Furnace door buffer mechanism and PECVD equipment

Abstract

The utility model provides a furnace door buffering mechanism and PECVD equipment, and the furnace door buffering mechanism comprises a sliding part which is connected with a connecting arm and is provided with two or more through gaps, the gaps are arranged at intervals, the width size of the gap close to the inner side is not greater than the width size of the gap close to the outer side, and the directions of the gaps are different; the number of the sliding seats is consistent with that of the notches, the sliding seats are in one-to-one correspondence with the notches, at least parts of the sliding seats penetrate through the notches and can slide relative to the sliding parts, one ends of the sliding seats are connected with the furnace door, and the other ends of the sliding seats can stop movement of the sliding parts in the direction away from the furnace door; and the elastic pieces are consistent with the sliding seats in number and correspond to the sliding seats one to one, one ends of the elastic pieces abut against the sliding pieces, the other ends abut against the sliding seats or the furnace door, and the elastic pieces are in a compressed state. According to the furnace door buffering mechanism, buffering can be carried out when the furnace door is closed, adjustment can be conveniently carried out, the sealing effect is guaranteed, the maintenance difficulty is lowered, and the workload is reduced.

Description

Technical Field

[0001] The present application belongs to the technical field of PECVD equipment, and more specifically, relates to a furnace door buffer mechanism and PECVD equipment. Background Art

[0002] In the related art, when the furnace door of the PECVD equipment is closed, the furnace door and the furnace tube are generally in hard contact, and the hard contact between the two is likely to cause damage to the parts. At the same time, the furnace door and the furnace tube are difficult to seal, resulting in leakage of process special gases or contamination of the furnace tube. When the furnace door is closed, the structure of the furnace door needs to be adjusted several times to achieve a better sealing effect. The installation requirements are relatively strict and the furnace door needs to be adjusted regularly, which greatly increases the difficulty and workload of on-site maintenance personnel, and the effect is not good. Utility Model Content

[0003] The embodiment of the present application provides a furnace door buffer mechanism, which can provide buffering when the furnace door is closed and can be easily adjusted to ensure the sealing effect, reduce the difficulty of maintenance and reduce the workload.

[0004] The technical solution adopted in the embodiment of the present application is: to provide a furnace door buffer mechanism for a PECVD device, wherein the PECVD device comprises a furnace door and a connecting arm, and the furnace door buffer mechanism comprises:

[0005] A sliding member connected to the connecting arm and provided with two or more through-going notches, the notches are arranged at intervals from each other, the width of the notch on the inner side is not greater than the width of the notch on the outer side, and the orientations of the notches are different;

[0006] Slide seats, the number of which is the same as that of the notches and corresponds to each other one by one, the slide seats are at least partially inserted into the notches and can slide relative to the sliding member, one end of the slide seat is connected to the furnace door, and the other end can stop the movement of the sliding member away from the furnace door; and

[0007] The elastic member is consistent in number with the sliding seat and corresponds one to one. One end of the elastic member abuts against the sliding member, and the other end abuts against the sliding seat or the furnace door. The elastic member is in a compressed state.

[0008] Furthermore, there are two slide seats, one of which is located at the center of the furnace door, and the other slide seat is located directly below the center of the furnace door.

[0009] Furthermore, the openings of the two notches face away from each other, and the opening of the notch located on the upper side faces directly upward.

[0010] Furthermore, there are more than two slide seats, at least one of which is located above the center of the furnace door, and the other slide seats are located below the center of the furnace door.

[0011] Furthermore, the openings of the notches located at the bottom face downward, and the openings of the notches located at the top face upward.

[0012] Furthermore, the notch is in a circular arc shape, an elliptical arc shape, a rectangular shape, a U shape or a V shape.

[0013] Furthermore, the sliding member comprises:

[0014] A connecting piece connected to one end of the connecting arm;

[0015] a slide plate connected to the connecting member, the slide plate being provided with the notch; and

[0016] The support member is arranged at an end of the connecting member away from the furnace door, and the elastic member is located between the support member and the sliding seat.

