Carrying device

Abstract

The utility model provides a carrying device. The carrying device comprises a base plate, a walking wheel device, a handle, a shear fork lifting device, a platform and a control device. The base plate comprises an upper surface and a lower surface, the walking wheel device is installed on the lower surface of the base plate, the handle is installed on the upper surface of the base plate and located on the edge of one side, the bottom of the shear fork lifting device is installed on the upper surface of the base plate, and the platform is installed on the upper portion of the shear fork lifting device. And the upper surface of the platform is always parallel to the upper surface of the substrate in the lifting process. And the control device is arranged on the handle and is in signal connection with the scissor lifting device. The carrying device can replace manual carrying of objects, time and labor are saved, and safety is improved.

Description

Technical Field

[0001] The present application relates to the technical field of handling tools in semiconductor production workshops, and in particular to a handling device. Background Art

[0002] With the development of semiconductor technology, semiconductor equipment is moving towards modularization. Generally speaking, semiconductor equipment generally contains a large number of complete sets of modules such as electronic, electrical, optical and mechanical. These complete sets of modules are divided into different modules according to different functions and installed at different positions and heights.

[0003] In the prior art, workers usually carry the modules to a cart, then transfer them to the next process location or near the next process equipment, and then carry them down manually. Since these modules are generally relatively heavy, it takes time and effort to carry them to or from the cart, and may also bring accidents to the transporters.

[0004] In addition, there is a risk of the module slipping during the transportation of the trolley, which may also bring potential safety hazards. Utility Model Content

[0005] The purpose of the embodiments of the present application is to provide a transport device that can replace manual transport of objects, saving time and effort and improving safety.

[0006] The present application provides a transport device, including a base plate, a walking wheel device, a handle, a scissor lift device, a platform and a control device. The base plate includes an upper surface and a lower surface, the walking wheel device is installed on the lower surface of the base plate, the handle is installed on the upper surface of the base plate and is located at one side edge, the bottom of the scissor lift device is installed on the upper surface of the base plate, the platform is installed on the upper part of the scissor lift device, and the upper surface of the platform is always kept parallel to the upper surface of the base plate during the lifting process. The control device is arranged on the handle, and the control device is connected to the scissor lift device by signal.

[0007] In an implementable scheme, the scissors-fork lifting device includes two groups of scissors-fork mechanisms, a first slide rail, a first slider, a second slide rail, a second slider and a pushing device; two parallel first slide rails are arranged on the upper surface of the base plate, and the first slider is installed on the first slide rails; two parallel second slide rails are arranged on the upper surface of the platform, and the second slider is installed on the second slide rails; the two groups of scissors-fork mechanisms are parallel to each other and symmetrically arranged above the base plate; the scissors-fork mechanism includes a bottom first end, a bottom second end, a top first end and a top second end; the bottom first ends of the two scissors-fork mechanisms are hinged to the upper surface of the base plate, and the bottom second ends of the two scissors-fork mechanisms are respectively hinged to the first sliders on the two first slide rails; the top first ends of the two scissors-fork mechanisms are hinged to the lower surface of the platform, and the top second ends of the two scissors-fork mechanisms are respectively hinged to the second sliders on the two second slide rails; the pushing device is installed on the base plate, and is used to push the first slider to reciprocate on the first slide rail; the pushing device is connected to the control device by signal.

[0008] In an implementable scheme, the pushing device includes a screw module, a driving device and a connecting block; the screw module is arranged in parallel between two first slide rails, and the driving device is installed on a base plate to drive the screw module to work; the middle part of the connecting block is installed on the screw module, and the two ends of the connecting block are respectively fixedly connected to the first sliding blocks of the two first slide rails, and the screw module drives the connecting block to slide back and forth along the extension direction of the first slide rail; the driving device is connected to the control device by signal.

[0009] In an implementable scheme, a single scissors-fork mechanism includes a first rod and a second rod, and the first rod is coaxially matched with the middle part of the second rod; the bottom end of the first rod is the bottom first end of the scissors-fork mechanism, and the top end of the first rod is the top second end of the scissors-fork mechanism; the bottom end of the second rod is the bottom second end of the scissors-fork mechanism, and the top end of the second rod is the top first end of the scissors-fork mechanism.

