Wafer conveying, washing, combining and transferring equipment

Abstract

The utility model discloses wafer conveying, washing, combining and transferring equipment, which comprises a cabinet, an XZ-axis gear rack module, a carrying frame, a clamping plug carrying platform, a wafer boat carrying platform, a wafer lifting platform I, a wafer lifting platform II, a wafer transferring frame and a wafer boat transferring frame, the XZ-axis gear rack module is arranged on the back surface of the cabinet, the carrying frame is horizontally erected on the XZ-axis gear rack module, and the clamping plug carrying platform is arranged on the XZ-axis gear rack module. A clamping plug carrying table and a wafer boat carrying table are arranged on the table top of the machine cabinet side by side in the X-axis direction, the middle of the clamping plug carrying table is hollowed out, and a first wafer lifting table is arranged in the clamping plug carrying table. Through the above mode, the wafer conveying, washing, combining and transferring equipment provided by the utility model adopts the xz-axis gear rack module to drive the carrying frame, realizes wafer handover between a clamping plug and a wafer boat and transfer between the wafer boat and downstream equipment through the carrying frame, and can automatically complete variable-pitch handover and front and back correction in the transfer process. Therefore, the wafer is well protected in the conveying and washing process, and meanwhile the front loading efficiency of the washing machine is improved.

Description

Technical Field

[0001] The utility model relates to the field of wafer processing equipment, in particular to a wafer delivery, cleaning and transfer equipment. Background Art

[0002] During the wafer production process, wafers need to be sent to a cleaning machine for cleaning. The existing technology usually uses manual operation to take out the wafers in the plug box, and then transfer them to a Teflon material boat. The boat then sends two frames of wafers to the cleaning machine for batch cleaning. Since the number of wafers in the plug is small and the capacity of the cleaning machine is large, it is necessary to move at least two wafers in the plug to the boat. In the process of transferring the wafers, the wafers are easily damaged due to improper operation. In addition, the manual loading process is prone to placing the front and back of the wafer upside down due to inadequate inspection, resulting in inadequate cleaning and other problems. Utility Model Content

[0003] The main technical problem solved by the utility model is to provide a wafer delivery, cleaning and transfer equipment, which adopts an xz-axis gear rack module to drive the transport frame, and realizes the wafer handover between the plug and the wafer boat, as well as the transfer between the wafer boat and the downstream equipment through the transport frame. The variable-distance handover and front and back side correction can be automatically completed during the transportation process, so that the wafers are better protected during the delivery and cleaning process, while improving the front loading efficiency of the cleaning machine.

[0004] In order to solve the above technical problems, a technical solution adopted by the utility model is: to provide a wafer sending, washing and transferring equipment, including a cabinet, an XZ-axis gear rack module, a transport frame, a plug carrier, a crystal boat carrier, a wafer lifting platform 1, a wafer lifting platform 2, a wafer transfer rack, and a crystal boat transfer rack. An XZ-axis gear rack module is arranged on the back of the cabinet, and a transport frame is horizontally mounted on the XZ-axis gear rack module. A plug carrier and a crystal boat carrier are arranged in parallel on the table top of the cabinet along the X-axis direction. The plug carrier is hollow in the middle and has a wafer lifting platform 1 built in. The crystal boat carrier is hollow in the middle and has a wafer lifting platform 2 built in. A pair of wafer transfer racks and a pair of crystal boat transfer racks are arranged in parallel in the transport frame.

[0005] In a preferred embodiment of the present invention, a wafer cleaning machine is arranged on the downstream side of the X-axis of the wafer boat carrier, and the wafer transfer rack is reciprocatingly docked with the wafer lifting platform 1 and the wafer lifting platform 2 respectively through the XZ-axis gear rack module, and the wafer boat transfer rack is reciprocatingly docked with the wafer boat carrier and the wafer cleaning machine respectively through the XZ-axis gear rack module.

