Micro-LED transfer printing laser vision module

Abstract

The utility model discloses a Micro-LED (Light Emitting Diode) transfer printing laser vision module. The Micro-LED transfer printing laser vision module comprises a cantilever beam, the longitudinal fine adjustment table comprises a fixed part arranged on the cantilever beam and a sliding part which is longitudinally connected to the fixed part in a sliding manner; an adapter plate, wherein the adapter plate is arranged on the sliding part; the laser vision part is mounted on the adapter plate; the spring pulling plate is arranged on the cantilever beam; two springs are symmetrically arranged between the spring pulling plate and the adapter plate; the two springs are located on the two sides of the adapter plate in the sliding direction respectively. The longitudinal position of the laser vision part can be finely adjusted through the longitudinal fine adjustment table; the elastic force of the spring and the force applied by the fine tuning knob form a pair of antagonism force to stabilize the structure and offset the possible shaking problem; reasonable layout provides a stable supporting structure for the laser vision part, and provides a storage passage for a circuit of the laser vision part, so that the circuit is prevented from being exposed.

Description

Technical Field

[0001] The utility model belongs to the field of Micro-LED technology, and in particular relates to a Micro-LED transfer laser vision module. Background Art

[0002] Micro-LED laser transfer technology is a key technology used to transfer Micro-LED chips from a growth substrate to a target substrate. In the production process of Micro-LED, mass transfer is a key step, because Micro-LED chips have high density and small size, and traditional transfer methods are difficult to meet the high-precision transfer requirements. Laser mass transfer technology can achieve high-precision and high-efficiency Micro-LED chip transfer, greatly improving production efficiency and product quality. Laser mass transfer technology mainly includes two steps: laser lift-off and laser transfer. Laser lift-off is the process of separating the Micro-LED chip from the native sapphire substrate, and the GaN epitaxial layer is separated from the sapphire substrate by the action of laser. Laser transfer is the process of transferring the peeled chip from the temporary substrate to the backplane, and the chip is transferred from the stamp to the receiving substrate by laser ablation or vaporization.

[0003] The Chinese patent document with publication number CN109768129B discloses a transfer device for Micro LED chips, including a transfer unit, a laser stripping unit, a pickup head switching unit, a visual inspection unit, a repair unit, and a bracket as the installation basis of the above units. The transfer device for Micro LED chips, wherein the transfer unit can realize the pickup and transfer of Micro LED chips; the laser stripping unit can realize the stripping of Micro LED chips from substrates; the top-view fixed camera can pre-judge the size, quantity, and position of the Micro LED chips to be transferred, and realize the rough positioning of the pickup head; the pickup head switching unit can automatically select and switch the pickup head to realize the pickup and transfer of Micro LED chips of different sizes and quantities; the top-view motion camera can realize the precise positioning of the pickup head; the visual inspection camera is used to detect whether the Micro LED chip works normally after transfer; the repair unit is used to repair the Micro LED chip that does not work normally, and finally realize the transfer of Micro LED chips, and obtain the effect of fast and accurate transfer of Micro LED chips.

[0004] When using the laser transfer equipment for the first time, or for different growth substrates or different types of Micro-LED chips, the height of the visual module needs to be adjusted to achieve the best imaging quality. At the same time, the height of the laser also needs to be adjusted to control the laser energy distribution, which helps to improve the transfer quality. At the same time, due to the addition of the adjustment function, the vibration generated by the movement of the motion mechanism will be transmitted to the laser vision part, which will cause a certain degree of jitter to the laser and the visual module. In the long run, its processing accuracy and service life will be significantly affected. Utility Model Content

