Three-stage temperature control system for integrated circuit

Abstract

The utility model relates to the technical field of temperature control systems, in particular to a three-stage temperature control system for an integrated circuit. The temperature of circulating liquid is adjusted step by step through a three-stage temperature control system, and three most stable and efficient target control temperature points are as follows: the target temperature of a first temperature sensor is SV-1 DEG C, the target temperature of a second temperature sensor is SV-0. 5 DEG C, and the target temperature of a third temperature sensor is SV, so that the temperature control requirement in semiconductor precision machining process requirements can be met; when the actual temperature of the circulating liquid is more than 20 DEG C and less than or equal to 80 DEG C for temperature control, the second electronic expansion valve cools the air suction of the compressor to 20 DEG C + / -5 DEG C, and when the actual temperature of the circulating liquid is more than or equal to-20 DEG C and less than 20 DEG C for temperature control, the second electronic expansion valve is closed to prevent the compressor from being damaged by liquid impact caused by too low air suction temperature; the problem that in the prior art, the temperature control effect of a precise temperature control heat exchange system with an inverter compressor as the core is difficult to meet the requirement of + / -0.01 DEG C is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of temperature control systems, in particular to a three-level temperature control system for integrated circuits. Background Art

[0002] In the requirements of semiconductor precision processing technology, there is a need for precise temperature control of the coolant. Temperature control is a key process factor, especially in advanced processes (7 nanometers and below), which requires large cooling capacity and high-precision temperature control with an accuracy of ±0.01°C. Slight changes in temperature will have a serious impact on product quality.

[0003] For a precision temperature control heat exchange system based on a variable frequency compressor in the prior art, its control target is Figure 1 The temperature at T1 is PID-regulated by adjusting the frequency of the compressor, the opening of the EV1 electronic expansion valve, and the heating percentage of the heating wire in the heating barrel. However, due to the large temperature fluctuations of the circulating fluid entering the temperature control system from the client, the primary temperature control effect can only achieve the requirements of ±0.1 to ±0.05°C, but cannot meet the requirement of ±0.01°C. Utility Model Content

[0004] In view of the deficiencies of the prior art, the utility model provides a three-stage temperature control system for integrated circuits, which solves the problem that the temperature control effect of the precision temperature control heat exchange system with a variable frequency compressor as the core in the prior art is difficult to meet the requirement of ±0.01℃.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A three-stage temperature control system for integrated circuits includes a circulating liquid system for outputting circulating liquid to customers, an evaporator is arranged on the circulating liquid system, a heating barrel for heating the circulating liquid is arranged on the liquid outlet side of the evaporator, a heating wire is arranged on the liquid outlet side of the heating barrel for heating the circulating liquid, and a refrigeration system for controlling the temperature of the circulating liquid through the evaporator, a first temperature sensor for detecting the temperature of the circulating liquid is arranged between the heating barrel and the evaporator, and a second temperature sensor and a third temperature sensor for detecting the temperature of the circulating liquid are respectively arranged on the water inlet side and the water outlet side of the heating wire.

[0007] Preferably, the liquid inlet end of the circulating liquid system is provided with a first filter and a flow meter, as well as a manual drain valve for draining the liquid in sequence, and a second filter, a water pump and a pressure sensor are provided between the heating barrel and the heating wire.

[0008] Preferably, a pressure-controlling hand valve is provided between the liquid inlet and the liquid outlet of the circulating liquid system.

[0009] Preferably, the refrigeration system includes a gas-liquid separator, a low-pressure sensor, a compressor, a condenser, a high-pressure sensor, a filter, a sight glass and a first electronic expansion valve, which are sequentially arranged between the refrigerant outlet side and the refrigerant inlet side of the evaporator, and also includes a plant water system for cooling the refrigerant through the condenser.

[0010] Preferably, a second electronic expansion valve is provided between the sight glass and the first electronic expansion valve and between the refrigerant outlet side of the evaporator.

[0011] Preferably, a third electronic expansion valve is provided between the liquid outlet side of the compressor and the refrigerant liquid inlet side of the evaporator.

