Intelligent nitrogen sealing system of electronic-grade hydrogen peroxide storage tank

Abstract

The utility model discloses an electronic grade hydrogen peroxide storage tank intelligent nitrogen sealing system, including hydrogen peroxide storage tank, nitrogen supply device and waste gas storage tank, the hydrogen peroxide storage tank is communicated with liquid inlet pipe, liquid outlet pipe, nitrogen input pipe and nitrogen output pipe, the output end of nitrogen supply device is communicated with nitrogen input pipe, and the nitrogen output pipe is communicated with the waste gas storage tank. The nitrogen output pipe is communicated with the input end of the waste gas storage tank, and the output end of the waste gas storage tank is communicated with the nitrogen input pipe and the liquid outlet pipe. Nitrogen is filled into the top of the hydrogen peroxide storage tank through the nitrogen supply device, so that the air pressure in the hydrogen peroxide storage tank is adjusted, the purpose of preventing external atmosphere, dust and the like from entering the hydrogen peroxide storage tank is achieved, and particulate matter of electronic-grade hydrogen peroxide is prevented from exceeding the standard; and the waste gas storage tank is adopted to recover nitrogen discharged by the hydrogen peroxide storage tank, and the recovered nitrogen can be continuously used in a nitrogen sealing manner and can also be introduced into a liquid outlet pipe of the hydrogen peroxide storage tank to be used for cleaning the liquid outlet pipe before the hydrogen peroxide is discharged, so that the front-section discharged hydrogen peroxide is prevented from being polluted.

Description

Technical Field

[0001] The utility model relates to the field of hydrogen peroxide production, in particular to an intelligent nitrogen sealing system for an electronic-grade hydrogen peroxide storage tank. Background Art

[0002] With the development of domestic food, medicine, photovoltaic, LCD and semiconductor industries, especially affected by the epidemic, the food, medicine and health industry has an increasing demand for H2O2 for cleaning and disinfection agents, and the quality control has become more and more stringent; and the semiconductor electronics industry, as a high-tech industry supported by the national development strategy, has invested more than 200 billion yuan each year in recent years, forming semiconductor industry clusters in East China, South China, Central China, and Southwest China, and the use of electronic-grade chemicals has also increased significantly year by year. With the evolution of semiconductor process line width, 14nm will gradually become the mainstream, and even 7nm and 5nm technologies will be realized step by step in the future. Therefore, the demand for high-purity electronic chemicals in the advanced processes of semiconductor factories will only increase, not decrease, and the quality level of cations must be less than 10ppt.

[0003] However, electronic-grade hydrogen peroxide is prone to exceeding the standard of particulate matter when in contact with the outside air, affecting its quality, so it is necessary to enhance the sealing of hydrogen peroxide storage tanks to prevent the occurrence of quality accidents. The prior art with patent number CN218441813U discloses a hydrogen peroxide storage tank nitrogen sealing device, which adopts a nitrogen sealing method to allow nitrogen to enter a plurality of hydrogen peroxide storage tanks connected in series in sequence, and seals the water seal tank to improve the nitrogen sealing effect of the hydrogen peroxide storage tank and reduce nitrogen consumption. However, when it is necessary to add hydrogen peroxide to the storage tank, in order to balance the air pressure in the tank, the nitrogen in the tank will also be discharged while filling with hydrogen peroxide. At present, this part of nitrogen is generally discharged directly into the atmosphere, which will cause nitrogen loss and waste. Summary of the invention

[0004] The utility model aims to solve at least one of the above-mentioned technical problems and provides an intelligent nitrogen sealing system for an electronic-grade hydrogen peroxide storage tank, which can effectively recycle and utilize the waste gas discharged by the nitrogen sealing.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] An electronic-grade hydrogen peroxide storage tank intelligent nitrogen sealing system comprises a hydrogen peroxide storage tank, a nitrogen supply device and a waste gas storage tank, wherein the hydrogen peroxide storage tank is connected with a liquid inlet pipe, a liquid outlet pipe, a nitrogen input pipe and a nitrogen output pipe, the output end of the nitrogen supply device is connected with the nitrogen input pipe, the nitrogen output pipe is connected with the input end of the waste gas storage tank, and the output end of the waste gas storage tank is connected with the nitrogen input pipe and the liquid outlet pipe.