[0005] In order to overcome the technical problem in the prior art that the laser vision part needs to have a longitudinal adjustment function, and the vibration generated by the motion mechanism is transmitted to the laser vision module, which will affect its processing accuracy and service life; one purpose of the utility model is to provide a Micro-LED transfer laser vision module, by installing the laser vision part on a longitudinal fine-tuning table, and arranging a spring between the sliding part and the fixed part of the longitudinal fine-tuning table, the elastic force of the spring is used to stabilize the structure and offset possible jitter.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a Micro-LED transfer laser vision module, including a cantilever beam, which is arranged above the Micro-LED displacement component; a longitudinal fine-tuning platform, which includes a fixed part arranged on the cantilever beam, a sliding part longitudinally slidably connected to the fixed part, and a fine-tuning knob rotatably connected to the fixed part and transmission-connected to the sliding part; an adapter plate, which is arranged on the sliding part; a laser vision part, which is installed on the adapter plate; a spring pull plate, which is arranged on the cantilever beam; wherein two springs are symmetrically arranged between the spring pull plate and the adapter plate; the two springs are respectively located on both sides of the sliding direction of the adapter plate.

[0007] Rotating the fine-tuning knob drives the sliding part to slide relative to the fixed part, and then fine-tunes the longitudinal height of the laser vision part to improve the transfer accuracy and quality; the elastic force of the spring and the force applied by the fine-tuning knob form a pair of antagonistic forces to stabilize the structure and offset possible jitter problems, thereby ensuring the transfer accuracy and service life.

[0008] Furthermore, a wire rack is provided at the upper end of the cantilever beam; a wire groove is provided at one end of the wire rack away from the laser vision part; the wire rack includes a vertical part installed on the cantilever beam and a semicircular arc part with one end located at the upper end of the vertical part; the other end of the semicircular arc part is located directly above the laser vision part.

[0009] The corresponding data lines and power lines of the laser vision unit are connected to the control unit via the wire trough, and the wire rack stores the circuit to prevent shielding and interference to the working parts.

[0010] Furthermore, the cantilever beam includes a vertically arranged mounting plate, a base plate horizontally arranged at the lower end of the mounting plate, and a reinforcing rib plate vertically arranged at an end of the mounting plate away from the laser vision part; the reinforcing rib plate is abutted against the upper end of the base plate; the mounting plate is flush with an end of the base plate close to the laser vision part; the fixing part is installed on the mounting plate; and the wire rack is installed on the reinforcing rib plate.

[0011] Furthermore, the Micro-LED displacement component is installed on a workbench; a vertical tube is arranged at the upper end of the workbench; an end of the bottom plate away from the laser vision part is arranged at the upper end of the vertical tube; a wire opening passing through the bottom plate is arranged on the bottom plate above the vertical tube.

[0012] Specifically, a bend is arranged at the upper end of the vertical tube at the outer periphery of the bottom plate; a threading groove is arranged on the side of the bend facing the cantilever beam; and both sides of the bottom plate are respectively mounted on two inner walls of the threading groove.

[0013] The corresponding lines of the laser vision part enter the controller located below through the wire groove, the wire threading groove, the wire passing port, and the vertical tube. There are no exposed lines and the quality is reliable. The laser vision part is located directly below the Micro-LED displacement component under the support of the cantilever beam. The structure is stable and reliable, which reduces the failure rate and improves the transfer quality.

[0014] Furthermore, a receiving opening is provided at a central position of one end of the spring pull plate facing the laser vision portion; the fine-tuning knob is located in the receiving opening; and the ends of the two springs are respectively provided on both sides of the receiving opening.

[0015] Specifically, the spring pull plate includes a substrate, which is arranged on the cantilever beam; a first bending plate, which is formed by bending the substrate ninety degrees upward; a second bending plate, which is formed by bending the first bending plate ninety degrees toward the direction of the laser vision part; and the retaining opening is arranged on the first bending plate and the second bending plate.

[0016] The spring pull plate is made of bent sheet metal. The bending structure reduces the deformation capacity of the spring pull plate and improves its strength. At the same time, the elastic force provided by the two springs is made uniform, preventing vibration from being transmitted to the laser vision part and affecting the transfer quality.

