Furnace wire lead fixing device

Abstract

The utility model provides a furnace wire lead fixing device. The furnace wire lead fixing device comprises an inner fixing group and an outer fixing group, the inner fixing group and the outer fixing group are used for fixing the furnace wire lead, the inner furnace wire lead is welded with the outer furnace wire lead, the inner fixing group is used for fixing the inner furnace wire lead positioned inside the furnace body on the inner wall of the furnace body, and the outer fixing group is used for fixing the outer furnace wire lead on the outer cover of the furnace body. The furnace wire lead fixing device solves the problems that in the prior art, due to the fact that a furnace wire lead fixing mode is not reasonable, potential safety hazards can be caused in actual use; due to the fact that the fixing mode of the furnace wire lead is unreasonable, adverse effects of the furnace wire lead on the furnace wire can be generated, and the service life of a furnace body can be shortened. As the furnace body outer cover capable of rapidly heating and cooling is large, the fixation of the furnace wire lead is more difficult, and the long-term use reliability problem is easily generated; and the continuous operation of a production line is influenced due to the problem of furnace wire lead, so that huge loss is caused to customers.

Description

Technical Field

[0001] The utility model relates to the technical field of vertical furnaces, in particular to a furnace wire lead fixing device. Background Art

[0002] With the increasing number of large-scale IC production lines in my country, the application and market demand of vertical furnaces are becoming more and more vigorous. Vertical furnaces are process equipment produced to meet the process requirements of large-scale IC production lines. The processes that can be completed include oxidation (Oxidation), low-pressure chemical vapor deposition (LPCVD), atomic layer deposition (ALD), annealing (Anneal), etc. No matter which process the vertical furnace is used for, a vertical furnace body with a long constant temperature zone, high control accuracy and stable operation is required. The furnace body is the core component of the vertical furnace. According to different vertical furnace processes, the furnace body can be divided into low temperature, medium temperature and high temperature types; according to different cooling of the vertical furnace body, the furnace body can be divided into natural cooling and rapid cooling types. The core component of the furnace body is the heating furnace wire. The furnace wire lead is a necessary component for the furnace wire to be connected to electricity. The form of the furnace wire lead and its fixing method are crucial to the long-term normal use of the furnace body. However, the existing furnace wire lead fixing device cannot play a good supporting and fixing role for the furnace wire lead in the rapid heating and cooling furnace body, and then the following problems will occur:

[0003] 1. The unreasonable way of fixing the furnace wire lead will cause potential safety hazards in actual use;

[0004] 2. Due to the unreasonable fixing method of the furnace wire lead, the furnace wire lead will have an adverse effect on the furnace wire, thereby reducing the service life of the furnace body;

[0005] 3. Since the outer cover of the rapid heating and cooling furnace is large, it is more difficult to fix the furnace wire lead, which is prone to long-term reliability problems;

[0006] 4. The continuous operation of the production line will be affected by the problem of furnace wire lead, which will cause huge losses to customers. Utility Model Content

[0007] In order to solve the above problems, the utility model provides a furnace wire lead fixing device to solve the above defects in the prior art.

[0008] According to a first aspect of the utility model, a furnace wire lead fixing device is provided, comprising: an inner fixing group and an outer fixing group;

[0009] The inner fixing group and the outer fixing group fix the furnace wire lead, and the furnace wire lead includes an inner furnace wire lead that passes through the furnace body from the inside and extends to the outside of the furnace body, and an outer furnace wire lead located outside the furnace body. The inner furnace wire lead and the outer furnace wire lead are welded. The inner fixing group fixes the inner furnace wire lead located inside the furnace body to the furnace body wall, and the outer fixing group fixes the outer furnace wire lead to the outer cover of the furnace body.

