Storage machine for improving storage sealing performance of semiconductor packaging carrier plate

Abstract

The utility model discloses a storage machine for improving the storage leakproofness of a semiconductor packaging carrier plate, which comprises a rack, a conveying mechanism and a storage mechanism, a sealing element is arranged in the rack and divides the rack into an open space and a closed space, the conveying mechanism is positioned in the open space and is used for conveying the packaging carrier plate to be stored, and the storage mechanism is positioned in the closed space. The storage mechanism is located in the closed space and used for temporarily storing the packaging carrier plate, the lifting mechanism is used for driving the storage mechanism to ascend and descend in the closed space, and the translation mechanism is used for driving the packaging carrier plate to penetrate through the sealing piece to be transferred to the storage mechanism for temporary storage. Through the structural arrangement of the lifting mechanism, the translation mechanism and the sealing piece, the intelligent degree of storage of the packaging carrier plate by the storage machine is improved, meanwhile, dust attached to the surface of the packaging carrier plate is reduced, and the problems that the storage machine can only provide a pure storage space for the packaging carrier plate, and the dust attached to the surface of the storage machine cannot be reduced are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production equipment, in particular to a storage machine used for improving the storage sealing performance of semiconductor packaging carriers. Background Art

[0002] In the semiconductor field, semiconductor packaging substrate is a key component used to connect and package semiconductor chips with other components. This substrate provides protection, fixation and support for the chip, and also enhances the thermal conductivity and heat dissipation of the chip to prevent it from physical damage. Specifically, the semiconductor packaging substrate is usually located between the chip and the printed circuit board (PCB) in structure, with the upper layer connected to the chip and the lower layer connected to the printed circuit board. It realizes electrical and physical connection, power distribution, signal distribution and other functions, communicates the internal and external circuits of the chip, thereby ensuring the overall performance and stability of the semiconductor device.

[0003] Among them, the packaging carrier is the core material of chip packaging, and the technical process requirements of the product are extremely high. Specifically, in the process of packaging carrier production, the packaging carrier is generally stored in a storage machine. During the storage process, the packaging carrier may need to be cooled, or the storage position of the packaging carrier and the order of the board need to be adjusted. This needs to be determined according to the actual situation. In addition, due to the quality requirements of the packaging carrier, it is necessary to reduce the dust adhesion on the surface of the packaging carrier, and then it is necessary to improve the high airtightness of the storage machine. The existing storage machine can only provide a simple storage space for the packaging carrier, which cannot meet its quality requirements. Therefore, it is necessary to propose a storage machine for improving the storage airtightness of semiconductor packaging carriers to improve the above-mentioned defects. Utility Model Content

[0004] In order to overcome the deficiencies of the existing technology, the utility model provides a storage machine for improving the sealing of semiconductor packaging carrier storage, which solves the problem that the storage machine can only provide a simple storage space for the packaging carrier and cannot reduce the dust adhesion on its surface.

[0005] The technical solution of the utility model is as follows:

[0006] A storage machine for improving the sealing performance of semiconductor package carrier storage, comprising: a frame, a conveying mechanism and a storage mechanism, wherein a seal is provided in the frame, and the seal divides the frame into an open space and a closed space, the conveying mechanism is located in the open space and is used to convey the package carrier to be stored, and the storage mechanism is located in the closed space and is used to temporarily store the package carrier;

[0007] It also includes a lifting mechanism and a translation mechanism, wherein the lifting mechanism is used to drive the storage mechanism to move up and down in the enclosed space, and the translation mechanism is used to drive the packaging carrier to pass through the sealing member and transfer to the storage mechanism for temporary storage.

[0008] In one possible implementation, the seal includes an upper sealing plate and a lower sealing plate, the upper sealing plate is fixedly connected to the upper end of the frame, the lower sealing plate is slidably connected to the lower end of the frame, and the upper sealing plate and the lower sealing plate are used to separate or connect the enclosed space and the open space.

[0009] In one possible implementation, the translation mechanism includes a translation component and a lifting component located below the translation component. The translation component and the lifting component are located below the conveying mechanism in sequence. The lifting component is used to drive the translation component to rise and fall, and the translation component is used to drive the packaging carrier to move between an open space and a closed space.