[0017] Furthermore, a locking plate is provided on the sliding part; a longitudinal sliding groove is longitudinally provided on the locking plate; a locking knob is provided on the fixed part; the locking knob passes through the longitudinal sliding groove; and the locking knob is threadedly connected to the fixed part.

[0018] The locking knob is used to lock the relative positions of the sliding part and the fixing part to prevent the laser vision part from moving.

[0019] Furthermore, the laser vision unit includes an optical component, a camera arranged at the upper end of the optical component, a lens arranged at the lower end of the optical component, a laser arranged on one side of the optical component, and a sensor arranged on the other side of the optical component; the optical component is arranged on the adapter plate.

[0020] Specifically, a focal length barrel is arranged at the lower end of the camera; the lower end of the focal length barrel is arranged at the upper end of the optical component; and a sliding rod for adjusting the focal length is slidably connected to the outer wall of the focal length barrel.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] 1. By placing the laser vision unit on the longitudinal fine-tuning platform, the longitudinal position of the laser vision unit can be fine-tuned to provide the best visual imaging effect and laser transfer quality;

[0023] 2. A spring is set between the fixed part and the sliding part of the longitudinal fine-tuning stage. The elastic force of the spring and the force applied by the fine-tuning knob form a pair of antagonistic forces to stabilize the structure, offset possible jitter problems, further improve the transfer quality, and extend the service life;

[0024] 3. Reasonably arrange the position and installation relationship of the cantilever beam, wire rack and vertical tube to provide a stable support structure for the laser vision department, and at the same time provide a storage passage for the lines of the laser vision department to prevent the lines from being exposed, and the appearance is neat and beautiful. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the utility model;

[0026] Figure 2 It is a structural schematic diagram of the main parts of the utility model;

[0027] Figure 3 It is a schematic diagram of the parts explosion of the utility model;

[0028] Figure 4 This is a schematic diagram of the structure of the laser vision unit of the utility model;

[0029] Figure 5 It is a structural schematic diagram of the longitudinal fine-tuning platform of the utility model;

[0030] Figure 6 It is a structural schematic diagram of the cantilever beam of the utility model.

[0031] In the figure: 11, cantilever beam; 111, bottom plate; 1111, wire opening; 112, mounting plate; 113, reinforcing rib plate; 12, vertical tube; 13, bend; 131, wire threading groove; 14, wire rack; 141, wire groove; 142, vertical part; 143, semicircular arc part; 2, laser vision part; 21, laser; 22, camera; 23, lens; 24, sensor; 25, optical component; 26, focal length tube; 3, longitudinal fine-tuning stage; 31, fine-tuning knob; 32, locking knob; 33, adapter plate; 34, spring; 35, spring pull plate; 351, retaining opening; 36, locking plate; 361, longitudinal slide groove. DETAILED DESCRIPTION

[0032] The present invention is further described below in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form a new embodiment.

[0033] In the description of the present invention, it should be noted that directional words, such as the terms "center", "lateral", "longitudinal", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating directions and positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of narrating the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and cannot be understood as limiting the specific protection scope of the present invention.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. Therefore, the definition of "first" and "second" features can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "several" is two or more, unless otherwise clearly and specifically defined.

[0035] In the present invention, unless otherwise specified and limited, the terms "setting", "installation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can also be a mechanical connection; it can be directly connected, or it can be connected through an intermediate medium, or two elements can be internally connected. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] See also Figure 1-Figure 6 A Micro-LED transfer laser vision module includes a vertical cylinder 12, which is arranged on a workbench; a cantilever beam 11, one end of which is arranged on the upper end of the vertical cylinder 12; a longitudinal fine-tuning platform 3, which is arranged on the other end of the cantilever beam 11; and a laser vision part 2, which is arranged on the longitudinal fine-tuning platform 3.