[0006] In a preferred embodiment of the utility model, the XZ-axis rack and pinion module includes an X-axis rack and pinion module and a Z-axis rack and pinion module, a plurality of X-axis line rails are arranged on the back of the cabinet, a back plate is carried on the X-axis line rail, and transmission meshing X-axis rack and pinion modules are arranged between the back plate and the back of the cabinet; a square cylindrical base with multiple sliders integrated is arranged on the upper end of the back plate, a lifting column is vertically inserted in the base, and the lifting column is attached with multiple straight rails connected to the sliders, and transmission meshing Z-axis rack and pinion modules are arranged on the lower end of the lifting column and the back plate below the base.

[0007] In a preferred embodiment of the utility model, the wafer transfer rack and the wafer boat transfer rack are respectively locked with Y-axis rotating shafts in a one-to-one correspondence, and the Y-axis rotating shafts are respectively mounted in the transport frame through bearings; a first double-output shaft stepper motor and a second double-output shaft stepper motor are coaxially aligned along the X-axis in the transport frame, and both ends of the first double-output shaft stepper motor are respectively connected to the Y-axis rotating shaft locked on the wafer transfer rack through a pair of mutually meshing worm gears, and both ends of the second double-output shaft stepper motor are respectively connected to the Y-axis rotating shaft locked on the wafer boat transfer rack through a pair of mutually meshing worm gears; the wafer boat transfer rack is arranged at the downstream side of the X-axis of the wafer transfer rack.

[0008] In a preferred embodiment of the utility model, the table top of the cabinet is provided with a pair of base frames, one of the base frames is provided with a Y-axis linear motor, and the bottom surfaces of the base frames are respectively provided with a loading and unloading linear rail parallel to each other, and the two sides of the jammer platform are respectively mounted on the loading and unloading linear rails through adapter brackets, and the jammer platform floats above the Y-axis linear motor and is connected to each other by transmission.

[0009] In a preferred embodiment of the utility model, a pair of lifting electric cylinders are invertedly mounted on the table top of the cabinet, and the table top of the cabinet is provided with flange bases disposed on both sides of the lifting electric cylinder. The flange base has holes and is provided with a group of guide columns guided by linear bearings, and the crystal boat carrier is supported on the lifting electric cylinder and the guide column.

[0010] In a preferred embodiment of the utility model, an empty opening 1 is opened on the jammer carrier, and two wafer lifting platforms 1 are arranged in the empty opening 1; an empty opening 2 is opened on the wafer boat carrier, and two wafer lifting platforms 2 are arranged in the empty opening 2; the wafer capacity of a single wafer lifting platform 1 and a single wafer lifting platform 2 are both half of that of the wafer transfer rack.

[0011] In a preferred embodiment of the utility model, the table top of the cabinet is opened and provided with two groups of guide pillars 2 guided by linear bearings, a servo screw elevator that links all guide pillars 2 is suspended under the table top of the cabinet, and the wafer lifting platform 1 is respectively carried on each group of guide pillars 2.

[0012] In a preferred embodiment of the utility model, an adapter plate is provided on the guide column 2, a torque motor is provided on the adapter plate, the wafer lifting platform 1 is carried on the torque motor, and there is only one adapter plate on which an X-axis variable pitch slide cylinder carrying the torque motor is provided.

[0013] In a preferred embodiment of the utility model, the table top of the cabinet is provided with an additional base placed in the middle between the flange bases, the additional base and the flange base are both opened with holes and provided with two groups of guide columns three guided by linear bearings, and two lifting electric cylinders two are invertedly installed under the table top of the cabinet and are placed on both sides of the additional base, and the wafer lifting platform two is respectively carried on the top of each group of lifting electric cylinders two.

