Quartz boat structure for reducing tooth marks of boron diffusion quartz boat

Abstract

The utility model provides a quartz boat structure for reducing tooth marks of a boron diffusion quartz boat, which relates to the technical field of quartz boats and comprises a quartz boat body, panels are arranged at two ends of the quartz boat body, four support columns are arranged at four corners between the two panels, a plurality of rhombic teeth are uniformly distributed on the side surfaces of the support columns, and the rhombic teeth are arranged at two ends of the quartz boat body. A rhombic bottom end is arranged between every two rhombic teeth, rhombic tip ends are symmetrically arranged on the side faces of the rhombic teeth, and a rhombic top end is arranged at one end of each rhombic tooth. According to the quartz boat, the use of a separation blade is avoided, the production cost is reduced, the airflow contact area between the clamping groove and a silicon wafer during diffusion can be increased by utilizing the rhombic bottom, the generation of clamping point marks is reduced, the weight of the quartz boat is reduced, and the quartz boat is convenient to carry; the grating plate is arranged on the inner side of the quartz boat body, and the gas flow equalizing plates are distributed on the grating plate; the grating plate and the gas flow equalizing plate are respectively provided with a first through hole and a second through hole, so that the boron diffusion gas can be more uniformly distributed after entering the quartz boat.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz boats, in particular to a quartz boat structure for reducing tooth marks of a boron diffusion quartz boat. Background Art

[0002] In recent years, my country's solar photovoltaic industry has developed rapidly at a doubling speed, and has become the world's largest solar cell producer. With the intensification of market competition, it has become a market trend to continuously improve the competitiveness of products. Only by improving product quality can the competitiveness of enterprises be improved. The production process of crystalline silicon solar cells includes texturing, diffusion, etching, deposition of anti-reflection film, printing electrodes and other steps. The diffusion step generally uses a quartz boat as a carrier tool.

[0003] In the prior art, for example, the patent publication number of CN208781876U, "Crystalline Silicon Solar Cell Diffused Quartz Boat", includes: a pair of panels; a pair of upper connecting rods, the pair of upper connecting rods are arranged in parallel; a pair of bottom connecting rods; a plurality of first card slots, the plurality of first card slots are arranged at intervals on the pair of upper connecting rods; a plurality of second card slots, the plurality of second card slots are arranged at intervals on the pair of bottom connecting rods; wherein, the distance between the first card slots located on both sides and the pair of panels is not less than 5 times the width of the first card slots, the distance between the second card slots located on both sides and the pair of panels is not less than 5 times the width of the second card slots, the angle between the symmetric planes of the plurality of first card slots and the pair of panels is 3°, and the angle between the symmetric planes of the plurality of second card slots and the pair of panels is also 3°. The utility model avoids the use of baffles, reduces the production cost, and reduces the weight of the quartz boat by using the M-shaped bottom and the sleeve structure, and makes it more convenient to carry the quartz boat.

[0004] The existing quartz boat adopts a trapezoidal sawtooth structure, and the sheet fits tightly with the boat teeth and has a large area. This results in poor gas flow at the boat teeth during diffusion, resulting in large-area boat tooth marks, which affects the appearance and overall efficiency of the battery cell. Utility Model Content

[0005] The purpose of the utility model is to solve the problem that the quartz boat adopts a trapezoidal sawtooth structure in the prior art, the sheet and the boat teeth fit closely and have a large area, which leads to poor gas flow at the boat tooth position during diffusion and large-area boat tooth marks, affecting the appearance and overall efficiency of the battery cell, and proposes a quartz boat structure that reduces boron diffusion quartz boat tooth marks.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a quartz boat structure for reducing the tooth marks of a boron diffusion quartz boat, comprising a quartz boat body, panels are arranged at both ends of the quartz boat body, four support columns are arranged at the four corners between the two panels, a plurality of rhombus teeth are evenly distributed on the side of the support column, a rhombus bottom end is opened between two of the rhombus teeth, rhombus tips are symmetrically arranged on the side of the rhombus teeth, and a rhombus top end is arranged at one end of the rhombus teeth.

[0007] Preferably, a grid plate is provided between the two panels, a plurality of gas flow equalizing plates are evenly distributed on the top of the grid plate, a plurality of first through holes are evenly opened on the side of the gas flow equalizing plates, and a plurality of second through holes are evenly opened on the bottom of the grid plate.

[0008] Preferably, docking sleeves are symmetrically arranged at two ends of the top of the quartz boat body, and docking blocks are symmetrically arranged at two ends of the bottom of the quartz boat body.