[0010] In an implementable solution, the scissor lift device includes a coaxial rod, which passes through the middle parts of the first rod and the second rod of the two scissor mechanisms respectively.

[0011] In an implementable solution, the platform includes a platform base and a support plate, the support plate is mounted on the platform base, and the lower surface of the platform base is mounted on the scissor lift device.

[0012] In an implementable solution, the platform further includes a rotating device, which is mounted on the platform base, and the support plate is mounted on the rotating device; the rotating device is signal-connected to the control device.

[0013] In an implementable solution, the platform also includes a horizontal displacement device, which is mounted on the rotating device, and the support plate is mounted on the horizontal displacement device, and the horizontal displacement device is used to send the support plate horizontally outward a predetermined distance; the horizontal displacement device is connected to the control device by signal.

[0014] In an implementable solution, the handling device further comprises an electro-permanent magnetic chuck, which is embedded and mounted on the platform, and the surface of the electro-permanent magnetic chuck is flush with the upper surface of the platform; the electro-permanent magnetic chuck is signal-connected to the control device.

[0015] In an implementable solution, the transport device further comprises a transport box, which is used to contain the transported object, and during transport, the bottom surface of the transport box is adsorbed on the electro-permanent magnetic chuck.

[0016] Compared with the prior art, the beneficial effects of this application include at least:

[0017] When the handling device of the present application is used for handling, the worker raises the platform of the handling device to a height substantially consistent with the object being handled by operating the control device, and then transfers the object being handled to the platform. The worker pushes the entire handling device to the next process position by holding the handle, and raises the platform of the handling device to be substantially flush with the table surface of the next process by operating the control device, and then transfers the object being handled. It can be seen that the handling device of this embodiment can replace the action of workers bending over to lift objects, and can more easily transfer objects to the next process position, saving time and effort, improving handling efficiency, and at the same time improving operation safety.

[0018] In a further solution, an electric permanent magnetic suction cup can be set on the platform, and a transport box can be placed on the electric permanent magnetic suction cup. By operating the control device, the magnetic force of the electric permanent magnetic suction cup is weakened or demagnetized for a short time, so that it is convenient to place the transport box on the electric permanent magnetic suction cup, and it is also convenient to remove the transport box from the electric permanent magnetic suction cup. When transporting objects, the objects to be transported are placed in the transport box, and the electric permanent magnetic suction cup is not powered on, maintaining normal suction, firmly adsorbing the transport box, and preventing the transport box from slipping during the transfer process, thereby ensuring transportation safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 is a perspective view of a transport device after being raised according to an embodiment of the present application;

[0021] Figure 2 It is a three-dimensional diagram of a scissor lift device of a handling device according to an embodiment of the present application;

[0022] Figure 3 is a three-dimensional diagram of a folded carrying device according to an embodiment of the present application;

[0023] Figure 4 It is a three-dimensional diagram of a transport device with a rotating device according to an embodiment of the present application;

[0024] Figure 5 It is a three-dimensional diagram of a transport device with a rotating device and a horizontal displacement device according to an embodiment of the present application;

[0025] Figure 6 for Figure 5 Schematic diagram of partial structure explosion of the middle handling device;

[0026] Figure 7 It is a three-dimensional diagram of a handling device with an electro-permanent magnetic chuck according to an embodiment of the present application;

[0027] Figure 8 It is a stereoscopic diagram of a transport device with a transport box according to an embodiment of the present application.

[0028] In the figure: 10, base plate; 20, walking wheel device; 30, handle; 40, scissors-fork lifting device; 41, scissors-fork mechanism; 411, first rod; 412, second rod; 42, first slide rail; 43, first slider; 44, second slide rail; 45, second slider; 46, pushing device; 461, screw module; 462, driving device; 463, connecting block; 47, coaxial rod; 50, platform; 51, platform base; 52, support plate; 53, rotating device; 54, horizontal displacement device; 60, control device; 70, electric permanent magnetic suction cup; 80, carrying box. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0030] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0031] like Figure 1 , Figure 2 and Figure 3 As shown, this embodiment provides a transport device, which is characterized by including a base plate 10, a walking wheel device 20, a handle 30, a scissor lift device 40, a platform 50 and a control device 60.