[0014] The beneficial effects of the utility model are as follows: the utility model provides a wafer delivery, cleaning and transfer equipment, which adopts an xz-axis gear rack module to drive the transport frame, and realizes the wafer handover between the plug and the wafer boat, as well as the transfer between the wafer boat and the downstream equipment through the transport frame. The variable-distance handover and front and back side correction can be automatically completed during the transportation process, so that the wafers are better protected during the delivery and cleaning process, while improving the front loading efficiency of the cleaning machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0016] Figure 1 This is the overall structural diagram of a wafer delivery, cleaning and transfer device of the utility model;

[0017] Figure 2 This is a structural diagram of an XZ-axis gear rack module of a wafer delivery, cleaning and transfer device of the utility model;

[0018] Figure 3 This is a structural diagram of a jammed carrier of a wafer delivery, cleaning and transfer device of the utility model;

[0019] Figure 4 This is a structural diagram of a wafer boat stage of a wafer delivery, cleaning and transfer device of the utility model;

[0020] Figure 5 This is a worm gear structure diagram of a wafer delivery, cleaning and transfer device of the utility model;

[0021] Figure 6 This is a structural diagram of a transport frame of a wafer delivery, cleaning and transfer device of the utility model;

[0022] Figure 7 This is a structural diagram of a Y-axis linear motor of a wafer delivery, cleaning and transfer device of the utility model;

[0023] Figure 8 This is a structural diagram of a lifting electric cylinder of a wafer delivery, cleaning and transfer device of the utility model;

[0024] Fig. 9 This is a structural diagram of the first and second air ports of a wafer delivery, cleaning and transfer device of the utility model;

[0025] Fig.10 This is a structural diagram of an X-axis variable-pitch slide cylinder of a wafer delivery, cleaning and transfer device of the utility model;

[0026] Fig.11 This is a structural diagram of the lifting electric cylinder of a wafer delivery, cleaning and transfer device of the utility model;

[0027] Fig.12 The utility model is a schematic diagram of the movement process of a wafer delivery, cleaning and transfer device. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] like Figure 1-12 As shown, the embodiment of the utility model includes:

[0030] A wafer sending, cleaning and transferring equipment comprises a cabinet 1, an XZ-axis rack and pinion module 2, a transport frame 3, a plugging platform 4, a boat platform 5, a wafer lifting platform 1 6, a wafer lifting platform 2 7, a wafer transfer rack 8 and a boat transfer rack 9. The cabinet 1 is provided with an XZ-axis rack and pinion module 2 on the back, and a transport frame 3 is horizontally mounted on the XZ-axis rack and pinion module 2. The table top of the cabinet 1 is provided with a plugging platform 4 and a boat platform 5 arranged in parallel along the X-axis direction. The plugging platform 4 is hollow in the middle and has a wafer lifting platform 1 6 built in. The boat platform 5 is hollow in the middle and has a wafer lifting platform 2 7 built in. A pair of wafer transfer racks 8 and a pair of boat transfer racks 9 are arranged in parallel in the transport frame 3.

[0031] Among them, a wafer cleaning machine 100 is arranged on the downstream side of the X-axis of the wafer boat carrier 5, the wafer transfer rack 8 is reciprocatingly docked with the wafer lifting platform 1 6 and the wafer lifting platform 2 7 through the XZ-axis gear rack module 2, and the wafer boat transfer rack 9 is reciprocatingly docked with the wafer boat carrier 5 and the wafer cleaning machine 100 through the XZ-axis gear rack module 2.

[0032] Furthermore, the XZ-axis rack and pinion module 2 includes an X-axis rack and pinion module 201 and a Z-axis rack and pinion module 202, a plurality of X-axis line rails 10 are arranged on the back of the cabinet 1, a back plate 11 is carried on the X-axis line rail 10, and the X-axis rack and pinion module 201 in transmission engagement is arranged between the back plate 11 and the back of the cabinet 1; a square cylindrical base 12 with multiple sliders integrated is arranged on the upper end of the back plate 11, a lifting column 13 is vertically inserted in the base 12, and a plurality of straight rails 14 connected to the sliders are attached to the lifting column 13, and the Z-axis rack and pinion module 202 in transmission engagement is arranged on the lower end of the lifting column 13 and the back plate 11 below the base 12.

