 1202 through the lifting spring 1204, so that the limit rod 1201 can be pulled or pushed to drive the lifting spring 1204 to stretch or compress it, so that the limit rod 1201 can move up and down inside the inner cavity 1203 to adjust the height of its external extension, and then when it is necessary to adjust the descent height of the measuring head 401, by adjusting the limited position of the limit rod 1201, the descent height limit position of the measuring head 401 can be adjusted through the cooperation with the top cone rod 23, so that it can better adapt to measuring different types of measurement operations.

[0056] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0057] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A protective overlay measuring device, comprising a measuring table (1), characterized in that: A measuring frame (2) is fixedly mounted on the top of the measuring platform (1); an external sleeve (3) is fixedly mounted on the outer surface of the measuring frame (2); a measuring assembly (4) is inserted into the interior of the external sleeve (3); a transverse sleeve (5) is fixedly mounted on the outer surface of the measuring assembly (4); a fixing frame (6) is fixedly mounted on the top of the measuring platform (1); a driving mechanism (7) is arranged on the top of the fixing frame (6); a threaded sleeve (8) is threadedly connected to the outer surface of the driving mechanism (7); a center column (9) is fixedly connected to one end of the threaded sleeve (8); a cross bar (10) is passed through and slidably connected to the interior of the center column (9); a connecting spring (11) is fixedly connected to one end of the cross bar (10); the other end of the connecting spring (11) extends to the interior of the transverse sleeve (5) and is fixedly connected thereto; a limiting assembly (12) is arranged on the top of the measuring platform (1); a top cone rod (23) is fixedly mounted on the outer surface of the cross bar (10).

2. A protective overlay measurement device according to claim 1, characterized in that: The measuring assembly (4) comprises a measuring head (401), a probe (402) is arranged at the bottom of the measuring head (401), a side through groove (13) is opened on the outer surface of the external sleeve (3), and the transverse sleeve (5) is fixed to the outer surface of the measuring head (401).

3. A protective overlay measurement device according to claim 1, characterized in that: The driving mechanism (7) comprises a motor (701), the output end of the motor (701) is fixedly connected to a main rotating shaft (702), one end of the main rotating shaft (702) is fixedly mounted with a screw rod (703), the other end of the screw rod (703) extends to the upper surface of the measuring platform (1) and is rotatably connected thereto, and the threaded sleeve (8) is threadedly connected to the outside of the screw rod (703).

4. A protective overlay measurement device according to claim 1, characterized in that: The outer surface of the central column (9) is fixedly connected to a limiting sleeve (14), the upper surface of the measuring platform (1) is fixedly installed with a limiting rod (15), and the limiting sleeve (14) penetrates and is slidably connected to the outside of the limiting rod (15).

5. The protective overlay measurement device according to claim 1, characterized in that: The limiting assembly (12) comprises a limiting upright pole (1201), the outer surface of the limiting upright pole (1201) is sleeved with a fixing sleeve (1202), and the bottom of the fixing sleeve (1202) is fixedly connected to the upper surface of the measuring platform (1).

6. A protective overlay measurement device according to claim 5, characterized in that: An inner cavity (1203) is provided inside the fixed sleeve (1202), a lifting spring (1204) is fixedly installed inside the fixed sleeve (1202), and the top end of the lifting spring (1204) is fixedly connected to the bottom end of the limiting vertical rod (1201); A limiting hole (1205) is provided on the outer surface of the limiting upright pole (1201), and the internal thread of the fixing sleeve (1202) is connected to a limiting plug rod (1206), and the limiting plug rod (1206) passes through the fixing sleeve (1202) and extends to the inside of the limiting hole (1205), and the limiting holes (1205) are provided in a plurality of numbers.

7. A protective overlay measurement device according to claim 1, characterized in that: A slide groove (16) is provided on the top of the measuring platform (1), and a loading platform (17) is arranged on the top of the measuring platform (1). The bottom of the loading platform (17) is slidably connected to the inside of the slide groove (16), and a loading plate (18) is rotatably installed on the top of the loading platform (17).

8. A protective overlay measurement device according to claim 7, characterized in that: A second motor (19) is arranged on the top of the measuring platform (1); a second rotating shaft (20) is fixedly mounted on the output end of the second motor (19); an action gear (21) is fixedly mounted on the top of the second rotating shaft (20); a toothed plate (22) is fixedly mounted on the outer surface of the loading platform (17); and the action gear (21) is meshed with the toothed plate (22).

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