[0009] Preferably, an embedding groove is provided through the side of the panel, an embedded limit block is movably connected to the inner side of the embedding groove, a pad is installed on the side of the embedded limit block, and the inner side of the embedded limit block is respectively connected to the two ends of the grid plate and the gas flow equalizing plate.

[0010] Preferably, the side surfaces of the cushion block are evenly connected with spring push rods, one end of the spring push rods is connected with a U-shaped frame, and both ends of the U-shaped frame are fixedly connected to the side surfaces of the panel.

[0011] Preferably, a right-angle limit block is symmetrically arranged on the inner side of the docking sleeve, a plurality of rubber strips are evenly distributed on the surface of the right-angle limit block, and limit grooves are symmetrically provided on both sides of the docking block.

[0012] Preferably, columnar boat supports are symmetrically arranged on the side surfaces of the quartz boat body, and the columnar boat supports are arranged above the U-shaped frame.

[0013] Preferably, edges are symmetrically arranged at both ends of one side of the support column, and a notch is opened at the bottom of the quartz boat body.

[0014] Preferably, a spring is provided on the outer wall of the spring push rod, and two ends of the spring are respectively connected to the cushion block and the U-shaped frame.

[0015] Preferably, a docking groove is provided on the inner side of the docking sleeve, and the right-angle limit blocks are distributed on the inner side of the docking groove.

[0016] Compared with the prior art, the advantages and positive effects of the utility model are:

[0017] 1. In the utility model, the production cost is reduced by avoiding the use of baffles, and the diamond-shaped bottom can increase the airflow contact area between the card slot and the silicon wafer during diffusion, reduce the generation of card point marks, and reduce the weight of the quartz boat for easy transportation.

[0018] 2. In the utility model, the grid plate is arranged on the inner side of the quartz boat body, the gas equalizing plate is distributed on the grid plate, and the grid plate and the gas equalizing plate are respectively provided with a first through hole and a second through hole, which is beneficial to evenly distribute the small holes on the equalizing plate, so that the boron diffusion gas can be more evenly distributed after entering the quartz boat, thereby improving the consistency of diffusion and effectively ensuring the uniformity of gas circulation. A cushion block and an embedded limit block are connected through a U-shaped frame in conjunction with a spring push rod, thereby facilitating the installation of the embedded limit block on the inner side of the embedded groove, and the embedded limit block is pushed by the spring push rod to be clamped at both ends of the grid plate, and the gas equalizing plate is simultaneously sleeved, thereby facilitating convenience. A stable docking is formed through the upper and lower distribution of the docking sleeve and the docking block, and in conjunction with the connection between the rubber strip and the limit groove, which facilitates rapid splicing and disassembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The utility model provides a three-dimensional structural schematic diagram of a quartz boat structure for reducing the tooth marks of the boron diffusion quartz boat;

[0020] Figure 2 This is a schematic structural diagram of another angle of a quartz boat structure for reducing boron diffusion quartz boat tooth marks proposed by the utility model;

[0021] Figure 3 The utility model provides a schematic structural diagram of a quartz boat structure partly cut away for reducing the tooth marks of a boron diffusion quartz boat;

[0022] Figure 4 For this utility model Figure 1 A is an enlarged structural diagram;

[0023] Figure 5 For this utility model Figure 3 The enlarged structural diagram at B in FIG.

[0024] Legend: 1. Quartz boat body; 2. Columnar boat support; 3. Panel; 4. Support column; 5. Diamond teeth; 6. Diamond bottom; 7. Diamond tip; 8. Diamond top; 9. Edge; 10. Notch; 11. Embedded limit block; 12. Pad; 13. Spring push rod; 14. U-shaped frame; 15. Grid plate; 16. Gas flow equalizing plate; 17. First through hole; 18. Second through hole; 19. Docking sleeve; 20. Right-angle limit block; 21. Rubber strip; 22. Embedded groove; 23. Docking block; 24. Limit groove. DETAILED DESCRIPTION

[0025] In order to more clearly understand the above-mentioned purpose, features and advantages of the utility model, the utility model is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0026] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments of the following disclosure.

