Secondary recycling application equipment for nitrogen in pure water system to RO (Reverse Osmosis) water tank

Abstract

The utility model relates to the technical field of ultrapure water, in particular to secondary recovery application equipment from nitrogen of a pure water system to an RO (Reverse Osmosis) pool, which comprises a base, a recovery mechanism is arranged at the top of the base, and a foundation bolt is arranged at the top of the base and is far away from the recovery mechanism; the recycling mechanism comprises a UPW water tank fixedly connected to the top of the base, an RO water tank is arranged on the top of the base and located on the right side of the UPW water tank, and a water seal barrel is fixedly connected to the position, close to the RO water tank, of a top plate of the base. The recovery mechanism in the device is used for reducing the loss of nitrogen, and the problems that in order to prevent carbon dioxide and oxygen in air from being dissolved in water to cause poor water quality during air suction, RO equipment in an existing ultrapure water system can use nitrogen for protection, but the fluctuation of the liquid level easily causes frequent discharge of nitrogen, so that a large amount of nitrogen is wasted are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of ultrapure water, in particular to secondary recovery and application equipment for nitrogen in a pure water system to an RO water pool. Background Art

[0002] In the production process of the electronics industry, quite a number of processes require chemical treatment, and the cleaning of electronic products and the preparation of chemical agents directly or indirectly utilize pure water or ultrapure water. With the development of the electronics industry, especially the development of the semiconductor industry represented by very large-scale integrated circuits, higher requirements are placed on the quality of pure water. In order to obtain better water quality, a large amount of nitrogen is used in the pure water system to protect the water tank to prevent soluble gases or particles in the air from entering the water tank and polluting the water quality.

[0003] At present, the RO equipment in the existing ultrapure water system is always turned on, and the reflux valve is adjusted according to the liquid level in the water tank to minimize the fluctuation of the liquid level. In order to prevent the carbon dioxide and oxygen in the air from dissolving in the water during inhalation and causing the water quality to deteriorate, nitrogen is used for protection. However, the fluctuation of the liquid level can easily cause the nitrogen to be discharged frequently, thereby wasting a lot of nitrogen.

[0004] Therefore, a secondary recovery and application device for nitrogen from a pure water system to an RO water pool is needed to solve the problems raised in the above background technology. Utility Model Content

[0005] The purpose of the utility model is to provide a secondary recovery and application device for nitrogen from a pure water system to an RO water pool, so as to solve the problems raised in the above-mentioned background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A secondary recovery and application device for nitrogen from a pure water system to an RO water pool, comprising a base, a recovery mechanism is arranged on the top of the base, and anchor bolts are installed on the top of the base and at a position away from the recovery mechanism;

[0008] The recovery mechanism includes a UPW water tank fixedly connected to the top of the base, an RO water tank is arranged on the top of the base and on the right side of the UPW water tank, a water seal barrel is fixedly connected to the top plate of the base and near the RO water tank, an exhaust pipe is fixedly connected to the outer wall of the UPW water tank, a discharge pipe is fixedly connected to the outer wall of the RO water tank at a position away from the UPW water tank, a guide pipe is fixedly connected to the outer wall of the RO water tank and near the water seal barrel, breathing valves are installed inside the exhaust pipe, the discharge pipe and the guide pipe, and pressure detection gauges are installed on the top of the UPW water tank, the RO water tank and the water seal barrel.

[0009] As a preferred solution of the utility model, the base is made of aluminum alloy, and multiple groups of anchor bolts are provided.

[0010] As a preferred solution of the utility model, the intake nitrogen pressure of the UPW water tank is 0.5 kpa, and the exhaust pressure of the breathing valve is 12 kpa.

[0011] As a preferred solution of the utility model, the pressure of the water seal barrel is 18kpa, the air inlet pressure of the RO water tank is -0.3kpa, and the exhaust pressure is 10kpa.

[0012] As a preferred solution of the utility model, the exhaust pipe passes through the UPW water tank and extends into the RO water tank, and the exhaust pipe is connected to the RO water tank in a fixed manner.