[0010] Optionally, the internal fixation group includes a square connecting plate and a fixing plate;

[0011] A first through hole having the same outer dimensions as the inner furnace wire lead is provided in the middle of the square connecting plate, the square connecting plate is attached to the inner wall of the furnace body, a groove having the same dimensions as the square connecting plate is provided on one end surface of the fixing plate, a second through hole communicating with the groove is provided on the other end surface of the fixing plate, and the size of the second through hole is larger than the size of the first through hole, and a plurality of mounting holes are provided around the fixing plate;

[0012] The square connecting plate is embedded in the groove, the fixing plate is arranged on the inner wall of the furnace body and is fixed on the inner wall of the furnace body by passing through the corresponding mounting holes through a plurality of first bolts, the inner furnace wire lead passes through the second through hole, the first through hole and the furnace body in turn and extends to the outside of the furnace body, and the intersection between the inner furnace wire lead and the square connecting plate is welded.

[0013] Optionally, the material of the fixing plate is ceramic material.

[0014] Optionally, the mounting hole is a round hole or an oblong hole.

[0015] Optionally, the outer fixing group includes an inner plate and an outer plate; the inner plate is provided with a plurality of first oblong holes evenly distributed and arranged along the first direction, the outer plate is provided with a plurality of second oblong holes evenly distributed and arranged along the second direction, the first direction is perpendicular to the second direction, the outer plate is arranged on the inner plate by passing through the corresponding second oblong holes with a plurality of corresponding second bolts, and the outer plate slides relative to the inner plate along the second direction, the inner plate is arranged on the outer cover of the furnace body by passing through the corresponding first oblong holes with a plurality of corresponding third bolts, and the inner plate slides relative to the outer cover of the furnace body along the first direction;

[0016] The middle parts of the inner plate and the outer plate are both provided with a third through hole and a fourth through hole, and the external furnace wire lead passes through the third through hole and the fourth through hole in sequence and is connected with the wiring terminal.

[0017] Optionally, the outer plate material is a ceramic material.

[0018] Optionally, a plurality of first oblong holes evenly distributed and arranged in the transverse direction are provided around the inner plate, and a plurality of second oblong holes evenly distributed and arranged in the longitudinal direction are provided around the outer plate.

[0019] Optionally, a plurality of first oblong holes evenly distributed and arranged along the longitudinal direction are provided around the inner plate, and a plurality of second oblong holes evenly distributed and arranged along the transverse direction are provided around the outer plate.

[0020] Through the furnace wire lead fixing device of the utility model, the inner furnace wire lead and the outer furnace wire lead are reasonably fixed respectively through the inner fixing group and the outer fixing group, and the structure is simple, the function of safe and reliable operation of the furnace body is realized, and the service life of the furnace body is improved. Therefore, the utility model solves the defects of the prior art that the unreasonable furnace wire lead fixing method will bury safety hazards in actual use; the unreasonable furnace wire lead fixing method will have an adverse effect on the furnace wire, thereby reducing the service life of the furnace body; the rapid heating and cooling furnace body outer cover is large, which makes it more difficult to fix the furnace wire lead, and is prone to long-term use reliability problems; and the continuous operation of the production line is affected due to the furnace wire lead problem, which will cause huge losses to customers. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the inner fixing group of a furnace wire lead fixing device provided by the utility model from a first perspective;

[0022] Figure 2 It is a cross-sectional view of an internal fixing group at AA in a furnace wire lead fixing device provided by the utility model;

[0023] Figure 3 It is a structural schematic diagram of an external fixing group of a furnace wire lead fixing device provided by the utility model;

[0024] Figure 4 It is a structural schematic diagram of the connection between the inner furnace wire lead and the outer furnace wire lead of a furnace wire lead fixing device provided by the utility model from a first perspective;

[0025] Figure 5 The utility model is a structural schematic diagram of the connection between the inner furnace wire lead and the outer furnace wire lead of a furnace wire lead fixing device provided by the utility model from a second perspective.

