Furnace body structure

Abstract

The utility model discloses a furnace body structure, which is used for carrying out annealing treatment on a wafer and comprises a cabin body with a hollow cavity and a cooling pipe group embedded in the cabin body, the cooling pipe group comprises a main cooling pipeline and a secondary cooling pipeline which are communicated with each other and surround the hollow cavity, the main cooling pipeline and the secondary cooling pipeline are arranged in a staggered manner, and a liquid inlet communicated with the main cooling pipeline and a liquid outlet communicated with the secondary cooling pipeline are formed in the side part of the cabin body; liquid flows into the main cooling pipeline from the liquid inlet, flows in the main cooling pipeline in an enclosed hollow cavity, flows into the secondary cooling pipeline from the communication position of the main cooling pipeline and the secondary cooling pipeline, flows in the secondary cooling pipeline in an enclosed hollow cavity and flows out from the liquid outlet. According to the utility model, the rapid cooling of the wafer is realized, and the cooling uniformity is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of heat treatment, in particular to a furnace body structure. Background Art

[0002] In the manufacture of semiconductor devices, the wafer needs to be heat treated to eliminate defects inside the wafer and optimize the grain boundary structure and crystal quality. Annealing is a common wafer heat treatment method. Annealing furnace is a common equipment used for annealing wafers. By heating the wafer and keeping it warm under certain conditions, the lattice structure can be changed, impurities and stress can be eliminated, and the electrical properties and structural integrity of the wafer can be improved.

[0003] The basic structure of a wafer annealing furnace usually consists of a heating chamber, a control system, a feeding device and a discharging device. The heating chamber is used to uniformly heat and insulate the wafer, and the heating temperature, time, atmosphere and other parameters are controlled by the control system to achieve the desired annealing effect for the wafer. The air pressure during the wafer annealing process needs to be controlled within a certain range to ensure that the wafer is heated evenly and to avoid problems such as oxidation and contamination. After the wafer is heated and insulated, the wafer needs to be quickly cooled to avoid excessive annealing of the wafer. There are two existing wafer cooling methods. One is to take the wafer out of the wafer annealing furnace and quickly cool it down through a cooling element. This method has the disadvantage of being inconvenient and is also easy to damage the wafer in the process of taking out the wafer at high temperature. The other is to configure a cooling element in the wafer annealing furnace. Due to the improper configuration position of the cooling element, the temperature distribution uniformity and the heat dissipation of the wafer annealing furnace are insufficient, resulting in poor wafer cooling effect.

[0004] In view of this, it is necessary to improve the wafer annealing furnace in the prior art to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to disclose the inconvenience of taking out wafers for cooling in the existing wafer cooling method, and the problem of poor wafer cooling effect due to improper configuration position of cooling elements in a wafer annealing furnace, which leads to insufficient uniformity of temperature distribution and insufficient heat dissipation of the wafer annealing furnace.

[0006] To achieve the above-mentioned purpose, the utility model shows a furnace structure for annealing a wafer, and the furnace structure comprises:

[0007] A cabin having a hollow cavity and a cooling pipe group embedded in the cabin;

[0008] The cooling pipe group includes: a main cooling pipe and a secondary cooling pipe that are connected and arranged to enclose the hollow cavity, the main cooling pipe and the secondary cooling pipe are staggered, and the side of the cabin is provided with a liquid inlet connected to the main cooling pipe and a liquid outlet connected to the secondary cooling pipe;

[0009] The liquid flows into the main cooling pipeline from the liquid inlet, flows in the main cooling pipeline to enclose the hollow cavity, and flows into the secondary cooling pipeline from the connection between the main cooling pipeline and the secondary cooling pipeline, flows in the secondary cooling pipeline to enclose the hollow cavity, and flows out from the liquid outlet.

[0010] As a further improvement of the utility model, the main cooling pipeline includes: a first main cooling pipe and a second main cooling pipe respectively arranged on both sides of the cabin in the vertical direction and enclosing the hollow cavity;

[0011] The liquid inlet includes: a first liquid inlet and a second liquid inlet respectively arranged on the first main cooling tube and the second main cooling tube, so as to input liquid into the first main cooling tube and the second main cooling tube respectively.

