Diaphragm valve suitable for semiconductor processing equipment

Abstract

The utility model relates to a diaphragm valve suitable for semiconductor processing equipment, which comprises a valve body, a flow-in channel and a flow-out channel are arranged on the valve body, a containing cavity is arranged in the valve body, a control cavity communicated with the flow-in channel and the flow-out channel is arranged at the bottom of the containing cavity, and a diaphragm assembly is arranged in the control cavity. A diaphragm assembly is arranged on the diaphragm assembly and connected with a driven shaft assembly, the driven shaft assembly is in threaded connection with a driving shaft assembly, a limiting assembly is arranged on the periphery of the diaphragm assembly, the outer side of the diaphragm assembly is connected with the limiting assembly, and a rotary knob assembly is arranged at the upper end of the driving shaft assembly. Therefore, the conduction control of the final diaphragm assembly can be realized through the accurate up-and-down displacement of the driving shaft assembly, and the convenient control of manually rotating the knob assembly can be met. The diaphragm assembly is driven to move through moderate deformation of the diaphragm assembly, necessary buffer release is achieved, and high-precision linear adjustment is met.

Description

Technical Field

[0001] The utility model relates to a diaphragm valve, in particular to a diaphragm valve suitable for semiconductor processing equipment. Background Art

[0002] For semiconductor processing equipment, it is often necessary to introduce some liquid medicine to participate in processing and manufacturing. In order to control the flow of liquid medicine, a pump device is often configured. However, the existing pump device is only used to achieve the conduction control of the liquid medicine, and cannot accurately meet the control of the liquid medicine conduction flow. If the flow control needs to be achieved, it is necessary to add an additional flow meter control module to the pump device, and the implementation cost is relatively high. In addition, the existing conduction flow control cannot achieve linear high-precision adjustment, and it is easy to have excessive flow at the moment of opening.

[0003] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a diaphragm valve suitable for semiconductor processing equipment to make it more valuable for industrial use. Utility Model Content

[0004] In order to solve the above technical problems, the purpose of the utility model is to provide a diaphragm valve suitable for semiconductor processing equipment.

[0005] The utility model is applicable to a diaphragm valve of semiconductor processing equipment, comprising a valve body, on which an inflow channel and an outflow channel are arranged, wherein: an accommodating chamber is arranged in the valve body, a control chamber which is in communication with the inflow channel and the outflow channel is arranged at the bottom of the accommodating chamber, a diaphragm assembly is arranged in the control chamber, a diaphragm assembly is arranged on the diaphragm assembly, a driven shaft assembly is connected to the diaphragm assembly, a driving shaft assembly is threadedly connected to the driven shaft assembly, a limiting assembly is arranged on the periphery of the diaphragm assembly, the outer side of the diaphragm assembly is connected to the limiting assembly, and the upper end of the driving shaft assembly is provided with a A knob assembly is provided, and the limit assembly includes a lower stroke limit ring, an upper stroke limit ring is stacked on the lower stroke limit ring, and the diaphragm assembly passes through the lower stroke limit ring and the upper stroke limit ring respectively, and the outer side of the diaphragm assembly is clamped and limited by the lower stroke limit ring and the upper stroke limit ring; a non-circular through hole is provided in the upper stroke limit ring, and an embedding plane is provided at the lower end of the driven shaft assembly, and the embedding plane is embedded in the non-circular through hole, when the driving shaft assembly rotates clockwise, the driven shaft assembly moves downward, and when the driving shaft assembly rotates counterclockwise, the driven shaft assembly moves upward.

[0006] Furthermore, the above-mentioned diaphragm valve suitable for semiconductor processing equipment, wherein the inlet channel and the outflow channel are both L-shaped, inlet holes and outlet holes are provided on both sides of the valve body, the inlet channel is connected to the inlet hole, and the outflow channel is connected to the outlet hole.

[0007] Furthermore, the above-mentioned diaphragm valve is suitable for semiconductor processing equipment, wherein the diaphragm assembly includes a diaphragm body, a plug is extended from the lower end of the diaphragm body, a connecting rod is provided at the upper end of the diaphragm body, and the connecting rod is connected to the diaphragm assembly. When in a blocked state, the diaphragm body blocks the control chamber, and the plug blocks the outflow channel.