[0007] As an improvement of the above technical solution, the output end of the exhaust gas storage tank is connected to a nitrogen purge head.

[0008] As an improvement of the above technical solution, it also includes a control system, wherein the hydrogen peroxide storage tank is provided with a first pressure transmitter, the nitrogen input pipe is provided with a nitrogen sealing valve, and the nitrogen output pipe is provided with a nitrogen release valve, and the control system is electrically connected to the first pressure transmitter, the nitrogen sealing valve and the nitrogen release valve, the first pressure transmitter can monitor the internal pressure value of the hydrogen peroxide storage tank in real time, and transmit the real-time pressure value to the control system, the control system can compare the real-time pressure value with a preset threshold value, and control the opening or closing of the nitrogen sealing valve and the nitrogen release valve respectively according to the comparison result.

[0009] As an improvement of the above technical solution, a breathing valve is provided on the hydrogen peroxide storage tank, and the control system can compare the real-time pressure value with a preset threshold value and control the opening or closing of the breathing valve according to the comparison result.

[0010] As an improvement of the above technical solution, the control system includes a central processing unit and a controller electrically connected to each other, the first pressure transmitter is electrically connected to the central processing unit, the nitrogen sealing valve, nitrogen release valve and breathing valve are all electrically connected to the controller, the central processing unit can receive the real-time pressure value sent by the first pressure transmitter, and compare the real-time pressure value with an internally preset pressure threshold, the controller can receive the comparison result signal sent by the central processing unit, and control the opening or closing of the nitrogen sealing valve, nitrogen release valve and breathing valve according to the comparison result.

[0011] As an improvement of the above technical solution, the hydrogen peroxide storage tank is connected to a liquid level tube, a liquid level sensor is arranged in the liquid level tube, the liquid level sensor is electrically connected to the central processing unit, the central processing unit can receive the real-time liquid level height value sent by the liquid level sensor, and compare the real-time liquid level height with the internal preset liquid level height threshold, the controller can receive the comparison result signal sent by the central processing unit, and control the opening or closing of the nitrogen sealing valve, the nitrogen release valve and the breathing valve respectively according to the comparison result.

[0012] As an improvement of the above technical solution, a second pressure transmitter is provided on the exhaust gas storage tank, and an outlet valve is provided on the output end of the exhaust gas storage tank.

[0013] As an improvement of the above technical solution, stop valves are provided on the nitrogen inlet pipe and at positions at both ends of the nitrogen sealing valve.

[0014] Compared with the prior art, the beneficial effects of this application are:

[0015] The utility model discloses an intelligent nitrogen sealing system for an electronic-grade hydrogen peroxide storage tank. A nitrogen supply device is provided to fill nitrogen into the top of the hydrogen peroxide storage tank to adjust the air pressure in the hydrogen peroxide storage tank, thereby preventing the external atmosphere, dust and the like from entering the hydrogen peroxide storage tank and avoiding the excessive particle matter in the electronic-grade hydrogen peroxide. A waste gas storage tank is used to recycle the nitrogen discharged from the hydrogen peroxide storage tank. The recycled nitrogen can be continuously used for nitrogen sealing and can also be passed to a liquid outlet pipe of the hydrogen peroxide storage tank to clean the liquid outlet pipe before the hydrogen peroxide is discharged, thereby avoiding the contamination of the hydrogen peroxide outlet at the front stage. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings, wherein:

[0017] Figure 1 The system structure of the embodiment of the utility model is shown in FIG. Figure 1 ;