[0012] As a further improvement of the present invention, the first main cooling pipe comprises: a first main cooling pipe section and a second main cooling pipe section which semi-enclose the hollow cavity, and the second main cooling pipe comprises: a third main cooling pipe section and a fourth main cooling pipe section which semi-enclose the hollow cavity;

[0013] The first liquid inlet is arranged at the front end of the first main cooling pipe segment and the front end of the second main cooling pipe segment to connect the first main cooling pipe segment with the second main cooling pipe segment, and the second liquid inlet is arranged at the front end of the third main cooling pipe segment and the front end of the fourth main cooling pipe segment to connect the third main cooling pipe segment with the fourth main cooling pipe segment.

[0014] As a further improvement of the utility model, the secondary cooling pipeline includes: a first cooling pipe and a second cooling pipe respectively arranged on both sides of the cabin in the vertical direction and enclosing the hollow cavity, and the first cooling pipe and the first main cooling pipe are arranged on the same side of the cabin in the vertical direction, and the second cooling pipe and the second main cooling pipe are arranged on the same side of the cabin in the vertical direction;

[0015] The liquid outlet includes: a first liquid outlet and a second liquid outlet arranged between the first cooling tube and the second cooling tube, so that the first cooling tube and the second cooling tube can output liquid.

[0016] As a further improvement of the utility model, the first cooling pipe comprises: a first cooling pipe section and a second cooling pipe section which semi-enclose the hollow cavity, and the second cooling pipe comprises: a third cooling pipe section and a fourth cooling pipe section which semi-enclose the hollow cavity;

[0017] The first liquid outlet is arranged at the end of the first cooling pipe segment and the end of the third cooling pipe segment to connect the first cooling pipe segment with the third cooling pipe segment, and the second liquid outlet is arranged at the end of the second cooling pipe segment and the end of the fourth cooling pipe segment to connect the second cooling pipe segment with the fourth cooling pipe segment.

[0018] As a further improvement of the present invention, the end of the first main cooling pipe segment is connected to the front end of the first cooling pipe segment, the end of the second main cooling pipe segment is connected to the front end of the second cooling pipe segment, the end of the third main cooling pipe segment is connected to the front end of the third cooling pipe segment, and the end of the fourth main cooling pipe segment is connected to the front end of the fourth cooling pipe segment.

[0019] As a further improvement of the present invention, the temperature corresponding to the liquid in the main cooling pipeline is lower than the temperature corresponding to the liquid in the secondary cooling pipeline.

[0020] As a further improvement of the present invention, a plurality of sensors for detecting the surface temperature of the cabin are arranged on the outer side of the cabin;

[0021] At least one first auxiliary pipe is connected to the side of the first cooling pipe segment, at least one second auxiliary pipe is connected to the side of the second cooling pipe segment, at least one third auxiliary pipe is connected to the side of the third main cooling pipe segment, and at least one fourth auxiliary pipe is connected to the side of the fourth main cooling pipe segment.

[0022] As a further improvement of the present invention, the furnace body structure also includes: a heat conduction plate arranged on the top of the cabin body, a receiving opening for accommodating the heat conduction plate is opened on the top of the cabin body, and a first sealing ring is arranged in the receiving opening to seal the heat conduction plate and the cabin body, and the first main cooling pipe is arranged on the side of the first cooling pipe close to the first sealing ring.

[0023] As a further improvement of the utility model, a plurality of longitudinally arranged heating pipes are embedded in the bottom end of the side of the cabin, and a second sealing ring is arranged around the outer side of the heating pipe to seal the heating pipe and the cabin, and the second main cooling pipe is arranged on the side of the secondary cooling pipe close to the second sealing ring.

[0024] Compared with the prior art, the beneficial effects of the utility model are:

[0025] A main cooling pipeline and a secondary cooling pipeline are embedded in the cabin body, and the main cooling pipeline and the secondary cooling pipeline are both series pipelines and flow in a single enclosed hollow cavity, thereby increasing the flow rate of liquid inside the main cooling pipeline and the secondary cooling pipeline and avoiding blockage, thereby ensuring that there is no heat accumulation problem inside the cooling pipe group and improving the heat dissipation of the cooling pipe group; at the same time, the main cooling pipeline and the secondary cooling pipeline form a double series pipeline to further increase the flow rate inside the cooling pipe group, thereby ensuring the cooling effect of the cooling pipe group on the cabin body; in addition, the main cooling pipeline and the secondary cooling pipeline are staggered in the vertical, transverse and longitudinal directions, thereby ensuring the uniformity of cooling the cabin body by the main cooling pipeline and the secondary cooling pipeline, thereby solving the inconvenience of taking out the wafer for cooling in the existing wafer cooling method, and solving the problem of insufficient uniformity of temperature distribution and heat dissipation of the wafer annealing furnace due to improper configuration position of the cooling element in the wafer annealing furnace, thereby causing the problem of poor wafer cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a three-dimensional diagram of the furnace structure shown in the utility model at a certain viewing angle;