[0033] Furthermore, the wafer transfer rack 8 and the wafer boat transfer rack 9 are respectively locked with Y-axis rotating shafts 15 in a one-to-one correspondence, and the Y-axis rotating shafts 15 are respectively mounted in the transport frame 3 through bearings; a first double-output shaft stepper motor 16 and a second double-output shaft stepper motor 17 are coaxially aligned along the X-axis in the transport frame 3, and both ends of the first double-output shaft stepper motor 16 are respectively connected to the Y-axis rotating shaft 15 locked on the wafer transfer rack 8 through a pair of mutually meshing worm gears 18, and both ends of the second double-output shaft stepper motor 17 are respectively connected to the Y-axis rotating shaft 15 locked on the wafer boat transfer rack 9 through a pair of mutually meshing worm gears 18; the wafer boat transfer rack 9 is arranged at the downstream side of the X-axis of the wafer transfer rack 8.

[0034] Furthermore, the table top of the cabinet 1 is provided with a pair of base frames 19, one of the base frames 19 is provided with a Y-axis linear motor 20, and the bottom surfaces of the base frames 19 are each provided with a mutually parallel loading and unloading linear rail 21, and the two sides of the jammer platform 4 are respectively mounted on the loading and unloading linear rail 21 through adapter brackets 22, and the jammer platform 4 floats above the Y-axis linear motor 20 and is connected to each other by transmission.

[0035] Furthermore, a pair of lifting electric cylinders 31 are invertedly mounted on the table top of the cabinet 1, and the table top of the cabinet 1 is provided with flange bases 32 disposed on both sides of the lifting electric cylinders 31. The flange base 32 has holes and is provided with a group of guide columns 33 guided by linear bearings, and the crystal boat carrier 5 is supported on the lifting electric cylinders 31 and the guide columns 33.

[0036] Furthermore, an empty opening 34 is opened on the jammer carrier 4, and two wafer lifting platforms 6 are arranged in the empty opening 34; an empty opening 35 is opened on the wafer boat carrier 5, and two wafer lifting platforms 7 are arranged in the empty opening 35; the wafer capacity of a single wafer lifting platform 1 6 and a single wafer lifting platform 2 7 is half of that of the wafer transfer rack 8.

[0037] Furthermore, the table top of the cabinet 1 is opened and provided with two groups of guide pillars 36 guided by linear bearings. A servo screw elevator 37 that links all the guide pillars 36 is suspended under the table top of the cabinet 1, and the wafer lifting platform 6 is respectively carried on each group of guide pillars 36.

[0038] Furthermore, an adapter plate 38 is provided on the guide column 2 36 , a torque motor 39 is provided on the adapter plate 38 , the wafer lifting platform 1 6 is supported on the torque motor 39 , and there is only one adapter plate 38 on which an X-axis variable pitch slide cylinder 40 supporting the torque motor 39 is provided.

[0039] Furthermore, the table top of the cabinet 1 is provided with an additional base 41 which is centrally placed between the flange bases 32. Both the additional base 41 and the flange base 32 have holes and are provided with two groups of guide columns 42 guided by linear bearings. Two lifting electric cylinders 43 are invertedly mounted on both sides of the additional base 41 under the table top of the cabinet 1, and the wafer lifting platform 7 is respectively carried on the top of each group of lifting electric cylinders 43.

[0040] The equipment can perform batch cleaning on wafers. The process is as follows:

[0041] like Figure 7 The structure diagram of the plug carrier 4 in the material receiving state is shown. The plug carrier 4 is pushed from the deep side of the cabinet 1 to the right side of the diagram to the window of the cabinet 1 to receive the material through the Y-axis linear motor 20. In this state, the two boxes of plugs filled with wafers are manually placed in turn as shown in the figure. Figure 1 The jammed carrier 4 is shown (at this time, the position status of each mechanism of the whole machine is as shown in FIG. Fig.12 (a)), and then the Y-axis linear motor 20 is used to move the jammed stage 4 to Figure 7 Push it deep into the cabinet 1 in the left direction as shown.