[0026] List of reference numerals:

[0027] 10. Internal fixing group; 20. External fixing group; 1. Internal furnace wire lead; 2. External furnace wire lead; 3. Inner wall of furnace body; 4. Square connecting plate; 5. Fixing plate; 6. Inner plate; 7. Outer plate; 8. First oblong hole; 9. Second oblong hole. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0029] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] Reference Figures 1 to 5 The utility model provides a furnace wire lead fixing device, which can solve the problems of the prior art that the furnace wire lead fixing method is unreasonable, which may cause safety hazards in actual use; the furnace wire lead will have an adverse effect on the furnace wire due to the unreasonable furnace wire lead fixing method, which will reduce the service life of the furnace body; the rapid heating and cooling of the furnace body is large, which makes it more difficult to fix the furnace wire lead, and is prone to long-term reliability problems; and the continuous operation of the production line is affected by the furnace wire lead problem, which will cause huge losses to customers.

[0032] The utility model provides a furnace wire lead fixing device, comprising: an inner fixing group 10 and an outer fixing group 20;

[0033] The inner fixing group 10 and the outer fixing group 20 fix the furnace wire lead, which includes an inner furnace wire lead 1 that passes through the furnace body from the inside and extends to the outside of the furnace body, and an outer furnace wire lead 2 located outside the furnace body. The inner furnace wire lead 1 and the outer furnace wire lead 2 are welded. The inner fixing group 10 fixes the inner furnace wire lead 1 located inside the furnace body to the furnace body inner wall 3 of the furnace body, and the outer fixing group 20 fixes the outer furnace wire lead 2 to the furnace body outer cover of the furnace body.

[0034] Among them, for actual use, multiple furnace wire lead fixing devices are required. The multiple furnace wire lead fixing devices are located in the longitudinal part of the furnace body, spread throughout and run through the entire longitudinal range of the furnace body. Each furnace wire lead fixing device is composed of a plurality of internal fixing groups 10 and a plurality of external fixing groups 20, and the number of internal fixing groups 10 and external fixing groups 20 is the same. Each internal fixing group 10 corresponds to an external fixing group 20. Through the design of each temperature zone and a reasonable layout, the furnace wire lead can be firmly fixed and connected, which meets the special requirements during work, and customers can use it with peace of mind.

[0035] The utility model provides a furnace wire lead fixing device, which reasonably fixes the inner furnace wire lead 1 and the outer furnace wire lead 2 respectively through the inner fixing group 10 and the outer fixing group 20. The structure is simple, and the function of safe and reliable operation of the furnace body is realized, and the service life of the furnace body is improved. Therefore, the utility model solves the defects of the prior art that the unreasonable furnace wire lead fixing method will bury safety hazards in actual use; the unreasonable furnace wire lead fixing method will have an adverse effect on the furnace wire, thereby reducing the service life of the furnace body; the rapid heating and cooling furnace body outer cover is large, which makes it more difficult to fix the furnace wire lead, and is prone to long-term use reliability problems; and the continuous operation of the production line is affected due to the furnace wire lead problem, which will cause huge losses to customers.

[0036] See also Figure 1 to Figure 2 , Optionally, the internal fixation group 10 includes a square connecting plate 4 and a fixing plate 5;

[0037] A first through hole having the same outer dimensions as the inner furnace wire lead 1 is provided in the middle of the square connecting plate 4, the square connecting plate 4 is attached to the inner wall 3 of the furnace body, a groove having a size matching that of the square connecting plate 4 is provided on one end surface of the fixing plate 5, a second through hole communicating with the groove is provided on the other end surface of the fixing plate 5, and the size of the second through hole is larger than that of the first through hole, and a plurality of mounting holes are provided around the fixing plate 5;

[0038] The square connecting plate 4 is embedded in the groove, the fixing plate 5 is arranged on the inner wall 3 of the furnace body, and is fixed on the inner wall 3 of the furnace body by passing through the corresponding mounting holes by a plurality of first bolts, the inner furnace wire lead 1 passes through the second through hole, the first through hole and the furnace body in turn and extends to the outside of the furnace body, and the intersection between the inner furnace wire lead 1 and the square connecting plate 4 is welded.

[0039] Among them, the present application uses a square connecting plate 4 to axially fix the inner furnace wire lead 1, and then uses a fixing plate 5 to strengthen the fixation of the inner furnace wire lead 1 and the square connecting plate 4, and embeds the square connecting plate 4 into the groove to ensure that the square connecting plate 4 is reliably fixed.