[0032] The base plate 10 includes an upper surface and a lower surface, the walking wheel device 20 is installed on the lower surface of the base plate 10, the handle 30 is installed on the upper surface of the base plate 10 and is located at one side edge, the bottom of the scissor lift device 40 is installed on the upper surface of the base plate 10, and the platform 50 is installed on the upper part of the scissor lift device 40, and the upper surface of the platform 50 is always kept parallel to the upper surface of the base plate 10 during the lifting process. The control device 60 is arranged on the handle 30, and the control device 60 is connected to the scissor lift device 40 by signal.

[0033] For example, when transporting semiconductor modules, the transport device of this embodiment raises the platform 50 of the transport device to a height substantially consistent with the transported items by operating the control device 60, and then transfers the transported items to the platform 50. The worker pushes the entire transport device to the next process position by holding the handle 30, and raises the platform 50 of the transport device to be substantially flush with the table surface of the next process by operating the control device 60, and then transfers the transported objects. It can be seen that the transport device of this embodiment can replace the action of workers bending over to lift objects, and can more easily transfer objects to the next process position, saving time and effort, improving transport efficiency, and at the same time improving work safety.

[0034] In this embodiment, if Figure 7 As shown, the handling device may further include an electro-permanent magnetic chuck 70 , which is embedded and installed on the platform 50 , and the surface of the electro-permanent magnetic chuck 70 is flush with the upper surface of the platform 50 , and the electro-permanent magnetic chuck 70 is connected to the control device 60 by signal.

[0035] The principle of the permanent magnetic chuck 70 is that it does not require electric energy during the working process, and only relies on the permanent magnetic suction force to hold the workpiece, thereby avoiding the danger of the workpiece falling off due to the loss of magnetic force caused by sudden power failure and disconnection damage of the electromagnetic system. Since the permanent magnetic chuck 70 only uses electric energy during the magnetization and demagnetization process, it does not use any energy during the work and generates safe, strong and efficient force, which is both economical and environmentally friendly.

[0036] In this embodiment, if Figure 8 As shown, the transport device also includes a transport box 80, which is used to hold the transported object, and during transport, the bottom surface of the transport box 80 is adsorbed on the electric permanent magnetic chuck 70. The bottom surface of the transport box 80 is provided with an iron material layer, which can be sucked by the electric permanent magnetic chuck 70.

[0037] Therefore, by using the electric permanent magnetic chuck 70 of the present embodiment and cooperating with the transport box 80 whose bottom surface is made of iron, the magnetic force of the electric permanent magnetic chuck 70 is weakened or demagnetized for a short time by operating the control device 60, so as to facilitate placing the transport box 80 on the electric permanent magnetic chuck 70 and also facilitate removing the transport box 80 from the electric permanent magnetic chuck 70. When transporting objects, the objects to be transported are placed in the transport box 80, and the electric permanent magnetic chuck 70 is not powered on, so as to maintain normal suction and firmly adsorb the transport box 80 to prevent the transport box 80 from slipping during the transfer process, thereby ensuring the safety of transportation.

[0038] In this embodiment, if Figure 2 As shown, the scissor lift device 40 may include two sets of scissor mechanisms 41, a first slide rail 42, a first slider 43, a second slide rail 44, a second slider 45 and a pushing device 46. Two parallel first slide rails 42 are arranged on the upper surface of the base plate 10, and the first slider 43 is installed on the first slide rail 42; two parallel second slide rails 44 are arranged on the upper surface of the platform 50, and the second slider 45 is installed on the second slide rail 44.

[0039] The two sets of scissor mechanisms 41 are parallel to each other and symmetrically arranged above the base plate 10; the scissor mechanisms 41 include a bottom first end, a bottom second end, a top first end and a top second end. The bottom first ends of the two scissor mechanisms 41 are hinged to the upper surface of the base plate 10, and the bottom second ends of the two scissor mechanisms 41 are respectively hinged to the first sliders 43 on the two first slide rails 42. The top first ends of the two scissor mechanisms 41 are hinged to the lower surface of the platform 50, and the top second ends of the two scissor mechanisms 41 are respectively hinged to the second sliders 45 on the two second slide rails 44.