[0027] Example 1: Figure 1-Figure 5 As shown, the utility model provides a technical solution: a quartz boat structure for reducing boron diffusion quartz boat tooth marks, including a quartz boat body 1, panels 3 are arranged at both ends of the quartz boat body 1, four support columns 4 are arranged at four corners between the two panels 3, a plurality of rhombus teeth 5 are evenly distributed on the side of the support column 4, a rhombus bottom end 6 is provided between two rhombus teeth 5, rhombus tips 7 are symmetrically provided on the side of the rhombus teeth 5, a rhombus top end 8 is provided at one end of the rhombus teeth 5, columnar boat supports 2 are symmetrically provided on the side of the quartz boat body 1, the columnar boat supports 2 are arranged above the U-shaped frame 14, edges 9 are symmetrically provided at both ends of one side of the support column 4, and a slot 10 is provided at the bottom of the quartz boat body 1.

[0028] In this embodiment, support columns 4 are distributed between two panels 3, diamond teeth 5 are distributed on the support columns 4, and cooperate with the diamond bottom 6 to provide an effective airflow effect. At the same time, the design of diamond tip 7 and diamond top 8 on the diamond tooth 5 is beneficial to changing the structure. By changing the boat tooth structure on the traditional basis and reducing the size of the boat tooth, the contact area between the silicon wafer and the boat tooth during diffusion is reduced, and the original surface contact is changed to line contact in the middle of the boat tooth, the airflow channel between the boat tooth and the silicon wafer is increased, and the air flow between the wafer and the boat tooth during diffusion is increased, thereby reducing the boat tooth mark. A slot 10 is opened at the bottom of the panel 3 to facilitate placement on a large boat, thereby ensuring stability, and the columnar boat support 2 provides a supporting function.

[0029] Example 2: Figure 1-Figure 5As shown, a grid plate 15 is arranged between the two panels 3, a plurality of gas equalizing plates 16 are evenly distributed on the top of the grid plate 15, a plurality of first through holes 17 are evenly opened on the side of the gas equalizing plates 16, a plurality of second through holes 18 are evenly opened on the bottom of the grid plate 15, docking sleeves 19 are symmetrically arranged at both ends of the top of the quartz boat body 1, docking blocks 23 are symmetrically arranged at both ends of the bottom of the quartz boat body 1, an embedding groove 22 is opened through the side of the panel 3, an embedded limiting block 11 is movably connected to the inner side of the embedded limiting block 11, a pad 12 is installed on the side of the embedded limiting block 11, and the inner side of the embedded limiting block 11 is respectively connected to the grid At both ends of the grid plate 15 and the gas flow equalizing plate 16, the side of the cushion block 12 is evenly connected with a spring push rod 13, one end of the spring push rod 13 is connected to a U-shaped frame 14, both ends of the U-shaped frame 14 are fixedly connected to the side of the panel 3, and the inner side of the docking sleeve 19 is symmetrically provided with a right-angle limit block 20, and a plurality of rubber strips 21 are evenly distributed on the surface of the right-angle limit block 20. Limiting grooves 24 are symmetrically provided on both sides of the docking block 23. A spring is provided on the outer wall of the spring push rod 13, and the two ends of the spring are respectively connected to the cushion block 12 and the U-shaped frame 14. A docking groove is provided on the inner side of the docking sleeve 19, and the right-angle limit blocks 20 are distributed on the inner side of the docking groove.

[0030] In this embodiment, the grid plate 15 is arranged on the inner side of the quartz boat body 1, and the gas flow equalizing plate 16 is distributed on the grid plate 15, and the grid plate 15 and the gas flow equalizing plate 16 are respectively provided with a first through hole 17 and a second through hole 18, which is conducive to evenly distributing the small holes on the flow equalizing plate, so that the boron diffusion gas can be more evenly distributed after entering the quartz boat, thereby improving the consistency of diffusion and effectively ensuring the uniformity of gas circulation. The cushion block 12 and the embedded limit block 11 are connected through the U-shaped frame 14 in conjunction with the spring push rod 13, thereby facilitating the installation of the embedded limit block 11 on the inner side of the embedded groove 22, and the spring push rod 13 is used to push the embedded limit block 11 to be clamped at both ends of the grid plate 15, and the gas flow equalizing plate 16 is simultaneously sleeved, thereby facilitating convenience. Through the upper and lower distribution of the docking sleeve 19 and the docking block 23, and in conjunction with the connection between the rubber strip 21 and the limit groove 24, a stable docking is formed, which facilitates rapid splicing and disassembly.