[0040] Optionally, the material of the fixing plate 5 is a ceramic material.

[0041] The fixing plate 5 has insulation and heat insulation functions, and in addition to being made of ceramic material, other materials that meet the insulation and heat insulation functions can also be used.

[0042] Reference Figure 2 , Optionally, the mounting hole is a round hole or an oblong hole.

[0043] Among them, the limitation of the oblong hole can meet the deviation of the installation position.

[0044] Reference Figure 3 Optionally, the outer fixing group 20 includes an inner plate 6 and an outer plate 7; a plurality of first oblong holes 8 are evenly distributed and arranged along the first direction around the inner plate 6, and a plurality of second oblong holes 9 are evenly distributed and arranged along the second direction around the outer plate 7, the first direction is perpendicular to the second direction, the outer plate 7 is arranged on the inner plate 6 by passing through the corresponding second oblong holes 9 with a plurality of corresponding second bolts, and the outer plate 7 slides relative to the inner plate 6 along the second direction, the inner plate 6 is arranged on the outer cover of the furnace body by passing through the corresponding first oblong holes 8 with a plurality of corresponding third bolts, and the inner plate 6 slides relative to the outer cover of the furnace body along the first direction;

[0045] A third through hole and a fourth through hole are provided in the middle of the inner plate 6 and the outer plate 7. The outer furnace wire lead 2 passes through the third through hole and the fourth through hole in sequence and is connected to the wiring terminal.

[0046] Among them, the arrangement of the inner plate 6 and the outer plate 7 allows the outer furnace wire lead 2 to move freely in the first direction and the second direction, and its limited movement range is the size distance between the second oblong hole 9 and the first oblong hole 8, which facilitates the adjustment of the deviation of the installation position; the outer furnace wire lead 2 is connected to the wiring terminal by a bolt hole to achieve the function of supplying power to the furnace body.

[0047] Optionally, the outer plate 7 is made of ceramic material.

[0048] The outer plate 7 has insulation and heat insulation functions, and in addition to ceramic materials, other materials that meet the insulation and heat insulation functions can also be used.

[0049] Optionally, a plurality of first oblong holes 8 evenly distributed and arranged in the transverse direction are provided around the inner plate 6, and a plurality of second oblong holes 9 evenly distributed and arranged in the longitudinal direction are provided around the outer plate 7.

[0050] Among them, the arrangement of the inner plate 6 and the outer plate 7 allows the outer furnace wire lead 2 to move freely in the horizontal and longitudinal directions. The limited movement range is the size distance between the second oblong hole 9 and the first oblong hole 8, which makes it convenient to adjust the upper and lower deviations of the installation position.

[0051] Reference Figure 3Optionally, a plurality of first oblong holes 8 evenly distributed and arranged along the longitudinal direction are provided around the inner plate 6, and a plurality of second oblong holes 9 evenly distributed and arranged along the transverse direction are provided around the outer plate 7.

[0052] Among them, the arrangement of the inner plate 6 and the outer plate 7 allows the outer furnace wire lead 2 to move freely in the longitudinal and transverse directions. The limited movement range is the size distance between the second oblong hole 9 and the first oblong hole 8, which makes it convenient to adjust the upper and lower deviations of the installation position.

[0053] It should be noted that not all steps and modules in the above-mentioned processes and system structure diagrams are necessary, and some steps or modules can be ignored according to actual needs. The execution order of each step is not fixed and can be adjusted as needed. The system structure described in the above-mentioned embodiments can be a physical structure or a logical structure, that is, some modules may be implemented by the same physical entity, or some modules may be implemented by multiple physical entities, or some components in multiple independent devices may be implemented together.

[0054] In the above embodiments, the hardware module can be implemented mechanically or electrically. The above text shows and describes the present invention in detail through the accompanying drawings and preferred embodiments, but the present invention is not limited to these disclosed embodiments. Based on the above embodiments, those skilled in the art can know that the code review methods in the above different embodiments can be combined to obtain more embodiments of the present invention, and these embodiments are also within the protection scope of the present invention.