[0013] As a preferred solution of the utility model, the guide pipe passes through the RO water tank and extends into the water seal barrel, and the connection between the guide pipe and the water seal barrel is a fixed connection.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. In the utility model, a secondary recovery application device for nitrogen from a pure water system to an RO water tank is designed, and the recovery mechanism in the device is used to reduce the loss of nitrogen. Nitrogen is injected into the UPW water tank. The pressure detection gauge on the top of the UPW water tank will detect the internal nitrogen pressure. When MB gas is mixed or the nitrogen pressure in the UPW water tank exceeds the exhaust pressure of the breathing valve inside the exhaust pipe, the breathing valve inside the exhaust pipe is opened, and the nitrogen in the UPW water tank flows into the RO water tank through the exhaust pipe. When the nitrogen pressure in the RO water tank exceeds the threshold, the breathing valve in the exhaust pipe is opened. The suction valve is opened, and nitrogen is discharged to the outside through the discharge pipe on the top of the RO water tank. When the nitrogen pressure in the RO water tank is insufficient, the RO water tank is replenished through the guide pipe and the water seal barrel to prevent the RO water tank from being damaged due to negative pressure. A certain micro-pressure of nitrogen is preserved in the RO water tank, which can reduce nitrogen loss and solve the problem that the RO equipment in the current ultrapure water system uses nitrogen for protection in order to prevent carbon dioxide and oxygen in the air from dissolving in water during inhalation, resulting in deterioration of water quality. However, the fluctuation of liquid level can easily cause nitrogen to be discharged frequently, thereby wasting a large amount of nitrogen. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the UPW water tank of the utility model;

[0018] Figure 3 It is a schematic diagram of the three-dimensional structure of the water seal barrel of the utility model.

[0019] In the figure: 1. base; 2. recovery mechanism; 3. anchor bolts; 201. UPW water tank; 202. RO water tank; 203. water seal barrel; 204. exhaust pipe; 205. discharge pipe; 206. guide pipe; 207. breathing valve; 208. pressure test gauge. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0021] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0022] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may also be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may also be a central element. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in this article includes any and all combinations of one or more related listed items.

[0024] For examples, see Figure 1-3 , the utility model provides a technical solution:

[0025] A secondary recovery and application device for nitrogen in a pure water system to an RO water pool comprises a base 1, a recovery mechanism 2 is arranged on the top of the base 1, and an anchor bolt 3 is installed on the top of the base 1 and at a position away from the recovery mechanism 2;

[0026] The base 1 is made of aluminum alloy, and multiple groups of anchor bolts 3 are provided;

[0027] In this embodiment, reference Figure 2and Figure 3 The recovery mechanism 2 includes a UPW water tank 201 fixedly connected to the top of the base 1, an RO water tank 202 is arranged on the top of the base 1 and on the right side of the UPW water tank 201, a water seal barrel 203 is fixedly connected to the top plate of the base 1 and near the RO water tank 202, an exhaust pipe 204 is fixedly connected to the outer wall of the UPW water tank 201, a discharge pipe 205 is fixedly connected to the outer wall of the RO water tank 202 and at a position away from the UPW water tank 201, a guide pipe 206 is fixedly connected to the outer wall of the RO water tank 202 and near the water seal barrel 203, a breathing valve 207 is installed inside the exhaust pipe 204, the discharge pipe 205 and the guide pipe 206, and a pressure detection gauge 208 is installed on the top of the UPW water tank 201, the RO water tank 202 and the water seal barrel 203;

[0028] The intake nitrogen pressure of the UPW water tank 201 is 0.5kpa, the exhaust pressure of the breathing valve 207 is 12kpa, the pressure of the water seal barrel 203 is 18kpa, the intake pressure of the RO water tank 202 is -0.3kpa, and the exhaust pressure is 10kpa. The exhaust pipe 204 runs through the UPW water tank 201 and extends into the RO water tank 202. The exhaust pipe 204 and the RO water tank 202 are connected in a fixed manner. The guide pipe 206 runs through the RO water tank 202 and extends into the water seal barrel 203. The guide pipe 206 and the water seal barrel 203 are connected in a fixed manner. Nitrogen is injected into the UPW water tank 201, and the pressure detection gauge 208 on the top of the UPW water tank 201 will detect the internal nitrogen pressure. When the MB gas is mixed or the nitrogen pressure of the UPW water tank 201 exceeds the exhaust pressure of the breathing valve 207 in the exhaust pipe 204, the breathing valve 207 in the exhaust pipe 204 is opened, and the nitrogen in the UPW water tank 201 flows into the RO water tank 202 through the exhaust pipe 204. When the nitrogen pressure in the RO water tank 202 exceeds the threshold, the breathing valve 207 in the discharge pipe 205 is opened, and the nitrogen is discharged to the outside through the discharge pipe 205 at the top of the RO water tank 202. When the nitrogen pressure in the RO water tank 202 is insufficient, the water seal barrel 203 replenishes the RO water tank 202 through the guide pipe 206 to prevent the RO water tank 202 from being damaged due to negative pressure, so that a certain micro-pressure of nitrogen is preserved in the RO water tank 202.