[0031] The working principle of this embodiment: when in use, first, diamond teeth 5 are distributed on the support column 4, and cooperate with the diamond bottom 6 to facilitate the effect of effective airflow circulation. At the same time, the design of diamond tip 7 and diamond top 8 on the diamond tooth 5 is conducive to changing the structure. By changing the boat tooth structure on the traditional basis, and reducing the size of the boat tooth, the contact area between the silicon wafer and the boat tooth during diffusion is reduced, and the original surface contact is changed to line contact in the middle position of the boat tooth, the airflow channel between the boat tooth and the silicon wafer is increased, and the air flow between the wafer and the boat tooth during diffusion is increased, thereby reducing the boat tooth mark. The grid plate 15 is set on the inner side of the quartz boat body 1, and the gas equalizing plate 16 is distributed on the grid plate 15, and the grid plate 15 and the gas equalizing plate 16 are respectively provided with a first through hole 17 and the second through hole 18 are conducive to evenly distributing the small holes on the flow equalizing plate, so that the boron diffusion gas can be more evenly distributed after entering the quartz boat, thereby improving the consistency of diffusion and effectively ensuring the uniformity of gas circulation. The cushion block 12 and the embedded limit block 11 are connected through the U-shaped frame 14 in conjunction with the spring push rod 13, thereby facilitating the installation of the embedded limit block 11 on the inner side of the embedded groove 22. The spring push rod 13 is used to push the embedded limit block 11 to be clamped at both ends of the grid plate 15, and the gas flow equalizing plate 16 is simultaneously sleeved, thereby facilitating convenience. Through the upper and lower distribution of the docking sleeve 19 and the docking block 23, and in conjunction with the connection between the rubber strip 21 and the limit groove 24, a stable docking is formed, which facilitates rapid splicing and disassembly.

[0032] The above description is only a preferred embodiment of the present invention and does not limit the present invention in other forms. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. A quartz boat structure for reducing boron diffusion quartz boat tooth marks, comprising a quartz boat body (1), characterized in that: Panels (3) are arranged at both ends of the quartz boat body (1), four support columns (4) are arranged at four corners between the two panels (3), a plurality of rhombus teeth (5) are evenly distributed on the side of the support column (4), a rhombus bottom end (6) is provided between the two rhombus teeth (5), rhombus tips (7) are symmetrically arranged on the side of the rhombus teeth (5), and a rhombus top end (8) is arranged at one end of the rhombus teeth (5).

2. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 1, characterized in that: A grid plate (15) is arranged between the two panels (3); a plurality of gas flow equalizing plates (16) are evenly distributed on the top of the grid plate (15); a plurality of first through holes (17) are evenly provided on the side of the gas flow equalizing plates (16); and a plurality of second through holes (18) are evenly provided on the bottom of the grid plate (15).

3. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 1, characterized in that: The top two ends of the quartz boat body (1) are symmetrically provided with docking sleeves (19), and the bottom two ends of the quartz boat body (1) are symmetrically provided with docking blocks (23).

4. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 2, characterized in that: An embedding groove (22) is provided through the side of the panel (3); an embedded limit block (11) is movably connected to the inner side of the embedding groove (22); a cushion block (12) is installed on the side of the embedded limit block (11); and the inner side of the embedded limit block (11) is respectively connected to the two ends of the grid plate (15) and the gas flow equalizing plate (16).

5. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 4, characterized in that: The side surface of the cushion block (12) is evenly connected with a spring push rod (13), one end of the spring push rod (13) is connected with a U-shaped frame (14), and both ends of the U-shaped frame (14) are fixedly connected to the side surface of the panel (3).

6. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 3, characterized in that: A right-angled stopper (20) is symmetrically arranged on the inner side of the docking sleeve (19), a plurality of rubber strips (21) are evenly distributed on the surface of the right-angled stopper (20), and limit grooves (24) are symmetrically arranged on both sides of the docking block (23).

7. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 5, characterized in that: A columnar boat support (2) is symmetrically arranged on the side of the quartz boat body (1), and the columnar boat support (2) is arranged above the U-shaped frame (14).

8. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 1, characterized in that: Edges (9) are symmetrically arranged at both ends of one side of the support column (4), and a notch (10) is provided at the bottom of the quartz boat body (1).

9. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 5, characterized in that: The outer wall of the spring push rod (13) is provided with a spring, and two ends of the spring are respectively connected to the cushion block (12) and the U-shaped frame (14).

10. The quartz boat structure for reducing boron diffusion quartz boat tooth marks according to claim 6, characterized in that: A docking groove is provided on the inner side of the docking sleeve (19), and the right-angle limit blocks (20) are distributed on the inner side of the docking groove.

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