Etching machine nozzle

Abstract

The utility model relates to the technical field of etching machines, and discloses an etching machine nozzle which comprises a machine frame, a machine base, conveying belts, single-body nozzles and multi-body nozzles, the machine base is installed at the bottom of the inner wall of the machine frame, and the conveying belts are symmetrically installed on the two sides of the inner wall of the machine base respectively; according to the utility model, the circuit board substrates can be clamped and positioned by the telescopic end clamping seats through the two groups of clamping cylinders which are symmetrically arranged, so that when multiple groups of circuit board substrates are conveyed in batches through the conveying belt, the circuit board substrates can be separated and then independently positioned to be conveyed, and the circuit board substrates can be stably conveyed to a spray head; the servo motor can drive the clamping air cylinder and the circuit board substrate to rotate to adjust the angle, so that the circuit board substrate can automatically adjust the two faces step by step and then etch the two faces of the circuit board substrate, the circuit etching precision of high-pressure etching liquid on the two faces of the circuit board is guaranteed, and the servo motor can further drive the clamped and positioned circuit board substrate to rotate to a certain inclination angle. The method can be suitable for various etching processing scenes of the circuit board substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of etching machines, in particular to an etching machine nozzle. Background Art

[0002] Semiconductor devices or display devices are manufactured by using semiconductor chips or flat panel displays through various manufacturing processes such as evaporation, etching, photolithography, and ion implantation. Etching often uses an etcher to spray chemical solutions on the substrate and etches circuits on the circuit board substrate through a nozzle.

[0003] For example, the Chinese patent publication number CN217517025U discloses a nozzle installation structure on an etching machine, which includes an upper nozzle installation frame, on which a plurality of upper nozzle installation tubes are arranged in parallel with each other, and the spacing between two adjacent upper nozzle installation tubes is the same, and each of the upper nozzle installation tubes is installed with a plurality of single nozzles and a plurality of multi-body nozzles, and the multi-body nozzles are formed by at least two single nozzles connected in series, and the single nozzles and multi-body nozzles on each upper nozzle installation tube are arranged at intervals from each other. The nozzle installation structure on the etching machine of the utility model can make the etching liquid fully strike the board surface, reduce the basic side corrosion problem, and reduce the defect of low line accuracy;

[0004] In the prior art, a single nozzle and a multi-body nozzle are provided to spray different volumes of etching liquid, so as to be applicable to etching of different circuit boards;

[0005] The existing etching machine etches circuits on both sides of the circuit board through upper and lower nozzles;

[0006] However, when the circuit board substrate is conveyed by the upper and lower pressure rollers and multiple groups of circuit board substrates are conveyed synchronously, there is a lack of a separate positioning mechanism. When the circuits are etched on both sides by high-pressure etching liquid, the stability is poor, the etching accuracy is poor, and when etching the inclined circuits of the circuit board substrate, the position of the circuit board substrate cannot be adjusted. The upper and lower nozzles have high maintenance costs after long-term use and low practicality. Utility Model Content

[0007] The purpose of the utility model is to provide an etcher nozzle, which can realize automatic step-by-step adjustment of etching on both sides of a circuit board substrate, ensure the etching accuracy of the circuits on both sides, and can adjust the inclination angle of the circuit board substrate for circuit etching processing, and can be suitable for a variety of etching processing scenarios of the circuit board substrate.

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an etching machine nozzle, comprising a frame, a base, a conveyor belt, a single nozzle, and a multi-body nozzle, the base being installed at the bottom of the inner wall of the frame, conveyor belts being symmetrically installed on both sides of the inner wall of the base, a nozzle mounting frame being installed at the top of the inner wall of the frame, an infusion tube being connected through one end of the nozzle mounting frame, the single nozzle and the multi-body nozzle being installed at equal intervals at the bottom of the nozzle mounting frame, mounting seats being installed at equal intervals at the top of the inner edge of the conveyor belt, a servo motor being fixedly installed on the inner side of the mounting seat, a clamping cylinder being fixedly connected to the output end of the servo motor, and a clamping seat being fixedly connected to the telescopic end of the clamping cylinder.

[0009] Preferably, a waste liquid box is installed at the opening at one end of the frame, and a material guide plate is fixedly installed at the bottom of the inner wall of the frame, and the material guide plate extends into the inner wall of the waste liquid box.

[0010] Preferably, the mounting seat is a U-shaped structure, and the mounting seat is fixed to the top of the inner edge of the conveyor belt by bolts.

[0011] Preferably, the two groups of conveyor belts are left-right reciprocating conveyor belts.

[0012] Preferably, the clamping seat is an L-shaped structure, and the two groups of the clamping seats symmetrically arranged are used to clamp and position the circuit board substrate.