[0018] Figure 2 The system structure of the embodiment of the utility model is shown in FIG. Figure 2 ;

[0019] Figure 3 It is a structural schematic diagram of a hydrogen peroxide storage tank in an embodiment of the utility model. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be a central component at the same time. When a component is referred to as being "set in the middle", it does not only mean being set in the middle, as long as it is not set at both ends within the range defined by the middle. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0023] like Figures 1 to 3 As shown, the utility model provides an intelligent nitrogen sealing system for electronic-grade hydrogen peroxide storage tanks, including a hydrogen peroxide storage tank 100, a nitrogen supply device 200 and a waste gas storage tank 300, the hydrogen peroxide storage tank 100 is connected with a liquid inlet pipe 110, a liquid outlet pipe 120, a nitrogen input pipe 130 and a nitrogen output pipe 140, the output end of the nitrogen supply device 200 is connected to the nitrogen input pipe 130, the nitrogen output pipe 140 is connected to the input end of the waste gas storage tank 300, and the output ends of the waste gas storage tank 300 are both connected to the nitrogen input pipe 13 and the liquid outlet pipe 120.

[0024] The nitrogen supply device 200 can adopt an existing nitrogen generator; the input end of the liquid inlet pipe 110 can be connected to the finished product output end of the hydrogen peroxide production system, and the liquid outlet pipe 120 can be connected to the filling head for filling the hydrogen peroxide liquid, and the liquid inlet pipe 110 and the liquid outlet pipe 120 are both provided with control valves; since the liquid outlet pipe 120 is directly in contact with the atmosphere, there is air in the pipe, and the hydrogen peroxide first discharged in the front section during liquid discharge will be contaminated, so the output end of the waste gas storage tank 300 is connected to the liquid outlet pipe 120, and nitrogen can be introduced before the liquid needs to be discharged to discharge the air in the pipe, so as to achieve the purpose of cleaning the liquid outlet pipe 120, thereby reducing the waste of hydrogen peroxide and reusing the recovered nitrogen.

[0025] Furthermore, the output end of the waste gas storage tank 300 is connected to a nitrogen purge head 310. The nitrogen purge head 310 is a prior art and will not be described in detail in this application. When filling hydrogen peroxide, such as tank truck filling or canning, the nitrogen purge head 310 can be used to purge and clean the filling port and the filling environment with nitrogen to reuse the recovered nitrogen. The waste gas storage tank 300 is provided with a second pressure transmitter 320, and the output end of the waste gas storage tank 300 is provided with an outlet valve 330. When the pressure in the tank exceeds the threshold, the outlet valve 330 will open to exhaust.

[0026] In a specific embodiment of the present application, in order to facilitate determination of the internal air pressure of the hydrogen peroxide storage tank 100 and control the inlet and outlet state of nitrogen, a control system is also included, wherein the hydrogen peroxide storage tank 100 is provided with a first pressure transmitter 150, the nitrogen input pipe 130 is provided with a nitrogen sealing valve 131, and the nitrogen output pipe 140 is provided with a nitrogen release valve 141, and the control system is electrically connected to the first pressure transmitter 150, the nitrogen sealing valve 131 and the nitrogen release valve 141, the first pressure transmitter 150 can monitor the internal pressure value of the hydrogen peroxide storage tank 100 in real time, and transmit the real-time pressure value to the control system, the control system can compare the real-time pressure value with a preset threshold value, and control the opening or closing of the nitrogen sealing valve 131 and the nitrogen release valve 141 respectively according to the comparison result.