[0027] Figure 2 A three-dimensional diagram of the cabin shown in the utility model at a viewing angle;

[0028] Figure 3 This is a perspective view of the cabin shown in the present invention from a main viewing angle;

[0029] Figure 4 A perspective view of the cabin shown in the present invention at a certain viewing angle;

[0030] Figure 5 A perspective view of the cabin shown in the present invention at another viewing angle;

[0031] Figure 6 A perspective view of the cabin shown in the present invention at another viewing angle;

[0032] Figure 7 It is a perspective view of the cabin body shown in the present invention from a rear perspective. DETAILED DESCRIPTION

[0033] The present invention is described in detail below in conjunction with the various embodiments shown in the accompanying drawings, but it should be noted that these embodiments are not limitations of the present invention, and any equivalent transformations or substitutions in functions, methods, or structures made by ordinary technicians in the field based on these embodiments are all within the scope of protection of the present invention.

[0034] It should be understood that, in the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present technical solution and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present technical solution.

[0035] It should be noted that, in this application, "lateral" refers to the Figure 1 The X-axis is the direction of the vertical axis. Figure 1 The Y-axis is shown in the vertical direction. Figure 1 The direction of the Z axis shown in .

[0036] Ginseng Figures 1 to 7 As shown, the utility model shows a specific implementation of a furnace structure 10, and the furnace structure 10 is used to anneal wafers. Specifically, the wafers can be placed inside a chamber 11 included in the furnace structure 10, and the wafers are heated by heating elements (for example, the heating tubes described below) included in the furnace structure 10, and the wafers are kept warm in the chamber 11. After being kept warm, the wafers are cooled by a cooling tube group 12 included in the furnace structure 10, thereby completing the entire annealing process of the wafers.

[0037] Ginseng Figure 1 and Figure 2As shown, the furnace structure 10 includes: a chamber 11 with a hollow cavity A, a heating chamber 13 disposed on the top of the chamber 11, and a heat conducting plate (not shown) disposed between the chamber 11 and the heating chamber 13. A receiving hole 111 for receiving the heat conducting plate is provided on the top of the chamber 11, and a first sealing ring 112 is provided in the receiving hole 111. The sealing ring 112 is provided on the periphery of the heat conducting plate to seal the heat conducting plate and the chamber 11. An opening 114 for wafer placement is provided on the side of the chamber 11, and a support frame 113 is provided in the chamber 11 to place the wafer. The wafer is placed on the support frame 113 from the opening 114 for annealing. A plurality of heating tubes 131 are arranged horizontally in the heating chamber 13, and the material of the heat conducting plate can be quartz. Heat is dissipated through the heating tube and transported to the hollow cavity A formed by the chamber 11 through the heat conducting plate, so as to heat the wafer placed on the support frame 113, and the heat is locked in the hollow cavity A through the sealing of the sealing ring 112. At this time, the sealing ring 112 will also be affected by the heat dissipated by the heating tube and the temperature will rise. Then, the wafer placed on the support frame 113 is kept warm under certain temperature conditions. After the heat preservation, the wafer is quickly cooled by the cooling tube group 12 embedded in the chamber 11, thereby realizing the annealing treatment of the wafer. At the same time, a plurality of longitudinally arranged heating tubes 115 are embedded in the bottom of the chamber 11, and a second sealing ring (not shown) is arranged around the outer side of the heating tube 115 to seal the heating tube 115 and the chamber 11. Therefore, when heating the wafer, the wafer can be heated on both sides of the chamber 11 vertically through the heating chamber 13 and the heating tube 115 to further ensure the uniformity of heating.