Claims

1. A furnace wire lead fixing device, characterized in that: include: internal fixation group (10) and external fixation group (20); The inner fixing group (10) and the outer fixing group (20) fix the furnace wire lead, and the furnace wire lead includes an inner furnace wire lead (1) that passes through the furnace body from the inside of the furnace body and extends to the outside of the furnace body, and an outer furnace wire lead (2) located outside the furnace body, and the inner furnace wire lead (1) and the outer furnace wire lead (2) are welded to each other. The inner fixing group (10) fixes the inner furnace wire lead (1) located inside the furnace body to the inner wall (3) of the furnace body, and the outer fixing group (20) fixes the outer furnace wire lead (2) to the outer cover of the furnace body.

2. A furnace wire lead fixing device according to claim 1, characterized in that: The internal fixing group (10) comprises a square connecting plate (4) and a fixing plate (5); A first through hole having the same outer dimensions as the inner furnace wire lead (1) is provided in the middle of the square connecting plate (4); the square connecting plate (4) is attached to the inner wall (3) of the furnace body; a groove having a size matching that of the square connecting plate (4) is provided on one end surface of the fixing plate (5); a second through hole communicating with the groove is provided on the other end surface of the fixing plate (5); and the size of the second through hole is larger than that of the first through hole; and a plurality of mounting holes are provided around the fixing plate (5); The square connecting plate (4) is embedded in the groove, the fixing plate (5) is arranged on the inner wall (3) of the furnace body and is fixed to the inner wall (3) of the furnace body by passing through the corresponding mounting holes with a plurality of first bolts, the inner furnace wire lead (1) passes through the second through hole, the first through hole and the furnace body in sequence and extends to the outside of the furnace body, and the intersection between the inner furnace wire lead (1) and the square connecting plate (4) is welded.

3. A furnace wire lead fixing device according to claim 2, characterized in that: The material of the fixing plate (5) is ceramic material.

4. A furnace wire lead fixing device according to claim 3, characterized in that: The mounting hole is a round hole or an oblong hole.

5. A furnace wire lead fixing device according to claim 4, characterized in that: The external fixing group (20) comprises an inner plate (6) and an outer plate (7); the inner plate (6) is provided with a plurality of first oblong holes (8) uniformly distributed and arranged along a first direction around the periphery, the outer plate (7) is provided with a plurality of second oblong holes (9) uniformly distributed and arranged along a second direction around the periphery, the first direction is arranged perpendicular to the second direction, the outer plate (7) is arranged on the inner plate (6) by means of a plurality of corresponding second bolts passing through the corresponding second oblong holes (9), and the outer plate (7) slides relative to the inner plate (6) along the second direction, the inner plate (6) is arranged on the furnace body outer cover by means of a plurality of corresponding third bolts passing through the corresponding first oblong holes (8), and the inner plate (6) slides relative to the furnace body outer cover along the first direction; The inner plate (6) and the outer plate (7) are both provided with a third through hole and a fourth through hole in the middle, and the outer furnace wire lead (2) passes through the third through hole and the fourth through hole in sequence and is connected to the connection terminal.

6. A furnace wire lead fixing device according to claim 5, characterized in that: The outer plate (7) is made of ceramic material.

7. A furnace wire lead fixing device according to claim 6, characterized in that: The inner plate (6) is provided with a plurality of first oblong holes (8) which are evenly distributed and arranged in the transverse direction around the periphery, and the outer plate (7) is provided with a plurality of second oblong holes (9) which are evenly distributed and arranged in the longitudinal direction around the periphery.

8. A furnace wire lead fixing device according to claim 7, characterized in that: The inner plate (6) is provided with a plurality of first oblong holes (8) evenly distributed and arranged in the longitudinal direction around the periphery, and the outer plate (7) is provided with a plurality of second oblong holes (9) evenly distributed and arranged in the transverse direction around the periphery.

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