[0010] In one possible implementation, the jacking assembly includes a jacking cylinder, a jacking bracket, and a jacking plate connected to the jacking bracket slide rail, the jacking plate is located below and connected to the translation assembly, the jacking cylinder is connected to the jacking bracket, the jacking plate is connected to the output end of the jacking cylinder, and the jacking cylinder is used to drive the jacking plate and the translation assembly to move up and down.

[0011] In one possible implementation, the translation assembly includes a translation cylinder, a support plate, and a fork frame connected to the support plate slide rail, the fork frame is used to match the packaging carrier, the translation cylinder is connected to the support plate, the output end of the translation cylinder is transmission-connected to the fork frame, and the translation cylinder is used to drive the fork frame and the packaging carrier to move in a horizontal direction.

[0012] In a possible implementation, the storage mechanism includes a temporary storage box having a temporary storage position opening toward the open space, and the temporary storage position is used to store the packaging carrier.

[0013] In one possible implementation, the lifting mechanism includes a lifting cylinder, a lifting column, and a lifting bracket slidably connected to the lifting column, the lifting cylinder is fixedly connected to the lifting column, the lifting bracket is used to carry the storage mechanism, and the lifting cylinder is used to drive the lifting bracket and the storage mechanism to move up and down.

[0014] The utility model according to the above scheme has the beneficial effect of providing a storage machine for improving the sealing of semiconductor packaging carrier storage, including a seal that divides a frame into an open space and a closed space, and a conveying mechanism, a storage mechanism, a lifting mechanism and a translation mechanism arranged in the space. The structural setting of the seal reduces the connection between the open space and the closed space, thereby reducing the entry of dust into the closed space, thereby reducing the adhesion of dust on the packaging carrier. In addition, the structural setting of the lifting mechanism and the translation mechanism can realize the need for arbitrary adjustment of the storage position of the packaging carrier and the sequence before and after the board is taken out, thereby improving the intelligence of the storage machine for the storage of the packaging carrier. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 Schematic diagram of the structure of the rack in this embodiment;

[0017] Figure 3 Schematic diagram of the structure of the translation mechanism in this embodiment;

[0018] Figure 4 Schematic diagram of the structure of the lifting mechanism in this embodiment;

[0019] Figure 5 Schematic diagram of the structure of the storage mechanism in this embodiment.

[0020] In the figure:

[0021] 10. Frame; 11. Seal; 1111. Upper sealing plate; 112. Lower sealing plate; 12. Open space; 13. Enclosed space; 14. Translation channel; 20. Conveying mechanism; 30. Storage mechanism; 31. Temporary storage box; 311. Temporary storage position; 40. Lifting mechanism; 41. Lifting cylinder; 42. Lifting column; 43. Lifting bracket; 50. Translation mechanism; 51. Translation assembly; 511. Translation cylinder; 512. Support plate; 513. Fork frame; 52. Lifting assembly; 521. Lifting cylinder; 522. Lifting bracket; 523. Lifting plate. DETAILED DESCRIPTION

[0022] The present invention is further described below in conjunction with the accompanying drawings and implementation modes:

[0023] It should be noted that in the production process of packaging carriers, multiple devices are required to perform multiple processes on the packaging carriers, wherein a storage machine is used to temporarily store the processed packaging carriers. Specifically, the packaging carriers are transferred between the multiple devices and the storage machine via a conveyor belt.

[0024] like Figures 1 to 5As shown, a storage machine for improving the storage sealing of semiconductor packaging carriers includes a frame 10, a conveying mechanism 20 and a storage mechanism 30. A sealing member 11 is provided in the frame 10, and the sealing member 11 divides the frame 10 into an open space 12 and a closed space 13. The conveying mechanism 20 is located in the open space 12 and is used to convey the packaging carriers to be stored. The storage mechanism 30 is located in the closed space 13 and is used to temporarily store the packaging carriers. In addition, it also includes a lifting mechanism 40 and a translation mechanism 50. The lifting mechanism 40 is used to drive the storage mechanism 30 to lift and move in the closed space 13, and the translation mechanism 50 is used to drive the packaging carrier to pass through the sealing member 11 and transfer to the storage mechanism 30 for temporary storage.