[0038] It should be noted that the cooling tube group 12 is embedded in the cabin 11 to quickly cool down the wafers placed in the cabin 11. In the present application, the cooling tube group 12 can be understood as a strip hole dug in the cabin 11, and the strip holes are connected and combined to form the cooling tube group 12. It can also be understood as a solid pipe segment embedded in the cabin 11, and the pipe segments are connected and combined to form the cooling tube group 12. In the following description, the cooling tube group 12 formed by connecting and combining pipe segments is used as an example for exemplary description, but the protection scope of the present application cannot be limited by this.

[0039] Ginseng Figure 3As shown, the cooling pipe group 12 includes: a main cooling pipeline 121 and a secondary cooling pipeline 122 that are connected and arranged to enclose a hollow cavity A. The main cooling pipeline 121 and the secondary cooling pipeline 122 are arranged in a staggered manner, and a liquid inlet 123 connected to the main cooling pipeline 121 and a liquid outlet 124 connected to the secondary cooling pipeline 122 are provided on the side of the cabin 11. The liquid flows into the main cooling pipeline 121 from the liquid inlet 123, flows in the main cooling pipeline 121 to enclose the hollow cavity A, and flows into the secondary cooling pipeline 122 from the connection between the main cooling pipeline 121 and the secondary cooling pipeline 122, flows in the secondary cooling pipeline 122 to enclose the hollow cavity A, and flows out from the liquid outlet 124, thereby completing the flow of liquid inside the cabin 11. The main cooling pipeline 121 is a pipeline directly connected to the liquid inlet 123, and the secondary cooling pipeline 122 is a pipeline directly connected to the liquid outlet 124, that is, liquid flows into the main cooling pipeline 121 and flows out of the secondary cooling pipeline 122. The main cooling pipeline 121 and the secondary cooling pipeline 122 cool the chamber 11, thereby cooling the wafers placed inside the chamber 11.

[0040] It should be noted that the aforementioned main cooling pipeline 121 and the secondary cooling pipeline 122 are both series pipelines and flow in a single enclosed hollow cavity A, thereby increasing the flow rate of the liquid inside the main cooling pipeline 121 and the secondary cooling pipeline 122 and avoiding blockage, thereby ensuring that there is no heat accumulation problem inside the cooling pipe group 12 and improving the heat dissipation of the cooling pipe group 12; at the same time, the main cooling pipeline 121 and the secondary cooling pipeline 122 form a double series pipeline to further increase the flow rate inside the cooling pipe group 12, thereby ensuring that the cooling pipe group 12 heats the cabin 11 Cooling effect; in addition, the main cooling pipeline 121 and the secondary cooling pipeline 122 are staggered in the vertical direction, the horizontal direction and the longitudinal direction, thereby ensuring the uniformity of cooling the chamber 11 by the main cooling pipeline 121 and the secondary cooling pipeline 122, thereby solving the inconvenience of taking out the wafer for cooling in the existing wafer cooling method, and configuring the cooling element in the wafer annealing furnace. Due to the improper configuration position of the cooling element, the temperature distribution uniformity and the heat dissipation of the wafer annealing furnace are insufficient, resulting in the problem of poor wafer cooling effect.

[0041] Ginseng Figures 2 to 4As shown, the main cooling pipeline 121 includes: a first main cooling pipe 1211 and a second main cooling pipe 1212 respectively arranged on both sides of the cabin 11 in the vertical direction and forming an enclosed hollow cavity A, and the liquid inlet 123 includes: a first liquid inlet 1231 and a second liquid inlet 1232, so as to respectively input liquid into the first main cooling pipe 1211 and the second main cooling pipe 1212. The first main cooling pipe 1211 and the second main cooling pipe 1212 are respectively arranged on both sides of the cabin 11 in the vertical direction, and liquid is simultaneously input into the first main cooling pipe 1211 and the second main cooling pipe 1212 through the first liquid inlet 1231 and the second liquid inlet 1232, so as to cool the cabin 11 at both sides of the cabin 11 in the vertical direction, thereby ensuring the uniformity of cooling and improving the cooling speed of the cabin 11. Among them, the vertical sides of the cabin 11 refer to the side of the cabin 11 close to the top surface along the vertical direction and the side of the cabin 11 close to the bottom surface along the vertical direction.