[0027] When the liquid outlet valve of the hydrogen peroxide storage tank 100 is opened to discharge, the liquid level in the tank will drop, the volume of the gas phase part will increase, the first pressure transmitter 150 detects that the nitrogen pressure in the tank is reduced, and the control system will open the nitrogen sealing valve 131 to inject nitrogen into the hydrogen peroxide storage tank 100, and the nitrogen pressure in the tank will rise. When the pressure rises to the maximum threshold, the control system will close the nitrogen sealing valve 131; when the liquid inlet valve of the hydrogen peroxide storage tank 100 is opened to add materials, the liquid level in the tank will rise, the volume of the gas phase part will decrease, the first pressure transmitter 150 detects that the nitrogen pressure in the tank is increased, and the control system will open the nitrogen release valve 141, and the nitrogen pressure in the tank will drop. When the pressure drops to the minimum threshold, the control system will close the nitrogen release valve 141. Of course, the nitrogen sealing valve 131 can also adopt an existing self-operated nitrogen sealing valve, which can automatically control opening, closing or adjusting flow according to the pressure value.

[0028] In order to further ensure the safety of the hydrogen peroxide storage tank 100 and prevent the occurrence of explosions, deflations, etc., a breathing valve 160 is provided on the hydrogen peroxide storage tank 100. The control system can compare the real-time pressure value with a preset threshold value and control the opening or closing of the breathing valve 160 according to the comparison result. The breathing valve 160 does not work under normal circumstances. It will only work when the nitrogen sealing valve 131 fails or fails, causing the pressure in the tank to be too high or too low, so as to play a role in safety protection. In addition, stop valves 132 are provided on the nitrogen input pipe 130 and at both ends of the nitrogen sealing valve 131 to enhance safety.

[0029] Specifically, the control system includes a central processing unit and a controller electrically connected to each other, the first pressure transmitter 150 is electrically connected to the central processing unit, the nitrogen sealing valve 131, the nitrogen release valve 141 and the breathing valve 160 are all electrically connected to the controller, the central processing unit can receive the real-time pressure value sent by the first pressure transmitter 150, and compare the real-time pressure value with the internal preset pressure threshold, the controller can receive the comparison result signal sent by the central processing unit, and control the opening or closing of the nitrogen sealing valve 131, the nitrogen release valve 141 and the breathing valve 160 respectively according to the comparison result. The central processing unit and the controller are both prior art, and this application will not be described in detail. Among them, the nitrogen supply pressure is generally around 300 to 800KPa, the nitrogen sealing valve 131 is 1KPa, the nitrogen release valve 141 pressure is 2KPa, the exhalation pressure of the breathing valve 160 is 3KPa, and the inhalation pressure is -300Pa.

[0030] Furthermore, in order to prevent pressure detection failure, the hydrogen peroxide storage tank 100 is connected to a liquid level pipe 170, in which a liquid level sensor is arranged, and the liquid level sensor is electrically connected to a central processing unit, and the central processing unit can receive a real-time liquid level height value sent by the liquid level sensor, and compare the real-time liquid level height with an internal preset liquid level height threshold, and the controller can receive a comparison result signal sent by the central processing unit, and control the opening or closing of the nitrogen sealing valve 131, the nitrogen release valve 141 and the breathing valve 160 respectively according to the comparison result. The valve is controlled according to the liquid level situation to further enhance the safety of the system.

[0031] The utility model discloses an intelligent nitrogen sealing system for an electronic-grade hydrogen peroxide storage tank. A nitrogen supply device 200 is provided to fill nitrogen into the top of a hydrogen peroxide storage tank 100 to adjust the air pressure in the hydrogen peroxide storage tank 100, thereby preventing the external atmosphere, dust, etc. from entering the hydrogen peroxide storage tank 100 and avoiding the excessive particle matter in the electronic-grade hydrogen peroxide. A waste gas storage tank 300 is used to recycle the nitrogen discharged from the hydrogen peroxide storage tank 100. The recycled nitrogen can be continuously used for nitrogen sealing or can be passed to a liquid outlet pipe 120 of the hydrogen peroxide storage tank 100 to clean the liquid outlet pipe 120 before the hydrogen peroxide is discharged, thereby avoiding the contamination of the hydrogen peroxide discharge at the front stage.