[0017] Furthermore, the end of the slide seat away from the furnace door is provided with a first positioning structure matched with one end of the elastic member, and the end of the support member close to the furnace door is provided with a second positioning structure matched with the other end of the elastic member.

[0018] Furthermore, the first positioning structure and / or the second positioning structure is a positioning groove or a positioning column.

[0019] Furthermore, the slide seat comprises:

[0020] a sliding column portion, at least partly passing through the notch and being able to slide relative to the sliding member, one end of the sliding column portion being connected to the furnace door; and

[0021] A limiting portion is arranged at the other end of the sliding column portion, and the limiting portion can stop the movement of the sliding member away from the furnace door.

[0022] An embodiment of the present application also provides a PECVD device, comprising a furnace door, a connecting arm and a furnace door buffer mechanism as described in any one of the above items, wherein the furnace door buffer mechanism connects the connecting arm and the furnace door.

[0023] The beneficial effect of the furnace door buffer mechanism provided by the embodiment of the present application is that: the sliding member is connected to the connecting arm, the sliding seat is connected to the furnace door, the sliding member and the sliding seat are slidably matched, and the elastic force of the elastic member makes the furnace door and the connecting arm move away from each other. When the connecting arm pushes the furnace door to close, the furnace door abuts against the furnace pipe and the connecting arm continues to push forward, and the connecting arm drives the sliding member to press forward together, so that the sliding member and the sliding seat slide relative to each other. Since the elastic force of the elastic member is opposite to the moving direction of the connecting arm, the connecting arm is blocked to buffer, and a hard collision between the connecting arm and the furnace door is avoided. At the same time, the furnace door is also pressed against the furnace pipe due to the elastic force. In addition, since the width dimension of the notch on the inner side is not greater than the width dimension of the notch on the outer side, when the furnace door and the furnace pipe are pressed, the pressure at various places is uneven. Under the elastic force of each elastic member, the sliding seat can be tilted and adjusted to a small extent in the notch relative to the penetration direction of the notch under uneven pressure, so that the furnace door is also slightly adjusted, and the furnace door is pressed against the furnace pipe more evenly, achieving a better sealing effect. That is, the furnace door buffer mechanism of the embodiment of the present application can be adaptively adjusted when closing the door, and the sealing effect is better. There is no need for on-site personnel to adjust the furnace door structure multiple times, which reduces the difficulty of maintenance and reduces the workload. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0025] Figure 1 A schematic diagram of a PECVD device provided in an embodiment of the present application;

[0026] Figure 2 A schematic diagram of the furnace door buffer mechanism, furnace door and connecting arm after being assembled according to an embodiment of the present application;

[0027] Figure 3 for Figure 2 Magnified view at A in the middle;

[0028] Figure 4 An exploded view of the furnace door buffer mechanism, the furnace door, and the connecting arm provided in an embodiment of the present application;

[0029] Figure 5 A schematic diagram of the three-dimensional structure of a sliding member provided in an embodiment of the present application;

[0030] Figure 6 A schematic diagram of the three-dimensional structure of a slide provided in an embodiment of the present application;

[0031] Figure 7A schematic diagram of the positions of the notches and the furnace door in an embodiment in which the number of slide seats provided in the present application is three;

[0032] Figure 8 A schematic diagram of the positions of the notches and the furnace door in an embodiment in which the number of slide seats provided in the present application is four.