[0013] Preferably, an anti-slip pad is installed on the inner side wall of the clamp seat.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] The utility model can clamp and position the circuit board substrate by the telescopic end clamp seat through two groups of symmetrically arranged clamping cylinders, so that when multiple groups of circuit board substrates are transported in batches through the conveyor belt, they can be separated and individually positioned for transportation, so that the circuit board substrates can be transported to the nozzle to maintain stability, and the servo motor can drive the clamping cylinder and the circuit board substrate to rotate and adjust the angle, so that the circuit board substrate can be etched after automatic step-by-step adjustment on both sides, ensuring the accuracy of the high-pressure etching liquid etching lines on both sides of the circuit board, and the servo motor can also drive the clamped and positioned circuit board substrate to rotate to a certain tilt angle, which can be applicable to various etching processing scenarios of the circuit board substrate;

[0016] Compared with the existing circuit board etcher nozzles, it can realize automatic step-by-step adjustment of etching on both sides of the circuit board substrate, ensuring the etching accuracy of the circuits on both sides, and can adjust the inclination angle of the circuit board substrate for circuit etching processing, which can be applied to various etching processing scenarios of circuit board substrates. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the front structure of the utility model;

[0019] Figure 3 It is a schematic diagram of the side section structure of the utility model;

[0020] Figure 4 It is a schematic diagram of the side section structure of the frame in the utility model;

[0021] Figure 5 for Figure 4 Schematic diagram of the local enlarged structure at point A in the middle.

[0022] In the figure: 1. frame; 2. waste liquid box; 3. machine base; 4. nozzle mounting frame; 5. material guide plate; 6. clamping cylinder; 7. mounting base; 8. clamping base; 9. servo motor; 31. conveyor belt; 41. single nozzle; 42. multi-body nozzle; 43. infusion tube; 81. anti-slip mat. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. The described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0024] See also Figure 1-5 The utility model provides a technical solution: an etching machine nozzle, comprising a frame 1, a base 3, a conveyor belt 31, a single nozzle 41, and a multi-body nozzle 42. The base 3 is installed at the bottom of the inner wall of the frame 1, and the conveyor belts 31 are symmetrically installed on both sides of the inner wall of the base 3. A nozzle mounting frame 4 is installed on the top of the inner wall of the frame 1, and a liquid infusion tube 43 is connected to one end of the nozzle mounting frame 4. The single nozzle 41 and the multi-body nozzle 42 are respectively installed at the bottom of the nozzle mounting frame 4 at equal intervals;

[0025] Mounting seats 7 are installed at equal intervals along the top of the inner edge of the conveyor belt 31, a servo motor 9 is fixedly installed inside the mounting seat 7, a clamping cylinder 6 is fixedly connected to the output end of the servo motor 9, and a clamping seat 8 is fixedly connected to the telescopic end of the clamping cylinder 6;

[0026] The circuit board substrate to be etched can be transported by two sets of conveyor belts 31, and the circuit board substrate on the top of the conveyor belt 31 can be etched by the liquid infusion pipe 43 on the top nozzle mounting frame 4 of the inner wall of the frame 1 and the single nozzle 41 and the multi-body nozzle 42 connected to the bottom;

[0027] The servo motor 9 is a self-locking motor, model ga12t-n20 right-angle self-locking worm gear reduction motor;

[0028] The two groups of symmetrically arranged clamping cylinders 6 can clamp and position the circuit board substrates with the telescopic end clamping seat 8, so that when multiple groups of circuit board substrates are transported in batches through the conveyor belt 31, they can be separated and individually positioned for transportation, so that the circuit board substrates can be transported to the nozzle to maintain stability, and the servo motor 9 can drive the clamping cylinder 6 and the circuit board substrate to rotate and adjust the angle, so that the circuit board substrate can be automatically adjusted in steps on both sides and then etched, ensuring the accuracy of the high-pressure etching liquid etching lines on both sides of the circuit board, and the servo motor 9 can also drive the clamped and positioned circuit board substrate to rotate to a certain tilt angle, which can be suitable for a variety of etching processing scenarios of the circuit board substrate. Compared with the existing circuit board etcher nozzle, it can realize the automatic step-by-step adjustment of the etching on both sides of the circuit board substrate, ensuring the etching accuracy of the lines on both sides, and can adjust the inclination angle of the circuit board substrate for line etching processing, which can be suitable for a variety of etching processing scenarios of the circuit board substrate.