[0042] In addition, the empty wafer boats will be pre-placed as follows Figure 8 The wafer boat stage 5 is shown (at this time, the position status of each mechanism of the whole machine is as follows Fig.12 (a)). Figure 1 , 12As shown, in order to achieve batch cleaning, the capacity of the wafer boat is equal to the capacity of the two plugs, and the wafers in the two plugs will be transferred to one wafer boat at a time, and a wafer boat full of wafers will be transported to the wafer cleaning machine 100 for cleaning. After cleaning, the equipment performs a reverse action and transports all wafers back to the two plugs.

[0043] Specifically, Figure 3 FIG. 1 is a schematic diagram showing a state in which a wafer is ejected from a jam box on a jam carrier 4 by the wafer lifting platform 6, that is, the device will take the wafer out of the jam box by lifting. Fig.10 As shown, the servo screw lift 37 lifts the wafer lift table 6. During the lifting process, the wafer originally supported in the plug box is lifted by the two rows of toothed strip blocks at the edge of the wafer lift table 6 (the wafer is supported in the tooth gap of the toothed strip blocks). At this time, the following can be obtained: Figure 3 The wafer is now completely free from the jam, thus providing space for the transport frame 3 to transfer the wafer (the position of each mechanism of the whole machine is shown in FIG. Fig.12 (as shown in (b)).

[0044] Then as Figure 2 As shown, the transport frame 3 is driven by the XZ-axis gear rack module 2022 to adjust the wafer transfer rack 8 to the top of the wafer lifting platform 6. In order to enable the wafer transfer rack 8 to perform the wafer handover operation with the wafer lifting platform 6, the wafer transfer rack 8 must be lowered to the positions on both sides of the wafer through the XZ-axis gear rack module 2022 (the effect diagram is shown in FIG. Figure 6 Before descending, the spacing between the wafer transfer racks 8 should be larger than the wafer diameter. Figure 3 When the positions of the two sides of the "two rows of toothed strip blocks at the edge of the wafer lifting platform 6" are Figure 5 The first dual-axis stepper motor 16 shown in the figure is running, which drives the Y-axis shaft 15 to rotate, so that the wafer transfer rack 8 is turned inward. After the wafer transfer rack 8 is turned inward, the spacing is reduced and is smaller than the diameter of the wafer, so that the wafer can be normally placed (the effect diagram is as shown in FIG. Figure 6 as shown).

[0045] like Figure 1 As shown, a camera 200 is suspended above the cabinet 1, and the camera 200 collects wafer images, identifies the front and back directions of the wafers, and identifies the number of wafers.

[0046] Since the distance between the two groups of wafers in the two boxes is large, and the distance between the two groups of wafers stored in the wafer boat is small (in Figure 4 The spatial position difference between the jammer and the wafer boat can be seen directly in the figure, so it is necessary to perform a distance change operation before moving the wafer. Fig.10 The servo screw lift 37 shown in the figure lifts the wafer lift table 6 to a position as shown in the figure. Figure 3 After the position shown, if the visual camera 200 recognizes that the front and back sides of the wafer in a certain plug are not reversed, then the plug box needs to be reversing 180 degrees, such as Fig.10 The torque motor 39 shown will Figure 3 The rotation is performed in the lifting state shown. Fig.10 The X-axis variable pitch slide cylinder 40 shown in the figure starts to operate, so that the wafer lifting platform 6 located on the right side of the figure moves closer to the wafer lifting platform 6 located on the left side of the figure ( Fig.10 The figure shows the state when the wafer lifting platform 6 is not raised, and the variable distance action of the wafer lifting platform 6 is Figure 3 In the raised state shown in the figure), the result is as follows Figure 3 Shown in collapsed state.

[0047] In order to complete the transfer of the wafer from the wafer lifting platform 6 to the wafer transfer rack 8, the transport frame 3 is slowly lifted under the drive of the XZ axis gear rack module 2022, and the wafer is separated from the wafer lifting platform 6 while contacting the wafer transfer rack 8, so as to obtain the following Figure 6 The position of the wafer shown on the left side ( Figure 6 The right half of the figure also shows the positional relationship between the wafer boat and the wafer boat bracket. However, in the current state, the wafer boat bracket is empty, and the wafer boat still remains in the position shown in FIG. Figure 3 After that, the X-axis variable pitch slide cylinder 40 is reset.