[0037] The longitudinal fine-tuning platform 3 includes a fixed part arranged on the cantilever beam 11, a sliding part longitudinally slidably connected to the fixed part, and a fine-tuning knob 31 rotatably connected to the fixed part and transmission-connected to the sliding part; an adapter plate 33 is arranged on the end of the sliding part away from the cantilever beam 11; the laser vision part 2 is arranged on the adapter plate 33; a spring pull plate 35 is arranged on the upper end of the cantilever beam 11; two springs 34 are symmetrically arranged between the spring pull plate 35 and the adapter plate 33; the two springs 34 are respectively located on both sides of the sliding direction of the adapter plate 33.

[0038] The cantilever beam 11 includes a vertically arranged mounting plate 112, a bottom plate 111 horizontally arranged at the lower end of the mounting plate 112, and a reinforcing rib plate 113 vertically arranged at the end of the mounting plate 112 away from the laser vision part 2; the reinforcing rib plate 113 is abutted against the upper end of the bottom plate 111; the mounting plate 112 is flush with the end of the bottom plate 111 close to the laser vision part 2; the fixing part is installed on the mounting plate 112.

[0039] A wire rack 14 is provided at the upper end of the reinforcing rib plate 113; a wire groove 141 is provided at one end of the wire rack 14 away from the laser vision part 2; the wire rack 14 includes a vertical portion 142 installed on the reinforcing rib plate 113 and a semicircular arc portion 143 with one end located at the upper end of the vertical portion 142; the other end of the semicircular arc portion 143 is located directly above the laser vision part 2.

[0040] One end of the bottom plate 111 away from the mounting plate 112 is arranged at the upper end of the vertical tube 12; the upper end of the vertical tube 12 is located on the outer periphery of the bottom plate 111 and is provided with a bend 13; the side of the bend 13 facing the cantilever beam 11 is provided with a threading groove 131; the two sides of the bottom plate 111 are respectively installed on the two inner walls of the threading groove 131; the bottom plate 111 is provided with a wire opening 1111 passing through the bottom plate 111 above the vertical tube 12.

[0041] A receiving opening 351 is provided at the central position of one end of the spring pull plate 35 facing the laser vision part 2 ; the fine-tuning knob 31 is located in the receiving opening 351 ; one ends of the two springs 34 are respectively disposed on both sides of the receiving opening 351 .

[0042] The spring pull plate 35 includes a substrate, which is arranged at the upper end of the mounting plate 112; a first bending plate, which is formed by bending the substrate upward by ninety degrees; a second bending plate, which is formed by bending the first bending plate by ninety degrees toward the direction of the laser vision part 2; and the containing opening 351 is arranged on the first bending plate and the second bending plate.

[0043] The sliding part is provided with a locking plate 36; the locking plate 36 is longitudinally provided with a longitudinal sliding groove 361; the fixing part is provided with a locking knob 32; the locking knob 32 passes through the longitudinal sliding groove 361; the locking knob 32 is threadedly connected to the fixing part.

[0044] The laser vision unit 2 includes an optical component 25, a focal tube 26 arranged at the upper end of the optical component 25, a camera 22 arranged at the upper end of the focal tube 26, a lens 23 arranged at the lower end of the optical component 25, a laser 21 arranged on one side of the optical component 25, and a sensor 24 arranged on the other side of the optical component 25; the optical component 25 is arranged on the adapter plate 33; the outer wall of the focal tube 26 is slidably connected to a sliding rod for adjusting the focal length.

[0045] A Micro-LED displacement component is arranged on the workbench, and the Micro-LED displacement component includes a Micro-LED positioning part and an XY moving part arranged at the lower end of the Micro-LED positioning part; the Micro-LED positioning part includes a receiving stage and a transfer stage; the XY moving part drives the Micro-LED positioning part to move on a horizontal plane, and is used to replace the receiving stage and the transfer stage, wherein the XY moving part is prone to vibration, and the vibration will be transmitted to the laser vision part to affect the transfer accuracy. By arranging a spring 34, the elastic force and the force applied by the fine-tuning knob 31 form a pair of antagonistic forces to stabilize the structure and offset the possible jitter problem.

