Pressure control valve

Abstract

The utility model discloses a pressure control valve, and relates to the technical field of pressure control valve devices. The valve comprises a valve main body, an air inlet pipe, an air outlet pipe, a fixed plate and a filter plate, wherein the filter plate is positioned at one end of the fixed plate; the control mechanism comprises a rotating plate arranged in the valve body, and one end of the rotating plate is attached to the fixing plate. According to the utility model, the control mechanism is arranged; the output end of a driving motor rotates to drive a rotating plate to rotate through mechanical transmission, the rotating plate rotates to open or close an air vent formed in a fixed plate, compared with arrangement of a traditional swing valve, the occupied space of the device is reduced, meanwhile, the air vent of the fixed plate is symmetrical when being opened, and the device is convenient to use. And therefore, when air passes through the ventilation opening, the stress of the fixing plate is uniform, the situation that the fixing plate deforms after being used for many times is avoided, and the service life of the fixing plate is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure control valve devices, in particular to a pressure control valve. Background Art

[0002] At present, pressure control valves are mostly used in solar energy, semiconductor deposition equipment and dry etching. The pressure control valve changes and controls the flow rate of the gas flow, thereby controlling the etching rate and deposition rate. The current pressure control valve controls the gas flow rate by changing the gas passage area of ​​the valve through a swinging valve plate. The larger the valve passage area, the faster the gas passage rate, and vice versa.

[0003] When the current pressure control valve is in use, a motor is driven to control the valve plate to swing back and forth, thereby achieving the opening and closing of the valve. The greater the swing amplitude of the valve plate, the larger the opening area of ​​the valve, thereby increasing the flow rate of the gas. Since the valve plate needs to swing back and forth when working, and the valve plate needs swinging space when swinging, the pressure control valve occupies a large space when manufactured, and is not convenient for installation in a relatively narrow environment. At the same time, the valve plate is swung to open and close the valve, so that the air flow area of ​​the valve is increased or decreased. However, the flow area of ​​the valve is asymmetric when opened, resulting in uneven force on the valve at the end in contact with the gas when the gas passes through the valve. Long-term use causes the valve to deform, and gaps appear in the deformed valve, which causes gas leakage, affecting the normal use of the pressure control valve. For this purpose, a pressure control valve is provided. Utility Model Content

[0004] The utility model aims to provide a pressure control valve to solve the problem proposed in the above background technology that the current pressure control valve realizes the size of the valve opening and closing area by swinging the valve plate, which makes the overall space occupied by the pressure control valve large and inconvenient to be used in narrow environments. At the same time, the gas flow area when the valve is opened is in an asymmetric state, which leads to uneven force on the end of the valve that contacts the gas, resulting in valve deformation after long-term use.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a pressure control valve, comprising a valve body, an air inlet pipe welded to one end of the valve body, an air outlet pipe welded to the end of the valve body away from the air inlet pipe, a fixing plate fixed to the inner wall of the valve body by bolts, a filter plate fixed to the inner wall of the valve body by bolts, and the filter plate is located at one end of the fixing plate; a control mechanism, the control mechanism is arranged at the top end of the valve body, and the control mechanism extends to the interior of the valve body, the control mechanism includes a rotating plate arranged inside the valve body, and one end of the rotating plate is in contact with the fixing plate.

[0006] Preferably, the control mechanism further comprises a driving motor arranged at the top end of the valve body, the bottom end of the driving motor is fixed with a motor seat by bolts, and the bottom end of the motor seat is fixedly connected to the outer wall of the valve body by bolts.

[0007] Preferably, the output end of the driving motor is connected to a rotating rod through a coupling, the rotating rod extends into the interior of the valve body, the outer wall of the rotating rod is connected to a first support seat through a bearing, both sides of the first support seat are fixedly connected to the inner wall of the valve body by bolts, and a first bevel gear is welded to the bottom end of the rotating rod, and the first bevel gear is located inside the first support seat.

[0008] Preferably, one end of the first bevel gear is meshed with the second bevel gear, and one end of the second bevel gear is welded with a rotating column, the rotating column penetrates to the outside of the first support seat, and the rotating column is rotatably connected to the inner wall of the first support seat through a bearing, and one end of the rotating column is fixedly connected to the rotating plate through a bolt.

[0009] Preferably, the inner wall of the fixed plate is provided with a plurality of evenly distributed vents, and the rotating plate matches the vents.

[0010] Preferably, the inner wall of the valve body is fixed with a second support seat by bolts, the second support seat is located at one end of the filter plate, the inner wall of the second support seat is connected with a connecting column by a bearing, both ends of the connecting column extend to the outside of the second support seat, and the end of the connecting column away from the filter plate is fixed with a fan blade by bolts.

[0011] Preferably, one end of the connecting column away from the fan blade is connected to a connecting plate by bolts, and the connecting plate is located at one end of the filter plate.