[0008] Furthermore, the above-mentioned diaphragm valve suitable for semiconductor processing equipment, wherein the diaphragm assembly includes a diaphragm body, the diaphragm body is an inverted T-shaped structure, the lower end of the diaphragm body is provided with a contact cavity, the upper end of the diaphragm assembly is connected to the contact cavity, the upper end of the diaphragm body is provided with a positioning rod, the positioning rod is connected to the driven shaft assembly, the diaphragm body is provided with a limited extension edge, and the limited extension edge is connected to the limit assembly.

[0009] Furthermore, the above-mentioned diaphragm valve suitable for semiconductor processing equipment, wherein the driven shaft assembly includes a driven shaft body, the upper end of the driven shaft body is provided with an external thread, the lower end of the driven shaft body is provided with a docking cavity, and the outer side of the driven shaft body is provided with a driven sealing ring, and the driven sealing ring is in contact with the accommodating cavity.

[0010] Furthermore, the above-mentioned diaphragm valve suitable for semiconductor processing equipment, wherein the active shaft assembly includes an active shaft body, the lower end of the active shaft body is provided with an internal threaded cavity, the outer side of the active shaft body is provided with an active sealing ring, and the active sealing ring is in contact with the accommodating cavity.

[0011] Furthermore, in the above-mentioned diaphragm valve suitable for semiconductor processing equipment, the knob assembly is connected to the upper end of the driving shaft assembly through a limiting bolt.

[0012] Furthermore, in the above-mentioned diaphragm valve suitable for semiconductor processing equipment, the upper end of the driving shaft assembly is threadedly connected with a travel limiter.

[0013] By means of the above solution, the utility model has at least the following advantages:

[0014] 1. The conduction and control of the final diaphragm assembly can be achieved through the precise up and down displacement of the active shaft assembly, which can meet the convenient control of manually turning the knob assembly.

[0015] 2. The diaphragm assembly is driven to move through moderate deformation of the diaphragm assembly to achieve necessary buffer release and meet high-precision linear adjustment.

[0016] 3. An independent limit assembly is provided to ensure that the diaphragm assembly will not loosen during use and excessive conduction will not occur.

[0017] 4. The overall structure is simple, easy to manufacture and use. It can be connected to the preset pipeline of semiconductor processing equipment by selecting different pipe joints, and has good versatility.

[0018] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of a diaphragm valve suitable for semiconductor processing equipment.

[0020] Figure 2 It is a schematic diagram of the combination of the driven shaft assembly and the upper travel limit ring.

[0021] The meanings of the reference numerals in the drawings are as follows.