[0029] Among them, a waste liquid box 2 is installed at the opening at one end of the frame 1, and a guide plate 5 is fixedly installed at the bottom of the inner wall of the frame 1. The guide plate 5 extends into the inner wall of the waste liquid box 2. The gap in the middle of the two sets of conveyor belts 31 can guide excess etching liquid into the top of the inclined guide plate 5, so that it can be collected and processed by the waste liquid box 2.

[0030] Among them, the mounting seat 7 is a U-shaped structure, and the mounting seat 7 is fixed to the top of the inner edge of the conveyor belt 31 by bolts. The U-shaped mounting seat 7 can drive the servo motor 9 and the clamping cylinder 6 to slide and adjust the spacing along the inner edge of the conveyor belt 31, and can be fixed by bolts. In this way, the circuit board substrates transported in batches on the conveyor belt 31 can be adjusted to a suitable spacing, and when used in conjunction with the single-body nozzle 41 and the multi-body nozzle 42, it can be suitable for various etching processing scenarios of circuit board substrates.

[0031] Among them, the two groups of conveyor belts 31 are left and right reciprocating conveyor belts, the clamping seat 8 is an L-shaped structure, and the two groups of clamping seats 8 symmetrically arranged are used to clamp and position the circuit board substrate. An anti-slip pad 81 is installed on the inner wall of the clamping seat 8. The conveyor belt 31 is driven by a motor to reciprocate left and right. After the single-sided etching of the circuit board substrates after batch clamping and positioning, the etching of the other side of the circuit board substrate can be adjusted by rotating the servo motor 9, thereby realizing the automatic step-by-step adjustment of the etching on both sides of the circuit board substrate, and ensuring the etching accuracy of the circuits on both sides.

[0032] Working principle: When in use, first place a batch of circuit board substrates between two groups of clamping seats 8. The anti-skid pads 81 on the side walls of the clamping seats 8 can prevent the two sides of the circuit board substrates from being squeezed, deformed and falling off. Then, the clamping cylinder 6 can clamp and position the circuit board substrates with the telescopic end clamping seats 8, so that when multiple groups of circuit board substrates are transported in batches through the conveyor belt 31, they can be separated and positioned separately for transportation, so that the circuit board substrates can be transported to the nozzle to maintain stability;

[0033] After the circuit board substrate is positioned and transported to the nozzle, the circuit board substrate surface circuit is etched by setting the single-body nozzle 41 and the multi-body nozzle 42 in coordination;

[0034] After etching one side of the circuit board substrate after batch clamping and positioning, the other side of the circuit board substrate can be rotated and adjusted by the servo motor 9, and the conveyor belt 31 can be moved back and forth for etching, thereby realizing automatic step-by-step adjustment of etching on both sides of the circuit board substrate and ensuring the etching accuracy of the circuits on both sides.

[0035] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes and modifications may be made to the embodiments without departing from the principles of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An etching machine nozzle, comprising a frame (1), a base (3), a conveyor belt (31), a single-body nozzle (41), and a multi-body nozzle (42), characterized in that: The machine base (3) is mounted on the bottom of the inner wall of the frame (1), and conveyor belts (31) are symmetrically mounted on both sides of the inner wall of the machine base (3). A nozzle mounting frame (4) is mounted on the top of the inner wall of the frame (1), and a liquid infusion tube (43) is connected through one end of the nozzle mounting frame (4). The single nozzle (41) and the multi-body nozzle (42) are respectively mounted at equal intervals on the bottom of the nozzle mounting frame (4). A mounting seat (7) is mounted at equal intervals on the top of the inner edge of the conveyor belt (31), and a servo motor (9) is fixedly mounted on the inner side of the mounting seat (7). The output end of the servo motor (9) is fixedly connected to a clamping cylinder (6), and the telescopic end of the clamping cylinder (6) is fixedly connected to a clamping seat (8).

2. The etching machine nozzle according to claim 1, characterized in that: A waste liquid box (2) is installed at an opening at one end of the frame (1), and a material guide plate (5) is fixedly installed at the bottom of the inner wall of the frame (1), and the material guide plate (5) extends into the inner wall of the waste liquid box (2).

3. The etching machine nozzle according to claim 1, characterized in that: The mounting seat (7) is a U-shaped structure, and the mounting seat (7) is fixed to the top of the inner edge of the conveyor belt (31) by means of bolts.

4. The etching machine nozzle according to claim 1, characterized in that: The two groups of conveyor belts (31) are left-right reciprocating conveyor belts.

5. The etching machine nozzle according to claim 1, characterized in that: The clamping seat (8) is an L-shaped structure, and two groups of the clamping seats (8) arranged symmetrically are used to clamp and position the circuit board substrate.

6. The etching machine nozzle according to claim 1, characterized in that: An anti-slip pad (81) is installed on the inner side wall of the clamp seat (8).

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