[0033] Among them, the reference numerals in the figure are:

[0034] 10. Sliding member; 11. Slide plate; 111. Notch; 1111. Inner wall; 1112. Opening; 12. Connecting member; 13. Support member; 131. Support plate; 132. Cover plate; 133. Second positioning structure;

[0035] 20. Sliding seat; 21. Sliding column portion; 22. Position limiting portion; 221. First positioning structure; 23. Fixing portion;

[0036] 30. Elastic parts;

[0037] 50. Furnace door;

[0038] 60. Connecting arm;

[0039] 70. Door opening and closing mechanism; 71. Base; 72. Sliding bottom plate; 73. First cylinder; 74. Second cylinder;

[0040] 80. Furnace pipe;

[0041] X, first direction; Y, second direction. DETAILED DESCRIPTION

[0042] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0043] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0044] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0045] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0046] See also Figure 1 and Figure 2 , the furnace door buffer mechanism provided in the embodiment of the present application is now described.

[0047] The furnace door buffer mechanism provided in the embodiment of the present application can be used in PECVD equipment.

[0048] Reference Figure 1 , the PECVD equipment may include a furnace door 50 and a connecting arm 60, and the furnace door buffer mechanism is used to connect the furnace door 50 and the connecting arm 60, so as to buffer the furnace door 50 when closing the furnace door 50, and the furnace door 50 can be adjusted. The PECVD equipment may also include a furnace tube 80 and a door opening and closing mechanism 70, one end of the furnace tube 80 is a door, and before the heating reaction is carried out in the furnace tube 80, the door needs to be closed with the furnace door 50, and then the furnace tube 80 is vacuumed, and then the heating reaction is carried out. The connecting arm 60 is outside the door, and the door opening and closing mechanism 70 is connected to the connecting arm 60, and is used to drive the connecting arm 60 to approach or move away from the door along the first direction X, so as to drive the furnace door 50 to close or punch the door through the connecting arm 60. It can be understood that the furnace door 50 is a circular plate, and its axis is arranged along the first direction X.

[0049] Among them, refer to Figure 1 The door opening and closing mechanism 70 may include a base 71, a sliding bottom plate 72 slidable along a first direction X and arranged on the base 71, a first cylinder 73 and a second cylinder 74. The first cylinder 73 is used to drive the sliding bottom plate 72 to translate along the first direction X on the base 71, the connecting arm 60 is slidably arranged on the sliding bottom plate 72 along a second direction Y, and the second cylinder 74 is used to drive the connecting arm 60 to slide along the second direction Y, the first direction X and the second direction Y are at an angle, for example, the first direction X and the second direction Y are perpendicular. The connecting arm 60 is also along the second direction Y, and the first direction X and the second direction Y are both horizontal.

[0050] Reference Figure 1The second cylinder 74 has an extended state and a retracted state. In the extended state, the furnace door 50 is opposite to the door of the furnace tube 80. In the retracted state, the furnace door 50 is staggered with the door. Usually, when the door of the furnace tube 80 is opened, in order to facilitate the placement of workpieces into or removal from the furnace tube 80, the second cylinder 74 is in the retracted state. When the door needs to be closed, the second cylinder 74 switches to the extended state, aligns the furnace door 50 with the door, and then approaches the door under the drive of the first cylinder 73 and closes the door.

[0051] The specific details of the door opening and closing mechanism 70 can refer to the relevant technology. It is not the main improvement point of the present application and will not be described in detail here.

[0052] Reference Figure 2 The furnace door buffer mechanism may include a sliding member 10 , a sliding seat 20 and an elastic member 30 .

[0053] Reference Figure 2 , Figure 3 and Figure 4 The sliding member 10 is connected to the connecting arm 60 and is provided with two or more through-going notches 111. The notches 111 are spaced apart from each other. The width dimension of the inner side of the notch 111 is not greater than the width dimension of the outer side of the notch. The openings 1112 are oriented in different directions.