[0025] In this embodiment, reference Figure 1 and Figure 2 The sealing member 11 is located in the frame 10 and divides it into an open space 12 and a closed space 13 on the left and right sides. Specifically, the upper end of the sealing member 11 is connected and fixed to the inner side of the upper end surface of the frame 10, and the lower end of the sealing member 11 is connected and fixed to the inner side of the lower end surface of the frame 10. The conveying mechanism 20 and the translation mechanism 50 are both arranged in the open space 12, and the storage mechanism 30 and the lifting mechanism 40 are both arranged in the closed space 13. Specifically, the conveying mechanism 20 is used to receive the packaging carrier conveyed from other processing equipment, or to convey the packaging carrier to other processing equipment, and the translation mechanism 50 is located below the conveying mechanism 20. The translation mechanism 50 can lift the packaging carrier to separate it from the conveying mechanism 20 through the lifting structure moving in the vertical direction, and combine the translation structure moving in the horizontal direction of the translation mechanism 50 to transfer the lifted packaging carrier from the open space 12 to the closed space 13. In addition, the storage mechanism 30 is provided with a plurality of storages for storing the packaging carriers. The storage mechanism 30 is connected to the lifting mechanism 40, so that the lifting mechanism 40 drives the storage mechanism 30 to move in the vertical direction. Specifically, the storage mechanism 30 is driven by the lifting mechanism 40 to lift and move, so that each storage space of the storage mechanism 30 can match the packaging carrier transferred by the translation component 51, and vice versa. Through the structural setting of the lifting mechanism 40 and the translation mechanism 50, the packaging carrier in any storage space in the storage mechanism 30 can be transferred to the conveying mechanism 20, thereby realizing the need for arbitrary adjustment of the storage position of the packaging carrier and the sequence before and after the board is discharged, thereby improving the intelligence of the storage machine for the storage of the packaging carrier. At the same time, through the structural setting of the sealing member 11, the connection size between the enclosed space 13 and the open space 12 can be reduced, thereby reducing the dust from entering the enclosed space 13, and then reducing the dust from adhering to the surface of the packaging carrier, thereby improving the quality requirements of the storage environment of the packaging carrier.

[0026] For further reference, Figure 1 and Figure 2 The sealing member 11 includes an upper sealing plate 1111 and a lower sealing plate 112. The upper sealing plate 1111 is fixedly connected to the upper end of the frame 10, and the lower sealing plate 112 is slidably connected to the lower end of the frame 10. The upper sealing plate 1111 and the lower sealing plate 112 are used to separate or connect the enclosed space 13 and the open space 12.

[0027] In this embodiment, the upper sealing plate 1111 is connected and fixed to the inner side of the frame 10, the lower sealing plate 112 is slidably connected to the lower end of the frame 10, and the lower sealing plate 112 is located directly below the upper sealing plate 1111. Specifically, a telescopic cylinder is bolted to the outer side of the lower end of the frame 10, and the output end of the telescopic cylinder is screwed and fixed to the lower sealing plate 112. The telescopic cylinder drives the lower sealing plate 112 to rise and fall through the telescopic rod, so that the lower sealing plate 112 can abut against the upper sealing plate 1111 to separate the open space 12 from the enclosed space 13, or the lower sealing plate 112 is lowered to form a translation channel 14 between it and the upper sealing plate 1111, and the translation channel 14 is used for the translation component 51 to shuttle between the open space 12 and the enclosed space 13, so that the structural setting of the sealing member 11 can effectively separate the open space 12 and the enclosed space 13, thereby reducing the dust from entering the enclosed space 13, and ultimately improving the quality requirements of the packaging carrier storage environment.

[0028] For further reference, Figure 1 , Figure 3 and Figure 4 The translation mechanism 50 includes a translation component 51 and a lifting component 52 located below the translation component 51. The translation component 51 and the lifting component 52 are located below the conveying mechanism 20 in sequence. The lifting component 52 is used to drive the translation component 51 to rise and fall, and the translation component 51 is used to drive the packaging carrier to move between the open space 12 and the closed space 13.

[0029] In this embodiment, the translation mechanism 50 is located below the conveying mechanism 20. Specifically, the lifting assembly 52 is fixedly connected to the inner bolts of the lower end of the frame 10, wherein the translation assembly 51 is located below the conveying mechanism 20 and above the lifting assembly 52, and the translation assembly 51 is fixedly connected to the upper end of the lifting assembly 52. ​​The lifting assembly 52 is used to drive the translation assembly 51 to rise and fall, so that the translation assembly 51 rises and lifts the packaging carrier off the conveying mechanism 20. In addition, the translation assembly 51 is used to transfer the packaging carrier separated from the conveying mechanism 20 from the open space 12 through the translation channel 14 to the storage mechanism 30 in the closed space 13, thereby completing the storage of the processed packaging carrier by the storage machine. Conversely, when it is necessary to take the plate, the lower sealing plate 112 descends to open the translation channel 14, and the translation assembly 51 enters the closed space 13 to transfer the packaging carrier from the storage mechanism 30 to the top of the conveying mechanism 20, and the lifting assembly 52 drives the translation assembly 51 to descend to complete the taking of the packaging carrier.