[0022] 1 Valve body 2 Inflow channel

[0023] 3 Outflow channel 4 Accommodation chamber

[0024] 5 Control chamber 6 Diaphragm assembly

[0025] 7 Diaphragm assembly 8 Driven shaft assembly

[0026] 9 Active shaft assembly 10 Knob assembly

[0027] 11 Plug 12 Connecting rod

[0028] 13 Limit extension edge 14 Lower travel limit ring

[0029] 15 Upper travel limit ring 16 Limit bolt

[0030] 17 Travel limiter DETAILED DESCRIPTION

[0031] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0032] like Figure 1The diaphragm valve suitable for semiconductor processing equipment includes a valve body 1, on which an inflow channel 2 and an outflow channel 3 are arranged. The difference lies in that: a receiving chamber 4 is arranged in the valve body 1, and a control chamber 5 which is in communication with the inflow channel 2 and the outflow channel 3 is arranged at the bottom of the receiving chamber 4. At the same time, a diaphragm assembly 6 is arranged in the control chamber 5, and a diaphragm assembly 7 is arranged on the diaphragm assembly 6. In this way, the matching clearance between the diaphragm assembly 6 and the control chamber 5 can be controlled by the deformation of the diaphragm assembly 7 to achieve precise fluid control. In addition, in order to achieve the deformation control of the diaphragm assembly 7, a driven shaft assembly 8 is connected to the diaphragm assembly 7, and a driving shaft assembly 9 is threadedly connected to the driven shaft assembly 8. In this way, the two are ensured to be tightly combined, and a suitable driven shaft assembly 8 is selected according to the model of the diaphragm assembly 6 during assembly. During the actual implementation, the limit assembly used includes a lower stroke limit ring 14, and an upper stroke limit ring 15 is stacked on the lower stroke limit ring 14. After assembly, the diaphragm assembly 7 passes through the lower stroke limit ring 14 and the upper stroke limit ring 15 respectively. At the same time, the limit extension edge 13 located on the outer side of the diaphragm assembly 7 is clamped and limited by the lower stroke limit ring 14 and the upper stroke limit ring 15. Furthermore, a non-circular through hole is provided in the upper stroke limit ring 15, and an embedding plane is provided at the lower end of the driven shaft assembly 8, and the embedding plane is embedded in the non-circular through hole. In this way, the upper stroke limit ring 15 and the driven shaft assembly 8 are relatively fixed. When the driving shaft assembly 9 rotates clockwise, the driven shaft assembly 8 moves downward, and when the driving shaft assembly 9 rotates counterclockwise, the driven shaft assembly 8 moves upward. (If the thread is reversed, the operation is opposite, which will not be repeated here) Therefore, the relative distance between the driven shaft assembly 8 and the driving shaft assembly 9 can be adjusted, and the length of the free stroke can be adjusted to meet the needs of large displacement adjustment or small displacement precise control.

[0033] At the same time, in order to utilize the deformation of the diaphragm assembly 7 to control the precise displacement of the diaphragm assembly 6, a limit assembly is provided on the periphery of the diaphragm assembly 6, and the outer side of the diaphragm assembly 7 is connected to the limit assembly. In this way, the diaphragm assembly 6 can be prevented from having an unnecessary follow-up state, so that the deformation and displacement thereof are directly applied to the diaphragm assembly 6. Furthermore, considering the convenience of manual adjustment by the user, a knob assembly 10 can be provided on the upper end of the driving shaft assembly 9.

[0034] In view of a preferred embodiment of the utility model, both the inflow channel 2 and the outflow channel 3 are arranged in an L-shaped shape. In this way, it is convenient to collect in the control chamber 5 to achieve effective conduction control. At the same time, considering the need for docking between the valve body 1 and the external pipeline, inlet holes and outlet holes are provided on both sides of the valve body 1, and the inflow channel 2 is connected to the inlet hole, and the outflow channel 3 is connected to the outlet hole. In this way, during implementation, corresponding pipeline joints can be added to the inlet hole and the outlet hole to connect to the preset pipeline of the semiconductor processing equipment.

[0035] Furthermore, in order to achieve stable blocking and accurate flow control during passage, the diaphragm assembly 6 adopted in the utility model includes a diaphragm body, and a plug 11 extends from the lower end of the diaphragm body. In this way, when in the blocking state, the diaphragm body blocks the control chamber 5, and the plug 11 blocks the outflow channel 3. At the same time, considering the stability of the combination, a connecting rod 12 is provided at the upper end of the diaphragm body, and the connecting rod 12 is connected to the diaphragm assembly 7. In this way, the diaphragm assembly 6 as a whole can be firmly combined with the diaphragm assembly 7. Moreover, the deformation control from the diaphragm assembly 7 can be effectively transmitted to achieve accurate conduction and release control.

[0036] In view of the actual implementation, the diaphragm assembly 7 used includes a diaphragm body, and the cross-section of the diaphragm body is an inverted T-shaped structure. Specifically, a contact cavity is provided at the lower end of the diaphragm body. The connecting rod 12 located at the upper end of the diaphragm assembly 6 is connected to the contact cavity. Considering the stability of the combination, it is necessary to ensure that the deformation of the diaphragm assembly 6 can be smoothly transmitted to the diaphragm assembly 7 by means of gluing, interference fit, etc. At the same time, a positioning rod is provided at the upper end of the diaphragm body, and the positioning rod is connected to the driven shaft assembly 8. Thus, the diaphragm assembly 7 can be appropriately deformed by the up and down displacement of the driven shaft assembly 8. During assembly, the diaphragm body is provided with a limited extension edge 13, and the limited extension edge 13 is connected to the limit assembly. In this way, the diaphragm assembly 7 is fixed on the periphery and movable in the middle, which satisfies the up and down displacement deformation while having better liquid tightness, and satisfies the conduction control while avoiding the liquid flow medium from invading the accommodating chamber 4.