[0012] Preferably, the power of the heating wire is 500W-600W.

[0013] Compared with the prior art, the utility model provides a three-level temperature control system for integrated circuits, which has the following beneficial effects:

[0014] 1. The utility model gradually adjusts the temperature of the circulating fluid by setting up a three-stage temperature control system. After a large number of experimental verifications, the three most stable and efficient target control temperature points are: the first temperature sensor is the target temperature SV-1°C, the second temperature sensor is the target temperature SV-0.5°C and the third temperature sensor is the target temperature SV, thereby being able to accurately realize the temperature control requirements of the circulating fluid and meet the temperature control requirements of the semiconductor precision machining process.

[0015] 2. Through the setting of the second electronic expansion valve, when the temperature is 20℃<actual temperature of circulating fluid ≤80℃, the second electronic expansion valve is adjusted to the set value opening, and the compressor suction temperature needs to be cooled to 20℃±5℃. When the temperature is -20℃≤actual temperature of circulating fluid<20℃, the second electronic expansion valve is closed to prevent the suction temperature from being too low and causing liquid hammer to damage the compressor. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0017] Figure 1 It is a schematic diagram of the prior art;

[0018] Figure 2 It is a schematic diagram of the three-stage temperature control system of the utility model;

[0019] Figure 3 It is a schematic diagram of the circulating fluid system of the utility model;

[0020] Figure 4 It is a schematic diagram of the refrigeration system of the utility model.

[0021] In the figure: 1. circulating liquid system; 11. first filter; 12. flow meter; 13. drain manual valve; 14. second filter; 15. water pump; 16. pressure sensor; 17. pressure control manual valve; 2. evaporator; 3. heating barrel; 4. heating wire; 5. refrigeration system; 51. gas-liquid separator; 52. low pressure sensor; 53. compressor; 54. condenser; 55. high pressure sensor; 56. filter; 57. sight glass; 58. first electronic expansion valve; 59. factory water system; 60. second electronic expansion valve; 61. third electronic expansion valve; 6. first temperature sensor; 7. second temperature sensor; 8. third temperature sensor. DETAILED DESCRIPTION

[0022] The following will describe the implementation methods of the present application in detail with the help of accompanying drawings and examples, so that the implementation process of how the present application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0023] In the requirements of semiconductor precision processing technology, especially in advanced processes (7 nanometers and below), there is another solution of Peltier cooling plate. Although the temperature can be accurately controlled within the range of ±0.01℃, it has the following disadvantages based on its cooling method: ① Since it is directly electric cooling, there is no medium for heat conduction in the middle, resulting in the same cooling capacity. The required power consumption is 2 to 3 times that of traditional compressor cooling; ② Due to the performance limitations of the Peltier body, the cooling range is small, and the cooling capacity that can be provided is generally less than 1kw. In addition, the quality of domestic Peltier is uneven, and it is extremely difficult to repair after damage. Therefore, the precision temperature control heat exchange system with variable frequency compressor as the core has a large market prospect.

[0024] In order to solve the problem that the temperature control effect of the precision temperature control heat exchange system based on the variable frequency compressor in the prior art is difficult to meet the requirement of ±0.01°C, this embodiment provides a three-level temperature control system for integrated circuits, such as Figure 2-Figure 4 As shown, the circulating liquid system 1 includes a circulating liquid system for outputting circulating liquid to customers, an evaporator 2 is provided on the circulating liquid system 1, a heating barrel 3 for heating the circulating liquid is provided on the liquid outlet side of the evaporator 2, a heating wire 4 for heating the circulating liquid is provided on the liquid outlet side of the heating barrel 3, and a refrigeration system 5 for controlling the temperature of the circulating liquid through the evaporator 2, a first temperature sensor 6 for detecting the temperature of the circulating liquid is provided between the heating barrel 3 and the evaporator 2, and a second temperature sensor 7 and a third temperature sensor 8 for detecting the temperature of the circulating liquid are provided on the water inlet side and the water outlet side of the heating wire 4, respectively. The three-stage temperature control method of this embodiment is as follows:

[0025] Primary temperature control: The client's circulating fluid exchanges heat with the refrigerant of the refrigeration system 5 in the evaporator 2. The circulating fluid absorbs the coldness of the refrigerant and cools down. At this time, the target point of temperature control is the first temperature sensor 6. The target temperature of the first sensor is the customer's required temperature SV-1°C. At this time, the temperature at the first temperature sensor 6 is controlled at the customer's required temperature (SV-1°C) ±0.5°C through the refrigeration system 5.