[0042] Similarly, the secondary cooling pipeline 122 includes: a first cooling pipe 1221 and a second cooling pipe 1222 which are respectively arranged on the vertical sides of the cabin body 11 and form an enclosed hollow cavity A, and the first cooling pipe 1221 and the first main cooling pipe 1211 are arranged on the same vertical side of the cabin body 11, and the second cooling pipe 1222 and the second main cooling pipe 1212 are arranged on the same vertical side of the cabin body 11, that is, the first cooling pipe 1221 and the first main cooling pipe 1211 are arranged on the side of the cabin body 11 close to the top surface along the vertical direction or the side of the cabin body 11 close to the bottom surface along the vertical direction, and the second cooling pipe 1222 and the second main cooling pipe 1212 are arranged on the side of the cabin body 11 close to the bottom surface along the vertical direction or the side of the cabin body 11 close to the top surface along the vertical direction. The liquid outlet 124 includes: a first liquid outlet 1241 and a second liquid outlet 1242 disposed between the first cooling pipe 1221 and the second cooling pipe 1211, for the first cooling pipe 1221 and the second cooling pipe 1222 to output liquid. The first cooling pipe 1221 and the second cooling pipe 1222 are disposed on both vertical sides of the cabin 11, so as to cool the cabin 11 at both vertical sides of the cabin 11, thereby ensuring the uniformity of cooling and increasing the cooling speed of the cabin 11, and the first cooling pipe 1221 and the second cooling pipe 1222 are simultaneously supplied with liquid output through the first liquid outlet 1241 and the second liquid outlet 1242, so as to increase the speed of liquid being discharged from the cooling pipe group 12, thereby increasing the flow speed of the liquid in the cooling pipe group 12, so as to further increase the cooling effect of the cooling tank group 12 on the cabin 11.

[0043] In the following description, the example in which the first main cooling pipe 1211 and the first cooling pipe 1221 are arranged on the side of the cabin body 11 close to the top surface in the vertical direction, and the second main cooling pipe 1212 and the second cooling pipe 1212 are arranged on the side of the cabin body 11 close to the bottom surface in the vertical direction is used for exemplary description.

[0044] Specifically, Figures 3 to 6 As shown, the first main cooling pipe 1211 includes: a first main cooling pipe section 1213 and a second main cooling pipe section 1214 which semi-enclose the hollow cavity A, and the second main cooling pipe 1212 includes: a third main cooling pipe section 1215 and a fourth main cooling pipe section 1216 which semi-enclose the hollow cavity A. In order to ensure the uniformity of cooling the cabin body 11, the first main cooling pipe section 1213, the second main cooling pipe section 1214, the third main cooling pipe section 1215 and the fourth main cooling pipe section 1216 are all configured to semi-enclose the hollow cavity A, so that the first main cooling pipe section 1213 and the second main cooling pipe section 1214 jointly enclose the hollow cavity A, and specifically enclose one side of the cabin body 11 close to the top surface in the vertical direction, and the third main cooling pipe section 1215 and the fourth main cooling pipe section 1216 jointly enclose the hollow cavity A, and specifically enclose one side of the cabin body 11 close to the bottom surface in the vertical direction. The first main cooling pipe section 1213 and the second main cooling pipe section 1214 share a first liquid inlet 1231, and the first liquid inlet 1231 is arranged at the front end 12131 of the first main cooling pipe section 1213 and the front end 12141 of the second main cooling pipe section 1214 to connect the first main cooling pipe section 1213 with the second main cooling pipe section 1214; similarly, the third main cooling pipe section 1215 and the fourth main cooling pipe section 1216 share a second liquid inlet 1232, and the second liquid inlet 1232 is arranged at the front end 12151 of the third main cooling pipe section 1215 and the front end 12161 of the fourth main cooling pipe section 1216 to connect the third main cooling pipe section 1215 with the fourth main cooling pipe section 1216. At the same time, the first main cooling pipe section 1213 and the second main cooling pipe section 1214 are located in the same plane (i.e., the plane formed by the transverse direction and the longitudinal direction), the third main cooling pipe section 1215 and the fourth main cooling pipe section 1216 are located in the same plane (i.e., the plane formed by the transverse direction and the longitudinal direction), liquid is simultaneously input into the first main cooling pipe section 1213 and the second main cooling pipe section 1214 through the first liquid inlet 1231, and liquid is simultaneously input into the third main cooling pipe section 1215 and the fourth main cooling pipe section 1216 through the second liquid inlet 1232 to ensure uniform liquid input, thereby further ensuring uniform cooling.