[0054] Reference Figure 2 The sliding member 10 is connected and fixed to the connecting arm 60, which can be welded or connected with screws or bolts. The notches 111 set on the sliding member 10 can be two, three, four or even more. The notches 111 penetrate the sliding member 10 along the first direction X, forming through holes at both ends of the sliding member 10. The notches 111 are formed at the edge of the sliding member 10, so that the notches 111 have a concave inner side wall 1111 and an opening 1112. Among them, the inner side wall 1111 of a notch 111 can be a continuous curved surface or a plurality of planes connected. The width of the inner side wall 1111 close to the opening 1112 is not less than the width away from the opening 1112, that is, the width dimension of the notch 111 on the inner side is not greater than the width dimension of the notch 111 on the outer side. In other words, the width of the notch 111 from the outside to the inside can gradually decrease or remain unchanged, and a structure similar in shape to the notch 111 can enter the notch 111 from the opening 1112.

[0055] Reference Figure 2 , Figure 7 and Figure 8 The openings 1112 of each notch 111 have different directions, and each opening 1112 can be oriented directly upward, directly downward, obliquely upward, obliquely downward, or horizontally.

[0056] Reference Figure 2 and Figure 4The number of slide seats 20 and the number of notches 111 are consistent and correspond one to one. The slide seat 20 is at least partially inserted into the notch 111 and can slide relative to the sliding member 10. One end of the slide seat 20 is connected to the furnace door 50, and the other end can stop the movement of the sliding member 10 away from the furnace door 50.

[0057] The number of slides 20 and notches 111 is the same, so that each slide 20 slides with one notch 111. The shape of the slide 20 can be partially matched with the shape of the notch 111, or the shape of the entire slide 20 can be matched with the shape of the notch 111, so that the shape-matched part can enter the notch 111 from the opening 1112 and cooperate with the sliding member 10 to form relative sliding. It can be understood that there is a certain sliding gap between the inner side wall 1111 of the notch 111 and the surface of the slide 20. The slide 20 is fixed on the furnace door 50, and the slide 20 enters the notch 111 from the opening 1112. The width of the slide 20 part is smaller than the size of the opening 1112, so that the slide 20 can enter the notch.

[0058] Due to the setting of the opening 1112, combined with the sliding gap between the inner side wall 1111 and the surface of the slide 20, the slide 20 is less restricted in the notch 111, and the slide 20 can be slightly deflected outward in the notch 111. For example, after the notch 111 passes through the first direction X, when the slide 20 enters the notch 111 and the two slide together, the length direction of the slide 20 should also be oriented toward the first direction X. However, due to the existence of the opening 1112 and the sliding gap, the length direction of the slide 20 can be slightly tilted relative to the first direction X. At the same time, in the case of tilting, the sliding member 10 and the slide 20 can still slide relative to each other.

[0059] Due to the existence of the opening 1112, the part of the structure of the slide 20 originally in the notch 111 can be slightly moved outward from the opening 1112, reducing the contact pressure between the slide 20 and the inner wall 1111 due to the tilt, thereby reducing the friction between the slide 20 and the inner wall 1111, making it difficult for the tilted sliding to get stuck. The furnace door 50 is also tilted relative to the first direction X, which can change the position and angle of contact between the furnace door 50 and the furnace tube 80.

[0060] Of course, when the plurality of slides 20 are respectively inserted into the corresponding notches 111 and connected to the furnace door 50 , the notches 111 are oriented in different directions and restrict each other, so that the slides 20 will not completely fall out of the notches 111 .

[0061] After the slide 20 is inserted into the notch 111, the slide 20 and the sliding member 10 can slide relative to each other. It can be understood that the length of the slide 20 is greater than the length of the notch 111, and the end of the slide 20 away from the furnace door 50 is outside the notch 111. When sliding relative to each other, the end of the slide 20 away from the furnace door 50 and the furnace door 50 both play a role of blocking and restricting the slide 10, preventing the slide 10 from sliding off the slide 20 along the length direction of the slide 20.

[0062] Reference Figure 2 and Figure 4 The number of the elastic members 30 and the sliding seat 20 is consistent and corresponds one to one. One end of the elastic member abuts against the sliding member 10, and the other end abuts against the sliding seat 20 or the furnace door 50. The elastic member 30 is in a compressed state.