[0030] For further reference, Figure 1 and Figure 3 The lifting assembly 52 includes a lifting cylinder 521, a lifting bracket 522, and a lifting plate 523 connected to the slide rail of the lifting bracket 522. The lifting plate 523 is located below and connected to the translation assembly 51. The lifting cylinder 521 is connected to the lifting bracket 522. The lifting plate 523 is connected to the output end of the lifting cylinder 521. The lifting cylinder 521 is used to drive the lifting plate 523 and the translation assembly 51 to move up and down.

[0031] In this embodiment, the lower end of the lifting bracket 522 is fixedly connected to the inner side of the lower end of the frame 10 by bolts, and one side of the lifting cylinder 521 is fixedly connected to the lifting bracket 522 by screws. Specifically, the lifting plate 523 is connected to the sliding rail on the other side of the lifting bracket 522, wherein the output end of the lifting cylinder 521 is fixedly connected to the lifting plate 523 by bolts, and the lifting cylinder 521 drives the lifting plate 523 to perform lifting and lowering movements, so that the lifting plate 523 is slidably connected to the lifting bracket 43 in the vertical direction. In addition, the upper end of the lifting plate 523 is fixedly connected to the translation assembly 51, so that the lifting plate 523 can drive the translation assembly 51 to be lifted and lowered as a whole, thereby separating the packaging carrier from the conveying mechanism 20.

[0032] For further reference, Figure 1 and Figure 3 The translation assembly 51 includes a translation cylinder 511, a support plate 512, and a fork frame 513 connected to the slide rail of the support plate 512, the fork frame 513 is used to match the packaging carrier, the translation cylinder 511 is connected to the support plate 512, the output end of the translation cylinder 511 is transmission-connected to the fork frame 513, and the translation cylinder 511 is used to drive the fork frame 513 and the packaging carrier to move in the horizontal direction.

[0033] In this embodiment, the support plate 512 is fixedly connected to the upper end of the lifting plate 523 by screws, the upper end surface of the support plate 512 is provided with a slide rail, and the lower end of the fork frame 513 is provided with a slider adapted to the slide rail, so that the fork frame 513 and the support plate 512 are connected to the slide rail in the horizontal direction. Specifically, the translation cylinder 511 is abutted against the upper end surface of the support plate 512, and the translation cylinder 511 is fixedly connected to the support plate 512 by bolts, wherein the output end of the translation cylinder 511 is fixedly connected to the fork frame 513 by screws, and the translation cylinder 511 drives the fork frame 513 to reciprocate toward the direction of the enclosed space 13, and the moving path of the fork frame 513 matches the translation channel 14, so that the fork frame 513 transfers the packaging carrier from the conveying mechanism 20 to the storage mechanism 30 to complete the temporary storage of the packaging carrier, and vice versa, transfers the packaging carrier from the storage mechanism 30 to the conveying mechanism 20 to complete the retrieval of the packaging carrier.

[0034] For further reference, Figure 1 and Figure 5 The storage mechanism 30 includes a temporary storage box 31 , and a temporary storage position 311 of the temporary storage box 31 is opened toward the open space 12 , and the temporary storage position 311 is used to store the packaging carrier.

[0035] Furthermore, a plurality of temporary storage boxes 31 are provided in the enclosed space 13, and the temporary storage boxes 31 are all located at the output end of the lifting assembly, so that they are driven to rise and fall by the lifting assembly. Specifically, a plurality of temporary storage positions 311 are provided on the temporary storage box 31, and the temporary storage positions 311 are arranged in the direction of the translation channel 14, and the temporary storage positions 311 are adapted to the packaging carrier, so that the utility model can store more packaging carriers.

[0036] For further reference, Figure 1 and Figure 4 The lifting mechanism 40 includes a lifting cylinder 41, a lifting column 42, and a lifting bracket 43 slidably connected to the lifting column 42. The lifting cylinder 41 is fixedly connected to the lifting column 42. The lifting bracket 43 is used to carry the storage mechanism 30. The lifting cylinder 41 is used to drive the lifting bracket 43 and the storage mechanism 30 to move up and down.