[0045] The first cooling pipe 1221 includes: a first cooling pipe section 1223 and a second cooling pipe section 1224 which semi-enclose the hollow cavity A, and the second cooling pipe 1222 includes: a third cooling pipe section 1225 and a fourth cooling pipe section 1226 which semi-enclose the hollow cavity A. In order to ensure the uniformity of cooling the cabin 11, the first cooling pipe section 1223, the second cooling pipe section 1224, the third cooling pipe section 1225 and the fourth cooling pipe section 1226 are all configured to semi-enclose the hollow cavity A, so that the first cooling pipe section 1223 and the second cooling pipe section 1224 jointly enclose the hollow cavity A, and specifically enclose the side of the cabin 11 close to the top surface in the vertical direction, and the third cooling pipe section 1225 and the fourth cooling pipe section 1226 jointly enclose the hollow cavity A, and specifically enclose the side of the cabin 11 close to the bottom surface in the vertical direction. The first cooling pipe segment 1223 and the third cooling pipe segment 1225 share a first liquid outlet 1241, and the first liquid outlet 1241 is set at the end 12232 of the first cooling pipe segment 1223 and the end 12252 of the third cooling pipe segment 1225 to connect the first cooling pipe segment 1223 and the third cooling pipe segment 1225; similarly, the second cooling pipe segment 1224 and the fourth cooling pipe segment 1226 share a second liquid outlet 1242, and the second liquid outlet 1242 is set at the end 12242 of the second cooling pipe segment 1224 and the end 12262 of the fourth cooling pipe segment 1226 to connect the second cooling pipe segment 1224 and the fourth cooling pipe segment 1226. At the same time, the first cooling pipe segment 1223 and the second cooling pipe segment 1224 are located in the same plane (i.e., the plane formed by the transverse direction and the longitudinal direction), and the third cooling pipe segment 1225 and the fourth cooling pipe segment 1226 are located in the same plane (i.e., the plane formed by the transverse direction and the longitudinal direction). The first liquid outlet 1241 is used to simultaneously supply liquid to the first cooling pipe segment 1223 and the second cooling pipe segment 1224, and the second liquid outlet 1242 is used to simultaneously supply liquid to the third cooling pipe segment 1225 and the fourth cooling pipe segment 1226, so as to ensure uniform liquid output, thereby further ensuring uniform cooling.

[0046] It should be noted that the front end and the end of each of the aforementioned cooling pipe sections are defined according to the flow direction of the liquid in the cooling pipe group 12. The end where the liquid flows into the cooling pipe section is the front end, and the end where the liquid flows out of the cooling pipe section is the end. The liquid can be a coolant, etc., and this embodiment does not make specific limitations on this.

[0047] Ginseng Figure 7As shown, for the specific connection mode of the main cooling pipeline 121 and the secondary cooling pipeline 122, the end 12132 of the first main cooling pipe section 1213 is connected to the front end 12231 of the first cooling pipe section 1223, the end 12142 of the second main cooling pipe section 1214 is connected to the front end 12241 of the second cooling pipe section 1224, the end 12152 of the third main cooling pipe section 1215 is connected to the front end 12251 of the third cooling pipe section 1225, and the end 12162 of the fourth main cooling pipe section 1216 is connected to the front end 12261 of the fourth cooling pipe section 1226. More specifically, in order to facilitate the staggered arrangement of the main cooling pipeline 121 and the secondary cooling pipeline 122, a connecting pipe section is arranged between the two cooling pipe sections to achieve this. A first connecting pipe section 1251 is set between the first main cooling pipe section 1213 and the first cooling pipe section 1223 to achieve connection, a second connecting pipe section 1252 is set between the second main cooling pipe section 1214 and the second cooling pipe section 1224 to achieve connection, a third connecting pipe section 1253 is set between the third main cooling pipe section 1215 and the third cooling pipe section 1225 to achieve connection, and a fourth connecting pipe section 1254 is set between the fourth main cooling pipe section 1216 and the fourth cooling pipe section 1226 to achieve connection.