[0037] During manufacturing, considering the need for free travel of up and down displacement, the driven shaft assembly 8 used includes a driven shaft body. An external thread is provided at the upper end of the driven shaft body. In addition, a docking cavity for connecting a positioning rod is provided at the lower end of the driven shaft body. In order to assist in achieving liquid tightness and also enable the driven shaft body to achieve a stable up and down displacement without deflection, a driven sealing ring is provided on the outer side of the driven shaft body, and the driven sealing ring is in contact with the accommodating cavity 4.

[0038] Furthermore, considering the stability of manual adjustment control, the active shaft assembly 9 includes an active shaft body, and the lower end of the active shaft body is provided with an internal threaded cavity for connecting the driven shaft assembly 8. Thus, the two can satisfy a stable threaded connection. In this way, during manual control, the active shaft assembly 9 can drive the driven shaft assembly 8 to move in the same direction. Furthermore, an active sealing ring is provided on the outer side of the active shaft body, and the active sealing ring is in contact with the accommodating cavity 4. Thus, while satisfying liquid-tightness, it can also effectively ensure that the active shaft body does not deflect laterally when moving, thereby improving the accuracy of subsequent conduction control.

[0039] Further, the knob assembly 10 is connected to the upper end of the active shaft assembly 9 through the limit bolt 16. In this way, the knob assembly 10 is firmly connected to the active shaft assembly 9. Furthermore, the upper end of the active shaft assembly 9 is threadedly connected with a travel limiter 17. In this way, by rotating the knob assembly 10, the active shaft assembly 9 is driven to rotate relative to the travel limiter 17, and then the driven shaft assembly 8 is driven to move, the diaphragm assembly 7 is controlled to deform, and the diaphragm assembly 6 is caused to have a suitable displacement, so as to perform precise conduction state control.

[0040] The working principle of the utility model is as follows:

[0041] When in the default closed state, the diaphragm assembly 6 blocks the control chamber 5, and the inflow channel 2 and the outflow channel 3 are connected but not connected to each other.

[0042] When conduction control is required, the knob assembly 10 is turned counterclockwise (the default counterclockwise position is loose and upward), and with the cooperation of the travel limiter 17, the active shaft assembly 9 starts to drive the driven shaft assembly 8 to move upward. At this time, the area between the extended edge and the positioning rod of the diaphragm assembly 7 undergoes a moderate upward deformation. As a result, the diaphragm assembly 6 is slightly lifted upward. In this way, a gap appears between the diaphragm assembly 6 and the control chamber 5, allowing the inflow channel 2 and the outflow channel 3 to be conducted.

[0043] Afterwards, if the knob assembly 10 is rotated counterclockwise, the flow rate after conduction can be further increased. In this way, the flow rate can be accurately controlled by rotating the stroke of the knob assembly 10.

[0044] Finally, when closing is required, the knob assembly 10 is rotated clockwise to put the diaphragm assembly 6 into a blocked state.

[0045] It can be seen from the above text description and the accompanying drawings that the following advantages are achieved after adopting the utility model:

[0046] 1. The conduction and control of the final diaphragm assembly can be achieved through the precise up and down displacement of the active shaft assembly, which can meet the convenient control of manually turning the knob assembly.

[0047] 2. The diaphragm assembly is driven to move through moderate deformation of the diaphragm assembly to achieve necessary buffer release and meet high-precision linear adjustment.

[0048] 3. An independent limit assembly is provided to ensure that the diaphragm assembly will not loosen during use and excessive conduction will not occur.