[0063] That is, the elastic member 30 can apply elastic force to the sliding member and the sliding seat 20 (or the furnace door) to keep the furnace door 50 and the connecting arm 60 away from each other. There are also multiple elastic members 30, which can apply elastic force at multiple positions of the furnace door 50. When the furnace door 50 and the furnace tube 80 are closed with uneven force, the elastic force of each elastic member 30 can be automatically balanced, and the position and angle of the furnace door 50 can be automatically adjusted, so that the furnace door 50 is better fitted and closed with the furnace tube 80.

[0064] Since the slide 20 is connected and fixed to the furnace door 50, and the slide 10 is connected and fixed to the connecting arm 60, when there is no pressure to bring the connecting arm 60 and the furnace door 50 closer to each other, due to the effect of the elastic force, the slide 10 moves away from the furnace door 50 along the length direction of the slide 20 along with the connecting arm 60 until it abuts against the end of the slide 20 away from the furnace door and is limited and stopped. At this time, the distance between the furnace door 50 and the connecting arm 60 remains unchanged.

[0065] When the furnace door 50 is closed, the door opening and closing mechanism 70 drives the connecting arm 60 to approach the furnace tube 80, and the furnace door 50 then approaches the furnace tube 80 and abuts against the furnace tube 80. The connecting arm 60 continues to approach the furnace tube 80. Since the furnace door 50 has abutted against the furnace tube 80 and no longer moves forward, the connecting arm 60 continues to move forward and overcomes the elastic force of the elastic member 30, and slides the sliding member 10 along the length direction of the sliding seat 20 to approach the furnace door 50. At the same time, the furnace door 50 is further pressed against the furnace tube 80 under the action of the elastic force until the door closing action stops. In this process, the original unbalanced contact pressure between the furnace door 50 and the furnace tube 80 and the elastic force of each elastic member 30 will cause the furnace door 50 to have a slight position and angle adjustment (the sliding seat 20 also has a slight tilt adjustment relative to the notch 111), so that the pressure tends to be balanced, so that the furnace door 50 is further pressed against the furnace tube 80, and the furnace tube 80 is completely sealed. The sliding gap between the slide seat 20 and the notch 111 and the opening 1112 of the notch 111 can ensure that the sliding member 10 and the slide seat 20 will not get stuck when the furnace door 50 is tilted and adjusted and the connecting arm 60 is pressed.

[0066] That is to say, the furnace door buffer mechanism of the embodiment of the present application can, through the cooperation of the sliding member 10, the sliding seat 20 and the elastic member 30, perform buffering through the elastic member 30 when the furnace door 50 is closed, without causing hard collision and avoiding damage to parts. At the same time, through the opening 1112 and the sliding gap, the furnace door 50 can be adaptively adjusted when closed to achieve a better sealing effect. At the same time, the effect is stable and not easy to get stuck, which greatly reduces the installation requirements of the furnace door 50 and reduces the difficulty and workload of on-site personnel in maintenance.

[0067] Reference Figure 2 In some embodiments of the present application, two slide seats 20 are provided, one slide seat 20 is located at the center of the furnace door 50, and the other slide seat 20 is located directly below the center of the furnace door 50. The number of slide seats 20 is consistent with the number of notches 111 and corresponds one to one. Therefore, there are also two notches 111, one at the center of the furnace door 50 and one directly below the center of the furnace door 50. The setting of these two positions can make the furnace door 50 more balanced when the force is closed.

[0068] The furnace door 50 is vertical. Under the action of gravity, since only one side of the furnace door 50 is supported (i.e., the side where the mounting member is provided), the upper half of the furnace door 50 will tend to the side away from the connecting arm 60, and the lower half will tend to the side close to the connecting arm 60 (i.e., deflected around the slide seat 20 located at the center of the circle). For this reason, another slide seat 20 is provided below the center of the circle, and the elastic force of the corresponding elastic member 30 pushes the lower half to the side away from the connecting arm 60, thereby offsetting the deflection caused by gravity, so that the axis of the furnace door 50 remains along the first direction X, and the furnace door 50 remains vertical. In this way, when the furnace door 50 is used to close the furnace tube 80, the pressure after the furnace door 50 contacts the furnace tube 80 is more balanced, and the sealing effect is better.