[0048] As for the flow direction of the liquid in the cooling tube group 12, the liquid is input into the first main cooling tube section 1213 from the first liquid inlet 1231, flows in the semi-enclosed hollow cavity A in the first main cooling tube section 1213, and flows into the first cooling tube section 1223 through the first connecting tube section 1251, and flows in the semi-enclosed hollow cavity A in the first cooling tube section 1223, and finally flows out from the first liquid outlet 1241; at the same time, the liquid is input into the second main cooling tube section 1214 from the first liquid inlet 1231, flows in the semi-enclosed hollow cavity A in the second main cooling tube section 1214, and flows into the second cooling tube section 1224 through the second connecting tube section 1252, flows in the semi-enclosed hollow cavity A in the second cooling tube section 1224, and finally flows out from the second liquid outlet At the same time, the liquid is input into the third main cooling pipe section 1215 from the second liquid inlet 1232, flows in the semi-enclosed hollow cavity A in the third main cooling pipe section 1215, and flows into the tertiary cooling pipe section 1225 through the third connecting pipe section 1253, flows in the semi-enclosed hollow cavity A in the tertiary cooling pipe section 1225, and finally flows out from the first liquid outlet 1241; at the same time, the liquid is input into the fourth main cooling pipe section 1216 from the second liquid inlet 1232, flows in the semi-enclosed hollow cavity A in the fourth main cooling pipe section 1216, and flows into the fourth connecting pipe section 1254, flows in the semi-enclosed hollow cavity A in the fourth cooling pipe section 1226, and finally flows out from the second liquid outlet 1242.

[0049] In the present application, the temperature corresponding to the liquid in the main cooling pipe 121 is lower than the temperature corresponding to the liquid in the secondary cooling pipe 122, and the first main cooling pipe 1211 is arranged on the side of the first cooling pipe 1221 close to the first sealing ring 112, and the second main cooling pipe 1212 is arranged on the side of the second cooling pipe 1222 close to the second sealing ring. Therefore, the cabin 11 is first cooled by the main cooling pipe 121 whose temperature is compared with that of the secondary cooling pipe 122 to ensure the final cooling effect.

[0050] Ginseng Figure 5 and Figure 6 As shown, a plurality of sensors (not shown) for detecting the surface temperature of the cabin body 11 are arranged on the outer side of the cabin body 11, at least one first auxiliary pipe 1261 is opened on the side of the first main cooling pipe section 1213 and the first cooling pipe section 1223, at least one second auxiliary pipe 1262 is opened on the side of the second main cooling pipe section 1214 and the second cooling pipe section 1224, at least one third auxiliary pipe (not shown) is opened on the side of the third main cooling pipe section 1215 and the third cooling pipe section 1225, and at least one fourth auxiliary pipe (not shown) is opened on the side of the fourth main cooling pipe section 1216 and the fourth cooling pipe section 1226. When the sensor detects that there is a difference in the surface temperature of the cabin body 11, the first main cooling pipe section 1213 and the first cooling pipe section 1223, the second main cooling pipe section 1214 and the second cooling pipe section 1224, the third main cooling pipe section 1215 and the third cooling pipe section 1225, and the fourth main cooling pipe section 1216 and the fourth cooling pipe section 1226 can be quickly opened through the first auxiliary pipe 1261, the second auxiliary pipe 1262, the third auxiliary pipe and the fourth auxiliary pipe, so as to improve the temperature of the liquid in the cooling pipe group 12 through the rapid circulation of the main cooling pipeline 121 and the secondary cooling pipeline 122, thereby achieving the purpose of improving the internal temperature of the cabin body 11 and further ensuring the uniformity of cooling of the cabin body 11.

[0051] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

[0052] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A furnace structure for annealing a wafer, characterized in that: The furnace structure comprises: A cabin having a hollow cavity and a cooling pipe group embedded in the cabin; The cooling pipe group includes: a main cooling pipe and a secondary cooling pipe that are connected and arranged to enclose the hollow cavity, the main cooling pipe and the secondary cooling pipe are staggered, and the side of the cabin is provided with a liquid inlet connected to the main cooling pipe and a liquid outlet connected to the secondary cooling pipe; The liquid flows into the main cooling pipeline from the liquid inlet, flows in the main cooling pipeline to enclose the hollow cavity, and flows into the secondary cooling pipeline from the connection between the main cooling pipeline and the secondary cooling pipeline, flows in the secondary cooling pipeline to enclose the hollow cavity, and flows out from the liquid outlet.