[0029] The working process of the utility model: When the secondary recovery application equipment of the pure water system nitrogen to the RO water pool designed by the present invention is in operation, the nitrogen is injected into the UPW water tank 201. The pressure detection gauge 208 on the top of the UPW water tank 201 will detect the internal nitrogen pressure. When the MB gas is mixed or the nitrogen pressure of the UPW water tank 201 exceeds the exhaust pressure of the breathing valve 207 inside the exhaust pipe 204, the breathing valve 207 inside the exhaust pipe 204 is opened, and the nitrogen in the UPW water tank 201 The nitrogen flows into the RO water tank 202 through the exhaust pipe 204. When the nitrogen pressure in the RO water tank 202 exceeds the threshold, the breathing valve 207 in the discharge pipe 205 is opened, and the nitrogen is discharged to the outside through the discharge pipe 205 at the top of the RO water tank 202. When the nitrogen pressure in the RO water tank 202 is insufficient, the water seal barrel 203 replenishes the RO water tank 202 through the guide pipe 206 to prevent the RO water tank 202 from being damaged due to negative pressure, so that a certain micro-pressure of nitrogen is preserved in the RO water tank 202.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A secondary recovery and application device for nitrogen from a pure water system to an RO water tank, comprising a base (1), characterized in that: A recovery mechanism (2) is provided on the top of the base (1), and anchor bolts (3) are installed on the top of the base (1) at a position away from the recovery mechanism (2); The recovery mechanism (2) comprises a UPW water tank (201) fixedly connected to the top of the base (1); an RO water tank (202) is arranged on the top of the base (1) and on the right side of the UPW water tank (201); a water seal barrel (203) is fixedly connected to the top plate of the base (1) and at a position close to the RO water tank (202); an exhaust pipe (204) is fixedly connected to the outer wall of the UPW water tank (201); and an exhaust pipe (204) is fixedly connected to the outer wall of the RO water tank (202) and at a position away from the UPW water tank (201). A discharge pipe (205) is fixedly connected to the W water tank (201); a flow guide pipe (206) is fixedly connected to the outer wall of the RO water tank (202) near the water seal barrel (203); a breathing valve (207) is installed inside the exhaust pipe (204), the discharge pipe (205) and the flow guide pipe (206); and pressure detection gauges (208) are installed on the tops of the UPW water tank (201), the RO water tank (202) and the water seal barrel (203).

2. The secondary recovery and application equipment of nitrogen from a pure water system to an RO water tank according to claim 1, characterized in that: The base (1) is made of aluminum alloy, and a plurality of groups of anchor bolts (3) are provided.

3. The secondary recovery and application equipment of nitrogen from a pure water system to an RO water tank according to claim 1, characterized in that: The nitrogen inlet pressure of the UPW water tank (201) is 0.5 kPa, and the exhaust pressure of the breathing valve (207) is 12 kPa.

4. The secondary recovery and application equipment of nitrogen from a pure water system to an RO water tank according to claim 1, characterized in that: The pressure of the water seal barrel (203) is 18 kpa, the air inlet pressure of the RO water tank (202) is -0.3 kpa, and the air outlet pressure is 10 kpa.

5. The secondary recovery and application equipment of nitrogen from a pure water system to an RO water tank according to claim 1, characterized in that: The exhaust pipe (204) passes through the UPW water tank (201) and extends into the RO water tank (202); the exhaust pipe (204) and the RO water tank (202) are connected in a fixed manner.

6. The secondary recovery and application equipment of nitrogen from a pure water system to an RO water tank according to claim 1, characterized in that: The flow guide pipe (206) passes through the RO water tank (202) and extends into the water seal barrel (203); the flow guide pipe (206) and the water seal barrel (203) are connected in a fixed manner.

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