[0069] The openings 1112 of the two notches 111 are away from each other, and the opening 1112 of the upper notch 111 faces upward. The openings 1112 of the two notches, one above and one below, cooperate with each other to limit the two slide seats 20 as a whole, so that the movement direction of the furnace door 50 is limited, and it can only move and adjust its inclination within a small range, so as to prevent the slide seat 20 from completely slipping out of the notch 111 during the adjustment and movement of the furnace door 50, causing the furnace door 50 to fall off the connecting arm 60 and be damaged.

[0070] In some embodiments of the present application, more than two slide seats 20 are provided, at least one slide seat 20 is located above the center of the furnace door 50, and the other slide seats 20 are located below the center of the furnace door 50. By arranging the slide seats 20 above and below the center of the furnace door 50, the tilt of the furnace door 50 caused by the unilateral support can also be balanced.

[0071] Reference Figure 7For example, if there are three slide seats 20, one slide seat 20 is located directly above the center of the furnace door 50, and the other two slide seats 20 are located on both sides below the center of the circle. The three slide seats 20 are arranged in an isosceles triangle, and the two slide seats 20 at the bottom are the two ends of the base of the isosceles triangle. According to the weight of the furnace door 50 and the elastic force of the elastic member 30 in different embodiments, the distance between the center of the circle of the furnace door 50 and the base, and the distance between the center of the circle and the upper slide seat 20 can be calculated and controlled.

[0072] Reference Figure 8 For example, there are four slide seats 20, two slide seats 20 are located on both sides above the center of the furnace door 50, and the remaining two slide seats 20 are located on both sides below the center of the circle. The four slide seats 20 are arranged in an isosceles trapezoid, and the upper side is the short side of the trapezoid, and the lower side is the long side. Similarly, the distance between the center of the furnace door 50 and the upper and lower sides can be calculated according to the weight of the furnace door 50 and the elastic force of the elastic member 30 in different embodiments.

[0073] The opening 1112 of each notch 111 located at the bottom faces downward, and the opening 1112 of the notch 111 located at the top faces upward. It can be understood that the downward direction here can be tilted downward or directly downward. When tilted downward, the directions are away from each other, for example, one is towards the lower left and the other is towards the lower right. Similarly, the upward direction here can be tilted upward or directly upward. When tilted upward, the directions are away from each other, for example, one is towards the upper left and the other is towards the upper right. Through different directions, each slide 20 is restricted to prevent the slide 20 from moving out of the notch 111 when the furnace door 50 adjusts its position and angle.

[0074] It can be understood that in the embodiment of the present application, the embodiment using two slide seats 20 saves more materials, is simpler to install and maintain, and is conducive to reducing equipment costs.

[0075] The notch 111 is in the shape of a circular arc, an elliptical arc, a rectangle, a U shape or a V shape. Correspondingly, at least a part of the shape of the slide 20 matches the shape of the notch 111. As a preferred embodiment, the notch 111 is in the shape of a U shape, and part of the slide 20 is in the shape of a cylinder.

[0076] Reference Figure 4 and Figure 5 The sliding member 10 may include a connecting member 12, a sliding plate 11 and a supporting member 13. The connecting member 12 is connected to one end of the connecting arm 60, and the sliding plate 11 is connected to the connecting member 12, and the sliding plate 11 is provided with a notch 111. That is, the connecting member 12 will not block the notch 111, so as to avoid affecting the mutual sliding between the sliding column portion 21 and the sliding plate 11.