[0048] like Fig.12 As shown in (c), the transport frame 3 that has taken the wafer moves to the right side of the figure, so that the wafer reaches the position directly above the wafer boat carrier 5. Because the transport frame 3 and the plug box on the plug carrier 4 will interfere with each other, the wafer lifting platform 2 7 must be lifted in advance before the wafer boat and the wafer are handed over. Fig.11 The lifting cylinder 43 shown in the figure will drive the crystal boat lifting platform 2 to lift up and reach Fig.12 (c) shows the position where the wafer boat still remains on the wafer boat stage 5 .

[0049] like Figure 5 and 11 As shown, when the wafer lifting platform 27 receives the wafer, similar to the wafer handover process, the first dual-axis stepper motor 16 will run in the reverse direction to achieve the separation of the wafer from the wafer transfer rack 8. Thereafter, the wafer will fall on the wafer lifting platform 27. Then, the wafer lifting platform 27 falls back under the control of the lifting electric cylinder 243, so that the wafer is stored in the wafer boat (as shown in FIG. Fig.12 (d)).

[0050] Similarly, if Figure 2As shown, the XZ-axis gear rack module 2022 drives the transport frame 3 to translate, so that the wafer boat transfer rack 9 reaches the top of the wafer boat, and the wafer boat transfer rack 9 falls to both sides of the wafer boat along with the transport frame 3, as shown in FIG. Figure 5 The second dual-output stepper motor 17 shown controls the Y-axis rotating shaft 15 to hook the wafer boat transfer frame 9 on both sides of the wafer boat (the wafer boat transfer frame 9 is in a long strip shape, with hooks arranged along the long sides, and the hooks can hook the frame of the wafer boat). Figure 6 As shown, the wafer boat is mounted on the wafer boat bracket.

[0051] like Figure 1 As shown in FIG. 12 ( e ), the transport frame 3 moves the wafer boat filled with wafers out of the equipment and hands it over to the downstream wafer cleaning machine 100 .

[0052] To sum up, the utility model provides a wafer delivery, cleaning and transfer equipment, which adopts XZ axis gear rack module 2022 to drive the transport frame 3, and realizes the wafer handover between the plug and the wafer boat, as well as the transfer between the wafer boat and the downstream equipment through the transport frame 3. The variable distance handover and front and back side correction can be automatically completed during the transportation process, so that the wafer can be better protected during the delivery and cleaning process, and the front loading efficiency of the cleaning machine is improved at the same time.

[0053] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A wafer delivery, cleaning and transfer device, characterized in that: It includes a cabinet, an XZ-axis gear rack module, a transport frame, a jammer platform, a boat platform, a wafer lift platform 1, a wafer lift platform 2, a wafer transfer rack, and a boat transfer rack. An XZ-axis gear rack module is arranged at the back of the cabinet, and a transport frame is horizontally mounted on the XZ-axis gear rack module. A jammer platform and a boat platform are arranged in parallel on the table top of the cabinet along the X-axis direction. The jammer platform is hollow in the middle and has a wafer lift platform 1 built in. The wafer boat platform is hollow in the middle and has a wafer lift platform 2 built in. A pair of wafer transfer racks and a pair of boat transfer racks are arranged in parallel in the transport frame.

2. The wafer delivery, cleaning and transfer equipment according to claim 1, characterized in that: A wafer cleaning machine is arranged on the downstream side of the X-axis of the wafer boat carrier, and the wafer transfer rack is reciprocatingly docked with the wafer lifting platform 1 and the wafer lifting platform 2 through the XZ-axis gear rack module, and the wafer boat transfer rack is reciprocatingly docked with the wafer boat carrier and the wafer cleaning machine through the XZ-axis gear rack module.