[0026] Secondary temperature control: The circulating fluid after primary temperature control flows into the heating barrel 3. After the second temperature sensor 7 collects the circulating fluid temperature signal, the microcomputer processing system analyzes and matches the output power of the heating barrel 3, and controls the circulating fluid temperature again. At this time, the target point of temperature control is the second temperature sensor 7, and the target temperature of the second sensor 29 is the customer's required temperature SV-0.5℃. At this time, the microcomputer control system analyzes and matches the output power of the heating barrel 3 to control the temperature at the second temperature sensor 7 to the customer's required temperature (SV-0.5℃) ±0.3℃.

[0027] Three-stage temperature control: the circulating fluid after the second-stage temperature control flows to the heating wire 4. After the third temperature sensor 8 collects the circulating fluid temperature signal, the microcomputer processing system analyzes and matches the output power of the heating wire 4 to control the circulating fluid temperature again. At this time, the target point of temperature control is the third temperature sensor 8, and the target temperature of the third sensor is the temperature SV required by the customer. At this time, the microcomputer control system analyzes and matches the output power of the heating wire 4 in the temperature control system to control the temperature at the third temperature sensor 8 to the customer's required temperature SV±0.01℃, and finally the temperature-controlled and stable circulating fluid is supplied to the client equipment.

[0028] In order to ensure the stable operation of the components in the circulating liquid system 1, the liquid inlet end of the circulating liquid system 1 is sequentially provided with a first filter 11 and a flow meter 12, as well as a drain hand valve 13 for draining liquid. A second filter 14, a water pump 15 and a pressure sensor 16 are provided between the heating barrel 3 and the heating wire 4. The pressure sensor 16 measures the pressure of the circulating liquid and compares it with the maximum or minimum value set by the customer. If it exceeds the upper or lower limit of the set value, a warning can be set or the temperature control system can be stopped. The microcomputer control program needs to add software protection: when the flow meter 12 cannot detect the flow, the heating barrel 3 and the heating wire 4 stop outputting to prevent the heating barrel 3 and the heating wire 4 from being damaged by dry burning when there is no liquid.

[0029] In order to ensure that the circulating fluid pressure output by the circulating fluid system 1 meets the customer's usage requirements, a pressure control hand valve 17 is provided between the liquid inlet and liquid outlet of the circulating fluid system 1. The circulating fluid pressure output by the circulating fluid system 1 is adjusted by adjusting the opening of the pressure control hand valve 17.

[0030] To further illustrate the structure of the refrigeration system, the refrigeration system 5 includes a gas-liquid separator 51, a low-pressure sensor 52, a compressor 53, a condenser 54, a high-pressure sensor 55, a filter 56, a sight glass 57 and a first electronic expansion valve 58, which are sequentially arranged between the refrigerant outlet side and the refrigerant inlet side of the evaporator 2, and also includes a plant water system 59 for cooling the refrigerant through the condenser 54. The refrigerant is first compressed into a high-temperature and high-pressure gas by the compressor 53, flows to the condenser 54 to exchange heat with the plant cooling water, and then flows out as a liquid at normal temperature and high pressure, flows through the high-pressure sensor 55, and the high-pressure sensor 55 is used to detect the pressure of the refrigerant at this time. After that, after passing through the filter 56 and the sight glass 57, the refrigerant is converted into a low-temperature and low-pressure liquid by the interception effect of the first electronic expansion valve 58, and then flows to the evaporator 2. The refrigerant exchanges heat with the circulating liquid in the evaporator 2, and the circulating liquid absorbs the coldness of the refrigerant to convert the refrigerant into a low-pressure gas, thereby cooling the circulating liquid.