[0077] Reference Figure 4 and Figure 5The connecting member 12 is block-shaped, for example, a rectangular parallelepiped, and has two first and second faces facing away from each other, and four side faces between the first and second faces, and the first face and the side faces are perpendicular to each other. The slide plate 11 is connected and fixed to the first face, and the connecting plate can be connected and fixed to one of the side faces.

[0078] The support member 13 is arranged at one end of the sliding member 10 away from the furnace door 50, and the elastic member 30 is located between the support member 13 and the sliding seat 20. The elastic force of the elastic member 30 pushes the sliding seat 20 in a direction away from the support member 13. That is, the support member 13 plays a role in supporting the elastic member 30, and the support member 13 and the sliding seat 20 respectively abut the two ends of the elastic member 30. The elastic force of the elastic member 30 is transmitted to the furnace door 50 and the connecting arm 60 through the sliding seat 20 and the support member 13, so that the two are away from each other. Specifically, the elastic member 30 is a compression spring.

[0079] Of course, the elastic member 30 may also be disposed between the slide plate 11 and the oven door 50 .

[0080] Reference Figure 3 The end of the slide 20 away from the furnace door 50 is provided with a first positioning structure 221 matched with one end of the elastic member 30, and the end of the support member 13 close to the furnace door 50 is provided with a second positioning structure 133 matched with the other end of the elastic member 30. The first positioning structure 221 and the second positioning structure 133 cooperate to position the elastic member 30, so as to avoid deviation when the elastic member 30 is compressed and cannot play a buffering role.

[0081] Reference Figure 5 and Figure 6 The first positioning structure 221 and / or the second positioning structure 133 are positioning grooves or positioning posts. That is, the first positioning structure 221 and the second positioning structure 133 can all be positioning grooves, or all be positioning posts, or one of them can be a positioning groove and the other can be a positioning post.

[0082] Reference Figure 5 and Figure 6 The first positioning structure 221 and the second positioning structure 133 are both positioning grooves, that is, the slide seat 20 is provided with a positioning groove, and the support member 13 is provided with a positioning groove. Specifically, the support member 13 is in a plate shape, and a positioning groove is opened thereon, or the positioning member may include a support plate 41 and a cover plate 132, and a through hole is provided on the support plate 41, and the cover plate 132 is fixed to one side of the support plate 41 and blocks one end of the through hole, thereby forming the positioning groove.

[0083] Reference Figure 6 The sliding seat 20 may include a sliding column portion 21 and a limiting portion 22 .

[0084] The sliding column portion 21 is at least partially inserted into the notch 111 and can slide relative to the sliding member 10. One end of the sliding column portion 21 is connected to the furnace door 50. The number of the sliding seats 20 and the notch 111 is the same, so that each sliding seat 20 is respectively slidably matched with a notch 111. The sliding column portion 21 can be partially matched with the shape of the notch 111, or the entire shape can be matched with the shape of the notch 111, so that the matching part can be inserted into the notch 111 from the opening 1112 and cooperate with the sliding member 10 to form relative sliding.

[0085] The limiting portion 22 is provided at the other end of the sliding column portion 21, and the limiting portion 22 can stop the movement of the sliding member away from the furnace door 50. The limiting portion 22 is outside the notch 111, and when the sliding member 10 slides relatively, the sliding member 10 slides along the sliding column portion 21 between the furnace door 50 and the limiting portion 22, and the furnace door 50 and the limiting portion 22 both play a role of blocking and limiting the sliding member 10, preventing the sliding member 10 from sliding away from the sliding column portion 21 along the length direction of the sliding column portion 21.

