Integrated circuit air tightness testing device

Abstract

The utility model relates to an integrated circuit air tightness testing device in the technical field of integrated circuit air tightness testing, which comprises a base, a lifting mechanism frame is fixedly connected onto the base, a linear guide rail is fixedly connected onto the lifting mechanism frame, and a limiting sliding block is slidably arranged on the linear guide rail. The limiting sliding block is fixedly connected with a testing device body, a suction nozzle fixing groove is formed in the bottom end of the interior of the testing device body, and a pressure sensor is arranged in the middle of the testing device body. According to the integrated circuit air tightness testing device, a universal manual air tightness testing jig is allowed to be used, the integrated circuit air tightness testing device is matched with a universal suction nozzle to adapt to products of different sizes for testing, the requirement for manufacturing a special socket for a specific product is eliminated, time and cost are greatly saved, meanwhile, the testing capacity is kept consistent with that of an original special socket, and the testing efficiency is improved. The accuracy and the reliability of the test result are ensured, the test efficiency is improved, and the consistency and the effectiveness of the test are also ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit air tightness testing, in particular to an integrated circuit air tightness testing device. Background Art

[0002] In the traditional field of airtightness testing, the use of semi-automatic airtightness testers usually relies on dedicated sockets that precisely match the product size. This dependence leads to a problem: whenever the size of the integrated circuit (chip) changes, the corresponding socket must be replaced for pressure testing. This process is not only time-consuming, but also lacks flexibility. In addition, in order to verify chips of different sizes, cumbersome change kit operations are usually required, which increases the complexity and cost of the testing process. Utility Model Content

[0003] The utility model aims to solve the shortcomings in the prior art and provides an integrated circuit airtightness testing device.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an integrated circuit air tightness testing device, including a base, a lifting mechanism frame is fixedly connected to the base, a linear guide rail is fixedly connected to the lifting mechanism frame, a limit slider is slidably provided on the linear guide rail, the limit slider is fixedly connected to a testing device body, a nozzle fixing groove is provided at the inner bottom end of the testing device body, a pressure sensor is provided in the middle of the testing device body, a bearing is slidably connected to the testing device body, the bearing is slidably connected to the testing device body, an adjustment gear is fixedly connected to the bearing, and a manual lifting device is provided on the top of the lifting mechanism frame.

[0005] As a further description of the above technical solution:

[0006] The manual lifting device is connected to the bearing and drives the bearing to descend by pressing down the manual lifting device.

[0007] As a further description of the above technical solution:

[0008] An external suction nozzle is fixed in the suction nozzle fixing groove, and one side of the suction nozzle is connected to the airtight leakage instrument through an air pipe.

[0009] As a further description of the above technical solution:

[0010] The chip to be tested is placed on the base.

[0011] As a further description of the above technical solution:

[0012] The pressure sensor is connected to the leak tester, and the leak tester feeds back the test result to the pressure sensor, and whether the test is passed is manually determined based on the pressure sensor result.

[0013] As a further description of the above technical solution:

[0014] The adjusting gear is used to adjust the pressure of the bearing.

[0015] The utility model has the following beneficial effects: the integrated circuit airtightness testing device proposed by the utility model allows the use of a universal manual airtightness testing fixture, and in combination with a universal suction nozzle, can adapt to the testing of products of different sizes, eliminating the need to make dedicated sockets for specific products, thereby greatly saving time and costs. At the same time, the testing device is consistent with the original dedicated socket in terms of testing capabilities, ensuring the accuracy and reliability of the test results. The utility model not only improves the test efficiency, but also ensures the consistency and effectiveness of the test. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of the integrated circuit air tightness testing device proposed by the utility model;

[0017] Figure 2 A cross-sectional schematic diagram of the test device body of the integrated circuit air tightness test device proposed by the utility model;

[0018] Legend:

[0019] 1. Base; 2. Lifting mechanism frame; 3. Linear guide rail; 4. Limit slider; 5. Test device body; 6. Suction nozzle fixing groove; 7. Pressure sensor; 8. Bearing; 9. Adjustment gear; 10. Manual lifting device. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] Reference Figure 1-2The utility model provides an embodiment: an integrated circuit air tightness testing device, including a base 1, a lifting mechanism frame 2 is fixedly connected to the base 1, a linear guide rail 3 is fixedly connected to the lifting mechanism frame 2, a limit slider 4 is slidably provided on the linear guide rail 3, a test device body 5 is fixedly connected to the limit slider 4, a nozzle fixing groove 6 is provided at the inner bottom end of the test device body 5, a pressure sensor 7 is provided in the middle of the test device body 5, a bearing 8 is slidably connected to the test device body 5, the bearing 8 is slidably connected to the test device body 5, an adjustment gear 9 is fixedly connected to the bearing 8, and a manual lifting device 10 is provided on the top of the lifting mechanism frame 2.

[0022] The manual lifting device 10 is connected to the bearing 8 and the bearing 8 is driven down by pressing the manual lifting device 10 downward.

[0023] An external suction nozzle is fixed in the suction nozzle fixing groove 6, and one side of the suction nozzle is connected to the airtight leakage instrument through an air pipe.