[0046] The above description is only a specific embodiment of the present invention, but the technical features of the present invention are not limited thereto. Any changes or modifications made by any technician in the field of the present invention are included in the patent scope of the present invention.

Claims

1. A Micro-LED transfer laser vision module, characterized in that: It includes a cantilever beam, and the cantilever beam is arranged above the Micro-LED displacement component; A longitudinal fine-tuning platform, the longitudinal fine-tuning platform comprising a fixed portion arranged on the cantilever beam, a sliding portion longitudinally slidably connected to the fixed portion, and a fine-tuning knob rotatably connected to the fixed portion and transmission-connected to the sliding portion; an adapter plate, the adapter plate being arranged on the sliding portion; a laser vision unit, the laser vision unit being mounted on the adapter plate; A spring pull plate, the spring pull plate being arranged on the cantilever beam; Among them, two springs are symmetrically arranged between the spring pull plate and the adapter plate; the two springs are respectively located on both sides of the sliding direction of the adapter plate.

2. The laser vision module according to claim 1, characterized in that: A wire rack is provided at the upper end of the cantilever beam; a wire groove is provided at one end of the wire rack away from the laser vision part; the wire rack includes a vertical part installed on the cantilever beam and a semicircular arc part with one end located at the upper end of the vertical part; the other end of the semicircular arc part is located directly above the laser vision part.

3. The laser vision module according to claim 2, characterized in that: The cantilever beam includes a vertically arranged mounting plate, a bottom plate horizontally arranged at the lower end of the mounting plate, and a reinforcing rib plate vertically arranged at one end of the mounting plate away from the laser vision part; the reinforcing rib plate abuts against the upper end of the bottom plate; the mounting plate is flush with one end of the bottom plate close to the laser vision part; the fixing part is installed on the mounting plate; and the wire rack is installed on the reinforcing rib plate.

4. The laser vision module according to claim 3, characterized in that: The Micro-LED displacement component is installed on a workbench; a vertical tube is arranged at the upper end of the workbench; an end of the bottom plate away from the laser vision part is arranged at the upper end of the vertical tube; a wire opening penetrating the bottom plate is arranged on the bottom plate above the vertical tube.

5. The laser vision module according to claim 4, characterized in that: The upper end of the vertical tube is provided with a bend at the outer periphery of the bottom plate; a wire threading groove is provided on the side of the bend facing the cantilever beam; and the two sides of the bottom plate are respectively mounted on the two inner walls of the wire threading groove.

6. The laser vision module according to any one of claims 1 to 5, characterized in that: A receiving opening is provided at the central position of one end of the spring pull plate facing the laser vision part; the fine-tuning knob is located in the receiving opening; and the ends of the two springs are respectively arranged on both sides of the receiving opening.

7. The laser vision module according to claim 6, characterized in that: The spring pull plate includes a substrate, which is arranged on the cantilever beam; a first bending plate, which is formed by bending the substrate upward by ninety degrees; a second bending plate, which is formed by bending the first bending plate by ninety degrees toward the direction of the laser vision part; and the containing opening is arranged on the first bending plate and the second bending plate.

8. The laser vision module according to any one of claims 1 to 5, characterized in that: The sliding part is provided with a locking plate; the locking plate is longitudinally provided with a longitudinal sliding groove; the fixing part is provided with a locking knob; the locking knob passes through the longitudinal sliding groove; the locking knob is threadedly connected to the fixing part.

9. The laser vision module according to any one of claims 1 to 5, characterized in that: The laser vision unit includes an optical component, a camera arranged at the upper end of the optical component, a lens arranged at the lower end of the optical component, a laser arranged at one side of the optical component, and a sensor arranged at the other side of the optical component; the optical component is arranged on the adapter plate.

10. The laser vision module according to claim 9, characterized in that: A focal length tube is arranged at the lower end of the camera; the lower end of the focal length tube is arranged at the upper end of the optical component; and a sliding rod for adjusting the focal length is slidably connected to the outer wall of the focal length tube.

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