[0040] The pushing device 46 is installed on the base plate 10 and is used to push the first sliding block 43 to reciprocate on the first sliding rail 42 . The pushing device 46 is connected to the control device 60 by signals.

[0041] In this embodiment, if Figure 2As shown, the pushing device 46 may include a lead screw module 461, a driving device 462 and a connecting block 463. The lead screw module 461 is arranged in parallel between the two first slide rails 42, and the driving device 462 is installed on the base plate 10 to drive the lead screw module 461 to work. The middle part of the connecting block 463 is installed on the lead screw module 461, and the two ends of the connecting block 463 are respectively fixedly connected to the first sliders 43 of the two first slide rails 42, and the lead screw module 461 drives the connecting block 463 to slide back and forth along the extension direction of the first slide rail 42. The driving device 462 is connected to the control device 60 by signal.

[0042] The feed distance is controlled by the lead screw module 461, so that the lifting and lowering control of the scissor mechanism 41 is more precise.

[0043] In this embodiment, if Figure 2 As shown, a single scissor mechanism 41 may include a first rod 411 and a second rod 412, and the first rod 411 is coaxially matched with the middle of the second rod 412. The bottom end of the first rod 411 is the bottom first end of the scissor mechanism 41, and the top end of the first rod 411 is the top second end of the scissor mechanism 41. The bottom end of the second rod 412 is the bottom second end of the scissor mechanism 41, and the top end of the second rod 412 is the top first end of the scissor mechanism 41.

[0044] In this embodiment, if Figure 2 As shown, the scissor lift device 40 may include a coaxial rod 47, which passes through the middle of the first rod 411 and the second rod 412 of the two scissor mechanisms 41 respectively to further maintain the synchronous lifting action of the two scissor mechanisms 41.

[0045] In this embodiment, if Figure 7 As shown, the platform 50 includes a platform base 51 and a support plate 52 . The support plate 52 is installed on the platform base 51 , and the lower surface of the platform base 51 is installed on the scissor lift device 40 .

[0046] In this embodiment, if Figure 4 As shown, the platform 50 may further include a rotating device 53, which is mounted on the platform base 51, and the support plate 52 is mounted on the rotating device 53; the rotating device 53 is signal-connected to the control device 60. The rotating device 53 can turn the support plate 52 of the platform 50 to different directions, for example, the transported semiconductor module can be smoothly docked with the next station.

[0047] In this embodiment, if Figure 5 and Figure 6As shown, the platform 50 may further include a horizontal displacement device 54, which is mounted on the rotating device 53, and the support plate 52 is mounted on the horizontal displacement device 54, and the horizontal displacement device 54 is used to send the support plate 52 horizontally outward by a predetermined distance; the horizontal displacement device 54 is connected to the control device 60 by signal. The horizontal displacement device 54 is used to send the support plate 52 of the platform 50 forward by a predetermined distance, so as to facilitate the transportation of the transported objects more conveniently.

[0048] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A transport device, characterized in that: include: A substrate (10) comprising an upper surface and a lower surface; A walking wheel device (20) mounted on the lower surface of the base plate (10); A handle (30) is mounted on the upper surface of the base plate (10) and is located at one side edge; A scissor lift device (40), the bottom of which is mounted on the upper surface of the base plate (10); A platform (50) is installed on the upper part of the scissor lift device (40), and the upper surface of the platform (50) is always kept parallel to the upper surface of the base plate (10) during the lifting process; A control device (60) is arranged on the handle (30), and the control device (60) is connected to the scissor lift device (40) by signal.