[0024] The chip to be tested is placed on the base 1 , and the manual lifting device 10 is pressed down to press the universal suction nozzle onto the surface of the chip to cover the air hole.

[0025] The universal suction nozzle is connected to the airtight leakage tester through an air pipe, and the working side of the suction nozzle provides air intake air flow for the air holes of the product.

[0026] The pressure sensor 7 is connected to the leak tester, and the leak tester feeds back the test result to the pressure sensor 7. According to the result of the pressure sensor 7, it is manually determined whether the test is passed.

[0027] Working principle:

[0028] The specific working principle is as follows: the chip to be tested is placed on the base 1, the manual lifting device 10 is pressed down, driving the bearing 8 to descend, and then the universal suction nozzle is pressed on the surface of the chip to cover the air hole. The universal suction nozzle is connected to the airtight leakage instrument through the air pipe, and the working side of the suction nozzle provides air intake air flow for the air hole of the product. The pressure sensor 7 is connected to the leakage instrument, and the leakage instrument feeds back the test results to the pressure sensor 7. The operator determines whether the test is passed according to the reading of the pressure sensor 7;

[0029] For example, if a 2 bar airflow is set, and the actual measured pressure drop is less than 0.2 bar, the chip is considered to be leak-free.

[0030] The specific test steps are as follows:

[0031] Test preparation phase:

[0032] First, the integrated circuit chip to be tested is placed on the base 1 of the testing device to ensure that the chip is positioned correctly and stably.

[0033] Lifting mechanism action:

[0034] The operator can precisely control the testing device body 5 through the manual lifting device 10. The design of the manual lifting device 10 allows the operator to adjust the tightness of the universal nozzle contacting the chip surface by the downward pressure.

[0035] The nozzle contacts the chip:

[0036] As the manual lifting device 10 is pressed down, the bearing 8 drives the limit slider 4 to slide along the linear guide rail 3, so that the universal suction nozzle fixed on the test device body 5 descends and contacts the chip surface to seal the chip pores.

[0037] Airtight connection:

[0038] One side of the universal nozzle is connected to the airtight leak tester through an air pipe to ensure that a stable airflow can be provided to the chip pores during the test.

[0039] Functions of pressure sensor 7:

[0040] The pressure sensor 7 in the middle of the test device body 5 is responsible for real-time monitoring of the pressure changes inside the pores. The accuracy of the sensor is crucial for detecting tiny air leaks.

[0041] The test process starts:

[0042] The operator starts the airtightness detector and the testing machine, and the airtightness detector provides an airflow of a predetermined pressure to the suction nozzle through the air pipe, thereby inflating the air holes of the chip.

[0043] Pressure change monitoring:

[0044] As the airtightness detector is inflated, the pressure sensor 7 monitors the pressure change inside the chip. If the chip has good airtightness, the pressure change should be within a preset threshold.

[0045] The operator compares the reading of the pressure sensor 7 with the preset standard to determine whether the air tightness of the chip is qualified. For example, if the set air flow pressure is 2 bar, and the actual measured pressure drop is less than 0.2 bar, it can be considered that the chip is leak-proof.

[0046] Adaptability of the nozzle:

[0047] The design of the universal nozzle allows it to adapt to different sizes of pores. The lower end of the nozzle is designed in a frustum shape with sealing rings of different diameters, which can seal pores with diameters ranging from 0.9mm to 4mm.

[0048] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An integrated circuit air tightness testing device, comprising a base (1), characterized in that: A lifting mechanism frame (2) is fixedly connected to the base (1), a linear guide rail (3) is fixedly connected to the lifting mechanism frame (2), a limit slider (4) is slidably provided on the linear guide rail (3), the limit slider (4) is fixedly connected to a test device body (5), a nozzle fixing groove (6) is provided at the inner bottom end of the test device body (5), a pressure sensor (7) is provided in the middle of the test device body (5), a bearing (8) is slidably connected to the test device body (5), the bearing (8) is slidably connected to the test device body (5), an adjustment gear (9) is fixedly connected to the bearing (8), and a manual lifting device (10) is provided at the top of the lifting mechanism frame (2).

2. The integrated circuit air tightness testing device according to claim 1, characterized in that: The manual lifting device (10) is connected to the bearing (8) and drives the bearing (8) to descend by pressing down the manual lifting device (10).

3. The integrated circuit air tightness testing device according to claim 2, characterized in that: An external suction nozzle is fixed in the suction nozzle fixing groove (6), and one side of the suction nozzle is connected to an airtight leakage instrument through an air pipe.

4. The integrated circuit air tightness testing device according to claim 3, characterized in that: The chip to be tested is placed on the base (1).

5. The integrated circuit air tightness testing device according to claim 4, characterized in that: The pressure sensor (7) is connected to a leak tester, and the leak tester feeds back the test result to the pressure sensor (7), and whether the test is passed is manually determined based on the result of the pressure sensor (7).

6. The integrated circuit air tightness testing device according to claim 5, characterized in that: The adjusting gear (9) is used to adjust the pressure of the bearing (8).

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