[0049] 4. The overall structure is simple, easy to manufacture and use. It can be connected to the preset pipeline of semiconductor processing equipment by selecting different pipe joints, and has good versatility.

[0050] In addition, the indicated orientations or positional relationships described in the present invention are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or structure referred to must have a specific orientation or be operated with a specific orientation structure. Therefore, they cannot be understood as a limitation on the present invention.

[0051] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. A diaphragm valve suitable for semiconductor processing equipment, comprising a valve body, wherein the valve body is provided with an inflow channel and an outflow channel, and characterized in that: The valve body is provided with an accommodating chamber, the bottom of the accommodating chamber is provided with a control chamber which is in communication with the inflow channel and the outflow channel, the control chamber is provided with a diaphragm assembly, the diaphragm assembly is provided with a diaphragm assembly, the diaphragm assembly is connected with a driven shaft assembly, the driven shaft assembly is threadedly connected with an active shaft assembly, a limit assembly is provided on the periphery of the diaphragm assembly, the outer side of the diaphragm assembly is connected with the limit assembly, the upper end of the active shaft assembly is provided with a knob assembly; the limit assembly includes a lower stroke limit ring, the An upper stroke limit ring is stacked on the lower stroke limit ring, and the diaphragm assembly passes through the lower stroke limit ring and the upper stroke limit ring respectively. The outer side of the diaphragm assembly is clamped and limited by the lower stroke limit ring and the upper stroke limit ring. A non-circular through hole is provided in the upper stroke limit ring, and an embedding plane is provided at the lower end of the driven shaft assembly. The embedding plane is embedded in the non-circular through hole. When the driving shaft assembly rotates clockwise, the driven shaft assembly moves downward, and when the driving shaft assembly rotates counterclockwise, the driven shaft assembly moves upward.

2. The diaphragm valve suitable for semiconductor processing equipment according to claim 1, characterized in that: The inflow channel and the outflow channel are both arranged in an L shape, and an inlet hole and an outlet hole are arranged on both sides of the valve body. The inflow channel is communicated with the inlet hole, and the outflow channel is communicated with the outlet hole.

3. The diaphragm valve suitable for semiconductor processing equipment according to claim 1, characterized in that: The diaphragm assembly includes a diaphragm body, a plug extending from the lower end of the diaphragm body, a connecting rod provided at the upper end of the diaphragm body, the connecting rod is connected to the diaphragm assembly, and when in a blocked state, the diaphragm body blocks the control cavity, and the plug blocks the outflow channel.

4. The diaphragm valve suitable for semiconductor processing equipment according to claim 1, characterized in that: The diaphragm assembly includes a diaphragm body, which is an inverted T-shaped structure. A contact cavity is arranged at the lower end of the diaphragm body, and the upper end of the diaphragm assembly is connected to the contact cavity. A positioning rod is arranged at the upper end of the diaphragm body, and the positioning rod is connected to the driven shaft assembly. The diaphragm body is provided with a limited extension edge, and the limited extension edge is connected to the limit assembly.

5. The diaphragm valve suitable for semiconductor processing equipment according to claim 1, characterized in that: The driven shaft assembly includes a driven shaft body, the upper end of the driven shaft body is provided with an external thread, the lower end of the driven shaft body is provided with a docking cavity, and the outer side of the driven shaft body is provided with a driven sealing ring, and the driven sealing ring is in contact with the accommodating cavity.

6. The diaphragm valve suitable for semiconductor processing equipment according to claim 1, characterized in that: The driving shaft assembly comprises a driving shaft body, the lower end of the driving shaft body is provided with an internal thread cavity, the outer side of the driving shaft body is provided with an active sealing ring, and the active sealing ring is in contact with the accommodating cavity.

7. The diaphragm valve suitable for semiconductor processing equipment according to claim 1, characterized in that: The knob assembly is connected to the upper end of the driving shaft assembly through a limiting bolt.

8. The diaphragm valve suitable for semiconductor processing equipment according to claim 1, characterized in that: The upper end of the driving shaft assembly is threadedly connected with a travel limiter.

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