[0012] Preferably, a plurality of evenly distributed flexible brushes are provided at one end of the connection plate close to the filter plate, and the flexible brushes are in contact with one end of the filter plate.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] By setting a control mechanism; the output end of the driving motor is rotated to drive the rotating plate to rotate through mechanical transmission, and the rotation of the rotating plate can open or close the vents opened inside the fixed plate. Compared with the setting of the traditional swing valve, the space occupied by the device is reduced, and the vents of the fixed plate are symmetrical when opened, so that when air passes through the vents, the force on the fixed plate is uniform, which avoids deformation of the fixed plate after repeated use, and improves the service life of the fixed plate.

[0015] At the same time, a filter plate is arranged inside the valve body, through which the passing gas is filtered, thereby purifying the circulating air, and at the same time, the fluidity of the air drives the connecting plate to rotate, and the flexible brush at one end of the connecting plate cleans one end of the filter plate to avoid blockage of the filter holes of the filter plate, thereby ensuring the air flow of the filter plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the internal structure of the valve body of the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the rotating plate blocking the fixed plate of the utility model;

[0019] Figure 4 This is a schematic diagram of the internal structure of the first support base of the utility model;

[0020] Figure 5 For the utility model Figure 4 A in the figure is an enlarged structural diagram.

[0021] In the figure: 1. valve body; 101. fixing plate; 1011. air vent; 102. filter plate; 2. air inlet pipe; 3. air outlet pipe; 4. control mechanism; 401. drive motor; 4011. motor seat; 402. rotating rod; 4021. first support seat; 403. first bevel gear; 404. second bevel gear; 405. rotating column; 406. rotating plate; 5. second support seat; 501. connecting column; 502. fan blade; 503. connecting plate. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] The following is combined with Figure 1-Figure 5 The utility model is described in further detail.

[0024] See also Figure 1-Figure 5, the utility model provides a pressure control valve embodiment: a pressure control valve, including a valve body 1, one end of the valve body 1 is welded with an air inlet pipe 2, the air inlet pipe 2 is used for the introduction of gas, the end of the valve body 1 away from the air inlet pipe 2 is welded with an air outlet pipe 3, the air outlet pipe 3 is used for the outlet of gas, the inner wall of the valve body 1 is fixed with a fixing plate 101 by bolts, the fixing plate 101 is used for the passage of gas, the inner wall of the valve body 1 is fixed with a filter plate 102 by bolts, the filter plate 102 is located at one end of the fixing plate 101, and the filter plate 102 is used to filter the passing gas; a control mechanism 4, the control mechanism 4 is arranged at the top of the valve body 1, and the control mechanism 4 extends to the inside of the valve body 1, the control mechanism 4 is used for the closing of the fixing plate 101, thereby facilitating the passage and blocking of gas, the control mechanism 4 includes a rotating plate 406 arranged inside the valve body 1, one end of the rotating plate 406 is in contact with the fixing plate 101, and the rotating plate 406 is used to open and close the vent 1011;

[0025] The control mechanism 4 also includes a driving motor 401 arranged at the top of the valve body 1, and a motor seat 4011 is fixed to the bottom end of the driving motor 401 by bolts, and the bottom end of the motor seat 4011 is fixedly connected to the outer wall of the valve body 1 by bolts, and the motor seat 4011 is used to support the driving motor 401, and the motor seat 4011 is used to ensure the stability of the driving motor 401 when working; the output end of the driving motor 401 is connected to a rotating rod 402 through a coupling, and the rotating rod 402 penetrates into the interior of the valve body 1, and the outer wall of the rotating rod 402 is connected to a first support seat 4021 through a bearing, and the two sides of the first support seat 4021 are fixedly connected to the inner wall of the valve body 1 by bolts, and the bottom end of the rotating rod 402 is welded with a first bevel gear 403, and the first bevel gear 403 is located at the first support Inside the support seat 4021, the output end of the driving motor 401 rotates to drive the rotating rod 402 to rotate, and the rotation of the rotating rod 402 can drive the first bevel gear 403 to rotate; one end of the first bevel gear 403 is meshed with the second bevel gear 404, and one end of the second bevel gear 404 is welded with a rotating column 405, the rotating column 405 penetrates the outside of the first support seat 4021, and the rotating column 405 is rotatably connected to the inner wall of the first support seat 4021 through a bearing, and one end of the rotating column 405 is fixedly connected to the rotating plate 406 through a bolt, and the rotation of the first bevel gear 403 can drive the second bevel gear 404 to rotate, and the rotation of the second bevel gear 404 drives the rotating column 405 to rotate, and the rotation of the rotating column 405 can drive the rotating plate 406 to rotate, so as to facilitate the opening or closing of the fixed plate 101;