2. The furnace structure according to claim 1, characterized in that: The main cooling pipeline comprises: a first main cooling pipe and a second main cooling pipe which are respectively arranged on both sides of the cabin in the vertical direction and surround the hollow cavity; The liquid inlet includes: a first liquid inlet and a second liquid inlet respectively arranged on the first main cooling tube and the second main cooling tube, so as to input liquid into the first main cooling tube and the second main cooling tube respectively.

3. The furnace structure according to claim 2, characterized in that: The first main cooling pipe comprises: a first main cooling pipe section and a second main cooling pipe section which semi-enclose the hollow cavity; the second main cooling pipe comprises: a third main cooling pipe section and a fourth main cooling pipe section which semi-enclose the hollow cavity; The first liquid inlet is arranged at the front end of the first main cooling pipe segment and the front end of the second main cooling pipe segment to connect the first main cooling pipe segment with the second main cooling pipe segment, and the second liquid inlet is arranged at the front end of the third main cooling pipe segment and the front end of the fourth main cooling pipe segment to connect the third main cooling pipe segment with the fourth main cooling pipe segment.

4. The furnace structure according to claim 3, characterized in that: The secondary cooling pipeline includes: a first cooling pipe and a second cooling pipe respectively arranged on both sides of the cabin in the vertical direction and enclosing the hollow cavity, and the first cooling pipe and the first main cooling pipe are arranged on the same side of the cabin in the vertical direction, and the second cooling pipe and the second main cooling pipe are arranged on the same side of the cabin in the vertical direction; The liquid outlet includes: a first liquid outlet and a second liquid outlet arranged between the first cooling tube and the second cooling tube, so that the first cooling tube and the second cooling tube can output liquid.

5. The furnace structure according to claim 4, characterized in that: The first cooling pipe comprises: a first cooling pipe section and a second cooling pipe section which half enclose the hollow cavity; the second cooling pipe comprises: a third cooling pipe section and a fourth cooling pipe section which half enclose the hollow cavity; The first liquid outlet is arranged at the end of the first cooling pipe segment and the end of the third cooling pipe segment to connect the first cooling pipe segment with the third cooling pipe segment, and the second liquid outlet is arranged at the end of the second cooling pipe segment and the end of the fourth cooling pipe segment to connect the second cooling pipe segment with the fourth cooling pipe segment.

6. The furnace structure according to claim 5, characterized in that: The end of the first main cooling pipe section is connected to the front end of the first cooling pipe section, the end of the second main cooling pipe section is connected to the front end of the second cooling pipe section, the end of the third main cooling pipe section is connected to the front end of the third cooling pipe section, and the end of the fourth main cooling pipe section is connected to the front end of the fourth cooling pipe section.

7. The furnace structure according to claim 6, characterized in that: The temperature corresponding to the liquid in the primary cooling pipeline is lower than the temperature corresponding to the liquid in the secondary cooling pipeline.

8. The furnace structure according to claim 7, characterized in that: A plurality of sensors for detecting the surface temperature of the cabin are arranged on the outer side of the cabin; At least one first auxiliary pipe is connected to the side of the first cooling pipe segment, at least one second auxiliary pipe is connected to the side of the second cooling pipe segment, at least one third auxiliary pipe is connected to the side of the third main cooling pipe segment, and at least one fourth auxiliary pipe is connected to the side of the fourth main cooling pipe segment.

9. The furnace structure according to claim 7, characterized in that: The furnace body structure also includes: a heat conduction plate arranged on the top of the cabin, a receiving opening for accommodating the heat conduction plate is opened on the top of the cabin, and a first sealing ring is arranged in the receiving opening to seal the heat conduction plate and the cabin, and the first main cooling pipe is arranged on the side of the first cooling pipe close to the first sealing ring.

10. The furnace structure according to claim 7, characterized in that: A plurality of longitudinally arranged heating tubes are embedded in the bottom end of the side of the cabin, and a second sealing ring is arranged around the outer side of the heating tube to seal the heating tube and the cabin. The second main cooling tube is arranged on the side of the secondary cooling tube close to the second sealing ring.

Images