[0032] The above embodiments are only used to illustrate the technical solution of the utility model but not to limit it. Any modification or equivalent substitution that does not deviate from the spirit and scope of the utility model shall be included in the scope of the technical solution of the utility model.

Claims

1. An intelligent nitrogen sealing system for electronic grade hydrogen peroxide storage tanks, characterized in that: The invention comprises a hydrogen peroxide storage tank, a nitrogen supply device and a waste gas storage tank. The hydrogen peroxide storage tank is connected with a liquid inlet pipe, a liquid outlet pipe, a nitrogen input pipe and a nitrogen output pipe. The output end of the nitrogen supply device is connected with the nitrogen input pipe, the nitrogen output pipe is connected with the input end of the waste gas storage tank, and the output end of the waste gas storage tank is connected with the nitrogen input pipe and the liquid outlet pipe.

2. The intelligent nitrogen sealing system for electronic grade hydrogen peroxide storage tank according to claim 1 is characterized in that: The output end of the waste gas storage tank is connected to a nitrogen purge head.

3. The intelligent nitrogen sealing system for electronic grade hydrogen peroxide storage tank according to claim 1 is characterized in that: It also includes a control system, wherein the hydrogen peroxide storage tank is provided with a first pressure transmitter, the nitrogen input pipe is provided with a nitrogen sealing valve, and the nitrogen output pipe is provided with a nitrogen release valve. The control system is electrically connected to the first pressure transmitter, the nitrogen sealing valve and the nitrogen release valve. The first pressure transmitter can monitor the internal pressure value of the hydrogen peroxide storage tank in real time and transmit the real-time pressure value to the control system. The control system can compare the real-time pressure value with a preset threshold value and control the opening or closing of the nitrogen sealing valve and the nitrogen release valve according to the comparison result.

4. The intelligent nitrogen sealing system for electronic grade hydrogen peroxide storage tank according to claim 3 is characterized in that: The hydrogen peroxide storage tank is provided with a breathing valve, and the control system can compare the real-time pressure value with a preset threshold value, and control the opening or closing of the breathing valve according to the comparison result.

5. The intelligent nitrogen sealing system for electronic grade hydrogen peroxide storage tank according to claim 4, characterized in that: The control system includes a central processing unit and a controller electrically connected to each other, the first pressure transmitter is electrically connected to the central processing unit, the nitrogen sealing valve, nitrogen release valve and breathing valve are all electrically connected to the controller, the central processing unit can receive the real-time pressure value sent by the first pressure transmitter, and compare the real-time pressure value with an internally preset pressure threshold, the controller can receive the comparison result signal sent by the central processing unit, and control the opening or closing of the nitrogen sealing valve, nitrogen release valve and breathing valve respectively according to the comparison result.

6. The intelligent nitrogen sealing system for electronic-grade hydrogen peroxide storage tanks according to claim 5, characterized in that: The hydrogen peroxide storage tank is connected to a liquid level pipe, in which a liquid level sensor is arranged, and the liquid level sensor is electrically connected to a central processing unit. The central processing unit can receive a real-time liquid level height value sent by the liquid level sensor, and compare the real-time liquid level height with an internally preset liquid level height threshold value. The controller can receive a comparison result signal sent by the central processing unit, and control the opening or closing of the nitrogen sealing valve, the nitrogen release valve and the breathing valve respectively according to the comparison result.

7. The intelligent nitrogen sealing system for electronic grade hydrogen peroxide storage tank according to claim 3 is characterized in that: The waste gas storage tank is provided with a second pressure transmitter, and the output end of the waste gas storage tank is provided with an outlet valve.

8. The intelligent nitrogen sealing system for electronic grade hydrogen peroxide storage tanks according to claim 1 is characterized in that: Stop valves are arranged on the nitrogen inlet pipe and at the positions at both ends of the nitrogen sealing valve.

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