[0026] The inner wall of the fixed plate 101 is provided with a plurality of evenly distributed vents 1011, and the rotating plate 406 matches the vent 1011. When the rotating plate 406 rotates and is located at one end of the vent 1011, the vent 1011 is in a blocked state, and gas cannot pass through. When the rotating plate 406 rotates and is misaligned with one end of the vent 1011, the vent 1011 is opened, and gas can pass through at this time. The inner wall of the valve body 1 is fixed with a second support seat 5 by bolts, and the second support seat 5 is located at one end of the filter plate 102. The inner wall of the second support seat 5 is connected with a connecting column 501 by a bearing, and both ends of the connecting column 501 extend to the outside of the second support seat 5. The end of the connecting column 501 away from the filter plate 102 is fixed with a fan blade 502 by bolts. When the vent 1011 is opened, gas flows through the valve body 1 502, thereby driving the fan blade 502 to rotate, and the rotation of the fan blade 502 drives the connecting column 501 to rotate; the end of the connecting column 501 away from the fan blade 502 is connected to the connecting plate 503 by bolts, and the connecting plate 503 is located at one end of the filter plate 102. The rotation of the fan blade 502 can drive the connecting column 501 to rotate, and the rotation of the connecting column 501 drives the connecting plate 503 to rotate; a plurality of evenly distributed flexible brushes are provided at one end of the connecting plate 503 close to the filter plate 102, and the flexible brushes are in contact with one end of the filter plate 102. When the connecting plate 503 rotates, it drives a plurality of evenly distributed flexible brushes to rotate, and the flexible brush rotates and cleans one end of the filter plate 102 to prevent the filtered impurities from adhering to one end of the filter plate 102, thereby ensuring the air circulation of the filter plate 102.

[0027] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A pressure control valve, characterized in that: include: A valve body (1), one end of the valve body (1) is welded with an air inlet pipe (2), an end of the valve body (1) away from the air inlet pipe (2) is welded with an air outlet pipe (3), an inner wall of the valve body (1) is fixed with a fixing plate (101) by means of bolts, an inner wall of the valve body (1) is fixed with a filter plate (102) by means of bolts, and the filter plate (102) is located at one end of the fixing plate (101); A control mechanism (4), wherein the control mechanism (4) is arranged at the top end of the valve body (1), and the control mechanism (4) extends to the interior of the valve body (1), and the control mechanism (4) comprises a rotating plate (406) arranged inside the valve body (1), and one end of the rotating plate (406) is in contact with the fixed plate (101).

2. A pressure control valve according to claim 1, characterized in that: The control mechanism (4) further comprises a driving motor (401) arranged at the top end of the valve body (1); the bottom end of the driving motor (401) is fixed with a motor seat (4011) by means of bolts; the bottom end of the motor seat (4011) is fixedly connected to the outer wall of the valve body (1) by means of bolts.

3. A pressure control valve according to claim 2, characterized in that: The output end of the driving motor (401) is connected to a rotating rod (402) via a coupling, and the rotating rod (402) penetrates into the interior of the valve body (1). The outer wall of the rotating rod (402) is connected to a first support seat (4021) via a bearing, and both sides of the first support seat (4021) are fixedly connected to the inner wall of the valve body (1) via bolts. A first bevel gear (403) is welded to the bottom end of the rotating rod (402), and the first bevel gear (403) is located inside the first support seat (4021).

4. A pressure control valve according to claim 3, characterized in that: One end of the first bevel gear (403) is meshed with the second bevel gear (404), and one end of the second bevel gear (404) is welded with a rotating column (405), the rotating column (405) penetrates to the outside of the first support seat (4021), and the rotating column (405) is rotatably connected to the inner wall of the first support seat (4021) through a bearing, and one end of the rotating column (405) is fixedly connected to the rotating plate (406) through a bolt.

5. A pressure control valve according to claim 4, characterized in that: The inner wall of the fixed plate (101) is provided with a plurality of evenly distributed vents (1011), and the rotating plate (406) matches the vents (1011).

6. A pressure control valve according to claim 5, characterized in that: The inner wall of the valve body (1) is fixed with a second support seat (5) by bolts, and the second support seat (5) is located at one end of the filter plate (102). The inner wall of the second support seat (5) is connected with a connecting column (501) by a bearing, and both ends of the connecting column (501) extend to the outside of the second support seat (5), and the end of the connecting column (501) away from the filter plate (102) is fixed with a fan blade (502) by bolts.

7. A pressure control valve according to claim 6, characterized in that: One end of the connecting column (501) away from the fan blade (502) is connected to a connecting plate (503) via bolts, and the connecting plate (503) is located at one end of the filter plate (102).

8. A pressure control valve according to claim 7, characterized in that: A plurality of evenly distributed flexible brushes are provided at one end of the connection plate (503) close to the filter plate (102), and the flexible brushes are in contact with one end of the filter plate (102).

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