[0037] In this embodiment, the lifting column 42 is fixedly connected to the inner side of the frame 10 by bolts, and the lifting cylinder 41 is fixedly connected to the lifting column 42 by screws, wherein the lifting bracket 43 is slidably connected to the lifting column 42. Specifically, the lifting bracket 43 is fixedly connected to the temporary storage box 31. In addition, the output end of the lifting cylinder 41 is fixedly connected to the lifting bracket 43 by screws. The lifting cylinder 41 drives the lifting bracket 43 to move up and down, thereby driving the temporary storage box 31 on the lifting bracket 43 to move up and down, thereby realizing the need for arbitrary adjustment of the storage position of the packaging carrier and the sequence before and after the plate is output, thereby improving the intelligence of the storage machine for the storage of the packaging carrier.

[0038] In some embodiments, the storage mechanism includes a plurality of temporary storage boxes 31 of different specifications, and each temporary storage box 31 is provided with temporary storage positions 311 of different specifications. Combined with the structural setting of the lifting mechanism 40, temporary storage and retrieval of packaging carriers of different specifications can be achieved simultaneously.

[0039] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0040] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A storage device for improving the sealing performance of semiconductor package carrier storage, characterized in that: include: A frame, a conveying mechanism and a storage mechanism, wherein a sealing member is provided in the frame, and the sealing member divides the frame into an open space and a closed space, the conveying mechanism is located in the open space and is used to convey the package carrier to be stored, and the storage mechanism is located in the closed space and is used to temporarily store the package carrier; It also includes a lifting mechanism and a translation mechanism, wherein the lifting mechanism is used to drive the storage mechanism to move up and down in the enclosed space, and the translation mechanism is used to drive the packaging carrier to pass through the sealing member and transfer to the storage mechanism for temporary storage.

2. A storage machine for improving the sealing performance of semiconductor package carrier storage according to claim 1, characterized in that: The sealing member comprises an upper sealing plate and a lower sealing plate, wherein the upper sealing plate is fixedly connected to the upper end of the frame, and the lower sealing plate is slidably connected to the lower end of the frame, and the upper sealing plate and the lower sealing plate are used to separate or connect the closed space and the open space.

3. A storage machine for improving the sealing performance of semiconductor package carrier storage according to claim 1 or 2, characterized in that: The translation mechanism includes a translation component and a lifting component located below the translation component. The translation component and the lifting component are located below the conveying mechanism in sequence. The lifting component is used to drive the translation component to rise and fall, and the translation component is used to drive the packaging carrier to move between an open space and a closed space.

4. A storage machine for improving the sealing performance of semiconductor package carrier storage according to claim 3, characterized in that: The jacking assembly includes a jacking cylinder, a jacking bracket, and a jacking plate connected to the jacking bracket slide rail. The jacking plate is located below and connected to the translation assembly. The jacking cylinder is connected to the jacking bracket. The jacking plate is connected to the output end of the jacking cylinder. The jacking cylinder is used to drive the jacking plate and the translation assembly to move up and down.

5. A storage machine for improving the sealing performance of semiconductor package carrier storage according to claim 4, characterized in that: The translation assembly includes a translation cylinder, a support plate, and a fork frame connected to the support plate slide rail, the fork frame is used to match the packaging carrier, the translation cylinder is connected to the support plate, the output end of the translation cylinder is transmission-connected to the fork frame, and the translation cylinder is used to drive the fork frame and the packaging carrier to move in the horizontal direction.

6. A storage machine for improving the sealing performance of semiconductor package carrier storage according to claim 5, characterized in that: The storage mechanism comprises a temporary storage box, wherein the temporary storage box has a temporary storage position opening in the direction of the open space, and the temporary storage position is used for storing the packaging carrier.

7. A storage machine for improving the sealing performance of semiconductor package carrier storage according to any one of claims 1, 2 or 6, characterized in that: The lifting mechanism includes a lifting cylinder, a lifting column, and a lifting bracket slidably connected to the lifting column. The lifting cylinder is fixedly connected to the lifting column, the lifting bracket is used to carry the storage mechanism, and the lifting cylinder is used to drive the lifting bracket and the storage mechanism to move up and down.

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