2. The transport device according to claim 1, characterized in that: The scissor lift device (40) comprises two sets of scissor mechanisms (41), a first slide rail (42), a first slider (43), a second slide rail (44), a second slider (45) and a pushing device (46); Two parallel first slide rails (42) are arranged on the upper surface of the base plate (10), and the first slider (43) is installed on the first slide rails (42); two parallel second slide rails (44) are arranged on the upper surface of the platform (50), and the second slider (45) is installed on the second slide rails (44); The two groups of scissor-fork mechanisms (41) are parallel to each other and symmetrically arranged above the base plate (10); the scissor-fork mechanisms (41) comprise a bottom first end, a bottom second end, a top first end and a top second end; The first ends of the bottoms of the two scissor-fork mechanisms (41) are both hinged to the upper surface of the base plate (10), and the second ends of the bottoms of the two scissor-fork mechanisms (41) are respectively hinged to the first sliding blocks (43) on the two first sliding rails (42); The first ends of the tops of the two scissor-fork mechanisms (41) are both hinged to the lower surface of the platform (50), and the second ends of the tops of the two scissor-fork mechanisms (41) are respectively hinged to the second sliding blocks (45) on the two second sliding rails (44); The pushing device (46) is installed on the base plate (10) and is used to push the first sliding block (43) to reciprocate on the first sliding rail (42); The pushing device (46) is connected to the control device (60) via signals.

3. The transport device according to claim 2, characterized in that: The pushing device (46) comprises a screw module (461), a driving device (462) and a connecting block (463); The lead screw module (461) is arranged in parallel between the two first slide rails (42), and the driving device (462) is installed on the base plate (10) and is used to drive the lead screw module (461) to work; The middle part of the connecting block (463) is mounted on the lead screw module (461), and the two ends of the connecting block (463) are respectively fixedly connected to the first sliding blocks (43) of the two first sliding rails (42), and the lead screw module (461) drives the connecting block (463) to slide back and forth along the extension direction of the first sliding rail (42); The drive device (462) is connected to the control device (60) via signals.

4. The transport device according to claim 2, characterized in that: A single scissor mechanism (41) comprises a first rod (411) and a second rod (412), wherein the first rod (411) and the second rod (412) are coaxially matched at their middle parts; The bottom end of the first rod (411) is the bottom first end of the scissor-fork mechanism (41), and the top end of the first rod (411) is the top second end of the scissor-fork mechanism (41); The bottom end of the second rod (412) is the bottom second end of the scissor-fork mechanism (41), and the top end of the second rod (412) is the top first end of the scissor-fork mechanism (41).

5. The transport device according to claim 4, characterized in that: The scissor lift device (40) comprises a coaxial rod (47), wherein the coaxial rod (47) passes through the middle parts of the first rod (411) and the second rod (412) of the two scissor mechanisms (41) respectively.

6. The transport device according to claim 1, characterized in that: The platform (50) comprises a platform base (51) and a support plate (52), wherein the support plate (52) is mounted on the platform base (51), and the lower surface of the platform base (51) is mounted on the scissor lift device (40).

7. The transport device according to claim 6, characterized in that: The platform (50) further comprises a rotating device (53), wherein the rotating device (53) is mounted on the platform base (51), and the support plate (52) is mounted on the rotating device (53); the rotating device (53) is signal-connected to the control device (60).

8. The transport device according to claim 7, characterized in that: The platform (50) further comprises a horizontal displacement device (54), wherein the horizontal displacement device (54) is mounted on the rotating device (53), and the support plate (52) is mounted on the horizontal displacement device (54), and the horizontal displacement device (54) is used to send the support plate (52) horizontally outward by a predetermined distance; the horizontal displacement device (54) is connected to the control device (60) by signal.

9. The handling device according to any one of claims 1 to 8, characterized in that: The handling device further comprises an electro-permanent magnetic chuck (70), wherein the electro-permanent magnetic chuck (70) is embedded and mounted on the platform (50), and the surface of the electro-permanent magnetic chuck (70) is flush with the upper surface of the platform (50); The electro-permanent magnetic chuck (70) is signal-connected to the control device (60).

10. The transport device according to claim 9, characterized in that: The transport device further comprises a transport box (80) for containing the transported object, and during transport, the bottom surface of the transport box (80) is adsorbed on the electro-permanent magnetic chuck (70).

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