[0031] In order to prevent the compressor 53 from having liquid hammer, a second electronic expansion valve 60 is arranged between the sight glass 57 and the first electronic expansion valve 58 and between the refrigerant outlet side of the evaporator 2. The second electronic expansion valve 60 is opened only when the circulating liquid is greater than 20°C. The refrigerant flows through the intercepting effect of the second electronic expansion valve 60, and the refrigerant becomes a low-temperature and low-pressure liquid, which is neutralized with the refrigerant flowing out of the evaporator 2 to make the refrigerant temperature around 20°C±5°C. The refrigerant then flows to the gas-liquid separator 51, and then flows through the low-pressure sensor 52, and finally to the compressor 53. The compressor 53 consumes electricity to do work to turn the low-temperature and low-pressure refrigerant gas into a high-temperature and high-pressure gas, and the cycle works in this way. When the temperature is controlled at -20°C≤the actual temperature of the circulating liquid<20°C, the second electronic expansion valve 60 is closed to prevent the suction temperature from being too low and causing liquid hammer to damage the compressor 53.

[0032] In order to further control the temperature of the refrigerant, a third electronic expansion valve 61 is arranged between the liquid outlet side of the compressor 53 and the refrigerant liquid inlet side of the evaporator 2. The refrigerant passing through the third electronic expansion valve 61 and the first electronic expansion valve 58 is controlled by the third electronic expansion valve 61 and mixed in a certain proportion, so that the cooling amplitude of the circulating fluid can be more accurately controlled.

[0033] In order to improve the temperature control accuracy and sensitivity of the heating wire 4, experiments have shown that when the power of the heating wire 4 is 500W to 600W, the temperature control can be achieved more accurately.

[0034] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A three-stage temperature control system for integrated circuits, comprising a circulating fluid system (1) for outputting circulating fluid to a customer, an evaporator (2) being provided on the circulating fluid system (1), a heating barrel (3) for heating the circulating fluid being provided on the liquid outlet side of the evaporator (2), and characterized in that: It also includes a heating wire (4) arranged on the liquid outlet side of the heating barrel (3) for heating the circulating liquid, and a refrigeration system (5) for controlling the temperature of the circulating liquid through the evaporator (2); a first temperature sensor (6) for detecting the temperature of the circulating liquid is arranged between the heating barrel (3) and the evaporator (2); and a second temperature sensor (7) and a third temperature sensor (8) for detecting the temperature of the circulating liquid are respectively arranged on the water inlet side and the water outlet side of the heating wire (4).

2. The three-stage temperature control system according to claim 1, characterized in that: The liquid inlet end of the circulating liquid system (1) is provided with a first filter (11) and a flow meter (12), as well as a manual drain valve (13) for draining liquid, and a second filter (14), a water pump (15) and a pressure sensor (16) are provided between the heating barrel (3) and the heating wire (4).

3. The three-stage temperature control system according to claim 1, characterized in that: A pressure control hand valve (17) is provided between the liquid inlet and the liquid outlet of the circulating liquid system (1).

4. The three-stage temperature control system according to claim 1, characterized in that: The refrigeration system (5) comprises a gas-liquid separator (51), a low-pressure sensor (52), a compressor (53), a condenser (54), a high-pressure sensor (55), a filter (56), a sight glass (57) and a first electronic expansion valve (58) which are sequentially arranged between the refrigerant liquid outlet side and the refrigerant liquid inlet side of the evaporator (2), and also comprises a plant water system (59) for cooling the refrigerant through the condenser (54).

5. The three-stage temperature control system according to claim 4, characterized in that: A second electronic expansion valve (60) is provided between the sight glass (57) and the first electronic expansion valve (58) and between the refrigerant liquid outlet side of the evaporator (2).

6. The three-stage temperature control system according to claim 4, characterized in that: A third electronic expansion valve (61) is provided between the liquid outlet side of the compressor (53) and the refrigerant liquid inlet side of the evaporator (2).

7. The three-stage temperature control system according to claim 1, characterized in that: The power of the heating wire (4) is 500W-600W.

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