3. The wafer delivery, cleaning, combined transfer equipment according to claim 1, characterized in that: The XZ-axis rack and pinion module comprises an X-axis rack and pinion module and a Z-axis rack and pinion module. A plurality of X-axis line rails are arranged at the back of the cabinet, a back plate is carried on the X-axis line rail, and transmission-engaged X-axis rack and pinion modules are arranged between the back plate and the back of the cabinet; a square cylindrical base with a plurality of sliders integrated is arranged at the upper end of the back plate, a lifting column is vertically inserted in the base, a plurality of straight rails connected to the sliders are attached to the lifting column, and transmission-engaged Z-axis rack and pinion modules are arranged on the lower end of the lifting column and the back plate below the base.

4. The wafer delivery, cleaning, combined transfer equipment according to claim 1, characterized in that: The wafer transfer rack and the wafer boat transfer rack are respectively locked with Y-axis rotating shafts in a one-to-one correspondence, and the Y-axis rotating shafts are respectively mounted in the transport frame through bearings; a first double-output shaft stepper motor and a second double-output shaft stepper motor are coaxially aligned along the X-axis in the transport frame, and both ends of the first double-output shaft stepper motor are respectively connected to the Y-axis rotating shaft locked on the wafer transfer rack through a pair of mutually meshing worm gears, and both ends of the second double-output shaft stepper motor are respectively connected to the Y-axis rotating shaft locked on the wafer boat transfer rack through a pair of mutually meshing worm gears; the wafer boat transfer rack is arranged at the downstream side of the X-axis of the wafer transfer rack.

5. The wafer delivery, cleaning, combined transfer equipment according to claim 1, characterized in that: The cabinet table is provided with a pair of base frames, one of the base frames is provided with a Y-axis linear motor, and the bottom surfaces of the base frames are respectively provided with a loading and unloading linear rail parallel to each other. The two sides of the jammer platform are respectively mounted on the loading and unloading linear rails through adapter brackets, and the jammer platform floats above the Y-axis linear motor and is connected to each other through transmission.

6. The wafer delivery, cleaning, combined transfer equipment according to claim 1, characterized in that: A pair of lifting electric cylinders are mounted inverted on the table top of the cabinet. The table top of the cabinet is provided with flange bases disposed on both sides of the lifting electric cylinder. The flange base has holes and is provided with a group of guide columns guided by linear bearings. The crystal boat carrier is supported on the lifting electric cylinder and the guide columns.

7. The wafer delivery, cleaning, combined transfer equipment according to claim 1, characterized in that: An empty opening 1 is opened on the jammer carrier, and two wafer lifting platforms 1 are arranged in the empty opening 1; an empty opening 2 is opened on the wafer boat carrier, and two wafer lifting platforms 2 are arranged in the empty opening 2; the wafer capacity of a single wafer lifting platform 1 and a single wafer lifting platform 2 is half of that of the wafer transfer rack.

8. The wafer delivery, cleaning, combined transfer equipment according to claim 7, characterized in that: The table top of the cabinet is opened with holes and is provided with two groups of guide pillars 2 guided by linear bearings. A servo screw lift that links all guide pillars 2 is suspended under the table top of the cabinet, and the wafer lifting platform 1 is respectively carried on each group of guide pillars 2.

9. The wafer delivery, cleaning, combined transfer equipment according to claim 8, characterized in that: An adapter plate is arranged on the guide pillar 2, a torque motor is arranged on the adapter plate, the wafer lifting platform 1 is carried on the torque motor, and there is only one adapter plate on which an X-axis variable pitch slide cylinder carrying the torque motor is arranged.

10. The wafer delivery, cleaning, combined transfer equipment according to claim 6, characterized in that: The table top of the cabinet is provided with an additional base placed in the middle between the flange bases. Both the additional base and the flange base have holes and are provided with two groups of guide columns three guided by linear bearings. Two lifting electric cylinders two are invertedly installed under the table top of the cabinet and are placed on both sides of the additional base. The wafer lifting platform two is respectively carried on the top of each group of lifting electric cylinders two.

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