[0086] The slide 20 may further include a fixing portion 23, which is disposed at one end of the slide column 21 away from the limiting portion 22, and the limiting portion 22 is connected and fixed to the furnace door 50. That is, one end of the slide column 21 is the fixing portion 23, and the other end is the limiting portion 22, and the slide 20 is connected and fixed to the furnace door 50 through the fixing portion 23. Specifically, the fixing portion 23 is disposed in a circular shape at the end of the slide column 21 and protrudes, and the limiting portion 22 is also disposed in a circular shape at the end of the slide column 21 and protrudes. The fixing portion 23 can be connected and fixed to the furnace door 50 by welding, screws or bolts.

[0087] Reference Figures 1 to 8 The embodiment of the present application also provides a PECVD device, which may include a furnace door 50, a connecting arm 60 and a furnace door buffer mechanism as in any of the above embodiments, wherein the furnace door buffer mechanism connects the connecting arm 60 and the furnace door 50.

[0088] Since the PECVD equipment of the embodiment of the present application may include the furnace door buffer mechanism in any of the above embodiments, it has the beneficial effects brought by the furnace door buffer mechanism in any of the above embodiments, which will not be repeated here.

[0089] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A furnace door buffer mechanism for a PECVD device, the PECVD device comprising a furnace door and a connecting arm, characterized in that: The furnace door buffer mechanism comprises: A sliding member connected to the connecting arm and provided with two or more through-going notches, the notches are arranged at intervals from each other, the width of the notch on the inner side is not greater than the width of the notch on the outer side, and the orientations of the notches are different; Slide seats, the number of which is the same as that of the notches and corresponds to each other one by one, the slide seats at least partially passing through the notches and being able to slide relative to the sliding member, one end of the slide seat being connected to the furnace door, and the other end being able to stop the movement of the sliding member away from the furnace door; and The elastic member is consistent in number with the sliding seat and corresponds one to one. One end of the elastic member abuts against the sliding member, and the other end abuts against the sliding seat or the furnace door. The elastic member is in a compressed state.

2. The furnace door buffer mechanism according to claim 1, characterized in that: There are two slide seats, one of which is located at the center of the furnace door, and the other slide seat is located directly below the center of the furnace door.

3. The furnace door buffer mechanism according to claim 2, characterized in that: The openings of the two notches are opposite to each other, and the opening of the notch located on the upper side faces upward.

4. The furnace door buffer mechanism according to claim 1, characterized in that: There are more than two slide seats, at least one of which is located above the center of the furnace door, and the other slide seats are located below the center of the furnace door.

5. The furnace door buffer mechanism according to claim 4, characterized in that: The openings of the notches located at the bottom face downward, and the openings of the notches located at the top face upward.

6. The furnace door buffer mechanism according to claim 1, characterized in that: The notch is in a circular arc shape, an elliptical arc shape, a rectangular shape, a U shape or a V shape.

7. The furnace door buffer mechanism according to claim 1, characterized in that: The sliding member comprises: A connecting piece connected to one end of the connecting arm; a slide plate connected to the connecting member, the slide plate being provided with the notch; and The support member is arranged at an end of the connecting member away from the furnace door, and the elastic member is located between the support member and the sliding seat.

8. The furnace door buffer mechanism according to claim 7, characterized in that: The end of the slide seat away from the furnace door is provided with a first positioning structure matched with one end of the elastic member, and the end of the support member close to the furnace door is provided with a second positioning structure matched with the other end of the elastic member.

9. The furnace door buffer mechanism according to claim 8, characterized in that: The first positioning structure and / or the second positioning structure is a positioning groove or a positioning column.

10. The furnace door buffer mechanism according to any one of claims 1 to 9, characterized in that: The slide seat comprises: a sliding column portion, at least partly passing through the notch and being able to slide relative to the sliding member, one end of the sliding column portion being connected to the furnace door; and A limiting portion is arranged at the other end of the sliding column portion, and the limiting portion can stop the movement of the sliding member away from the furnace door.

11. A PECVD device, characterized in that: The invention comprises a furnace door, a connecting arm and a furnace door buffer mechanism according to any one of claims 1 to 10, wherein the furnace door buffer mechanism connects the connecting arm and the furnace door.

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